JP6234274B2 - 内面形状計測方法および装置 - Google Patents

内面形状計測方法および装置 Download PDF

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JP6234274B2
JP6234274B2 JP2014039295A JP2014039295A JP6234274B2 JP 6234274 B2 JP6234274 B2 JP 6234274B2 JP 2014039295 A JP2014039295 A JP 2014039295A JP 2014039295 A JP2014039295 A JP 2014039295A JP 6234274 B2 JP6234274 B2 JP 6234274B2
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transparent tube
laser
hole
light
unit
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JP2015163844A5 (enExample
JP2015163844A (ja
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達雄 針山
達雄 針山
渡辺　正浩
正浩 渡辺
雄太 浦野
雄太 浦野
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Hitachi Ltd
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JP2014039295A 2014-02-28 2014-02-28 内面形状計測方法および装置 Active JP6234274B2 (ja)

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JP2014039295A JP6234274B2 (ja) 2014-02-28 2014-02-28 内面形状計測方法および装置

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JP2014039295A JP6234274B2 (ja) 2014-02-28 2014-02-28 内面形状計測方法および装置

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JP2015163844A JP2015163844A (ja) 2015-09-10
JP2015163844A5 JP2015163844A5 (enExample) 2016-09-23
JP6234274B2 true JP6234274B2 (ja) 2017-11-22

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA3060434A1 (en) 2017-05-31 2018-12-06 Nippon Steel Corporation Tubular body inner surface inspection method and tubular body inner surface inspection apparatus
WO2020026290A1 (ja) 2018-07-30 2020-02-06 日本製鉄株式会社 管状体内表面検査装置及び管状体内表面検査方法
CN117006958B (zh) * 2023-08-08 2025-01-28 大连工业大学 一种高深径比小孔内表面几何特征精密测量方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0375544A (ja) * 1989-08-18 1991-03-29 Nippon Telegr & Teleph Corp <Ntt> レーザ管内検査装置
US5895927A (en) * 1995-06-30 1999-04-20 The United States Of America As Represented By The Secretary Of The Air Force Electro-optic, noncontact, interior cross-sectional profiler
JP3427625B2 (ja) * 1996-07-05 2003-07-22 ソニー株式会社 複合偏光フィルタおよびｉｃリード検査システム
JP2000097846A (ja) * 1998-09-21 2000-04-07 Olympus Optical Co Ltd 光走査プローブ装置
JP2000266525A (ja) * 1999-03-19 2000-09-29 Komatsu Ltd 電子部品検査装置
JP2004101190A (ja) * 2002-09-04 2004-04-02 Hitachi Ltd 管渠内面形状測定装置及び測定方法
JP3837431B2 (ja) * 2004-07-26 2006-10-25 国立大学法人 宮崎大学 管内面形状測定装置
US7609373B2 (en) * 2005-05-31 2009-10-27 Kla-Tencor Technologies Corporation Reducing variations in energy reflected from a sample due to thin film interference
JP5309542B2 (ja) * 2007-12-05 2013-10-09 株式会社ニコン 測定装置およびその方法
JP5315124B2 (ja) * 2009-05-12 2013-10-16 本田技研工業株式会社 車両用撮像装置および車両周辺監視装置
JP5829280B2 (ja) * 2011-09-30 2015-12-09 オリンパス株式会社 内面形状測定装置、検出ヘッド及び内視鏡装置
JP2015025771A (ja) * 2013-07-29 2015-02-05 株式会社Ihi 内形測定装置

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