JP2015163844A5 - - Google Patents

Download PDF

Info

Publication number
JP2015163844A5
JP2015163844A5 JP2014039295A JP2014039295A JP2015163844A5 JP 2015163844 A5 JP2015163844 A5 JP 2015163844A5 JP 2014039295 A JP2014039295 A JP 2014039295A JP 2014039295 A JP2014039295 A JP 2014039295A JP 2015163844 A5 JP2015163844 A5 JP 2015163844A5
Authority
JP
Japan
Prior art keywords
laser
transparent tube
hole
light
shape measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2014039295A
Other languages
English (en)
Japanese (ja)
Other versions
JP6234274B2 (ja
JP2015163844A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2014039295A priority Critical patent/JP6234274B2/ja
Priority claimed from JP2014039295A external-priority patent/JP6234274B2/ja
Publication of JP2015163844A publication Critical patent/JP2015163844A/ja
Publication of JP2015163844A5 publication Critical patent/JP2015163844A5/ja
Application granted granted Critical
Publication of JP6234274B2 publication Critical patent/JP6234274B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2014039295A 2014-02-28 2014-02-28 内面形状計測方法および装置 Active JP6234274B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014039295A JP6234274B2 (ja) 2014-02-28 2014-02-28 内面形状計測方法および装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014039295A JP6234274B2 (ja) 2014-02-28 2014-02-28 内面形状計測方法および装置

Publications (3)

Publication Number Publication Date
JP2015163844A JP2015163844A (ja) 2015-09-10
JP2015163844A5 true JP2015163844A5 (enExample) 2016-09-23
JP6234274B2 JP6234274B2 (ja) 2017-11-22

Family

ID=54186833

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014039295A Active JP6234274B2 (ja) 2014-02-28 2014-02-28 内面形状計測方法および装置

Country Status (1)

Country Link
JP (1) JP6234274B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA3060434A1 (en) 2017-05-31 2018-12-06 Nippon Steel Corporation Tubular body inner surface inspection method and tubular body inner surface inspection apparatus
WO2020026290A1 (ja) 2018-07-30 2020-02-06 日本製鉄株式会社 管状体内表面検査装置及び管状体内表面検査方法
CN117006958B (zh) * 2023-08-08 2025-01-28 大连工业大学 一种高深径比小孔内表面几何特征精密测量方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0375544A (ja) * 1989-08-18 1991-03-29 Nippon Telegr & Teleph Corp <Ntt> レーザ管内検査装置
US5895927A (en) * 1995-06-30 1999-04-20 The United States Of America As Represented By The Secretary Of The Air Force Electro-optic, noncontact, interior cross-sectional profiler
JP3427625B2 (ja) * 1996-07-05 2003-07-22 ソニー株式会社 複合偏光フィルタおよびｉｃリード検査システム
JP2000097846A (ja) * 1998-09-21 2000-04-07 Olympus Optical Co Ltd 光走査プローブ装置
JP2000266525A (ja) * 1999-03-19 2000-09-29 Komatsu Ltd 電子部品検査装置
JP2004101190A (ja) * 2002-09-04 2004-04-02 Hitachi Ltd 管渠内面形状測定装置及び測定方法
JP3837431B2 (ja) * 2004-07-26 2006-10-25 国立大学法人 宮崎大学 管内面形状測定装置
US7609373B2 (en) * 2005-05-31 2009-10-27 Kla-Tencor Technologies Corporation Reducing variations in energy reflected from a sample due to thin film interference
JP5309542B2 (ja) * 2007-12-05 2013-10-09 株式会社ニコン 測定装置およびその方法
JP5315124B2 (ja) * 2009-05-12 2013-10-16 本田技研工業株式会社 車両用撮像装置および車両周辺監視装置
JP5829280B2 (ja) * 2011-09-30 2015-12-09 オリンパス株式会社 内面形状測定装置、検出ヘッド及び内視鏡装置
JP2015025771A (ja) * 2013-07-29 2015-02-05 株式会社Ihi 内形測定装置

Similar Documents

Publication Publication Date Title
JP2017517761A5 (enExample)
EP4354162A3 (en) Apparatus, method and computer program product for defect detection in work pieces
JP2016047237A5 (enExample)
JP2009160190A5 (enExample)
JP2013228361A5 (enExample)
JP2020003262A5 (enExample)
JP2013188316A5 (enExample)
JP2015136095A5 (enExample)
JP2015161776A5 (ja) 撮像装置、撮像システム、発光装置及び焦点検出方法
JP2018175848A5 (enExample)
JP2013188461A5 (enExample)
JP2017196307A5 (enExample)
JP2015528590A5 (enExample)
RU2016121188A (ru) Устройство для обработки кожи на основе многофотонной обработки кожи
US10852128B2 (en) Shape measuring apparatus
JP2014147500A5 (enExample)
JP2016142850A5 (enExample)
JP2015163844A5 (enExample)
JP2015152405A5 (enExample)
JP2015157040A5 (enExample)
EP4235255A3 (en) An optical arrangement and method for imaging a sample
JP6234274B2 (ja) 内面形状計測方法および装置
JP2016514258A5 (enExample)
JP2013090836A5 (enExample)
JP2014188067A5 (enExample)