WO2019049890A1

WO2019049890A1 - Suction device

Info

Publication number: WO2019049890A1
Application number: PCT/JP2018/032876
Authority: WO
Inventors: 斉岩坂; 英幸徳永; 裕二河西; 克洋輿石; 秀光田中; 浩彦小野; 勝利箕浦; 直然岩坂
Original assignee: 株式会社ハーモテック
Priority date: 2017-09-05
Filing date: 2018-09-05
Publication date: 2019-03-14
Also published as: TW201919972A; JP2019042895A

Abstract

A suction device (10) is provided which can suction a material to be sucked that is located in a position away from a negative pressure generating region. This suction device (10) is provided with: a columnar main body; a flat end surface which is formed on the main body; a recess which is formed in the end surface; a swirling flow forming means which forms a swirling flow in a fluid in the recess; a plate body (21) which is formed so as to allow passage of the fluid sucked by negative pressure; a holding member (3) which is fixed on one side to the main body and on the other side holds the plate body (21) opposite of the end surface, and which holds the plate body (21) such that a gap for enabling flow of the fluid that flows out of the recess is formed between the end surface and the plate body (21); and one or more tubular bodies (4) which, while allowing passage of the fluid sucked by negative pressure, are fixed at the one end to the plate body (21) so as to inhibit the influx of the sucked material into the recess.<u/> <u/>

Description

Suction device

The present invention relates to an apparatus for suctioning material utilizing the Bernoulli effect.

Conventionally, an apparatus for suctioning a plate-like member such as a semiconductor wafer or a glass substrate using the Bernoulli effect is known. For example, Patent Document 1 describes a suction device provided with a swirl flow forming body that suctions an object to be sucked by forming a swirl flow in the recess and generating a negative pressure. The suction device includes a guiding portion for restricting the flow of the fluid flowing out of the recess provided in the swirl flow forming body to guide the fluid away from the suctioned object, and suctioning the suctioned object stably. Can.

JP 2017-35350 A

The present invention has been made in view of the above-described technology, and an object of the present invention is to provide a suction device capable of suctioning a substance to be suctioned present at a position distant from a negative pressure generation region.

In order to solve the above problems, the suction device according to the present invention comprises a columnar main body, a flat end face formed on the main body, a recess formed on the end face, and a swirling flow of fluid in the recess A fluid flow forming means for generating a negative pressure by suctioning a substance by generating a radial flow by discharging a fluid into the recess or forming a radial flow, and allowing the fluid sucked by the negative pressure to pass through. And a holding member fixed at one end side to the main body and holding the other end of the plate so as to face the end face, and between the end face and the plate, A holding member for holding the plate body so that a gap for flowing out the fluid from the recess is formed, and the entry of the aspirated object into the recess while passing the fluid sucked by the negative pressure. One end of which is fixed to the plate so as to inhibit And a cylindrical body above.

In a preferred embodiment, the one or more cylinders may have a bellows shape.

In another aspect, the one or more cylinders may be a plurality of cylinders.

In yet another aspect, the other end of the one or more cylinders may have a plurality of notches.

In still another aspect, the opening area of the other end of the one or more cylinders may be smaller than the opening area of the recess.

Further, another suction device according to the present invention may have a columnar main body, a flat end face formed in the main body, a recess formed in the end face, and a swirling flow of fluid in the recess Alternatively, a fluid flow forming unit that generates a negative pressure by discharging a fluid into the recess to form a radial flow and suctions a suction target, and a fluid drawn by the negative pressure, while passing through the recess A cylinder whose one end is fixed to the end face so as to inhibit the entry of the aspirated material into the cylinder, the cylinder having, on its side wall, a hole through which the fluid flowing out from the recess flows Prepare.

According to the suction device according to the present invention, it is possible to suction the suctioned object present at a position further away from the negative pressure generation region as compared with the case where the cylinder is not provided.

FIG. 2 is a perspective view of an example of a suction device 10; FIG. 2 is a top view of an example of a suction device 10; FIG. 2 is a side view of an example of a suction device 10; FIG. 2 is a bottom view of an example of a suction device 10; FIG. 3 is a cross-sectional view taken along the line AA of FIG. FIG. 2 is a perspective view of an example of a swirl flow former 1; FIG. 2 is a top view of an example of a swirl flow former 1; FIG. 8 is a cross-sectional view taken along the line BB of FIG. 7; FIG. 9 is a cross-sectional view taken along the line CC of FIG. 8; It is a perspective view which shows an example of the lower surface of the rotational flow formation body 5. FIG. It is a perspective view showing an example of the upper surface of swirling flow formation object 5. FIG. 12 is a cross-sectional view taken along the line DD of FIG. It is a perspective view showing an example of swirl flow formation object 1 with which annular board 6 was attached removably. It is the perspective view seen from the direction different from FIG. It is a perspective view showing an example of swirl flow formation object 1A to which annular board 6A was attached removably. It is the perspective view seen from the direction different from FIG. It is a perspective view showing an example of swirl flow formation object 1 with which annular board 6B was attached removably. It is a perspective view showing an example of swirl flow formation object 1 with which annular board 6C was attached removably. It is a perspective view which shows an example of 4 A of cylinders. It is a perspective view which shows an example of cylinder 4B. It is a perspective view which shows an example of 4 C of cylinders. It is a perspective view which shows an example of cylinder 4D. It is a perspective view showing an example of barrel 4E. It is a perspective view which shows an example of cylinder 4F. It is a side view showing an example of suction device 10A.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
1. Embodiment FIG. 1 is a perspective view of an example of a suction device 10 according to the present embodiment. FIG. 2 is a top view of an example of the suction device 10. FIG. 3 is a side view of an example of the suction device 10. FIG. 4 is a bottom view of an example of the suction device 10. FIG. 5 is a cross-sectional view taken along line AA of FIG. The suction device 10 shown in these figures is a device for sucking, holding, and transporting food such as sweet potato, plum, peach and the like. The suction device 10 is used, for example, attached to the tip of a robot arm. The suction device 10 includes a swirl flow forming body 1, a barbed annular plate 2 screwed to the swirl flow forming body 1 via four spacers 3, and a tube screwed to the barbed ring plate 2. The body 4 is provided. In addition, screwing is an example of a fixing method. Each component will be described below.

FIG. 6 is a perspective view of an example of the swirl flow former 1. FIG. 7 is a top view of an example of the swirl flow former 1. FIG. 8 is a cross-sectional view taken along the line BB in FIG. FIG. 9 is a cross-sectional view taken along line CC in FIG. A swirling flow forming body 1 shown in these figures is a device that forms a swirling flow and sucks a suctioned object by the Bernoulli effect. The swirl flow forming body 1 includes a main body 11, an end surface 12, a recess 13, two jets 14, and an inclined surface 15. The main body 11 has a cylindrical shape and is made of a material such as an aluminum alloy. The end surface 12 is formed flat on one surface of the main body 11 (specifically, the surface facing the object to be suctioned) (hereinafter, referred to as “bottom surface”). The recess 13 is a bottomed hole formed on the end surface 12 and having a cylindrical shape. The recess 13 is formed coaxially with the main body 11. The two spouts 14 are formed on the inner circumferential side surface 111 of the main body 11 facing the recess 13. The two spouts 14 are disposed on the bottom side of the axial center of the inner circumferential side surface 111. Moreover, the two jet outlets 14 are disposed to face each other. Specifically, they are disposed point-symmetrically with respect to the axial center of the central axis of the main body 11 or the recess 13. The fluid supplied to the swirl flow forming body 1 is discharged into the recess 13 through the respective jets 14. Here, the fluid is, for example, a gas such as compressed air or a liquid such as pure water or carbonated water. The inclined surface 15 is formed at the open end of the main body 11.

Further, the swirl flow forming body 1 includes a supply port 16, an annular passage 17, a communication passage 18, and two supply passages 19. The supply port 16 has a circular shape and is formed at the center of the upper surface (that is, the surface opposite to the bottom surface) of the main body 11. The supply port 16 is connected to a fluid supply pump (not shown) via, for example, a tube, and the fluid is supplied into the main body 11 through the supply port 16. The annular passage 17 has a cylindrical shape and is formed inside the main body 11 so as to surround the recess 13. The annular passage 17 is formed coaxially with the recess 13. The annular passage 17 supplies the fluid supplied from the communication passage 18 to the supply passage 19. The communication passage 18 is formed inside the main body 11 and extends linearly in the radial direction of the bottom or top surface of the main body 11. The communication passage 18 communicates with the annular passage 17 at both ends thereof. The communication passage 18 supplies the fluid supplied into the main body 11 through the supply port 16 to the annular passage 17. The two supply paths 19 are formed so as to extend substantially parallel to the end face 12 and tangential to the outer periphery of the recess 13. The two supply channels 19 extend parallel to one another. Each supply passage 19 communicates with the annular passage 17 at one end and communicates with the jet 14 at the other end. Each supply passage 19 forms a swirling flow of fluid in the recess 13. Each supply path 19 is an example of the "fluid flow forming means" according to the present invention.

Next, the barbed annular plate 2 is a member for guiding the fluid flowing out of the swirling flow forming body 1 in the direction away from the position of the aspirated object. The barbed annular plate 2 is made of a material such as an aluminum alloy. The barbed annular plate 2 includes an annular plate 21 and a guide portion 22 cylindrically extending from the outer edge of the annular plate 21. The annular plate 21 has an annular shape, the outer diameter of which is larger than the outer diameter of the end face 12, and the inner diameter of which is smaller than the inner diameter of the end face 12 (in other words, the diameter of the opening of the recess 13). Be done. The annular plate 21 is formed to pass the fluid sucked by the negative pressure generated by the swirl flow former 1. The annular plate 21 is an example of the "plate" according to the present invention. The guide portion 22 has a cylindrical shape and is formed to surround the outer peripheral side surface of the main body 11 (in other words, the outer periphery of the opening of the recess 13) when the barbed annular plate 2 is attached to the swirling flow forming body 1 Ru. The guide portion 22 is formed such that the inner peripheral surface 221 does not contact the outer peripheral side surface of the main body. The axial length of the guide portion 22 is shorter than half the axial length of the main body 11 in the illustrated example, but may be longer than this. The guide portion 22 regulates the flow of the fluid flowing out from the recess 13 of the swirling flow forming body 1 along the end surface 12 and separates the fluid from the position of the suction object (specifically, the position before the start of suction). Guide in the direction. The guide portion 22 particularly regulates the flow of the fluid flowing out from the recess 13 along the end surface 12 in the direction having the radial component. Then, the fluid is guided in the direction including the directional component of the suction direction of the aspirated object. More specifically, the fluid flowing out of the recess 13 is guided upward along the inner circumferential surface 221 of the guide portion 22 in FIG.

Next, in the four spacers 3, a gap (flow path) is formed between the end face 12 of the swirling flow forming body 1 and the annular plate 21 of the barbed annular plate 2 for the fluid flowing out from the recess 13 to flow. Thus, it is a member for holding the annular plate 2 with a bar. These four spacers 3 are an example of the "holding member" according to the present invention. One end of each spacer 3 is fixed to the end face 12 of the main body 11,
The other end side is fixed to one surface of the annular plate 21 (specifically, the surface on the side opposite to the end surface 12). At this time, the spacers 3 are arranged at equal intervals. Each spacer 3 is made of a material such as an aluminum alloy and has a cylindrical shape. The flow path formed by the four spacers 3 is formed parallel to the end face 12 and the annular plate 21, and the fluid flowing out of the recess 13 does not flow out from the opening of the annular plate 21 along this flow path. It flows (that is, flows parallel to the end face 12 and the surface of the annular plate 21) and collides with the inner peripheral surface 221 of the guide portion 22. The height of the spacer 3 (that is, the gap between the end face 12 and the annular plate 21) is set in accordance with the flow rate of the fluid supplied from the fluid supply pump to the suction device 10. For example, the height is set such that the fluid flowing out of the recess 13 passes through the flow path formed by the spacer 3 between the end surface 12 and the annular plate 21 without passing through the opening of the annular plate 21. Be done. At that time, it is preferable that the height of the spacer 3 be as low as possible so that the suction force of the suction device 10 does not drop.

Preferably, the spacer 3 is disposed at a position that does not obstruct the flow path formed between the end face 12 and the annular plate 21 by the member. In other words, it is arranged at a position where the flow path is not formed (or at a position where the flow rate is small compared to other positions). This is to prevent the occurrence of turbulence due to the collision of the fluid flowing out of the recess 13 with the spacer 3. The flow path of the fluid flowing out of the recess 13 is determined by the diameter and depth of the recess 13 and the flow velocity of the fluid. Further, the flow path here is represented by, for example, synthesis of vectors of fluid molecules which are discharged from one jet nozzle 14 and flow out of the recess 13.

Next, the cylindrical body 4 is a bellows-like cylindrical body made of an elastic material such as rubber, and is a member for holding the suctioned object sucked by the swirling flow forming body 1. One end of the cylindrical body 4 is returned to the annular plate 2 with a return so as to block the entry of the aspirated object into the recess 13 while letting the fluid sucked by the negative pressure generated by the swirling flow forming body 1 pass. It is fixed. In other words, it is fixed coaxially with the recess 13. The inner diameter of the constricted portion of the cylindrical body 4 is smaller than the inner diameter of the recess 13 and the maximum diameter of the object to be sucked, and the other end is enlarged toward the object to be sucked. The height of the cylinder 4 is set according to the flow rate of the fluid supplied from the fluid supply pump to the suction device 10 and the type of the aspirated object. The shape of the cylinder 4 is not limited to a cylinder, and may be a square cylinder, an oval cylinder, or the like.

Next, the suction operation of the suction device 10 described above will be described. When fluid is supplied from the fluid supply pump to the supply port 16 of the swirl flow forming body 1, the fluid is discharged from the spout 14 into the recess 13 through the communication passage 18, the annular passage 17 and the supply passage 19. Be done. The fluid discharged into the recess 13 is rectified as a swirling flow in the recess 13 and then flows out from the opening of the recess 13. At that time, for example, when a weir exists as a suction object at a position facing the opening 41 of the cylindrical body 4, the inflow of the external fluid into the recess 13 is restricted, and the centrifugal force of the swirling flow and the entrainment effect The density of fluid molecules per unit volume at the central portion of the swirling flow decreases, and a negative pressure is generated in the recess 13. As a result, the fluid around the suction device 10 starts to flow into the recess 13 through the opening 41 of the cylinder 4 and the weir is pressed by the surrounding fluid and drawn to the suction device 10 side. For example, the tip of the scissors drawn into the suction device 10 indents into the opening 41 of the cylinder 4 and is positioned. On the other hand, the main fluid that has flowed out from the opening of the recess 13 does not pass through the opening of the barbed annular plate 2 but passes through the flow path formed between the barbed annular plate 2 and the end face 12 to form a suction device. Spill out of ten.

According to the suction device 10 described above, the inflow of the surrounding fluid is limited by the cylindrical body 4, so that it is possible to suction the suctioned object present at a position away from the negative pressure generation region. In addition, since the cylindrical body 4 has an expandable bellows shape, the cylindrical body 4 has the shape of the object to be sucked even if misalignment occurs when the suction device 10 sucks the target to be suctioned. By combining and deforming, the aspirated object can be stably sucked and held. Moreover, since the cylindrical body 4 is bellows-like, damage to the to-be-sucked thing which arises when a to-be-sucked thing contacts the cylindrical body 4 can be suppressed. In addition, since the cylindrical body 4 has a bellows shape, it is easy to secure the vertical clearance between the suction device 10 and the suction target. In other words, even if each of the objects to be sucked has a variation in height, the stretchability of the cylindrical body 4 absorbs the variation.

Further, according to the suction device 10 described above, the main fluid flowing out of the recess 13 flows out of the opening 41 of the cylinder 4 because it flows out of the suction device 10 without passing through the opening 41 of the cylinder 4 The phenomenon in which the fluid collides with the object to be aspirated and the object to be aspirated flaps or rotates is suppressed. Further, the fluid flowing out of the swirling flow forming body 1 can be guided in the direction away from the position of the suction target.

Further, according to the suction device 10 described above, since the swirling flow is formed to suction the suctioned object by the Bernoulli effect, the opening 41 of the cylindrical body 4 is a suctioned object as compared with the case of vacuum suction. The object to be suctioned can be held by suction even if it is not completely blocked (that is, even if a vacuum state is not formed). Further, all the suctioned fluid is discharged to the outside of the suction device 10 and does not enter the recess 13 and the spout 14, so that the fluid supply path is prevented from being contaminated by the aspirated material.

2. Modifications The above embodiment may be modified as follows. The following modifications may be combined with each other.

2-1. Modification 1
The shape of the main body 11 and the recess 13 of the swirling flow forming body 1 according to the above embodiment is not limited to a cylinder, and may be, for example, a prism or an elliptic cylinder. In addition, on the inner circumferential side surface 111 of the main body 11 facing the recess 13, a taper may be formed which is expanded in diameter toward the opening. In addition, in the recess 13, a protrusion that forms a fluid flow path may be formed between the outer peripheral side surface and the inner peripheral side surface 111 of the main body 11 (for example, FIG. 13 of JP-A-2016-159405). reference). Moreover, the number of the jet nozzle 14 and the supply path 19 provided in the swirl flow-forming body 1 is not limited to two and may be one or three or more. Further, the arrangement of the jet nozzle 14 is not limited to the bottom side of the inner circumferential side surface 111 from the axial center, and may be the axial center or the end face 12 side. In addition, the formation of the inclined surface 15 may be omitted. Further, the shape of the supply port 16 is not limited to a circle, and may be, for example, a rectangle or an ellipse. Moreover, the supply port 16 may be formed not on the upper surface of the main body 11 but on the side surface. Also, the two supply paths 19 may not necessarily extend parallel to each other.

Further, in the suction device 10 according to the above embodiment, instead of the swirl flow forming body 1, a radial flow forming body may be adopted which is a device that forms a radial flow and sucks an object to be drawn by the Bernoulli effect. (For example, refer to FIG. 12 of JP-A-2016-159405). The radial flow forming body generates negative pressure by discharging a fluid into the concave portion by forming a columnar flow, a flat end face formed in the main body, a recess formed in the end face, and the recess. And radiation flow forming means for aspirating the aspirated object. Here, this radial flow forming means is an example of the "fluid flow forming means" according to the present invention.

Further, in the suction device 10 according to the above embodiment, a non-contact chuck using an electric fan, which is a device which forms a swirling flow and sucks a suctioned object by the Bernoulli effect instead of the swirling flow forming body 1 You may employ | adopt (for example, refer Unexamined-Japanese-Patent No. 2011-138948). This non-contact chuck generates negative pressure by forming a swirling flow of fluid in the recess, and the concave end formed on the end surface, the end face having a columnar shape, the flat body formed on the main body, and the suction target And a swirl flow forming means for suctioning an object. Here, the swirl flow forming means is an example of the "fluid flow forming means" according to the present invention.

Further, in the suction device 10 according to the above embodiment, the swirl flow-forming body 5 described below may be employed instead of the swirl flow-forming body 1.

FIG. 10 is a perspective view showing an example of the lower surface of the swirling flow forming body 5. FIG. 11 is a perspective view showing an example of the upper surface of the swirling flow forming body 5. FIG. 12 is a cross-sectional view taken along line DD of FIG. The swirling flow forming body 5 shown in these figures is a device that forms a swirling flow and sucks a suctioned object by the Bernoulli effect. The swirl flow forming body 5 is formed on a main body 51 which is a substantially annular pillar having a circular through hole 52 (an example of a "recess" according to the present invention) in the center, and a lower surface of the main body 51 A first flat end face 53 facing the object, a second flat end face 54 formed on the upper surface of the main body 51, and two jets formed on the inner circumferential surface 511 of the main body 51 facing the through hole 52. The outlet 55, the two supply ports 56 formed on the outer peripheral surface 512 of the main body 51, and the two linear fluid passages 57 communicating the jet port 55 and the supply port 56 (in accordance with the present invention Means), a substantially disk-shaped cover 58, and four spacers 59 which are holding members for fixedly holding the cover 58 so as to face the second end face 54 substantially in parallel.

The outer periphery of a cross section substantially perpendicular to the central axis of the main body 51 has a circular shape in which a part of the opposing outer periphery is cut in a straight line. The inner circumferential surface 511 of the main body 51 is formed to guide the fluid ejected from the ejection port 55 in a direction away from the object to be sucked and to discharge the fluid from the through hole 52. More specifically, it is formed to be guided to the opening of the second end face 54 and discharged from the through hole 52. More specifically, the area of a cross section substantially perpendicular to the central axis of the main body 51 of the inner circumferential surface 511 is formed so as to gradually increase in diameter from the opening of the first end surface 53 to the opening of the second end surface 54. That is, it is formed in a tapered shape.

The through hole 52 is formed to extend linearly in the central axis direction of the main body 51. The through hole 52 opens at the first end face 53 and opens at the second end face 54.

The first end face 53 and the second end face 54 are formed substantially perpendicular to the central axis of the main body 51.

The two jet outlets 55 are formed at the center of the inner circumferential surface 511 in the central axis direction of the main body 51. Further, they are formed so as to be point symmetrical with respect to the central axis of the main body 51. The two supply ports 56 are formed in the center axis direction center of the main body 51 on the outer peripheral surface 512. Further, they are formed so as to be point symmetrical with respect to the central axis of the main body 51. Each is also connected to a fluid supply pump (not shown), for example via a tube.

The two fluid passages 57 are formed to extend tangentially to the inner periphery of the main body 51. In addition, they are formed to extend substantially parallel to each other. Further, it is formed to extend substantially perpendicularly to the central axis of the main body 51. In addition, the diameter is reduced in front of the jet nozzle 55. The two fluid passages 57 eject fluid from the orifice 55 into the through hole 52. The fluid jetted into the through hole 52 flows along the inner peripheral surface of the main body 51 by the Coanda effect, and forms a swirl flow in the through hole 52. Most of the fluid molecules constituting the formed swirl flow out from the through hole 52 along the second end face 54 at an angle of about 45 degrees with respect to the direction in which the fluid passage 57 to which the fluid molecules are supplied extends. Do. The swirling flow formed in the through hole 52 generates negative pressure in the central portion of the through hole 52 by entrainment of stationary fluid in the central portion of the through hole 52. The negative pressure causes the plate member facing the first end surface 53 to be sucked. The angle at which fluid molecules flow out of the through hole 52 along the second end face 54 is determined by the diameter and depth of the through hole 52 and the flow velocity of the fluid, and the above-mentioned angle of about 45 degrees is merely an example.

The cover 58 has the same shape as the outer periphery of a cross section substantially perpendicular to the central axis of the main body 51. The cover 58 covers the through hole 52 and restricts the inflow of external fluid (specifically, gas or liquid) into the through hole 52.

Each of the four spacers 59 has a cylindrical shape. Four spacers 59 are attached at equal intervals along the outer periphery of the second end face 54. At that time, it is attached so as to extend substantially perpendicularly from the second end face 54 toward the cover 58, and connects the main body 51 and the cover 58. Each spacer 59 is fixed to the main body 51 and the cover 58, for example, by screwing. The four spacers 59 form a flow path between the second end face 54 and the cover 58 for the fluid flowing out of the through hole 52 to flow. The fluid having passed through the flow channel flows out of the swirl flow forming body 5. The heights of the four spacers 59 (in other words, the gap between the second end face 54 and the cover 58) are set in accordance with the flow rate of the fluid supplied from the fluid supply pump to the swirl flow forming body 5. It is desirable that the four spacers 59 be attached at the second end face 54 in a position that does not obstruct the flow path of the fluid flowing out of the through hole 52. This is to prevent the fluid flowing out of the through hole 52 from colliding with the spacer 59 and generating turbulence. The flow path of the fluid flowing out of the through hole 52 is determined by the diameter and depth of the through hole 52 and the flow velocity of the fluid, but the four spacers 59 make an angle of approximately 45 degrees with the direction in which the fluid passage 57 extends. It is desirable not to be attached on the line.

When fluid is supplied to the swirl flow forming body 5 described above through the tube, the supplied fluid is jetted from the spout 55 into the through hole 52 through the supply port 56 and the fluid passage 57. The fluid ejected into the through hole 52 is rectified as a swirl flow in the through hole 52. Then, most of the fluid molecules constituting the swirling flow are guided by the inner circumferential surface 511 and flow out from the through hole 52 along the second end face 54. At this time, in the case where an object to be sucked exists opposite to the first end face 53, in the state where the inflow of the external fluid (specifically, gas or liquid) into the through hole 52 is restricted, Centrifugal force and entrainment reduce the density of fluid molecules per unit volume at the center of the swirling flow. That is, negative pressure is generated at the center of the swirling flow. As a result, the aspirated object is pressed by the surrounding fluid and drawn to the first end surface 53 side.

Thus, in the swirl flow forming body 5, most of the fluid molecules flowing out of the through hole 52 flow out along the second end surface 54, so the amount of the fluid molecules flowing out along the first end surface 53 temporarily exists It will be too small. Therefore, the phenomenon in which the fluid flowing out along the first end face 53 collides with the aspirated object and the aspirated object vibrates or rotates is compared with the case where the fluid is not allowed to flow out from the second end face 54 side. Be suppressed. As a result, more stable suction, holding and transport of the aspirated object can be realized. In addition, damage to the suction target due to vibration (flapping) is suppressed. That is, in the swirling flow forming body 5, only the suction force of the swirling flow formed in the through hole 52 can be separated and used.

2-2. Modification 2
The shape of the annular plate 21 of the barbed annular plate 2 according to the above embodiment is not limited to an annular ring, and may be, for example, a square ring or an elliptical ring. Further, the outer diameter of the annular plate 21 may not necessarily be larger than the outer diameter of the end face 12, and the inner diameter of the annular plate 21 may not necessarily be smaller than the inner diameter of the end face 12. Alternatively, a mesh or a porous material (porous material) may be attached to the opening of the annular plate 21 (see, for example, FIG. 6 of JP-A-2016-159405). In addition, in the barbed annular plate 2, the guide portion 22 may be omitted.

The number of the spacers 3 according to the above embodiment is not limited to four, and may be three or less or five or more. Further, the arrangement of the spacer 3 is not limited to the outer edge of the end face 12 and may be the center in the radial direction or the inner edge. Also, the spacers 3 may not necessarily be formed at equal intervals. Moreover, the cross-sectional shape of the spacer 3 is not limited to a circle, and may be, for example, a rectangle or an ellipse.

Further, in the suction device 10 according to the above-described embodiment, the annular plate 6 described below may be adopted instead of the annular plate 2 and the spacer 3 with the return.

FIG. 13 is a perspective view showing an example of the swirl flow-forming body 1 to which the annular plate 6 is detachably attached. FIG. 14 is a perspective view seen from a direction different from FIG. The annular plate 6 shown in these figures is provided with an annular plate main body 61 (an example of the "plate" according to the present invention) and four holding members 62, and each holding member 62 is spread outward to hold the holding members The swirling flow forming body 1 is attached to the swirling flow forming body 1 by being sandwiched between the two 62. The annular plate body 61 has an annular shape, and allows the fluid sucked by the negative pressure generated by the swirl flow former 1 to pass therethrough. One end side of the four holding members 62 is detachably fixed to the main body 11, and the other end side holds the annular plate main body 61 so as to face the end face 12. The four holding members 62 hold the annular plate main body 61 such that a flow path for the fluid flowing out of the recess 13 to flow is formed between the end face 12 and the annular plate main body 61. Further, the annular plate main body 61 and the four holding members 62 are integrally formed.

The annular plate main body 61 is made of a plate spring material and has an annular shape. The annular plate main body 61 is formed such that its outer diameter is substantially the same as the outer diameter of the end face 12 and its inner diameter is substantially the same as the inner diameter of the end face 12 (in other words, the diameter of the opening of the recess 13). The annular plate body 61 is provided with four spacers 611. Each of the four spacers 611 is provided to form a gap between the end face 12 and the annular plate main body 61, and sandwiches (holds) the main body 11 with the claws 621 of the holding member 62 described later. In addition, the flow path for the fluid which flows out of crevice 13 to flow is formed. Four spacers 611 are formed on the outer edge of the annular plate body 61 at equal intervals. The four spacers 611 are formed to be circular and have substantially the same height by embossing. The heights of the four spacers 611 define the gap between the end face 12 and the annular plate body 61, and the heights are set according to the flow rate of the fluid supplied from the fluid supply pump to the suction device 10. Be done. For example, the height is such that the fluid flowing out of the recess 13 passes through the flow path formed between the end face 12 and the annular plate main body 61 by the spacer 611 without passing through the opening of the annular plate main body 61 Set to At that time, it is preferable that the height of the spacer 611 be as low as possible so that the suction force of the suction device 10 does not drop.

The four holding members 62 are each formed by bending an elongated leaf spring material extending at equal intervals from the peripheral edge of the annular plate main body 61 substantially perpendicularly to the annular plate main body 61. The leaf spring material is formed to be longer than the axial length of the main body 11. When bending the leaf spring material, when the annular plate 6 is attached to the swirl flow forming body 1, the side surface of the main body 11 of the swirl flow forming body 1 is pressed by the restoring force (elastic force) of each holding member 62 Thus, the main body 11 is adjusted so as to be held between the holding members 62. The end of each of the four holding members 62 is formed with a claw portion 621. The claws 621 are hooked to the outer edge of the upper surface of the main body 11 (in other words, hooked and fixed). The claw portion 621 is formed by bending the end portion of the plate spring material forming the holding member 62 inward substantially perpendicularly to the direction in which the plate spring material extends. At that time, when the annular plate 6 is attached to the swirling flow forming body 1, the upper surface and the bottom surface of the main body 11 of the swirling flow forming body 1 have a restoring force (elastic force) Thus, the main body 11 is adjusted so as to be held between the claws 621 and the spacer 611. When the annular plate 6 is attached to the swirling flow forming body 1, the claw portion 621 is subjected to V-bending processing so as to be convex with respect to the upper surface.

When the annular plate 6 described above is adopted, the annular plate 6 is detachably attached to the swirl flow forming body 1 without using a tool, so that the annular plate 6 is sandwiched between the swirl flow forming body 1 and the annular plate 6 It is easy to remove dust and to clean the annular plate 6 alone.

Hereinafter, the modification of annular board 6 is explained.
FIG. 15 is a perspective view showing an example of a swirling flow-forming body 1A to which an annular plate 6A which is a modification of the annular plate 6 is detachably attached. FIG. 16 is a perspective view seen from a direction different from FIG. The annular plate 6A shown in these figures is different from the annular plate 6 in that the support member is fixed to the side surface of the main body of the swirl flow forming body 1A and in that the spacer is not provided. Hereinafter, these differences will be described.

The swirl flow former 1A further includes four grooves 112 in comparison with the swirl flow former 1. The four grooves 112 are formed at equal intervals on the side surface of the main body 11. The four grooves 112 are formed on the upper surface side of the axial center of the side surface of the main body 11. The four groove portions 112 are formed such that the circumferential length thereof is shorter than 1⁄4 of the arc of the outer periphery of the end face 12. Each of the four grooves 112 is formed of three V-shaped grooves (in other words, slits) extending in the axial direction and extending in the circumferential direction. In each of the four groove portions 112, a claw portion 621A of an annular plate 6A described later is engaged.

The annular plate 6A includes an annular plate main body 61 and four holding members 62A. The annular plate main body 61 is the same as the annular plate 6 described above, and thus the description thereof is omitted. One end side of the four holding members 62A is detachably fixed to the main body 11, and the other end side supports the annular plate main body 61 so as to face the end face 12. The four holding members 62A form a gap between the end face 12 and the annular plate main body 61, and hold the annular plate main body 61 so as to form a flow path for the fluid flowing out of the recess 13. Further, the annular plate main body 61 and the four holding members 62A are integrally formed.

The four holding members 62 </ b> A are each formed by bending an elongated leaf spring material extending at equal intervals from the peripheral edge of the annular plate main body 61 substantially perpendicularly to the annular plate main body 61. The leaf spring material is formed to be longer than a half length of the main body 11 in the axial direction and shorter than a total length of the main body 11 in the axial direction. When bending the leaf spring material, when the annular plate 6A is attached to the swirl flow forming body 1A, the side surface of the main body 11 of the swirl flow forming body 1A is pressed by the restoring force (elastic force) of each holding member 62A. Then, the main body 11 is adjusted so as to be held between the holding members 62A. The claws 621A are formed at the ends of the four holding members 62A, respectively. The claws 621A are engaged with the grooves 112 of the main body 11 by the restoring force (elastic force) of the holding member 62A (in other words, they are engaged and fixed). As a result, the vertical position of the annular plate 6A with respect to the swirling flow forming body 1A is fixed. The claw portion 621A is formed by performing V-bending processing so as to be convex with respect to the side surface of the main body 11 when the annular plate 6A is attached to the swirl flow forming body 1A at the end of the plate spring material forming the holding member 62A. Be done.

When the annular plate 6A described above is employed, in addition to the advantages obtained by the annular plate 6 described above, there is an advantage that it is not necessary to form a spacer. This is because the claw portion 621A of the annular plate 6A is engaged with the groove portion 112 of the swirling flow forming body 1A, and the vertical position of the annular plate 6A with respect to the swirling flow forming body 1A is fixed. This is because a gap is held between the plate bodies 61. Further, by changing the groove of the main body 11 to which the annular plate 6A is locked, there is an advantage that the gap between the end face 12 and the annular plate main body 61 can be adjusted.

Next, FIG. 17 is a perspective view showing an example of the swirling flow forming body 1 to which an annular plate 6B which is another modification of the annular plate 6 is detachably attached. The annular plate 6B shown in the figure is different from the above-described annular plate 6 in that it has a guide portion 612. The guide portion 612 has a cylindrical shape and is formed to surround the outer peripheral side surface of the main body 11 (in other words, the outer periphery of the opening of the recess 13) when the annular plate 6B is attached to the swirling flow forming body 1 . The guide portion 612 is formed such that its inner peripheral surface does not contact the outer peripheral side surface of the main body. The axial length of the guide portion 612 is shorter than half the axial length of the main body 11 in the illustrated example, but may be longer than this. The guiding portion 612 restricts the flow of fluid flowing out from the recess 13 of the swirling flow forming body 1 along the end face 12 to move the fluid away from the position of the suction object (more precisely, the position before the start of suction). Guide in the direction. The guide portion 612 particularly regulates the flow of the fluid flowing out from the recess 13 along the end surface 12 in the direction having the radial component. Then, the fluid is guided in the direction including the directional component of the suction direction of the aspirated object. More specifically, the fluid flowing out of the recess 13 is guided upward along the inner circumferential surface of the guide portion 612 in the figure.

Next, FIG. 18 is a perspective view showing an example of the swirling flow forming body 1 to which an annular plate 6C which is another modification of the annular plate 6 is detachably attached. In the annular plate 6C shown in the same figure, the claws 621B of each holding member 62B are fixed to the upper surface of the main body 11 of the swirling flow forming body 1 by screwing, and the annular plate main body 61A has a tool against the swirling flow forming body 1 The annular plate 6 is different from the annular plate 6 in that the annular plate main body 61A is not provided with a spacer so that the annular plate main body 61A is detachably attached. The claw portion 621B is different from the claw portion 621 of the annular plate 6 only in that it is formed flat. The claw portion 621B is screwed to the upper surface of the main body 11, whereby the vertical position of the annular plate 6C with respect to the swirl flow forming body 1 is fixed, and as a result, a gap is maintained between the end face 12 and the annular plate main body 61A. Be done. Therefore, no spacer is required in the annular plate 6C. Note that, instead of screwing, the claws 621B may be fixed to the upper surface of the main body 11 of the swirling flow forming body 1 by a magnetic force or a frictional force.

2-3. Modification 3
19 to 21 are views showing modifications of the cylindrical body 4 according to the above-described embodiment. The cylindrical body 4A shown in FIG. 19 differs from the cylindrical body 4 in that the inner diameter of its constriction portion is smaller. The inner diameter of the constricted portion of the cylindrical body 4A is equal to or less than 1/2 of the inner diameter of the recess 13 of the swirling flow forming body 1. Therefore, by using the cylindrical body 4A, it is possible to suction and hold a smaller suction target. The cylindrical body 4B shown in FIG. 20 is different from the cylindrical body 4 in that it has a plurality of notches at its end on the side holding the object to be suctioned. More specifically, the end of the cylindrical body 4B has a saw-tooth shape, and the diameter is increased toward the object to be sucked. The shape of the notch may be a semicircle, a semielliptical circle, a rectangle, or the like. The three cylindrical bodies 4C shown in FIG. 21 are different from the cylindrical body 4 in that the inner diameter of the constriction portion is smaller, and a cylindrical body group is formed by the respective cylindrical bodies. The inner diameter of the constricted portion of each cylindrical body 4C is half or less of the inner diameter of the recess 13 of the swirling flow forming body 1, and each end is disposed to face the recess 13. If the cylindrical body 4C is used, a plurality of objects to be sucked can be suctioned and held at one time. The number of cylindrical bodies 4C may be two or four or more.

22 to 24 are views showing another modified example of the cylindrical body 4 according to the above embodiment. The cylindrical body 4D shown in FIG. 22 is different from the cylindrical body 4 in that it does not have a bellows shape. The end of the cylindrical body 4D on the side holding the aspirated object is expanded in diameter toward the aspirated object. The cylindrical body 4E shown in FIG. 23 does not have a bellows shape, and the opening area of the end on the side holding the object to be suctioned is the opening area on the end on the side fixed to the barbed annular plate 2 (and the recess It differs from the cylindrical body 4 in that it is smaller than the opening area 13). More specifically, while the diameter of the cylindrical body 4E is gradually reduced from the end fixed to the looped annular plate 2 to the center in the axial direction, the end on the side holding the object to be suctioned is The diameter is expanded toward the aspirant. Note that, as a modification, the diameter may be gradually reduced toward the end on the side of holding the suction target. The cylindrical body 4F shown in FIG. 24 is different from the cylindrical body 4 in that it does not have a bellows shape and has a plurality of notches at the end portion on the side holding the object to be suctioned. More specifically, the end of the cylindrical body 4F has a plurality of semi-elliptical notches, and the diameter thereof is increased toward the object to be suctioned. The shape of the notch may be semicircular or rectangular.

The cylindrical body 4 according to the above embodiment or the cylindrical bodies 4A to 4C shown in FIGS. 19 to 21 are fixed to the barbed annular plate 2 as the cylindrical body 4E shown in FIG. The diameter may be gradually reduced from the side end to the axial center. Alternatively, the diameter may be gradually reduced to the end on the side to hold the aspirated object. Further, each of the three cylindrical bodies 4C shown in FIG. 21 may not have a bellows shape like the cylindrical body 4D shown in FIG.

2-4. Modification 4
FIG. 25 is a side view showing an example of a suction device 10A which is a modification of the suction device 10. As shown in FIG. The suction device 10A shown in the figure is different from the suction device 10 in that the cylindrical body 4G is screwed to the swirling flow forming body 1 without the barbed annular plate 2 being provided. In addition, screwing is an example of a fixing method.

In the cylindrical body 4G shown in the same figure, one end is fixed to the end face 12 of the swirling flow forming body 1, and a plurality of holes 42 for flowing the fluid flowing out from the recess 13 of the swirling flow forming body 1 It differs from the cylindrical body 4 which concerns on said embodiment in the point to equip. The plurality of holes 42 are formed at equal intervals so that the fluid flowing out of the swirl flow former 1 can flow out along the end face 12.

According to the suction device 10A, the main fluid flowing out of the swirl flow forming body 1 flows out of the suction device 10A through the hole 42 without passing through the opening of the cylinder 4G. The fluid flowing out of the opening of the nozzle collides with the object to be sucked, and the phenomenon that the object to be sucked is fluttered or rotated is suppressed.

2-5. Modification 5
The

suction device

10 or 10A according to the above-described embodiment is not limited to food, and may be used to suction and hold a plate-like or sheet-like member such as a semiconductor wafer or a glass substrate, and to convey it. At that time, depending on the size of the object to be sucked, a plurality of

suction devices

10 or 10A may be attached to a plate-like frame and used (see, for example, FIGS. 10 and 11 of JP-A-2016-159405).

DESCRIPTION OF SYMBOLS 1 ... Swirling flow formation body, 2 ... Retracted annular plate, 3 ... Spacer, 4, 4A, 4B, 4C, 4D, 4E, 4F, 4G ... Cylinder, 5 ... Swirling flow formation body, 6, 6A ...

Annular plate

10, 10A: suction device, 11: main body, 12: end face, 13: recess, 14: spout, 15: inclined surface, 16: supply port, 17: annular passage, 18: communication passage, 19: supply passage, DESCRIPTION OF SYMBOLS 21 ... Ring plate, 22 ... Guide part, 41 ... Opening, 42 ... Hole part, 51 ... Main body, 52 ... Through-hole, 53 ... 1st end surface, 54 ... 2nd end surface, 55 ... Spout, 56 ... Supply port, 57: fluid passage, 58: cover, 59: spacer, 61, 61A: annular plate main body, 62, 62A, 62B: holding member, 111: inner circumferential side, 112: groove portion, 221, 511: inner circumferential surface, 512: Outer circumferential surface, 611, spacer, 612, guide portion, 621, 621A, 621B, claw portion

Claims

With a columnar body,
A flat end face formed on the body;
A recess formed on the end face;
A fluid flow forming means for creating a negative pressure by forming a swirling flow of fluid in the recess or discharging the fluid in the recess to form a radial flow, and suctioning an object to be suctioned;
A plate formed to pass fluid sucked by the negative pressure;
One end side is fixed to the main body, and the other end side is a holding member for holding the plate body so as to face the end face, and the fluid flowing out from the recess flows between the end face and the plate body A holding member for holding the plate so as to form a gap for
And at least one cylinder whose one end is fixed to the plate so as to block the entry of the aspirated substance into the recess while passing the fluid sucked by the negative pressure. Aspiration device.
The suction device according to claim 1, wherein the one or more cylinders have a bellows shape.
The suction device according to claim 1, wherein the one or more cylinders are a plurality of cylinders.
The suction device according to any one of claims 1 to 3, wherein the other end of the one or more cylinders has a plurality of notches.
The suction device according to any one of claims 1 to 4, wherein an opening area of the other end of the one or more cylinders is smaller than an opening area of the recess.
With a columnar body,
A flat end face formed on the body;
A recess formed on the end face;
A fluid flow forming means for creating a negative pressure by forming a swirling flow of fluid in the recess or discharging the fluid in the recess to form a radial flow, and suctioning an object to be suctioned;
A cylinder whose one end is fixed to the end face so as to block the entry of the aspirated object into the recess while passing the fluid sucked by the negative pressure, the fluid flowing out of the recess And a cylinder having a hole on the side wall thereof for the flow of air.