JP2015130223A - 磁気スタックおよびその製造方法 - Google Patents
磁気スタックおよびその製造方法 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 claims abstract description 32
- 229910005335 FePt Inorganic materials 0.000 claims description 102
- 239000000463 material Substances 0.000 claims description 61
- 239000008187 granular material Substances 0.000 claims description 42
- 238000004544 sputter deposition Methods 0.000 claims description 34
- 229910010413 TiO 2 Inorganic materials 0.000 claims description 20
- 239000006249 magnetic particle Substances 0.000 claims description 10
- 238000000151 deposition Methods 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 9
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 7
- 239000013078 crystal Substances 0.000 claims description 7
- 239000002019 doping agent Substances 0.000 claims description 7
- 239000002131 composite material Substances 0.000 claims description 6
- 150000004767 nitrides Chemical class 0.000 claims description 5
- 239000000956 alloy Substances 0.000 claims description 4
- 229910045601 alloy Inorganic materials 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000000696 magnetic material Substances 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 229910052726 zirconium Inorganic materials 0.000 claims description 4
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 229910052750 molybdenum Inorganic materials 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- 229910052709 silver Inorganic materials 0.000 claims description 2
- 229910052721 tungsten Inorganic materials 0.000 claims description 2
- 239000010410 layer Substances 0.000 abstract description 166
- 239000011229 interlayer Substances 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 87
- 229910010282 TiON Inorganic materials 0.000 description 36
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 25
- 229910052718 tin Inorganic materials 0.000 description 20
- 238000004627 transmission electron microscopy Methods 0.000 description 18
- 238000002441 X-ray diffraction Methods 0.000 description 6
- 239000002245 particle Substances 0.000 description 6
- 239000000203 mixture Substances 0.000 description 5
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 238000001552 radio frequency sputter deposition Methods 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
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- 238000001755 magnetron sputter deposition Methods 0.000 description 3
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- 238000000926 separation method Methods 0.000 description 3
- 239000012790 adhesive layer Substances 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000002524 electron diffraction data Methods 0.000 description 2
- -1 for example Substances 0.000 description 2
- 238000002173 high-resolution transmission electron microscopy Methods 0.000 description 2
- 238000011065 in-situ storage Methods 0.000 description 2
- 238000013507 mapping Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000006911 nucleation Effects 0.000 description 2
- 238000010899 nucleation Methods 0.000 description 2
- 238000005191 phase separation Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- NQTSTBMCCAVWOS-UHFFFAOYSA-N 1-dimethoxyphosphoryl-3-phenoxypropan-2-one Chemical compound COP(=O)(OC)CC(=O)COC1=CC=CC=C1 NQTSTBMCCAVWOS-UHFFFAOYSA-N 0.000 description 1
- 241000238366 Cephalopoda Species 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
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- 238000013461 design Methods 0.000 description 1
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- 238000002003 electron diffraction Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 229910021480 group 4 element Inorganic materials 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
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- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000002040 relaxant effect Effects 0.000 description 1
- 230000000284 resting effect Effects 0.000 description 1
- 238000004626 scanning electron microscopy Methods 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 238000010561 standard procedure Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000000101 transmission high energy electron diffraction Methods 0.000 description 1
- 238000001106 transmission high energy electron diffraction data Methods 0.000 description 1
Classifications
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- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
- G11B5/7368—Non-polymeric layer under the lowermost magnetic recording layer
- G11B5/7375—Non-polymeric layer under the lowermost magnetic recording layer for heat-assisted or thermally-assisted magnetic recording [HAMR, TAMR]
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/083—Oxides of refractory metals or yttrium
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
- C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
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- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/65—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition
- G11B5/657—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition containing inorganic, non-oxide compound of Si, N, P, B, H or C, e.g. in metal alloy or compound
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/65—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition
- G11B5/658—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition containing oxygen, e.g. molecular oxygen or magnetic oxide
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
- G11B5/7368—Non-polymeric layer under the lowermost magnetic recording layer
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
- G11B5/7368—Non-polymeric layer under the lowermost magnetic recording layer
- G11B5/7369—Two or more non-magnetic underlayers, e.g. seed layers or barrier layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
- G11B5/7368—Non-polymeric layer under the lowermost magnetic recording layer
- G11B5/7371—Non-magnetic single underlayer comprising nickel
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Abstract
【解決手段】スタックは、基板と、柱状構造を有する磁気記録層と、基板と磁気記録層の間に配置された中間層とを含む。柱状構造は、結晶性分離体によってまたは結晶性分離体と非晶質分離体を組合わせたものによって分離された磁性粒状体を含む。
【選択図】図1C
Description
本願は、米国特許法第119条(e)に従い、2014年1月3日に出願された仮特許出願第61/923,561号に基づく優先権を主張し、その全体を本明細書に引用により援用する。
本明細書に記載の実施の形態は、基板と、磁気記録層と、基板と磁気記録層の間に配置された中間層とを含むスタックに関する。磁気記録層は、結晶性分離体によって分離された磁性粒状体を含む柱状構造を有する。
熱アシスト型磁気記録(heat assisted magnetic recording)(HAMR)媒体は、たとえばFePtの高い結晶磁気異方性を利用して理論上は面密度を5Tb/in2まで高めることが可能という点で、注目を集めてきた。FePt薄膜を熱アシスト磁気記録に適用するには、小さな柱状粒状体を有する微細構造によって熱安定性とより高い残留磁化(Mrt)を得ることが必要である。これら微細構造を用いることによって得られるFePt膜は、良好なテクスチャを示し、結晶磁気異方性が大きく、小粒径で粒径分布が狭く、十分に分離された柱状構造を有する。これらの性質を有する微細構造を得るために、結晶磁気異方性が大きく粒径が小さいFePt−C、FePt−SiNX−C、FePt−SiOX−C、FePt−Ag−C等の膜が作製されてきた。非晶質材料(たとえばC、SiO2、TiO2等)でドーピングすると、必要な小粒径は得られるものの、ドープされた非晶質材料は、磁気記録層の表面に拡散し易いものでもある。Mrtをより高くしようとして所望の媒体の厚さを大きくする(たとえば約4〜5nm)と、上昇されたスパッタリング温度でドーパント材料が拡散することにより、結果として磁性粒状体の第2の核生成が生じ二重層構造が形成される。このため、磁気記録層の磁性粒状体は、より高いアスペクト比で柱状に成長する。
Claims (25)
- 基板と、
結晶性分離体によって分離された磁性粒状体を含む柱状構造を有する磁気記録層と、
前記基板と前記磁気記録層の間に配置された中間層とを備える、スタック。 - 前記磁性粒状体はFePtを含む、請求項1に記載のスタック。
- 前記結晶性分離体は、MgO、TiO2、ZrO2、およびTiCのうちの少なくとも1つである、請求項1に記載のスタック。
- 前記結晶性分離体はZrO2である、請求項1に記載のスタック。
- 前記磁気記録層は、約5体積%と約50体積%の間の量のZrO2を含む、請求項4に記載のスタック。
- 前記結晶性分離体は50%以上の結晶構造を含む、請求項1に記載のスタック。
- 前記磁気記録層は、前記磁性粒状体と前記結晶性分離体の間に配置された非晶質分離体をさらに含む、請求項1に記載のスタック。
- 前記非晶質分離体は、酸化物および窒化物のうちの少なくとも1つである、請求項7に記載のスタック。
- 前記非晶質分離体は、C、SiO2、TiO2、WO3、Ta2O5、およびBNのうちの少なくとも1つである、請求項7に記載のスタック。
- 前記中間層はTiN−X層であり、Xは、MgO、TiC、TiO、TiO2、ZrN、ZrC、ZrO、ZrO2、HfN、HfC、HfO、およびHfO2のうちの少なくとも1つを含むドーパントである、請求項1に記載のスタック。
- 前記中間層はMgO−Y層であり、Yは、Ni、Ti、およびZrのうちの少なくとも1つを含むドーパントである、請求項1に記載のスタック。
- 前記磁気記録層の厚さは、約5nmと約30nmの間である、請求項1に記載のスタック。
- 前記FePtの粒状体は、約1以上の高さ/直径のアスペクト比を有する、請求項2に記載のスタック。
- Ag、Au、Cu、Al、Cr、Mo、およびWのうちの少なくとも1つを含む合金を含むヒートシンク層をさらに備え、前記ヒートシンク層は前記中間層と前記基板の間に配置される、請求項1に記載のスタック。
- CrRuおよびMgOのうちの1つ以上を含む下地層をさらに備え、前記下地層は前記中間層と前記基板の間に配置される、請求項1に記載のスタック。
- 基板と、
結晶性分離体と非晶質分離体によって互いに分離された磁性粒状体を含む柱状構造を有する磁気記録層と、
前記基板と前記磁気記録層の間に配置された中間層とを備える、スタック。 - 前記磁性粒状体はFePtを含み、前記結晶性分離体はZrO2を含み、前記非晶質分離体はCを含む、請求項16に記載のスタック。
- 前記磁性層は、約5体積%と約50体積%の間の量のZrO2と、約5〜50体積%の量のCとを含む、請求項16に記載のスタック。
- 前記結晶性分離体はZrO2を含み、前記非晶質分離体はCを含み、前記磁性層は、約20体積%と約45体積%の間の量のZrO2と、約5〜20体積%の量のCとを含む、請求項16に記載のスタック。
- 前記磁性粒状体は、高さ/直径のアスペクト比が1以上のFePtを含む、請求項16に記載のスタック。
- 基板の上に中間層を形成することと、
前記中間層の上に磁性材料と分離体材料をスパッタリングすることによって磁性層を成膜することとを含み、前記スパッタリングにより、結晶性分離体によって分離された柱状の磁性粒状体を形成する、方法。 - 前記スパッタリングは、FePtターゲットとZrO2ターゲットを同時にスパッタリングすることを含む、請求項21に記載の方法。
- 前記スパッタリングは、FePt−ZrO2複合体ターゲットをスパッタリングすることを含む、請求項21に記載の方法。
- 前記磁性層を成膜することは、非晶質材料をスパッタリングすることをさらに含む、請求項21に記載の方法。
- 前記磁性層を成膜することは、前記基板を400℃以上の温度に加熱することを含む、請求項21に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201461923561P | 2014-01-03 | 2014-01-03 | |
US61/923,561 | 2014-01-03 |
Publications (3)
Publication Number | Publication Date |
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JP2015130223A true JP2015130223A (ja) | 2015-07-16 |
JP2015130223A5 JP2015130223A5 (ja) | 2018-01-11 |
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JP2020173878A (ja) * | 2019-04-09 | 2020-10-22 | 昭和電工株式会社 | 磁気記録媒体および磁気記憶装置 |
CN112382315A (zh) * | 2017-03-10 | 2021-02-19 | 富士电机株式会社 | 磁记录介质 |
US11302349B2 (en) | 2020-05-21 | 2022-04-12 | Showa Denko K.K. | Magnetic recording medium and magnetic storage apparatus |
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US9558777B2 (en) * | 2014-11-26 | 2017-01-31 | HGST Netherlands B.V. | Heat assisted magnetic recording (HAMR) media having a highly ordered crystalline structure |
US9406329B1 (en) * | 2015-11-30 | 2016-08-02 | WD Media, LLC | HAMR media structure with intermediate layer underlying a magnetic recording layer having multiple sublayers |
JP2017224371A (ja) * | 2016-06-15 | 2017-12-21 | 昭和電工株式会社 | 磁気記録媒体及び磁気記憶装置 |
JP6701384B2 (ja) * | 2016-12-28 | 2020-05-27 | 住友電気工業株式会社 | 被膜 |
JP6989427B2 (ja) * | 2018-03-23 | 2022-01-05 | 昭和電工株式会社 | 磁気記録媒体および磁気記録再生装置 |
TWI702294B (zh) * | 2018-07-31 | 2020-08-21 | 日商田中貴金屬工業股份有限公司 | 磁氣記錄媒體用濺鍍靶 |
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