JP2015100876A - Conveyance tool - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a conveyance tool capable of conveying a small work without damaging a surface.SOLUTION: A case body part 3c of a case 3 has a taper surface 9 expanding toward a bottom surface 3a facing a surface of a work 2 from a lower end of a first air passage 6. In a stud 4, a stud body part 4a is arranged in the first air passage, and a taper part 5 of the lower end is oppositely arranged to the taper surface. Compressed air, from a second air passage 7 formed inside the stud body part, jets toward a bottom surface side outer peripheral edge whole periphery of the case body part along the taper surface via air exhaust ports 8a-8d formed on a stud body part side surface, and a slit 10 formed over the whole periphery between a stud body part outer surface and a taper part outer surface, and the first air passage and the taper surface with a lower end part bottom surface 5a of the taper part being located further lower part than the case body part bottom surface, forms a high speed air flow 11 flowing along the case body part bottom surface and a side surface 3b, and enables work adsorption by maintaining negative pressure space in the vicinity of a stud lower end part bottom surface.

Description

  The present invention relates to a transfer tool used when a small work having an extremely thin wall portion as found in a fragile element used in MEMS (Micro Electro Mechanical Systems) is mounted on an object to be mounted.

  Conventionally, the suction operation by vacuum suction is the most common when a workpiece is sucked and transported to the next manufacturing process. However, in the case of a small workpiece having an extremely thin wall portion, there is a high possibility that the surface of the workpiece is damaged from the suction nozzle during vacuum suction. Therefore, a Bernoulli method for forming a high-speed air flow between the suction surface of the suction nozzle and the surface of the work, generating a negative pressure, and sucking the work with this negative pressure is widely known (for example, Patent Document 1).

  FIG. 3A is a schematic cross-sectional view showing the structure of a conventional transport apparatus having such a configuration.

  A taper portion 105 that expands toward the workpiece 102 is provided at the center of the bottom surface of the main body 103, and a valve-shaped shape in which the bottom surface 104 a forms substantially the same plane as the bottom surface 103 a of the main body 103 inside the taper portion 105. A stud 104 is provided.

  As a result, a gap 110 is formed between the inner periphery of the tapered portion 105 and the outer periphery of the stud 104 on the bottom surface 103a of the main body 103. When the compressed air 101 is supplied from above the tapered portion 105, the compressed air 101 is From the gap 110, the liquid is ejected toward the outer periphery of the workpiece 102. The jetted compressed air 101 forms a jet 101a between the bottom surface 103a of the main body 103 and the surface 102a of the work 102, and the work 102 is adsorbed by the negative pressure generated by the Bernoulli principle.

  However, in the conventional transfer device using the negative pressure generated by the Bernoulli principle, the bottom surface 103a of the main body 103 and the bottom surface 104a of the valve-shaped stud 104 form substantially the same plane. And the outer periphery of the bottom surface 103 a of the main body 103 act as the suction surface 106. For this reason, in order to secure the suction surface 106, the main body 103 has to be enlarged, and it is difficult to suck a small work.

  On the other hand, in order to make the main body 103 compact and to adsorb a small work, the Coanda effect is generated by enclosing a jet over the entire circumference of the adsorbing surface and generating a negative pressure between the main body 103 and the work 102. A transport apparatus has been proposed (see, for example, Patent Document 2).

  FIG. 3B shows a schematic cross-sectional view showing the structure of a conventional transport apparatus having such a configuration.

  In this example, the bottom surface 114a of the stud 114 is positioned above the bottom surface 103a of the main body 103, and the jet flow ejected from the gap 110 between the inner periphery of the tapered portion 105 and the outer periphery of the stud 104 has a rapid flow area. By expanding, the flow velocity is reduced, and the jet flow heading outward along the bottom surface 103a of the main body 103 in the space 111 formed between the end bottom surface 114a of the stud 114 and the surface 102a of the workpiece 102 by the Coanda effect. The distance between the outer peripheral edge of the taper portion 105 and the outer peripheral edge of the bottom surface of the main body 103 is reduced by enclosing with 101b and securing the suction surface.

JP 2008-284671 A JP 2012-106331 A

  However, since the jet flow 101a directed outward is formed along the bottom surface 103a of the main body 103 by intentionally reducing the flow velocity, in order to reliably maintain a large negative pressure, the tapered portion 105 is inevitably maintained. Adsorption was not possible unless the workpiece was larger than the outer periphery.

  In view of the above problems, an object of the present invention is to provide a transport tool capable of transporting a small workpiece having an extremely thin portion without damaging the surface of the workpiece.

In order to solve the above-described problem, a first aspect of the present invention includes a case main body having a first air passage extending in the axial direction therein, and the first main body is provided at a lower portion of the case main body. A case having a tapered surface extending from the lower end of the air passage toward the bottom surface facing the surface of the workpiece;
A stud having a stud main body disposed in the first air passage and a taper connected to the lower end of the stud main body and facing the tapered surface with a gap. ,
Forming a plurality of air outlets on the side surface of the main body of the stud;
Forming a second air passage extending in the axial direction inside the body portion of the stud and connected to the air outlet;
The bottom surface of the lower end of the tapered portion of the stud is located below the bottom surface of the case main body located at the lower edge of the tapered surface, and the outer surface of the main body of the stud and the outer surface of the tapered portion A slit is formed over the entire circumference between the first air passage of the case and the tapered surface,
Compressed air from above the second air passage of the stud is jetted toward the outer periphery of the bottom side of the case body along the tapered surface through the air outlet and the slit, Compressed air ejected from the entire outer periphery of the tapered surface forms a high-speed air flow that flows along the bottom surface of the case main body portion and the side surface of the case main body portion, and is near the bottom surface of the lower end of the stud. This is a transfer tool that can maintain the space at a negative pressure and suck and hold the workpiece on the bottom surface of the lower end portion of the stud.

  The second aspect of the present invention is the lower end portion of the stud so that the distance between the bottom surface of the lower end portion of the stud and the bottom surface of the case main body portion is greater than 0 mm and equal to or less than 0.5 mm. It is a conveyance tool concerning a 1st aspect by which a bottom is projected and arranged below the bottom of the case body part.

  Moreover, the 3rd aspect of this invention is a conveyance tool concerning the 1st or 2nd aspect which is trying for the inclination-angle of the outer surface of the said taper part of the said stud to be 5 degrees-30 degrees.

  Moreover, the 4th aspect of this invention is arrange | positioned so that the lower end edge of the said air exhaust port may be located in the same surface as the upper end edge of the outer surface of the said taper surface, Any 1st-3rd It is a conveyance tool concerning one mode.

  By the said aspect of this invention, the conveyance tool which can convey the small workpiece | work which has an ultra-thin part without damaging a workpiece | work surface can be provided.

The model expanded sectional view which shows the structure of the conveyance tool of one embodiment of this invention The perspective view which shows the stud of the conveyance tool of the said embodiment of this invention Schematic sectional view showing the stud of the transfer tool of the embodiment of the present invention The enlarged view which shows the air discharge port vicinity of the conveyance tool of the said embodiment of this invention Schematic sectional view showing the vicinity of the tapered surface of the transfer tool of the embodiment of the present invention Schematic cross-sectional view showing the structure of the transport device of the embodiment Schematic cross-sectional view showing the structure of a conventional transport device Schematic cross-sectional view showing the structure of a conventional transport device

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Embodiment)
FIG. 1A is a schematic cross-sectional view showing the structure of the transfer tool 20 according to one embodiment of the present invention. FIG. 1B is a diagram showing the stud 4 of the transfer tool 20 according to the embodiment of the present invention.

  The transfer tool 20 includes a cylindrical case 3 and a valve-shaped stud 4 disposed in the case 3.

  The case 3 has a case main body 3c in which a first air passage 6 extending in the axial direction is formed at the center of the inside. A tapered surface 9 that extends from the lower end of the first air passage 6 toward the bottom surface 3a of the case 3 that faces the surface of the workpiece 2 is provided at the lower portion of the case body 3c.

  In the first air passage 6, the stud 4 is fixed to the center of the case body 3 c of the case 3 on the concentric shaft along the axial direction.

  The stud 4 is configured by integrally forming a cylindrical stud main body portion 4a and a conical tapered portion 5 that expands toward the lower end at a lower portion of the cylindrical stud main body portion 4a. On the outer peripheral surface of the stud main body 4a of the stud 4, a plurality of (for example, four) elongated air discharge ports 8a to 8d are arranged at predetermined intervals around the axis (for example, etc.) along the longitudinal axis direction of the stud 4. Formed at intervals). A second air passage 7 connected to the air discharge ports 8 a to 8 d is formed in the center portion inside the stud main body 4 a, for example, from the upper end to the taper portion 5 in the longitudinal axis direction of the stud 4. Since the second air passage 7 does not penetrate the taper portion 5, the compressed air 1 supplied to the upper end of the second air passage 7 is discharged from the air discharge ports 8a to 8d. The bottom surface 5a of the lower end portion of the tapered portion 5 of the stud 4 is fixed to the case 3 so as to protrude downward from the bottom surface 3a located at the lower end edge of the tapered surface 9 of the case 3. Therefore, the cylindrical slit 10 extends over the entire circumference between the outer surface of the stud main body portion 4 a and the outer surface of the tapered portion 5 of the stud 4 and the air passage forming surface 3 d and the tapered surface 9 of the first air passage 7 of the case 3. Is forming.

  The stud body 4a is fixed in the first air passage of the case body 3c of the case 3, and the taper 5 is fixed so as to face the taper surface 9 of the case 3 with a gap. Yes.

  Therefore, the compressed air 1 is supplied from, for example, the upper end of the second air passage 7 of the stud 4, passes through the second air passage 7 and the air discharge ports 8 a to 8 d, and passes through the outer surface of the stud 4 and the first of the case 3. Along the slit 10 formed between the air passage 6 and the air passage forming surface 3 d of the air passage 6 and between the outer peripheral surface of the tapered portion 5 and the tapered surface 9 of the stud 4, on the entire outer periphery of the bottom surface side of the case body 3 c. It spouts towards. At this time, the compressed air 1 is discharged at high speed from the air discharge ports 8 a to 8 d toward the air passage forming surface 3 d of the first air passage 6 of the case 3 and the inner peripheral wall of the tapered surface 9. Therefore, the air flowing through the slit 10 flows so as to be sucked to the air passage forming surface 3d of the first air passage 6 of the case 3 and the inner peripheral wall of the tapered surface 9 without decreasing the flow velocity. It reaches the outer edge (the entire circumference of the outer peripheral edge on the bottom surface side of the case main body 3c), and the direction is changed along the bottom surface 3a and the side surface 3b of the case 3.

  Thereby, since the bottom face vicinity of the lower end part of the stud 4 is surrounded by the high-speed jet 11 along the bottom face 3a and the side face 3b of the case 3, a jet is formed between the bottom face 3a of the case 3 and the surface of the workpiece 2. Even if not, a large negative pressure is reliably maintained between the bottom surface 3a of the case 3 and the surface of the work 2 in the space near the bottom surface of the lower end. Therefore, even the work 2 smaller than the frame shape formed at the outer peripheral edge of the tapered surface 9 of the case 3 can be sucked and held as shown in FIG. 1A.

  Here, suppose that the distance between the bottom surface 5a of the lower end of the stud 4 (the bottom surface of the tapered portion 5) 5a and the bottom surface 3a of the tapered surface 9 is 0 mm, that is, the bottom surface 5a of the lower end of the stud 4 as in the prior art. If the bottom surface 3a of the tapered surface 9 is disposed so as to form substantially the same plane, there are the following problems. That is, as described above, the gap between the inner periphery of the tapered surface 9 and the outer periphery of the stud 4 to the outer peripheral edge of the bottom surface 3a of the case 3 acts as an adsorption surface. Since the suction surface is configured in this way, the case 3 must be enlarged, and it is difficult to suck a small work.

  Further, when the distance between the bottom surface 5a of the lower end portion of the stud 4 and the bottom surface 3a of the tapered surface 9 is larger than 0.5 mm, the high speed surrounding the vicinity of the bottom surface of the lower end portion of the stud 4 when conveying a small work at high speed. Since the jet is greatly disturbed during conveyance, the workpiece 2 cannot be stably adsorbed and held.

  Accordingly, the bottom end bottom surface 5a of the stud 4 and the bottom surface 3a of the case main body 3c are set so that the distance between the bottom end bottom surface 5a of the stud 4 and the bottom surface 3a of the tapered surface 9 is greater than 0 mm and 0.5 mm or less. It is preferable to arrange it so as to protrude downward.

FIG. 1C is a schematic cross-sectional view of the stud 4 of the transfer tool 20 in the embodiment of the present invention. If the inclination angle theta ₁ of the outer surface of the tapered portion 5 of the stud 4 with respect to the direction perpendicular to the longitudinal direction of the stud 4 is greater than 30 degrees, it is impossible to form a high-speed air flow 11 along the bottom surface 3a and the side surface 3b of the case 3 . Further, when the inclination angle theta ₁ of the outer surface of the tapered portion 5 of the stud 4 is less than 5 degrees, the air flow 11 along the bottom surface 3a of the case 3 can be formed, can not form an air flow along the side surface 3b of the case 3.

For these reasons, it is preferable that the inclination angle θ ₁ of the outer surface of the taper portion 5 of the stud 4 is 5 degrees to 30 degrees.

The inclination angle theta ₂ of the tapered surface 9 is also the same as the inclination angle theta ₁ of the outer surface of the tapered portion 5, it is preferable to be 5 to 30 degrees. Note that the inclination angle θ ₂ of the tapered surface 9 may be exactly the same as or slightly different from the inclination angle θ ₁ of the outer surface of the tapered portion 5.

  FIG. 1D is an enlarged view of the air discharge ports 8a to 8d of the transfer tool 20 according to the embodiment of the present invention. FIG. 1E is a schematic cross-sectional view of the tapered surface 9 of the transfer tool 20 according to the embodiment of the present invention. The flow rate of the compressed air 1 is reduced by arranging the position 14 of the lower edge of the air discharge ports 8a to 8d so as to be flush with the position 12 of the upper edge of the outer surface of the tapered surface 9 indicated by the alternate long and short dash line. Without being swept away by the inner peripheral wall of the tapered surface 9. Thereby, it is preferable that the position 14 of the lower end edge of the air discharge ports 8 a to 8 d is flush with the position 12 of the upper end edge of the outer surface of the tapered surface 9.

  From the above, by adopting the structure of the transfer tool 20 of the embodiment shown in FIGS. 1A to 1E, the work 2 is adsorbed even if the work 2 is not larger than the outer peripheral edge of the bottom surface of the tapered surface 9. Is possible. Therefore, the small work 2 having an extremely thin portion can be transported without damaging the surface of the work 2.

  Next, the effects of the present invention will be described by comparing the examples of the present invention with comparative examples.

  Examples of the present invention will be described below, but the present invention is not limited to these examples.

  In FIG. 2, the schematic cross section which shows the structure of the conveyance tool used in Example 1-3 of this invention, the comparative example 1, and the comparative example 2 is shown. Table 1 shows the dimensions of each part of the transport tool used in Examples 1 to 3 and Comparative Examples 1 and 2 of the present invention.

Example 1
As shown in Table 1, the transfer tool of Example 1 has an outer diameter (φ _a ) of 9 mm at the bottom end bottom surface (bottom surface of the taper portion 5) 5 a of the stud 4 and an open bottom surface (outer peripheral edge) of the taper surface 9. The diameter (φ _b ) is 10 mm, the distance (H) between the bottom surface 5 a of the lower end portion of the stud 4 and the bottom surface 3 a of the tapered surface 9 is 0.5 mm, the angle θ ₁ of the tapered portion 5 of the stud 4 and the tapered surface 9 of the case 3. the angle θ ₂ was 30 degrees.

  In the structure of the transfer tool, three types of workpieces having a size of 6 mm square, 9 mm square, and 20 mm square were adsorbed.

(Example 2)
As shown in Table 1, the transfer tool of Example 2 has an outer diameter (φ _a ) of 8 mm at the bottom end bottom surface (bottom surface of the taper portion 5) 5 a of the stud 4 and an open bottom surface (outer peripheral edge) of the taper surface 9. The diameter (φ _b ) is 8 mm, the distance (H) between the bottom surface 5 a of the lower end portion of the stud 4 and the bottom surface 3 a of the tapered surface 9 is 0.5 mm, the angle θ ₁ of the tapered portion 5 of the stud 4 and the tapered surface 9 of the case 3. the angle θ ₂ was 30 degrees.

  In the structure of the transfer tool, three types of workpieces having a size of 6 mm square, 9 mm square, and 20 mm square were adsorbed.

(Example 3)
As shown in Table 1, the conveyance tool of Example 3 has an outer diameter (φ _a ) of 4 mm for the bottom surface (bottom surface of the tapered portion 5) 5a of the stud 4 and an open bottom surface (outer peripheral edge) of the tapered surface 9. The diameter (φ _b ) is 4 mm, the distance (H) between the bottom surface 5 a of the lower end portion of the stud 4 and the bottom surface 3 a of the tapered surface 9 is 0.2 mm, the angle θ ₁ of the tapered portion 5 of the stud 4 and the tapered surface 9 of the case 3. the angle θ ₂ was 30 degrees.

  In the structure of the transfer tool, two types of workpieces having a size of 4 mm square and 6 mm square were adsorbed, respectively.

(Comparative Example 1)
As shown in Table 1, the conveying tool of Comparative Example 1 has an outer diameter (φ _a ) of 9 mm at the bottom surface of the lower end of the stud 4, an opening diameter (φ _b ) of the bottom surface of the tapered surface 9 of 10 mm, and a lower end of the stud 4. The distance (H) between the bottom surface of the portion and the bottom surface of the tapered surface 9 was 0 mm, the angle θ ₁ of the tapered portion of the stud 4 and the angle θ ₂ of the tapered surface 9 of the case 3 were 30 degrees.

  In the structure of this transfer tool, suction of two types of workpieces having a size of 9 mm square and 20 mm square was performed.

(Comparative Example 2)
As shown in Table 1, the transport tool of Comparative Example 2 has an outer diameter (φ _a ) of 9 mm at the bottom surface of the lower end of the stud 4, an opening diameter (φ _b ) of the bottom surface of the tapered surface 9, and a lower end of the stud 4. The distance (H) between the bottom surface of the part and the bottom surface of the tapered surface 9 was −0.5 mm, the angle θ ₁ of the tapered part of the stud 4 and the angle θ ₂ of the tapered surface 9 of the case 3 were 30 degrees.

  In the structure of this transfer tool, suction of two types of workpieces having a size of 9 mm square and 20 mm square was performed.

(Evaluation)
Table 2 shows the adsorption results of Examples 1 to 3, Comparative Example 1, and Comparative Example 2.

  From Table 2, in Example 1 to Example 3, it was possible to adsorb the workpiece 2 having substantially the same size as the outer peripheral diameter of the bottom surface (bottom surface of the tapered portion 5) 5a of the stud 4. On the other hand, in Comparative Example 1 and Comparative Example 2, even the workpiece 2 having a size larger than the outer peripheral edge of the tapered surface 9 of the case 3 could not be adsorbed.

  In addition, it can be made to show the effect which each has by combining suitably arbitrary embodiment or an example of the said various embodiment or an Example.

  The transfer tool according to the present invention has an effect of transferring a small work having an extremely thin portion without damaging the work surface, and is widely used not only in the MEMS manufacturing process but also in various fields such as adsorption of fragile parts. It can be expected to be used.

DESCRIPTION OF SYMBOLS 1 Compressed air 2 Workpiece | work 3 Case 3a Bottom surface 3b Side surface 3c Case main-body part 3d Formation surface of the 1st air path 4 Stud 4a Stud main-body part 5 Tapered part 5a Bottom face 6 1st air path 7 2nd air path 8a, 8b 8c, 8d Air discharge port 9 Tapered surface 10 Slit 11 High speed jet 12 Position of upper edge of outer surface of taper surface 14 Position of lower edge of air discharge port 20 Transfer tool 101 Compressed air 102 Work 103 Main body 104 Stud 105 Tapered portion 106 Suction surface θ ₁ Inclination angle of outer surface of taper part θ ₂ Inclination angle of taper surface

Claims (4)

A case main body having a first air passage extending in the axial direction therein, and extending from a lower end of the first air passage toward a bottom surface facing the surface of the workpiece at a lower portion of the case main body. A case having a tapered surface;
A stud having a stud main body disposed in the first air passage and a taper connected to the lower end of the stud main body and facing the tapered surface with a gap. ,
Forming a plurality of air outlets on the side surface of the main body of the stud;
Forming a second air passage extending in the axial direction inside the body portion of the stud and connected to the air outlet;
The bottom surface of the lower end of the tapered portion of the stud is located below the bottom surface of the case main body located at the lower edge of the tapered surface, and the outer surface of the main body of the stud and the outer surface of the tapered portion A slit is formed over the entire circumference between the first air passage of the case and the tapered surface,
Compressed air from above the second air passage of the stud is jetted toward the outer periphery of the bottom side of the case body along the tapered surface through the air outlet and the slit, Compressed air ejected from the entire outer periphery of the tapered surface forms a high-speed air flow that flows along the bottom surface of the case main body portion and the side surface of the case main body portion, and is near the bottom surface of the lower end of the stud. A transfer tool that maintains a negative pressure and allows the workpiece to be sucked and held on the bottom surface of the lower end of the stud.   The bottom surface of the lower end of the stud is more than the bottom surface of the case body so that the distance between the bottom of the bottom of the stud and the bottom of the case body is greater than 0 mm and 0.5 mm or less. The conveying tool according to claim 1, wherein the conveying tool is disposed so as to protrude downward.   The conveyance tool according to claim 1 or 2, wherein an inclination angle of an outer surface of the tapered portion of the stud is set to 5 degrees to 30 degrees.   The conveyance tool according to any one of claims 1 to 3, wherein a lower end edge of the air discharge port is disposed so as to be located on the same plane as an upper end edge of the outer surface of the tapered surface.

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