JP2009019942A5 - - Google Patents

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JP2009019942A5
JP2009019942A5 JP2007181720A JP2007181720A JP2009019942A5 JP 2009019942 A5 JP2009019942 A5 JP 2009019942A5 JP 2007181720 A JP2007181720 A JP 2007181720A JP 2007181720 A JP2007181720 A JP 2007181720A JP 2009019942 A5 JP2009019942 A5 JP 2009019942A5
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sheet light
test object
shape
multiple reflection
unit
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JP2007181720A
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JP5170622B2 (en
JP2009019942A (en
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Claims (13)

光切断法による被検物の形状測定方法であって、
前記光切断を行うためのシート光を前記被検物に投影する第１のステップと、
前記第１のステップで前記シート光が投影された前記被検物の表面を撮像する第２のステップと、
前記第２のステップで撮像した画像に対し前記シート光の延在方向と交差する方向に走査して輝度のピーク位置を検出する第３のステップと、
前記第３のステップにおいて前記ピーク位置が複数検出されたとき、前記複数のピーク位置から前記画像における前記シート光の多重反射による像を特定する第４のステップとを有していることを特徴とする形状測定方法。 A method for measuring the shape of an object by light cutting,
A first step of projecting sheet light for performing the light cutting onto the test object;
A second step of imaging the surface of the test object on which the sheet light is projected in the first step;
A third step of detecting the peak position of the brightness by scanning the image captured in the second step in a direction intersecting the extending direction of the sheet light;
And a fourth step of specifying an image by multiple reflection of the sheet light in the image from the plurality of peak positions when a plurality of peak positions are detected in the third step. Shape measurement method to do. 前記第４のステップでは、前記第３のステップで検出された前記ピーク位置から前記シート光が投影された前記被検物の表面の概略形状を求め、該概略形状に基づいて前記シート光の多重反射による像を特定することを特徴とする請求項１に記載の形状測定方法。In the fourth step, a rough shape of the surface of the test object on which the sheet light is projected is obtained from the peak position detected in the third step, and multiplexing of the sheet light is performed based on the rough shape. 2. The shape measuring method according to claim 1, wherein an image by reflection is specified. 前記第４のステップでは、前記複数検出された前記ピーク位置から光線追跡することにより、前記シート光の多重反射による像を特定することを特徴とする請求項１または２に記載の形状測定方法。3. The shape measuring method according to claim 1, wherein in the fourth step, an image due to multiple reflection of the sheet light is specified by tracing light rays from the plurality of detected peak positions. 前記第４のステップで特定された前記シート光の多重反射による像を除外して、前記被検物の三次元形状を測定する第５のステップを有していることを特徴とする請求項１から３のいずれか一項に記載の形状測定方法。2. The method according to claim 1, further comprising: a fifth step of measuring a three-dimensional shape of the test object by excluding an image due to multiple reflection of the sheet light specified in the fourth step. 4. The shape measuring method according to any one of items 1 to 3. 前記第２のステップで撮像した前記画像に基づいて、前記被検物の三次元形状を測定する第５のステップと、
前記第４のステップで特定した前記多重反射による像に対応する部分の前記シート光を選択的に減光もしくは消光させる設定を行う第６のステップと、
前記第６のステップで前記減光もしくは消光させた前記シート光を前記被検物に投影する第７のステップと、
前記第７のステップで前記シート光が投影された前記被検物の表面を撮像する第８のステップと、
前記第８のステップで撮像した前記画像に基づいて、前記第５のステップで測定した前記被検物の三次元形状の補正を行う第９のステップとを有していることを特徴とする請求項１から３のいずれか一項に記載の形状測定方法。 A fifth step of measuring a three-dimensional shape of the test object based on the image captured in the second step;
A sixth step of performing a setting for selectively dimming or extinguishing the portion of the sheet light corresponding to the image due to the multiple reflection specified in the fourth step;
A seventh step of projecting the sheet light attenuated or extinguished in the sixth step onto the test object;
An eighth step of imaging the surface of the test object on which the sheet light is projected in the seventh step;
Based on the eighth the image captured in step, claims, characterized in that it has a ninth step of correcting the three-dimensional shape of the fifth the test object measured in step Item 4. The shape measuring method according to any one of Items 1 to 3 . 光切断法による被検物の形状測定方法であって、
既知である前記被検物の形状データから、前記被検物表面で多重反射が生じるおそれのあるシート光の部分を選択的に減光もしくは消光させる設定を行う第１のステップと、
前記第１のステップで前記減光もしくは消光させた前記シート光を前記被検物に投影する第２のステップと、
前記第２のステップで前記シート光が投影された前記被検物を撮像する第３のステップと、
前記シート光における前記多重反射が生じるおそれのある部分を除く他の部分を減光もしくは消光させる設定を行う第４のステップと、
前記第４のステップで前記減光もしくは消光させた前記シート光を前記被検物に投影する第５のステップと、
前記第５のステップで前記シート光が投影された前記被検物を撮像する第６のステップと、
前記第３のステップおよび前記第６のステップでそれぞれ撮像した画像に基づいて、前記被検物の三次元形状を測定する第７のステップとを有していることを特徴とする形状測定方法。 A method for measuring the shape of an object by light cutting,
A first step of performing a setting for selectively dimming or extinguishing a portion of sheet light that may cause multiple reflection on the surface of the test object from the shape data of the test object that is known;
A second step of projecting the sheet light attenuated or extinguished in the first step onto the test object;
A third step of imaging the test object on which the sheet light is projected in the second step;
A fourth step of performing a setting for dimming or extinguishing other portions of the sheet light except for a portion where the multiple reflection may occur,
A fifth step of projecting the sheet light attenuated or extinguished in the fourth step onto the test object;
A sixth step of imaging the test object on which the sheet light is projected in the fifth step;
A shape measuring method comprising: a seventh step of measuring a three-dimensional shape of the test object based on the images captured in the third step and the sixth step, respectively. 請求項１から６のいずれか一項に記載の形状測定方法を実行可能であることを特徴とするプログラム。 A program capable of executing the shape measuring method according to any one of claims 1 to 6 . 被検物にシート光を照射する照射部と、
前記シート光が照射された前記被検物を観察する観察部と、
前記観察部の観察結果に基づいて前記シート光が前記被検物で多重反射したことを検出する検出部と、
前記検出部で前記多重反射を検出した場合に、前記多重反射の原因となる部分の前記シート光を他の部分と判別可能にするシート光制御部と、
前記観察部の観察結果に基づいて前記被検物の形状を測定する測定部とを備えることを特徴とする形状測定装置。 An irradiation unit that irradiates the specimen with sheet light; and
An observation unit for observing the specimen irradiated with the sheet light;
A detection unit for detecting that the sheet light has been multiple-reflected by the test object based on the observation result of the observation unit;
When the detection unit detects the multiple reflection, a sheet light control unit that makes it possible to distinguish the sheet light of the part that causes the multiple reflection from other parts,
A shape measuring apparatus comprising: a measuring unit that measures a shape of the test object based on an observation result of the observing unit. 前記シート光制御部は、前記多重反射の原因となる部分の前記シート光を選択的に減光もしくは消光させることを特徴とする請求項８に記載の形状測定装置。 The shape measuring apparatus according to claim 8 , wherein the sheet light control unit selectively diminishes or extinguishes the sheet light of a portion that causes the multiple reflection. 被検物にシート光を照射する照射部と、An irradiation unit that irradiates the specimen with sheet light; and
前記シート光が照射された前記被検物を観察する観察部と、An observation unit for observing the specimen irradiated with the sheet light;
前記観察部の観察結果に基づいて前記シート光が前記被検物で多重反射したことを検出する検出部と、A detection unit for detecting that the sheet light is multiple-reflected by the test object based on the observation result of the observation unit;
前記観察部の観察結果から前記シート光が照射された前記被検物の概略形状を求め、該概略形状に基づいて前記シート光における前記多重反射の原因となる部分を特定し、前記被検物の形状を測定する測定部とを備えることを特徴とする形状測定装置。The approximate shape of the test object irradiated with the sheet light is obtained from the observation result of the observation unit, and the part that causes the multiple reflection in the sheet light is specified based on the approximate shape, and the test object A shape measuring device comprising: a measuring unit that measures the shape of the device. 前記測定部は、前記特定した前記多重反射の原因となる部分を除外して前記被検物の形状を測定することを特徴とする請求項１０に記載の形状測定装置。The shape measuring apparatus according to claim 10, wherein the measuring unit measures the shape of the test object by excluding a part that causes the identified multiple reflection. 前記検出部で前記多重反射を検出した場合に、前記多重反射の原因となる部分の前記シート光を他の部分と判別可能にするシート光制御部をさらに備えることを特徴とする請求項１０または１１に記載の形状測定装置。11. The apparatus according to claim 10, further comprising: a sheet light control unit that enables the sheet light of a portion that causes the multiple reflection to be distinguished from other portions when the detection unit detects the multiple reflection. 11. The shape measuring apparatus according to 11. 前記被検物を前記シート光の延在方向と略直角な方向に移動させる駆動部をさらに備えることを特徴とする請求項１０から１２のいずれか一項に記載の形状測定装置。The shape measuring apparatus according to claim 10, further comprising a drive unit that moves the test object in a direction substantially perpendicular to the extending direction of the sheet light.
JP2007181720A 2007-07-11 2007-07-11 Shape measuring method, program, and shape measuring apparatus Active JP5170622B2 (en)

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JP2009019942A5 true JP2009019942A5 (en) 2010-11-18
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US9857166B2 (en) 2012-09-19 2018-01-02 Canon Kabushiki Kaisha Information processing apparatus and method for measuring a target object
JP6351201B2 (en) * 2012-12-06 2018-07-04 キヤノン株式会社 Distance measuring device and method
JP2014115109A (en) 2012-12-06 2014-06-26 Canon Inc Device and method for measuring distance
FR3056778B1 (en) * 2016-09-29 2018-10-26 Airbus Operations METHOD AND DEVICE FOR GENERATING AN OPTIMUM FLIGHT PATH TO BE FOLLOWED BY AN AIRCRAFT
US10529082B2 (en) * 2017-06-20 2020-01-07 Mitutoyo Corporation Three-dimensional geometry measurement apparatus and three-dimensional geometry measurement method
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