JP2015154297A5 - - Google Patents
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- JP2015154297A5 JP2015154297A5 JP2014027032A JP2014027032A JP2015154297A5 JP 2015154297 A5 JP2015154297 A5 JP 2015154297A5 JP 2014027032 A JP2014027032 A JP 2014027032A JP 2014027032 A JP2014027032 A JP 2014027032A JP 2015154297 A5 JP2015154297 A5 JP 2015154297A5
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- JP
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- Prior art keywords
- internal space
- atomic cell
- cell according
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- disposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000011248 coating agent Substances 0.000 claims 14
- 238000000576 coating method Methods 0.000 claims 14
- 239000002184 metal Substances 0.000 claims 6
- 239000003566 sealing material Substances 0.000 claims 6
- 230000005284 excitation Effects 0.000 claims 4
- 239000000463 material Substances 0.000 claims 3
- 238000002844 melting Methods 0.000 claims 3
- 230000008018 melting Effects 0.000 claims 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims 2
- 150000001875 compounds Chemical class 0.000 claims 2
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 claims 2
- 229910052731 fluorine Inorganic materials 0.000 claims 2
- 239000011737 fluorine Substances 0.000 claims 2
- 239000011347 resin Substances 0.000 claims 2
- 229920005989 resin Polymers 0.000 claims 2
- 229930195734 saturated hydrocarbon Natural products 0.000 claims 2
- 238000001514 detection method Methods 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 230000035515 penetration Effects 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014027032A JP6375637B2 (ja) | 2014-02-14 | 2014-02-14 | 原子セル、量子干渉装置、原子発振器、電子機器および移動体 |
| US14/621,601 US9673830B2 (en) | 2014-02-14 | 2015-02-13 | Atomic cell, manufacturing method for atomic cell, quantum interference device, atomic oscillator, electronic apparatus, and moving object |
| CN201510079108.9A CN104850001B (zh) | 2014-02-14 | 2015-02-13 | 原子室及制造方法、量子干涉装置、振荡器、设备和移动体 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014027032A JP6375637B2 (ja) | 2014-02-14 | 2014-02-14 | 原子セル、量子干渉装置、原子発振器、電子機器および移動体 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015154297A JP2015154297A (ja) | 2015-08-24 |
| JP2015154297A5 true JP2015154297A5 (enExample) | 2017-02-23 |
| JP6375637B2 JP6375637B2 (ja) | 2018-08-22 |
Family
ID=53849720
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014027032A Active JP6375637B2 (ja) | 2014-02-14 | 2014-02-14 | 原子セル、量子干渉装置、原子発振器、電子機器および移動体 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US9673830B2 (enExample) |
| JP (1) | JP6375637B2 (enExample) |
| CN (1) | CN104850001B (enExample) |
Families Citing this family (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6488599B2 (ja) * | 2014-09-08 | 2019-03-27 | セイコーエプソン株式会社 | 量子干渉装置、原子セルの製造方法および電子機器 |
| US10145909B2 (en) * | 2014-11-17 | 2018-12-04 | Seiko Epson Corporation | Magnetism measuring device, gas cell, manufacturing method of magnetism measuring device, and manufacturing method of gas cell |
| US9639062B2 (en) * | 2015-03-30 | 2017-05-02 | Texas Instruments Incorporated | Vapor cell and method for making same |
| JP6627335B2 (ja) * | 2015-09-01 | 2020-01-08 | セイコーエプソン株式会社 | 量子干渉装置、原子発振器、および電子機器 |
| WO2017134531A1 (en) * | 2016-02-03 | 2017-08-10 | King Abdullah University Of Science And Technology | In-liquid plasma devices and methods of use thereof |
| US10396809B2 (en) | 2016-02-19 | 2019-08-27 | Seiko Epson Corporation | Atomic cell, atomic cell manufacturing method, quantum interference device, atomic oscillator, electronic apparatus, and vehicle |
| JP2017147402A (ja) * | 2016-02-19 | 2017-08-24 | セイコーエプソン株式会社 | 原子セルおよびその製造方法、量子干渉装置、原子発振器、電子機器、ならびに移動体 |
| EP3244269B1 (en) * | 2016-05-11 | 2021-12-15 | CSEM Centre Suisse d'Electronique et de Microtechnique SA - Recherche et Développement | Alkali vapor cell |
| US10409227B2 (en) | 2016-08-03 | 2019-09-10 | Texas Instruments Incorporated | Temperature gradient in microfabricated sensor cavity |
| CN106219481B (zh) * | 2016-08-04 | 2017-08-11 | 兰州空间技术物理研究所 | 一种双腔型mems原子气室的制备方法 |
| US10364144B2 (en) * | 2017-11-17 | 2019-07-30 | Texas Instruments Incorporated | Hermetically sealed package for mm-wave molecular spectroscopy cell |
| US10370760B2 (en) | 2017-12-15 | 2019-08-06 | Texas Instruments Incorporated | Methods for gas generation in a sealed gas cell cavity |
| RU2676296C1 (ru) * | 2018-04-25 | 2018-12-27 | Общество с ограниченной ответственностью "Атомикс" | Способ изготовления малогабаритных атомных ячеек с парами атомов щелочных металлов |
| RU2683455C1 (ru) * | 2018-04-25 | 2019-03-28 | Общество с ограниченной ответственностью "Атомикс" | Малогабаритная атомная ячейка |
| RU187339U1 (ru) * | 2018-04-26 | 2019-03-01 | Общество с ограниченной ответственностью "Атомикс" | Малогабаритная атомная ячейка |
| CN108548531B (zh) * | 2018-05-02 | 2023-10-03 | 中国工程物理研究院总体工程研究所 | 一种用于核磁共振陀螺仪的微小型集成化原子气室 |
| CN110908269B (zh) * | 2018-09-18 | 2021-10-22 | 中国计量科学研究院 | 用于冷原子喷泉钟的微波谐振器 |
| CN110015636B (zh) * | 2019-03-27 | 2021-06-15 | 浙江工业大学 | 一种全玻璃碱金属原子气室的制备方法 |
| US11054453B2 (en) * | 2019-11-27 | 2021-07-06 | Quantum Valley Ideas Laboratories | Photonic-crystal vapor cells for imaging of electromagnetic fields |
| CN111537488A (zh) * | 2020-06-08 | 2020-08-14 | 山西中谱能源科技有限公司 | 一种利用塞曼荧光消除汞元素测量干扰的装置及测量方法 |
| US20230246117A1 (en) * | 2020-06-26 | 2023-08-03 | ColdQuanta, Inc. | Quantum-particle cell with patterned transparent conductive oxides |
| CN112363381B (zh) * | 2020-11-18 | 2022-02-11 | 北京大学 | 基于真空绝热微型原子气室的芯片原子钟及实现方法 |
| KR102401465B1 (ko) | 2021-02-15 | 2022-05-24 | 부산대학교 산학협력단 | 장거리 양자통신용 원자의 전이선에 안정화된 독립적인 결맞음 광원 생성 방법 및 시스템 |
| US11600581B2 (en) | 2021-04-15 | 2023-03-07 | Texas Instruments Incorporated | Packaged electronic device and multilevel lead frame coupler |
| CN115505869B (zh) * | 2021-06-22 | 2024-06-21 | 北京华信泰科技股份有限公司 | 原子气室的加工设备、加工方法和原子钟 |
| US12444702B2 (en) | 2021-08-02 | 2025-10-14 | Texas Instruments Incorporated | Flip-chip enhanced quad flat no-lead electronic device with conductor backed coplanar waveguide transmission line feed in multilevel package substrate |
| KR102704376B1 (ko) * | 2022-11-16 | 2024-09-05 | 국방과학연구소 | 원자증기셀 제작 장치 및 방법 |
| US12489211B2 (en) | 2023-03-15 | 2025-12-02 | Texas Instruments Incorporated | Electronic device with patch antenna in packaging substrate |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1390105A (en) * | 1971-06-21 | 1975-04-09 | Fujitsu Ltd | Gas discharge display device and a method for fabricating the same |
| JP2001339302A (ja) * | 2000-05-26 | 2001-12-07 | Nec Miyagi Ltd | ルビジウム原子発振器 |
| JP3982263B2 (ja) * | 2002-01-08 | 2007-09-26 | セイコーエプソン株式会社 | 圧電デバイスの封止方法 |
| US7400207B2 (en) | 2004-01-06 | 2008-07-15 | Sarnoff Corporation | Anodically bonded cell, method for making same and systems incorporating same |
| US7292111B2 (en) * | 2004-04-26 | 2007-11-06 | Northrop Grumman Corporation | Middle layer of die structure that comprises a cavity that holds an alkali metal |
| US7292031B2 (en) * | 2004-12-20 | 2007-11-06 | Northrop Grumman Corporatin | Micro-cell for NMR gyroscope |
| JP4816051B2 (ja) | 2005-12-13 | 2011-11-16 | 大日本印刷株式会社 | センサーパッケージおよびその製造方法 |
| JP2009164776A (ja) * | 2007-12-28 | 2009-07-23 | Nippon Dempa Kogyo Co Ltd | 圧電デバイスとその封止方法 |
| JP2009283526A (ja) | 2008-05-20 | 2009-12-03 | Epson Toyocom Corp | ガスセルの製造方法及びガスセル |
| US8237514B2 (en) * | 2009-02-06 | 2012-08-07 | Seiko Epson Corporation | Quantum interference device, atomic oscillator, and magnetic sensor |
| JP2010205875A (ja) * | 2009-03-03 | 2010-09-16 | Seiko Epson Corp | ガスセル |
| JP5078933B2 (ja) | 2009-03-23 | 2012-11-21 | 京セラ株式会社 | パッケージ及びパッケージの製造方法 |
| JP5821439B2 (ja) * | 2011-02-16 | 2015-11-24 | セイコーエプソン株式会社 | ガスセルの製造方法 |
| JP2012191138A (ja) * | 2011-03-14 | 2012-10-04 | Seiko Epson Corp | ガスセルユニット、原子発振器および電子装置 |
| JP5699725B2 (ja) * | 2011-03-23 | 2015-04-15 | セイコーエプソン株式会社 | ガスセル製造装置およびガスセルの製造方法 |
| JP2013030513A (ja) * | 2011-07-26 | 2013-02-07 | Seiko Epson Corp | ガスセルユニットおよび原子発振器 |
| JP5786546B2 (ja) * | 2011-08-15 | 2015-09-30 | セイコーエプソン株式会社 | ガスセルの製造方法及び磁気測定装置 |
-
2014
- 2014-02-14 JP JP2014027032A patent/JP6375637B2/ja active Active
-
2015
- 2015-02-13 CN CN201510079108.9A patent/CN104850001B/zh active Active
- 2015-02-13 US US14/621,601 patent/US9673830B2/en active Active
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