JP2015133443A5 - - Google Patents

Download PDF

Info

Publication number
JP2015133443A5
JP2015133443A5 JP2014005040A JP2014005040A JP2015133443A5 JP 2015133443 A5 JP2015133443 A5 JP 2015133443A5 JP 2014005040 A JP2014005040 A JP 2014005040A JP 2014005040 A JP2014005040 A JP 2014005040A JP 2015133443 A5 JP2015133443 A5 JP 2015133443A5
Authority
JP
Japan
Prior art keywords
gazette
special table
special
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2014005040A
Other languages
English (en)
Japanese (ja)
Other versions
JP6302254B2 (ja
JP2015133443A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2014005040A external-priority patent/JP6302254B2/ja
Priority to JP2014005040A priority Critical patent/JP6302254B2/ja
Priority to EP14200332.6A priority patent/EP2897157A1/en
Priority to TW104100395A priority patent/TW201539739A/zh
Priority to US14/593,296 priority patent/US9391145B2/en
Priority to KR1020150004085A priority patent/KR20150085475A/ko
Priority to CN201510019134.2A priority patent/CN104779329A/zh
Publication of JP2015133443A publication Critical patent/JP2015133443A/ja
Publication of JP2015133443A5 publication Critical patent/JP2015133443A5/ja
Publication of JP6302254B2 publication Critical patent/JP6302254B2/ja
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2014005040A 2014-01-15 2014-01-15 窒化物半導体素子、窒化物半導体ウェーハ、及び、窒化物半導体素子の製造方法 Active JP6302254B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2014005040A JP6302254B2 (ja) 2014-01-15 2014-01-15 窒化物半導体素子、窒化物半導体ウェーハ、及び、窒化物半導体素子の製造方法
EP14200332.6A EP2897157A1 (en) 2014-01-15 2014-12-24 Nitride semiconductor element and nitride semiconductor wafer
TW104100395A TW201539739A (zh) 2014-01-15 2015-01-07 氮化物半導體元件與氮化物半導體晶圓
US14/593,296 US9391145B2 (en) 2014-01-15 2015-01-09 Nitride semiconductor element and nitride semiconductor wafer
KR1020150004085A KR20150085475A (ko) 2014-01-15 2015-01-12 질화물 반도체 소자 및 질화물 반도체 웨이퍼
CN201510019134.2A CN104779329A (zh) 2014-01-15 2015-01-14 氮化物半导体元件和氮化物半导体晶片

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014005040A JP6302254B2 (ja) 2014-01-15 2014-01-15 窒化物半導体素子、窒化物半導体ウェーハ、及び、窒化物半導体素子の製造方法

Publications (3)

Publication Number Publication Date
JP2015133443A JP2015133443A (ja) 2015-07-23
JP2015133443A5 true JP2015133443A5 (enExample) 2017-02-16
JP6302254B2 JP6302254B2 (ja) 2018-03-28

Family

ID=52232019

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014005040A Active JP6302254B2 (ja) 2014-01-15 2014-01-15 窒化物半導体素子、窒化物半導体ウェーハ、及び、窒化物半導体素子の製造方法

Country Status (6)

Country Link
US (1) US9391145B2 (enExample)
EP (1) EP2897157A1 (enExample)
JP (1) JP6302254B2 (enExample)
KR (1) KR20150085475A (enExample)
CN (1) CN104779329A (enExample)
TW (1) TW201539739A (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2552444A (en) * 2016-03-21 2018-01-31 Univ Warwick Heterostructure
US10211297B2 (en) * 2017-05-03 2019-02-19 Globalwafers Co., Ltd. Semiconductor heterostructures and methods for forming same
JP7228176B2 (ja) * 2017-11-10 2023-02-24 豊田合成株式会社 Ｉｉｉ族窒化物半導体発光素子
JP7033498B2 (ja) 2018-05-18 2022-03-10 株式会社東芝 半導体素子及びその製造方法
JP6951301B2 (ja) 2018-07-23 2021-10-20 株式会社東芝 半導体装置及びその製造方法
CN112531015B (zh) * 2020-12-02 2023-09-22 北京大学东莞光电研究院 低损耗氮化镓射频材料外延结构及制备方法
CN115983738B (zh) * 2023-03-21 2023-06-27 广东仁懋电子有限公司 一种用于提升氮化镓制备效率的方法和装置

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2746899A (en) * 1998-03-12 1999-09-27 Nichia Chemical Industries, Ltd. Nitride semiconductor device
US8299451B2 (en) * 2005-11-07 2012-10-30 Showa Denko K.K. Semiconductor light-emitting diode
WO2008024991A2 (en) * 2006-08-24 2008-02-28 Hongxing Jiang Er doped iii-nitride materials and devices synthesized by mocvd
US8362503B2 (en) 2007-03-09 2013-01-29 Cree, Inc. Thick nitride semiconductor structures with interlayer structures
US7825432B2 (en) * 2007-03-09 2010-11-02 Cree, Inc. Nitride semiconductor structures with interlayer structures
JP5191843B2 (ja) * 2008-09-09 2013-05-08 株式会社東芝 半導体発光素子及びウェーハ
JP2011258843A (ja) 2010-06-10 2011-12-22 Panasonic Corp 窒化物半導体発光素子及びその製造方法
GB2485418B (en) * 2010-11-15 2014-10-01 Dandan Zhu Semiconductor materials
JP5781292B2 (ja) * 2010-11-16 2015-09-16 ローム株式会社 窒化物半導体素子および窒化物半導体パッケージ
US8525194B2 (en) * 2011-05-16 2013-09-03 Kabushiki Kaisha Toshiba Nitride semiconductor device, nitride semiconductor wafer and method for manufacturing nitride semiconductor layer
KR101910564B1 (ko) * 2011-06-02 2018-10-22 서울바이오시스 주식회사 스트레인 강화된 웰층을 갖는 발광 다이오드
JP5127978B1 (ja) * 2011-09-08 2013-01-23 株式会社東芝 窒化物半導体素子、窒化物半導体ウェーハ及び窒化物半導体層の製造方法
JP5117609B1 (ja) 2011-10-11 2013-01-16 株式会社東芝 窒化物半導体ウェーハ、窒化物半導体装置及び窒化物半導体結晶の成長方法
JP5319810B2 (ja) 2012-03-08 2013-10-16 株式会社東芝 窒化物半導体層の製造方法
JP5228122B1 (ja) * 2012-03-08 2013-07-03 株式会社東芝 窒化物半導体素子及び窒化物半導体ウェーハ
JP6200175B2 (ja) * 2012-03-23 2017-09-20 サンケン電気株式会社 半導体光電陰極及びその製造方法、電子管並びにイメージ増強管
JP5425284B1 (ja) 2012-09-21 2014-02-26 株式会社東芝 半導体ウェーハ、半導体素子及び窒化物半導体層の製造方法
JP5421442B1 (ja) * 2012-09-26 2014-02-19 株式会社東芝 窒化物半導体ウェーハ、窒化物半導体素子及び窒化物半導体ウェーハの製造方法
US8981382B2 (en) * 2013-03-06 2015-03-17 Iqe Rf, Llc Semiconductor structure including buffer with strain compensation layers
US9048387B2 (en) * 2013-08-09 2015-06-02 Qingdao Jason Electric Co., Ltd. Light-emitting device with improved light extraction efficiency

Similar Documents

Publication Publication Date Title
EP3402944C0 (de) Stütze
JP2016081431A5 (enExample)
KR20180084876A (ko) 내플라즈마성 부재
DK3200653T3 (da) Højdejusterbart bord.
JP2016058548A5 (enExample)
JP2016014777A5 (enExample)
JP2015133443A5 (enExample)
EP3655287A4 (en) DEPLOYABLE TABLE SET
JP2016104089A5 (enExample)
JP2015139858A5 (enExample)
JP2016054879A5 (enExample)
JP2017012034A5 (enExample)
JP2015178752A5 (enExample)
JP2016054715A5 (enExample)
IT201700043111A1 (it) Teglia per alimenti
DE112015004761A5 (de) Kombinationsmöbel
JP2015200574A5 (enExample)
JP2015226513A5 (enExample)
JP2015186422A5 (enExample)
ES1124632Y (es) Tabla de Salvamento
ES1112830Y (es) Barbacoa de sobremesa
JP2015189392A5 (enExample)
UA37704S (uk) Стіл
UA36592S (uk) Стіл
ES1203986Y (es) Toalla-cambiador