JP2015162449A - 高周波発振回路 - Google Patents
高周波発振回路 Download PDFInfo
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- JP2015162449A JP2015162449A JP2014039114A JP2014039114A JP2015162449A JP 2015162449 A JP2015162449 A JP 2015162449A JP 2014039114 A JP2014039114 A JP 2014039114A JP 2014039114 A JP2014039114 A JP 2014039114A JP 2015162449 A JP2015162449 A JP 2015162449A
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- 230000010355 oscillation Effects 0.000 title claims abstract description 98
- 238000004804 winding Methods 0.000 claims abstract description 51
- 239000003990 capacitor Substances 0.000 claims abstract description 36
- 230000006698 induction Effects 0.000 abstract description 21
- 239000007858 starting material Substances 0.000 description 10
- 230000004913 activation Effects 0.000 description 8
- 238000009616 inductively coupled plasma Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 238000004458 analytical method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 238000007792 addition Methods 0.000 description 3
- 230000001965 increasing effect Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 239000008186 active pharmaceutical agent Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000004451 qualitative analysis Methods 0.000 description 1
- 238000004445 quantitative analysis Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
- H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
- H03B5/02—Details
- H03B5/06—Modifications of generator to ensure starting of oscillations
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
- H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
- H03B5/08—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element comprising lumped inductance and capacitance
- H03B5/12—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element comprising lumped inductance and capacitance active element in amplifier being semiconductor device
- H03B5/1206—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element comprising lumped inductance and capacitance active element in amplifier being semiconductor device using multiple transistors for amplification
- H03B5/1218—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element comprising lumped inductance and capacitance active element in amplifier being semiconductor device using multiple transistors for amplification the generator being of the balanced type
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
- H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
- H03B5/08—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element comprising lumped inductance and capacitance
- H03B5/12—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element comprising lumped inductance and capacitance active element in amplifier being semiconductor device
- H03B5/1228—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element comprising lumped inductance and capacitance active element in amplifier being semiconductor device the amplifier comprising one or more field effect transistors
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
- H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
- H03B5/08—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element comprising lumped inductance and capacitance
- H03B5/12—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element comprising lumped inductance and capacitance active element in amplifier being semiconductor device
- H03B5/1296—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element comprising lumped inductance and capacitance active element in amplifier being semiconductor device the feedback circuit comprising a transformer
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
- H03L3/00—Starting of generators
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/34—Details, e.g. electrodes, nozzles
- H05H1/36—Circuit arrangements
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
- H03B2200/00—Indexing scheme relating to details of oscillators covered by H03B
- H03B2200/006—Functional aspects of oscillators
- H03B2200/0094—Measures to ensure starting of oscillations
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
- H05H1/4645—Radiofrequency discharges
- H05H1/4652—Radiofrequency discharges using inductive coupling means, e.g. coils
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H2242/00—Auxiliary systems
- H05H2242/20—Power circuits
- H05H2242/22—DC, AC or pulsed generators
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Electromagnetism (AREA)
- Power Engineering (AREA)
- Plasma Technology (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Inverter Devices (AREA)
- Inductance-Capacitance Distribution Constants And Capacitance-Resistance Oscillators (AREA)
- Ignition Installations For Internal Combustion Engines (AREA)
Abstract
Description
a)前記LC共振回路中に2次巻線が接続された起動用トランスと、
b)当該高周波発振回路の自励発振を開始させるべく、起動時の一定期間中に、前記起動用トランスの1次巻線に前記LC共振回路の共振周波数に近い周波数の高周波電流を供給する起動手段と、
を備えることを特徴としている。
図1は本実施例の高周波発振回路の構成図、図2は本実施例の高周波発振回路の等価回路を示す図、図3は図1中の起動部の回路構成の一例を示す図である。
2…バイパスコンデンサ
3、4、61、67、74…インダクタ
5…起動用トランスの1次巻線
6…起動部
7…制御部
9…プラズマトーチ
10…フルブリッジ駆動回路
11、14、17、20…フィードバック用トランスの2次巻線
12、15、18、21、31、36、62、68、70、71…コンデンサ
13、16、19、22、63…MOSFET
30…LC共振回路
32、33、34、35…フィードバック用トランスの1次巻線
37…誘導コイル
38…起動用トランスの2次巻線
39…インピーダンス変換回路
64、66、73、75…抵抗
72…PINダイオード
76…スイッチ
Claims (3)
- 直流電圧源と、コイルとコンデンサを含むLC共振回路と、前記直流電圧源から供給される直流電力をスイッチングし前記LC共振回路に与えるスイッチング素子を含むスイッチング回路と、前記LC共振回路に含まれる1次巻線と前記スイッチング素子をオン/オフするために該スイッチング素子の制御端子に接続された2次巻線とからなるトランスと、を具備する自励方式の高周波発振回路において、
a)前記LC共振回路中に2次巻線が接続された起動用トランスと、
b)当該高周波発振回路の自励発振を開始させるべく、起動時の一定期間中に、前記起動用トランスの1次巻線に前記LC共振回路の共振周波数に近い周波数の高周波電流を供給する起動手段と、
を備えることを特徴とする高周波発振回路。 - 請求項1に記載の高周波発振回路であって、
前記起動手段は、前記起動用トランスの1次巻線を共振回路の一部とする高周波LC発振回路であることを特徴とする高周波発振回路。 - 請求項2に記載の高周波発振回路であって、
前記高周波LC発振回路内の共振回路の抵抗値を、自励発振開始後にそれ以前よりも大きい値に切り替える抵抗値切替手段をさらに備えることを特徴とする高周波発振回路。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014039114A JP6221833B2 (ja) | 2014-02-28 | 2014-02-28 | 高周波発振回路 |
US14/633,336 US9232627B2 (en) | 2014-02-28 | 2015-02-27 | Radio-frequency oscillation circuit |
CN201510091978.8A CN104883129B (zh) | 2014-02-28 | 2015-02-28 | 高频振荡电路 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014039114A JP6221833B2 (ja) | 2014-02-28 | 2014-02-28 | 高周波発振回路 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015162449A true JP2015162449A (ja) | 2015-09-07 |
JP6221833B2 JP6221833B2 (ja) | 2017-11-01 |
Family
ID=53950488
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014039114A Active JP6221833B2 (ja) | 2014-02-28 | 2014-02-28 | 高周波発振回路 |
Country Status (3)
Country | Link |
---|---|
US (1) | US9232627B2 (ja) |
JP (1) | JP6221833B2 (ja) |
CN (1) | CN104883129B (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020048321A (ja) * | 2018-09-19 | 2020-03-26 | Tdk株式会社 | 半導体スイッチング素子用ゲート駆動回路 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016054041A (ja) * | 2014-09-03 | 2016-04-14 | 株式会社島津製作所 | 高周波電源装置 |
CN106358358B (zh) * | 2016-09-28 | 2020-06-23 | 北京锐光仪器有限公司 | 一种自激式固态射频发生器 |
CN111263858B (zh) * | 2017-09-26 | 2022-03-01 | 先进能源工业公司 | 用于等离子体激发的系统和方法 |
CN115642789A (zh) * | 2022-10-09 | 2023-01-24 | 江苏威尔曼科技有限公司 | 一种快速匹配频率的自动匹配调节电路 |
Citations (7)
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JPH06290893A (ja) * | 1993-03-31 | 1994-10-18 | Toshiba Lighting & Technol Corp | 放電灯点灯装置 |
JP2004120987A (ja) * | 2002-09-27 | 2004-04-15 | Hitachi Lighting Ltd | インバータ装置 |
JP2006019042A (ja) * | 2004-06-30 | 2006-01-19 | Toshiba Lighting & Technology Corp | 高圧放電灯点灯装置及び照明装置 |
JP2009515300A (ja) * | 2005-11-07 | 2009-04-09 | エム ケー エス インストルメンツ インコーポレーテッド | 反応性ガス発生器においてプラズマに点火しこれを維持するための電力供給方法および装置 |
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US6329757B1 (en) | 1996-12-31 | 2001-12-11 | The Perkin-Elmer Corporation | High frequency transistor oscillator system |
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JP2008005607A (ja) * | 2006-06-21 | 2008-01-10 | Matsushita Electric Works Ltd | 自励式発振回路 |
CN102130607A (zh) * | 2011-03-02 | 2011-07-20 | 陈子杨 | 高频电子变压器 |
US8624684B2 (en) * | 2011-04-22 | 2014-01-07 | Continental Automotive Systems, Inc | Adaptive current limit oscillator starter |
US8576018B2 (en) * | 2011-04-22 | 2013-11-05 | Continental Automotive Systems, Inc. | Synchronized array bridge power oscillator |
-
2014
- 2014-02-28 JP JP2014039114A patent/JP6221833B2/ja active Active
-
2015
- 2015-02-27 US US14/633,336 patent/US9232627B2/en active Active
- 2015-02-28 CN CN201510091978.8A patent/CN104883129B/zh active Active
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06290893A (ja) * | 1993-03-31 | 1994-10-18 | Toshiba Lighting & Technol Corp | 放電灯点灯装置 |
JP2004120987A (ja) * | 2002-09-27 | 2004-04-15 | Hitachi Lighting Ltd | インバータ装置 |
JP2006019042A (ja) * | 2004-06-30 | 2006-01-19 | Toshiba Lighting & Technology Corp | 高圧放電灯点灯装置及び照明装置 |
JP2009515300A (ja) * | 2005-11-07 | 2009-04-09 | エム ケー エス インストルメンツ インコーポレーテッド | 反応性ガス発生器においてプラズマに点火しこれを維持するための電力供給方法および装置 |
JP2010108650A (ja) * | 2008-10-28 | 2010-05-13 | Panasonic Electric Works Co Ltd | 放電灯点灯装置及び照明器具 |
JP2010257659A (ja) * | 2009-04-22 | 2010-11-11 | Panasonic Electric Works Co Ltd | 高圧放電灯点灯装置及びそれを用いた照明器具 |
WO2012039035A1 (ja) * | 2010-09-22 | 2012-03-29 | 株式会社 島津製作所 | 高周波電源 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020048321A (ja) * | 2018-09-19 | 2020-03-26 | Tdk株式会社 | 半導体スイッチング素子用ゲート駆動回路 |
JP7150237B2 (ja) | 2018-09-19 | 2022-10-11 | Tdk株式会社 | 半導体スイッチング素子用ゲート駆動回路 |
Also Published As
Publication number | Publication date |
---|---|
JP6221833B2 (ja) | 2017-11-01 |
US9232627B2 (en) | 2016-01-05 |
CN104883129B (zh) | 2018-05-15 |
US20150249429A1 (en) | 2015-09-03 |
CN104883129A (zh) | 2015-09-02 |
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