JP6186298B2 - 基板処理システムおよび配管洗浄方法 - Google Patents

基板処理システムおよび配管洗浄方法 Download PDF

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Publication number
JP6186298B2
JP6186298B2 JP2014065621A JP2014065621A JP6186298B2 JP 6186298 B2 JP6186298 B2 JP 6186298B2 JP 2014065621 A JP2014065621 A JP 2014065621A JP 2014065621 A JP2014065621 A JP 2014065621A JP 6186298 B2 JP6186298 B2 JP 6186298B2
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Prior art keywords
cleaning
processing
liquid
pipe
unit
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JP2014065621A
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English (en)
Japanese (ja)
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JP2015191897A5 (enrdf_load_stackoverflow
JP2015191897A (ja
Inventor
鮎美 樋口
鮎美 樋口
恵理 藤田
恵理 藤田
吉田　祥司
祥司 吉田
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Screen Holdings Co Ltd
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Screen Holdings Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Priority to JP2014065621A priority Critical patent/JP6186298B2/ja
Application filed by Screen Holdings Co Ltd filed Critical Screen Holdings Co Ltd
Priority to US15/124,252 priority patent/US20170014873A1/en
Priority to CN201580012432.7A priority patent/CN106104762B/zh
Priority to CN201811416745.0A priority patent/CN109285800B/zh
Priority to KR1020187007915A priority patent/KR20180033594A/ko
Priority to KR1020187037875A priority patent/KR102049193B1/ko
Priority to PCT/JP2015/001010 priority patent/WO2015136872A1/ja
Priority to KR1020167028100A priority patent/KR101842824B1/ko
Priority to TW107118516A priority patent/TWI709443B/zh
Priority to TW109134990A priority patent/TWI760883B/zh
Priority to TW104107388A priority patent/TWI628007B/zh
Publication of JP2015191897A publication Critical patent/JP2015191897A/ja
Publication of JP2015191897A5 publication Critical patent/JP2015191897A5/ja
Application granted granted Critical
Publication of JP6186298B2 publication Critical patent/JP6186298B2/ja
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  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning In General (AREA)
  • Cleaning By Liquid Or Steam (AREA)
JP2014065621A 2014-03-10 2014-03-27 基板処理システムおよび配管洗浄方法 Active JP6186298B2 (ja)

Priority Applications (11)

Application Number Priority Date Filing Date Title
JP2014065621A JP6186298B2 (ja) 2014-03-27 2014-03-27 基板処理システムおよび配管洗浄方法
KR1020167028100A KR101842824B1 (ko) 2014-03-10 2015-02-26 기판 처리 시스템 및 배관 세정 방법
CN201811416745.0A CN109285800B (zh) 2014-03-10 2015-02-26 基板处理系统以及管道清洗方法
KR1020187007915A KR20180033594A (ko) 2014-03-10 2015-02-26 기판 처리 시스템 및 배관 세정 방법
KR1020187037875A KR102049193B1 (ko) 2014-03-10 2015-02-26 기판 처리 시스템 및 배관 세정 방법
PCT/JP2015/001010 WO2015136872A1 (ja) 2014-03-10 2015-02-26 基板処理システムおよび配管洗浄方法
US15/124,252 US20170014873A1 (en) 2014-03-10 2015-02-26 Substrate processing system and pipe cleaning method
CN201580012432.7A CN106104762B (zh) 2014-03-10 2015-02-26 基板处理系统以及管道清洗方法
TW107118516A TWI709443B (zh) 2014-03-10 2015-03-09 基板處理裝置
TW109134990A TWI760883B (zh) 2014-03-10 2015-03-09 基板處理系統及配管洗淨方法
TW104107388A TWI628007B (zh) 2014-03-10 2015-03-09 基板處理系統及配管洗淨方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014065621A JP6186298B2 (ja) 2014-03-27 2014-03-27 基板処理システムおよび配管洗浄方法

Related Child Applications (1)

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JP2017148044A Division JP6347875B2 (ja) 2017-07-31 2017-07-31 基板処理システムおよび配管洗浄方法

Publications (3)

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JP2015191897A JP2015191897A (ja) 2015-11-02
JP2015191897A5 JP2015191897A5 (enrdf_load_stackoverflow) 2017-02-09
JP6186298B2 true JP6186298B2 (ja) 2017-08-23

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JP2014065621A Active JP6186298B2 (ja) 2014-03-10 2014-03-27 基板処理システムおよび配管洗浄方法

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JP (1) JP6186298B2 (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6535649B2 (ja) 2016-12-12 2019-06-26 株式会社荏原製作所 基板処理装置、排出方法およびプログラム
JP6984431B2 (ja) * 2018-01-19 2021-12-22 東京エレクトロン株式会社 流路洗浄方法及び流路洗浄装置
JP2024101853A (ja) 2023-01-18 2024-07-30 株式会社Ｓｃｒｅｅｎホールディングス 基板処理システムおよび洗浄方法
WO2024203710A1 (ja) * 2023-03-30 2024-10-03 東京エレクトロン株式会社 配管洗浄方法及び基板処理システム

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004267965A (ja) * 2003-03-11 2004-09-30 Dainippon Screen Mfg Co Ltd 基板処理装置及び処理液切替方法
JP2012200712A (ja) * 2011-03-28 2012-10-22 Kuraray Co Ltd 配管の洗浄方法

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