JP2015163844A5

JP2015163844A5 -

Info

Publication number: JP2015163844A5
Application number: JP2014039295A
Authority: JP
Filing date: 2014-02-28
Publication date: 2016-09-23
Anticipated expiration: 2034-02-28

Claims

An apparatus for measuring the shape of the inner surface of a hole formed in a sample,
A light source for emitting a laser;
A light irradiating unit that irradiates the inner surface of a hole formed in the sample by spreading a laser emitted from the light source unit in a ring shape;
An imaging unit that detects reflected light from the inner surface of the hole irradiated with the laser spread in the ring shape by the light irradiation unit, and captures an image of the inner surface of the hole;
An image processing unit for processing an image of the inner surface of the hole obtained by imaging with the imaging unit;
A display unit for displaying a result processed by the image processing unit;
An optically transparent transparent tube that houses the light source unit , the light irradiation unit, and the imaging unit;
A stage portion which is mounted on the transparent tube and is movable in at least one axial direction, and transmits the transparent tube and irradiates the inner surface of the hole portion or is reflected by the inner surface of the hole portion and is transparent. An inner surface shape measuring apparatus, wherein a polarization state control characteristic for controlling a polarization state of light transmitted through a tube is imparted to the transparent tube.

The inner surface shape measuring apparatus according to claim 1, wherein a polarization state control characteristic for controlling a polarization state of a laser irradiated on the inner surface of the hole portion or light reflected by the inner surface of the hole portion is provided.
An inner surface shape measuring apparatus, which is provided by attaching a film having a polarizer function to the transparent tube.

It is an inner surface shape measuring apparatus of Claim 1 or 2, Comprising: The said light irradiation part has (lambda) / 4 board,
The state of polarization of the laser emitted from the light source unit, the to circularly polarized light by transmitting the lambda / 4 plate, the laser was circular polarization spread to the ring-shaped hole formed in the sample An inner surface shape measuring device irradiating the inner surface.

3. The inner surface shape measuring apparatus according to claim 1, wherein the light irradiation unit includes a radial polarization unit that changes a polarization state of a laser emitted from the light source unit to a radial polarization, and is emitted from the light source unit. has been the state of polarization of the laser, said to radial polarization by passing the radial polarization unit, by irradiating the laser to the radial polarization on the inner surface of the ring-shaped to spread the hole portion formed in the sample An internal shape measuring device.

The inner surface shape measuring apparatus according to claim 1, wherein the imaging unit includes a camera and a radial polarization unit, and is reflected by an inner surface of a hole formed in the sample to give the polarization state control characteristic. An inner surface shape measuring apparatus characterized in that an image of reflected light that has passed through the radial polarization part among reflected light that has passed through the transparent tube is captured by the camera.

The inner surface shape measuring apparatus according to claim 1, wherein the light source unit includes a laser light source that emits a laser, an optical fiber that guides the laser emitted from the laser light source, and a borescope. The borescope is housed inside the transparent tube, and the laser light source and the optical fiber are installed outside the transparent tube.

The inner surface shape measuring apparatus according to claim 6, wherein the light source unit further includes a polarization controller that emits an input laser as circularly polarized light, and the optical fiber is configured to emit a laser emitted from the laser light source. An inner surface shape measuring apparatus comprising: a first optical fiber guided to a wave controller; and a second optical fiber configured to guide a laser light circularly polarized by the polarization controller to the light irradiation unit.

The inner surface shape measuring apparatus according to claim 1, wherein the image processing unit is obtained by imaging with the imaging unit using information on a diameter of the hole and information on a diameter of the transparent tube. An inner surface shape measuring apparatus comprising: a ghost determination processing unit that determines and deletes a ghost generated by light reflected from the inner surface of the transparent tube from an image of an inner surface of the hole formed in the sample.

The laser emitted from the light source is spread in a ring shape at the light irradiation part and irradiated to the inner surface of the hole formed in the sample,
Taking an image of the inner surface of the hole portion by the reflected light from the inner surface of the hole portion irradiated with the laser spread in the ring shape,
An image processing unit processes an image of the inner surface of the hole obtained by imaging,
A method of measuring the shape of the inner surface of a hole formed in a sample for displaying the processed result on a screen,
The light irradiation unit and the imaging sensor are housed inside a transparent tube partially imparted with a characteristic that controls a polarization state with respect to light that is optically transparent and transmitted.
While the transparent tube is placed on the stage and the stage is moved at least in one axial direction, the laser spread in the ring shape is transmitted through the portion of the transparent tube to which the characteristic for controlling the polarization state is transmitted and polarized. A characteristic of controlling the polarization state of the transparent tube by irradiating the inner surface of the hole with a laser whose state is controlled, or reflecting light from the inner surface of the hole irradiated with the laser spread in a ring shape An inner surface shape measuring method, wherein the applied portion is transmitted and imaged by the imaging sensor.

10. The inner surface shape measuring method according to claim 9, wherein the ring-shaped laser irradiated on the inner surface of the hole is a laser having circular polarization characteristics or radial polarization characteristics. Method.

11. The inner surface shape measuring method according to claim 9, wherein the hole obtained by imaging with the imaging sensor using information on a diameter of the hole and information on a diameter of the transparent tube. An inner surface shape measuring method comprising: performing a ghost determination process of performing a process of determining a ghost generated by light reflected from the inner surface of the transparent tube from an image of an inner surface of a section and deleting an image component determined to be a ghost .

Irradiate the ring-shaped laser to the inner surface of the hole formed in the sample through the transparent tube,
Taking an image of the inner surface of the hole portion by the reflected light from the inner surface of the hole portion irradiated with the laser spread in the ring shape through the transparent tube,
Removing the ghost component generated by the light reflected by the inner surface of the transparent tube with respect to the image of the inner surface of the hole obtained by imaging,
An inner surface shape measuring method, wherein an image from which the ghost component has been removed is processed to measure the inner surface of the hole.

13. The inner surface shape measuring method according to claim 12, wherein the transparent tube is partially provided with a characteristic of controlling a polarization state of light transmitted through the transparent tube, and the laser spread in the ring shape is When irradiating the inner surface of the hole through the transparent tube, the laser spread in the ring shape is transmitted through the portion of the transparent tube to which the characteristic for controlling the polarization state is transmitted to the inner surface of the hole. When the image of the inner surface of the hole portion is irradiated through the transparent tube or irradiated with the reflected light from the inner surface of the hole portion, the reflected light from the inner surface of the hole portion is polarized in the transparent tube. An inner surface shape measuring method, wherein an image of an inner surface of the hole portion is taken through a portion to which a characteristic for controlling a state is given.

The inner surface shape measuring method according to claim 12 or 13, wherein the generation position of a ghost component generated by light reflected from the inner surface of the transparent tube is defined as information on the diameter of the hole and information on the diameter of the transparent tube. Obtaining a ghost component generated by the light reflected on the inner surface of the transparent tube from the image information of the generation position of the ghost component calculated and determined geometrically using
An inner surface shape measuring method, wherein information obtained by subtracting the obtained ghost component is processed as image information of the inner surface of the hole.