JP2015188187A5 - - Google Patents

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Publication number
JP2015188187A5
JP2015188187A5 JP2014065395A JP2014065395A JP2015188187A5 JP 2015188187 A5 JP2015188187 A5 JP 2015188187A5 JP 2014065395 A JP2014065395 A JP 2014065395A JP 2014065395 A JP2014065395 A JP 2014065395A JP 2015188187 A5 JP2015188187 A5 JP 2015188187A5
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JP
Japan
Prior art keywords
application example
frequency adjustment
carried out
vibration device
resonator element
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JP2014065395A
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English (en)
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JP2015188187A (ja
JP6436280B2 (ja
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Priority to JP2014065395A priority Critical patent/JP6436280B2/ja
Priority claimed from JP2014065395A external-priority patent/JP6436280B2/ja
Priority to CN201510114198.0A priority patent/CN104953977A/zh
Priority to US14/658,706 priority patent/US9444466B2/en
Publication of JP2015188187A publication Critical patent/JP2015188187A/ja
Publication of JP2015188187A5 publication Critical patent/JP2015188187A5/ja
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Publication of JP6436280B2 publication Critical patent/JP6436280B2/ja
Expired - Fee Related legal-status Critical Current
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Description

［適用例４］
上記適用例に係る振動デバイスの周波数調整方法において、
前記振動片の周波数調整は、大気圧よりも低圧の雰囲気中で行われてもよい。
JP2014065395A 2014-03-27 2014-03-27 恒温槽型発振器の製造方法 Expired - Fee Related JP6436280B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2014065395A JP6436280B2 (ja) 2014-03-27 2014-03-27 恒温槽型発振器の製造方法
CN201510114198.0A CN104953977A (zh) 2014-03-27 2015-03-16 振动器件的频率调整方法和振动器件的制造方法
US14/658,706 US9444466B2 (en) 2014-03-27 2015-03-16 Method of adjusting frequency of resonation device and method of manufacturing resonation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014065395A JP6436280B2 (ja) 2014-03-27 2014-03-27 恒温槽型発振器の製造方法

Publications (3)

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JP2015188187A JP2015188187A (ja) 2015-10-29
JP2015188187A5 true JP2015188187A5 (ja) 2017-04-06
JP6436280B2 JP6436280B2 (ja) 2018-12-12

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ID=54168378

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JP2014065395A Expired - Fee Related JP6436280B2 (ja) 2014-03-27 2014-03-27 恒温槽型発振器の製造方法

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US (1) US9444466B2 (ja)
JP (1) JP6436280B2 (ja)
CN (1) CN104953977A (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107239171B (zh) * 2017-06-12 2018-05-01 北京中硕众联智能电子科技有限公司 基于压电材料的电容触屏系统及相应处理压力检测的方法
JP2019050478A (ja) * 2017-09-08 2019-03-28 株式会社大真空 Ｍｅｍｓ発振器
JP2019102848A (ja) * 2017-11-28 2019-06-24 セイコーエプソン株式会社 振動デバイス、振動デバイスの製造方法、電子機器および移動体
CN108869247B (zh) * 2018-07-25 2023-10-13 珠海格力电器股份有限公司 一种压缩机减振方法和系统及包括该系统的电器产品
CN110190827B (zh) * 2019-05-30 2024-05-28 中电科技集团重庆声光电有限公司 一种基于声表面波的离子束调频方法
CN112564658A (zh) * 2020-12-02 2021-03-26 赛莱克斯微系统科技（北京）有限公司 一种薄膜体声波谐振器及其制备方法

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JP2002118423A (ja) * 2000-10-06 2002-04-19 Seiko Epson Corp 圧電デバイス及びその製造方法
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JP4916775B2 (ja) 2006-05-31 2012-04-18 京セラキンセキ株式会社 圧電発振器
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JP2008091970A (ja) 2006-09-29 2008-04-17 Citizen Miyota Co Ltd 圧電発振器とその製造方法
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JP4730419B2 (ja) 2008-09-26 2011-07-20 エプソントヨコム株式会社 圧電発振器の製造方法
JP2010166346A (ja) 2009-01-16 2010-07-29 Epson Toyocom Corp 恒温型圧電発振器
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JP5678727B2 (ja) 2011-03-03 2015-03-04 セイコーエプソン株式会社 振動デバイス、振動デバイスの製造方法、電子機器
JP2014003466A (ja) * 2012-06-19 2014-01-09 Seiko Epson Corp 振動素子の周波数調整方法および周波数調整装置
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