JP2015207559A5 - - Google Patents

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Publication number
JP2015207559A5
JP2015207559A5 JP2015085117A JP2015085117A JP2015207559A5 JP 2015207559 A5 JP2015207559 A5 JP 2015207559A5 JP 2015085117 A JP2015085117 A JP 2015085117A JP 2015085117 A JP2015085117 A JP 2015085117A JP 2015207559 A5 JP2015207559 A5 JP 2015207559A5
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JP
Japan
Prior art keywords
ray
structures
hadamard matrix
high aspect
aspect ratio
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JP2015085117A
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English (en)
Japanese (ja)
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JP6499498B2 (ja
JP2015207559A (ja
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Priority claimed from US14/645,689 external-priority patent/US9934930B2/en
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Publication of JP2015207559A publication Critical patent/JP2015207559A/ja
Publication of JP2015207559A5 publication Critical patent/JP2015207559A5/ja
Application granted granted Critical
Publication of JP6499498B2 publication Critical patent/JP6499498B2/ja
Expired - Fee Related legal-status Critical Current
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JP2015085117A 2014-04-18 2015-04-17 高アスペクト比ｘ線ターゲットおよびその使用 Expired - Fee Related JP6499498B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201461981330P 2014-04-18 2014-04-18
US61/981,330 2014-04-18
US14/645,689 US9934930B2 (en) 2014-04-18 2015-03-12 High aspect ratio x-ray targets and uses of same
US14/645,689 2015-03-12

Publications (3)

Publication Number Publication Date
JP2015207559A JP2015207559A (ja) 2015-11-19
JP2015207559A5 true JP2015207559A5 (enExample) 2018-06-07
JP6499498B2 JP6499498B2 (ja) 2019-04-10

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Family Applications (1)

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JP2015085117A Expired - Fee Related JP6499498B2 (ja) 2014-04-18 2015-04-17 高アスペクト比ｘ線ターゲットおよびその使用

Country Status (3)

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US (2) US9934930B2 (enExample)
JP (1) JP6499498B2 (enExample)
CN (1) CN105105779B (enExample)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150117599A1 (en) * 2013-10-31 2015-04-30 Sigray, Inc. X-ray interferometric imaging system
US10295485B2 (en) 2013-12-05 2019-05-21 Sigray, Inc. X-ray transmission spectrometer system
USRE48612E1 (en) 2013-10-31 2021-06-29 Sigray, Inc. X-ray interferometric imaging system
CN107209944B (zh) 2014-08-16 2021-08-10 Fei公司 在容器中成像的样品微层析成像中的射束硬化伪像的校正
US10520454B2 (en) 2017-05-02 2019-12-31 Fei Company Innovative X-ray source for use in tomographic imaging
EP3413691A1 (en) * 2017-06-08 2018-12-12 Koninklijke Philips N.V. Apparatus for generating x-rays
JP7046746B2 (ja) * 2017-07-11 2022-04-04 エフ イー アイ カンパニ Ｘ線生成のための薄片成形されたターゲット
US10566170B2 (en) * 2017-09-08 2020-02-18 Electronics And Telecommunications Research Institute X-ray imaging device and driving method thereof
JP2021082374A (ja) * 2018-03-09 2021-05-27 国立大学法人東北大学 位相イメージング用ｘ線発生装置
US10468230B2 (en) * 2018-04-10 2019-11-05 Bae Systems Information And Electronic Systems Integration Inc. Nondestructive sample imaging
WO2019236384A1 (en) 2018-06-04 2019-12-12 Sigray, Inc. Wavelength dispersive x-ray spectrometer
DE112019003777B4 (de) 2018-07-26 2025-09-11 Sigray, Inc. Röntgenreflexionsquelle mit hoher helligkeit
US10656105B2 (en) * 2018-08-06 2020-05-19 Sigray, Inc. Talbot-lau x-ray source and interferometric system
CN109255818B (zh) * 2018-08-12 2021-05-28 浙江农林大学 一种新型标靶及其亚像素级角点的提取方法
CN112638261B (zh) 2018-09-04 2025-06-27 斯格瑞公司 利用滤波的x射线荧光的系统和方法
US11056308B2 (en) 2018-09-07 2021-07-06 Sigray, Inc. System and method for depth-selectable x-ray analysis
US11152183B2 (en) 2019-07-15 2021-10-19 Sigray, Inc. X-ray source with rotating anode at atmospheric pressure
US11340179B2 (en) 2019-10-21 2022-05-24 Bae Systems Information And Electronic System Integration Inc. Nanofabricated structures for sub-beam resolution and spectral enhancement in tomographic imaging
US11996259B2 (en) * 2019-10-24 2024-05-28 Nova Measuring Instruments Inc. Patterned x-ray emitting target
US12046442B2 (en) 2020-12-31 2024-07-23 VEC Imaging GmbH & Co. KG Hybrid multi-source x-ray source and imaging system
WO2023137334A1 (en) 2022-01-13 2023-07-20 Sigray, Inc. Microfocus x-ray source for generating high flux low energy x-rays
US12360067B2 (en) 2022-03-02 2025-07-15 Sigray, Inc. X-ray fluorescence system and x-ray source with electrically insulative target material
US12181423B1 (en) 2023-09-07 2024-12-31 Sigray, Inc. Secondary image removal using high resolution x-ray transmission sources

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3610984A (en) * 1967-12-28 1971-10-05 Tokyo Shibaura Electric Co Rotating-anode x-ray tube with multiple focal areas
US6545790B2 (en) * 1999-11-08 2003-04-08 Ralph W. Gerchberg System and method for recovering phase information of a wave front
JP3847134B2 (ja) * 2001-10-19 2006-11-15 三井造船株式会社 放射線検出装置
US6793039B2 (en) * 2002-03-13 2004-09-21 Jerome R. Schmid, Jr. Submerged water activity platform
US6947522B2 (en) * 2002-12-20 2005-09-20 General Electric Company Rotating notched transmission x-ray for multiple focal spots
US6950495B2 (en) * 2003-12-01 2005-09-27 The Boeing Company Backscatter imaging using Hadamard transform masking
WO2007033060A1 (en) * 2005-09-12 2007-03-22 Board Of Regents Of The Nevada System Of Higher Education, On Behalf Of The University Of Nevada, Reno Targets and processes for fabricating same
CN101467071B (zh) * 2006-04-21 2012-06-13 美国科技工程公司 使用分立源阵列和多个准直束的对于行李和人员的x射线成像
EP2076793B1 (en) * 2006-10-24 2016-01-06 Thermo Scientific Portable Analytical Instruments Inc. Apparatus for inspecting objects using coded beam
KR20100071564A (ko) * 2008-12-19 2010-06-29 삼성전기주식회사 엑스선 튜브
EP2411997A1 (en) * 2009-03-27 2012-02-01 Koninklijke Philips Electronics N.V. Structured electron emitter for coded source imaging with an x-ray tube
US20150117599A1 (en) 2013-10-31 2015-04-30 Sigray, Inc. X-ray interferometric imaging system
JP6202484B2 (ja) * 2012-08-10 2017-09-27 国立研究開発法人物質・材料研究機構 中性子撮像装置及びその使用方法
JP2014038742A (ja) * 2012-08-13 2014-02-27 Tokyo Electron Ltd Ｘ線発生用ターゲットの製造方法、及びｘ線発生用ターゲット
US20150092924A1 (en) 2013-09-04 2015-04-02 Wenbing Yun Structured targets for x-ray generation
US9874531B2 (en) 2013-10-31 2018-01-23 Sigray, Inc. X-ray method for the measurement, characterization, and analysis of periodic structures
EP3171163B1 (en) * 2015-11-18 2022-05-04 FEI Company X-ray imaging technique

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