JP2015188187A5 - - Google Patents

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Publication number
JP2015188187A5
JP2015188187A5 JP2014065395A JP2014065395A JP2015188187A5 JP 2015188187 A5 JP2015188187 A5 JP 2015188187A5 JP 2014065395 A JP2014065395 A JP 2014065395A JP 2014065395 A JP2014065395 A JP 2014065395A JP 2015188187 A5 JP2015188187 A5 JP 2015188187A5
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JP
Japan
Prior art keywords
application example
frequency adjustment
carried out
vibration device
resonator element
Prior art date
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Granted
Application number
JP2014065395A
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English (en)
Japanese (ja)
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JP6436280B2 (ja
JP2015188187A (ja
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Publication date
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Priority to JP2014065395A priority Critical patent/JP6436280B2/ja
Priority claimed from JP2014065395A external-priority patent/JP6436280B2/ja
Priority to US14/658,706 priority patent/US9444466B2/en
Priority to CN201510114198.0A priority patent/CN104953977A/zh
Publication of JP2015188187A publication Critical patent/JP2015188187A/ja
Publication of JP2015188187A5 publication Critical patent/JP2015188187A5/ja
Application granted granted Critical
Publication of JP6436280B2 publication Critical patent/JP6436280B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2014065395A 2014-03-27 2014-03-27 恒温槽型発振器の製造方法 Expired - Fee Related JP6436280B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2014065395A JP6436280B2 (ja) 2014-03-27 2014-03-27 恒温槽型発振器の製造方法
US14/658,706 US9444466B2 (en) 2014-03-27 2015-03-16 Method of adjusting frequency of resonation device and method of manufacturing resonation device
CN201510114198.0A CN104953977A (zh) 2014-03-27 2015-03-16 振动器件的频率调整方法和振动器件的制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014065395A JP6436280B2 (ja) 2014-03-27 2014-03-27 恒温槽型発振器の製造方法

Publications (3)

Publication Number Publication Date
JP2015188187A JP2015188187A (ja) 2015-10-29
JP2015188187A5 true JP2015188187A5 (US20040106767A1-20040603-C00005.png) 2017-04-06
JP6436280B2 JP6436280B2 (ja) 2018-12-12

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ID=54168378

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014065395A Expired - Fee Related JP6436280B2 (ja) 2014-03-27 2014-03-27 恒温槽型発振器の製造方法

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US (1) US9444466B2 (US20040106767A1-20040603-C00005.png)
JP (1) JP6436280B2 (US20040106767A1-20040603-C00005.png)
CN (1) CN104953977A (US20040106767A1-20040603-C00005.png)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107239171B (zh) * 2017-06-12 2018-05-01 北京中硕众联智能电子科技有限公司 基于压电材料的电容触屏系统及相应处理压力检测的方法
JP2019050478A (ja) * 2017-09-08 2019-03-28 株式会社大真空 Ｍｅｍｓ発振器
JP2019102848A (ja) * 2017-11-28 2019-06-24 セイコーエプソン株式会社 振動デバイス、振動デバイスの製造方法、電子機器および移動体
CN108869247B (zh) * 2018-07-25 2023-10-13 珠海格力电器股份有限公司 一种压缩机减振方法和系统及包括该系统的电器产品
CN110190827B (zh) * 2019-05-30 2024-05-28 中电科技集团重庆声光电有限公司 一种基于声表面波的离子束调频方法
CN112564658B (zh) * 2020-12-02 2024-09-17 赛莱克斯微系统科技（北京）有限公司 一种薄膜体声波谐振器及其制备方法

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US5446954A (en) 1993-09-30 1995-09-05 Motorla, Inc. Method for manufacturing a frequency control device
WO2000033455A1 (fr) * 1998-12-02 2000-06-08 Seiko Epson Corporation Dispositif piezo-electrique et son procédé de fabrication
JP2002118423A (ja) * 2000-10-06 2002-04-19 Seiko Epson Corp 圧電デバイス及びその製造方法
JP2006086664A (ja) * 2004-09-15 2006-03-30 Nec Corp 水晶振動子及び水晶発振器並びにその組立て方法及び携帯通信端末
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JP4916775B2 (ja) 2006-05-31 2012-04-18 京セラキンセキ株式会社 圧電発振器
JP2007336321A (ja) 2006-06-16 2007-12-27 Epson Toyocom Corp 表面実装型圧電発振器の製造方法、及びｉｃ部品実装パッドの異物除去方法
JP2008091970A (ja) 2006-09-29 2008-04-17 Citizen Miyota Co Ltd 圧電発振器とその製造方法
JP2008259004A (ja) 2007-04-06 2008-10-23 Epson Toyocom Corp 圧電デバイスおよびその製造方法
JP5157641B2 (ja) 2008-01-28 2013-03-06 セイコーエプソン株式会社 圧電発振器及び送信機
US8384486B2 (en) 2007-07-18 2013-02-26 Seiko Epson Corporation Piezoelectric oscillator and transmitter
JP2009065334A (ja) 2007-09-05 2009-03-26 Nippon Dempa Kogyo Co Ltd 表面実装用の水晶発振器
JP2009159001A (ja) 2007-12-25 2009-07-16 Epson Toyocom Corp 弾性表面波デバイス
JP5115258B2 (ja) 2008-03-17 2013-01-09 セイコーエプソン株式会社 圧電デバイスおよび電子機器
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JP5082988B2 (ja) * 2008-03-31 2012-11-28 セイコーエプソン株式会社 温度補償型圧電発振器の調整方法およびその方法により調整された温度補償型圧電発振器
JP4730419B2 (ja) 2008-09-26 2011-07-20 エプソントヨコム株式会社 圧電発振器の製造方法
JP4730418B2 (ja) 2008-09-26 2011-07-20 エプソントヨコム株式会社 圧電発振器
JP2009044753A (ja) 2008-09-26 2009-02-26 Epson Toyocom Corp 圧電発振器
JP2010166346A (ja) 2009-01-16 2010-07-29 Epson Toyocom Corp 恒温型圧電発振器
EP2228903B1 (en) 2009-03-09 2011-11-16 Micro Crystal AG Oscillator device comprising a thermally-controlled piezoelectric resonator
JP5466537B2 (ja) 2009-09-30 2014-04-09 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動子、発振器及び発振器パッケージ
JP5678727B2 (ja) 2011-03-03 2015-03-04 セイコーエプソン株式会社 振動デバイス、振動デバイスの製造方法、電子機器
JP2014003466A (ja) * 2012-06-19 2014-01-09 Seiko Epson Corp 振動素子の周波数調整方法および周波数調整装置
JP5429653B2 (ja) 2012-09-06 2014-02-26 セイコーエプソン株式会社 発振器、及び発振器の製造方法

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