JP2015191897A5 - - Google Patents

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Publication number
JP2015191897A5
JP2015191897A5 JP2014065621A JP2014065621A JP2015191897A5 JP 2015191897 A5 JP2015191897 A5 JP 2015191897A5 JP 2014065621 A JP2014065621 A JP 2014065621A JP 2014065621 A JP2014065621 A JP 2014065621A JP 2015191897 A5 JP2015191897 A5 JP 2015191897A5
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JP
Japan
Prior art keywords
cleaning
processing
liquid
unit
processing liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2014065621A
Other languages
English (en)
Japanese (ja)
Other versions
JP6186298B2 (ja
JP2015191897A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2014065621A external-priority patent/JP6186298B2/ja
Priority to JP2014065621A priority Critical patent/JP6186298B2/ja
Priority to US15/124,252 priority patent/US20170014873A1/en
Priority to CN201811416745.0A priority patent/CN109285800B/zh
Priority to KR1020187007915A priority patent/KR20180033594A/ko
Priority to KR1020187037875A priority patent/KR102049193B1/ko
Priority to PCT/JP2015/001010 priority patent/WO2015136872A1/ja
Priority to KR1020167028100A priority patent/KR101842824B1/ko
Priority to CN201580012432.7A priority patent/CN106104762B/zh
Priority to TW107118516A priority patent/TWI709443B/zh
Priority to TW109134990A priority patent/TWI760883B/zh
Priority to TW104107388A priority patent/TWI628007B/zh
Publication of JP2015191897A publication Critical patent/JP2015191897A/ja
Publication of JP2015191897A5 publication Critical patent/JP2015191897A5/ja
Publication of JP6186298B2 publication Critical patent/JP6186298B2/ja
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2014065621A 2014-03-10 2014-03-27 基板処理システムおよび配管洗浄方法 Active JP6186298B2 (ja)

Priority Applications (11)

Application Number Priority Date Filing Date Title
JP2014065621A JP6186298B2 (ja) 2014-03-27 2014-03-27 基板処理システムおよび配管洗浄方法
KR1020167028100A KR101842824B1 (ko) 2014-03-10 2015-02-26 기판 처리 시스템 및 배관 세정 방법
CN201811416745.0A CN109285800B (zh) 2014-03-10 2015-02-26 基板处理系统以及管道清洗方法
KR1020187007915A KR20180033594A (ko) 2014-03-10 2015-02-26 기판 처리 시스템 및 배관 세정 방법
KR1020187037875A KR102049193B1 (ko) 2014-03-10 2015-02-26 기판 처리 시스템 및 배관 세정 방법
PCT/JP2015/001010 WO2015136872A1 (ja) 2014-03-10 2015-02-26 基板処理システムおよび配管洗浄方法
US15/124,252 US20170014873A1 (en) 2014-03-10 2015-02-26 Substrate processing system and pipe cleaning method
CN201580012432.7A CN106104762B (zh) 2014-03-10 2015-02-26 基板处理系统以及管道清洗方法
TW107118516A TWI709443B (zh) 2014-03-10 2015-03-09 基板處理裝置
TW109134990A TWI760883B (zh) 2014-03-10 2015-03-09 基板處理系統及配管洗淨方法
TW104107388A TWI628007B (zh) 2014-03-10 2015-03-09 基板處理系統及配管洗淨方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014065621A JP6186298B2 (ja) 2014-03-27 2014-03-27 基板処理システムおよび配管洗浄方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2017148044A Division JP6347875B2 (ja) 2017-07-31 2017-07-31 基板処理システムおよび配管洗浄方法

Publications (3)

Publication Number Publication Date
JP2015191897A JP2015191897A (ja) 2015-11-02
JP2015191897A5 true JP2015191897A5 (enrdf_load_stackoverflow) 2017-02-09
JP6186298B2 JP6186298B2 (ja) 2017-08-23

Family

ID=54426199

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014065621A Active JP6186298B2 (ja) 2014-03-10 2014-03-27 基板処理システムおよび配管洗浄方法

Country Status (1)

Country Link
JP (1) JP6186298B2 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6535649B2 (ja) 2016-12-12 2019-06-26 株式会社荏原製作所 基板処理装置、排出方法およびプログラム
JP6984431B2 (ja) * 2018-01-19 2021-12-22 東京エレクトロン株式会社 流路洗浄方法及び流路洗浄装置
JP2024101853A (ja) 2023-01-18 2024-07-30 株式会社Ｓｃｒｅｅｎホールディングス 基板処理システムおよび洗浄方法
WO2024203710A1 (ja) * 2023-03-30 2024-10-03 東京エレクトロン株式会社 配管洗浄方法及び基板処理システム

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004267965A (ja) * 2003-03-11 2004-09-30 Dainippon Screen Mfg Co Ltd 基板処理装置及び処理液切替方法
JP2012200712A (ja) * 2011-03-28 2012-10-22 Kuraray Co Ltd 配管の洗浄方法

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