TW201919972A - Suction device - Google Patents

Abstract

A suction device is provided which can suction a material to be sucked that is located in a position away from a negative pressure generating region. This suction device is provided with: a columnar main body; a flat end surface which is formed on the main body; a recess which is formed in the end surface; a swirling flow forming means which forms a swirling flow in a fluid in the recess; a plate body which is formed so as to allow passage of the fluid sucked by negative pressure; a holding member which is fixed on one side to the main body and on the other side holds the plate body opposite of the end surface, and which holds the plate body such that a gap for enabling flow of the fluid that flows out of the recess is formed between the end surface and the plate body; and one or more tubular bodies which, while allowing passage of the fluid sucked by negative pressure, are fixed at the one end to the plate body so as to inhibit the influx of the sucked material into the recess.

Description

Suction device

The present invention relates to a device for attracting materials using the Bernoulli effect.

Conventionally, a device for attracting a plate-shaped member such as a semiconductor wafer, a glass substrate, or the like by the Bernoulli effect has been known. For example, Patent Document 1 describes a suction device including a vortex flow forming body, and a vortex flow is formed in a recessed portion thereof to attract an object to be attracted by generation of a negative pressure. This suction device includes a guide portion that restricts the flow of the fluid flowing out of the recessed portion provided in the vortex flow forming body, and guides the fluid in a direction away from the suction object, and can stably suction the suction object.
[Prior technical literature]
[Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 2017-35350

[Problems to be Solved by the Invention]

The present invention has been developed in view of the above-mentioned technology, and an object thereof is to provide a suction device capable of attracting an object to be attracted existing at a position distant from a negative pressure generating region.

[Means for solving problems]

In order to solve the above-mentioned problems, a suction device according to the present invention includes: a columnar body; a flat end surface formed on the body; a recessed portion formed on the end surface; a vortex of fluid or a flow toward the recessed portion formed in the recessed portion; The fluid discharged from the inside forms a radiant flow to generate a negative pressure to attract a fluid flow forming means; a plate body formed in a way that the fluid attracted by the negative pressure can pass through; the one end side is fixed to the main body, and the other end side is held A holding member that opposes the plate body and the end surface, and holds the plate body between the end surface and the plate body so as to form a holding member for a gap for fluid flow flowing from the recessed portion; and The pressure-sucked fluid passes through, and prevents the attracted object from entering the recessed portion, and fixes one end thereof to one or more cylinders of the plate.

In a preferred aspect, the one or more cylinders may have a corrugated shape.

In other aspects, the one or more cylinders may be a plurality of cylinders.

In other aspects, the other ends of the one or more cylinders may have a plurality of notches.

In another aspect, the opening area of the other end of the one or more cylinders may be smaller than the opening area of the concave portion.

In addition, another suction device according to the present invention includes: a columnar body; a flat end surface formed on the main body; a recessed portion formed on the end surface; a vortex of a fluid formed in the recessed portion or ejected into the recessed portion; The fluid forms a radiant flow, thereby generating a negative pressure to attract a fluid flow forming means for attracting an object to be attracted; by one side, the fluid attracted by the negative pressure is passed, and the object to be attracted is prevented from entering the recess, and one end of the object is fixed to the end A cylindrical body having a hole portion on a side wall thereof for flowing a fluid from the recessed portion.

[Inventive effect]

According to the suction device according to the present invention, compared with a case without a cylindrical body, it is possible to suck an object to be attracted existing at a position far from the negative pressure generating area.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

1. Embodiment FIG. 1 is a perspective view of an example of a suction device 10 according to the present invention. Fig. 2 is a top view of an example of the suction device 10. FIG. 3 is a side view of an example of the suction device 10. FIG. 4 is a bottom view of an example of the suction device 10. Fig. 5 is a sectional view taken along the line AA in Fig. 2. The suction device 10 shown in these drawings is a device for suctioning and holding foods such as raspberries, plums, and peaches for transportation. This suction device 10 is used by being attached to the tip of a robot arm, for example. The suction device 10 includes a vortex flow forming body 1, a flanged ring plate 2 screwed to the vortex flow forming body 1 through four spacers 3, and a cylinder screwed to the ringed plate 2 with a flange. 4. In addition, screwing is an example of a fixing method. Hereinafter, each constituent element will be described.

FIG. 6 is a perspective view of an example of the vortex flow forming body 1. FIG. 7 is a top view of an example of the vortex flow forming body 1. Fig. 8 is a sectional view taken along line B-B in Fig. 7. Fig. 9 is a sectional view taken along the line C-C in Fig. 8. The vortex flow forming body 1 shown in these figures is a device that forms a vortex and uses the Bernoulli effect to attract an object to be attracted. The vortex flow forming body 1 includes a main body 11, an end surface 12, a recessed portion 13, two discharge ports 14, and an inclined surface 15. The main body 11 is made of a material having a cylindrical shape and an aluminum alloy. The end surface 12 is a surface in which one of the main bodies 11 (specifically, a surface adjacent to the attracted object) (hereinafter, referred to as a “bottom surface”) is formed in a flat shape. The recessed portion 13 is a bottomed hole formed in the end surface 12 and having a cylindrical shape. The recessed portion 13 is formed coaxially with the main body 11. The two ejection outlets 14 are formed on the inner peripheral side surface 111 of the main body 11 facing the recessed portion 13. The two ejection outlets 14 are disposed on the bottom side from the axial center of the inner peripheral surface side surface 111. The two ejection ports 14 are arranged to face each other. Specifically, the center of the central axis of the main body 11 or the recessed portion 13 is symmetrically arranged at a point as the center. The fluid supplied to the vortex flow forming body 1 is discharged into the recessed portion 13 through each of the ejection ports 14. Here, the fluid is a gas such as compressed air or a liquid such as pure water or carbonated water. The inclined surface 15 is formed at the open end of the main body 11.

The vortex flow forming body 1 includes a supply port 16, an annular passage 17, a communication path 18, and two supply paths 19. The supply port 16 has a circular shape, and is formed in the center of the upper surface (that is, the surface on the opposite side to the bottom surface) of the main body 11. The supply port 16 is connected to a fluid supply pump (not shown) through a pipe, for example, and supplies fluid into the main body 11 through the supply port 16. The annular passage 17 has a cylindrical shape and is formed inside the main body 11 so as to surround the concave portion 13. The annular passage 17 is formed coaxially with the recessed portion 13. The annular passage 17 supplies a fluid supplied from the communication passage 18 to the supply passage 19. The communication path 18 is formed inside the main body 11 and extends linearly in a radial direction toward the bottom surface or the upper surface of the main body 11. The communication portion 18 communicates with the annular passage 17 at both end portions thereof. The communication portion 18 supplies the fluid in the supply main body 11 to the annular passage 17 through the supply port 16. The two supply paths 19 are formed substantially parallel to the end surface 12 and extend in a tangential direction with respect to the periphery of the recess 13 . The two supply paths 19 extend parallel to each other. Each supply path 19 communicates one end with the annular passage 17 and communicates the other end with the discharge port 14. Each supply path 19 is a vortex flow of a fluid in the recess 13. Each supply path 19 is an example of the "fluid flow formation means" related to the present invention.

Next, the flanged annular plate 2 is a member for guiding the fluid flowing out of the vortex flow forming body 1 in a direction away from the position of the object to be attracted. The flanged annular plate 2 is made of a material such as aluminum alloy. This flanged annular plate 2 includes an annular plate 21 and a guide portion 22 extending in a cylindrical shape from the outer edge of the annular plate 21. The annular plate 21 has a circular ring shape, and its outer diameter is larger than the outer diameter of the end surface 12, and its inner diameter is formed smaller than the inner diameter of the end surface 12 (in other words, the diameter of the opening of the recess 13). The annular plate 21 forms a fluid that can be attracted by the negative pressure generated by the vortex flow forming body 1. This annular plate 21 is an example of a "plate body" related to the present invention. The guide portion 22 is formed in a cylindrical shape, and surrounds the peripheral side surface of the main body 11 (in other words, the periphery of the opening of the recessed portion 13) when the flanged annular plate 2 is mounted on the vortex flow forming body 1. The guide portion 22 is formed such that its inner peripheral surface 221 does not contact the peripheral side surface of the main body. Although the length of the guide portion 22 in the axial direction is shorter than half the length in the axial direction of the main body 11 in the illustrated example, it may be longer. The guide portion 22 restricts the flow of the fluid flowing out of the recessed portion 13 of the vortex flow forming body 1 along the end surface 12 and guides the fluid away from the position of the object to be attracted (correctly the position before the start of suction). In particular, the guide portion 22 can restrict the flow of the fluid having a radial component flowing from the recessed portion 13 along the end surface 12. Then, the fluid is guided in a direction including a directional component of the suction direction of the attracted object. More specifically, the fluid flowing from the recessed portion 13 is guided upward along the inner peripheral surface 221 of the guide portion 22 in FIG. 5.

Next, the four spacers 3 are formed between the end surface 12 of the vortex flow forming body 1 and the annular plate 21 with the flanged annular plate 2, and a gap (flow path) for fluid flow from the recessed portion 13 is formed. A member for holding the flanged annular plate 2. The four spacers 3 are examples of the "holding member" related to the present invention. Each of the spacers 3 is an end surface 12 of which one end side is fixed to the main body 11 and the other end side is fixed to one surface of the annular plate 21 (specifically, a surface opposite to the end surface 12). At this time, the spacers 3 are arranged at equal intervals. Each spacer 3 is made of a material such as aluminum alloy and has a cylindrical shape. The flow path formed by the four spacers 3 is formed parallel to the end surface 12 and the annular plate 21, and the fluid flowing out of the recess 13 does not flow out from the opening of the annular plate 21, but flows along this flow path ( That is, it flows parallel to the end surface 12 and the surface of the annular plate 21), and collides with the inner peripheral surface 221 of the guide portion 22. The height of this spacer 3 (that is, the gap between the end surface 12 and the annular plate 21) is set corresponding to the flow rate of the fluid supplied from the fluid supply pump to the suction device 10. For example, the height is set so that the fluid flowing from the recessed portion 13 does not pass through the opening of the annular plate 21, but passes through a flow path formed between the end surface 12 and the annular plate 21 by the spacer 3. At this time, in order not to reduce the attractive force of the suction device 10, it is preferable to make the height of the spacer 3 as low as possible.

Further, the spacer 3 is preferably arranged at a position where the spacer 3 does not obstruct the flow path formed between the end surface 12 and the annular plate 21 by this member. In other words, it is arranged at a position where no flow path is formed (or a position where the flow rate is relatively small compared to other positions). This is to prevent the fluid flowing from the recess 13 from colliding with the spacer 3 and causing turbulence. The flow path of the fluid flowing out of the recessed portion 13 is determined based on the diameter and depth of the recessed portion 13 and the flow velocity of the fluid. Here, the flow path is represented by, for example, a combination of vectors of fluid molecules discharged from one discharge port 14 and flowing out of the recess 13.

Next, the cylindrical body 4 is a corrugated cylindrical body made of an elastic material such as rubber, and a member for holding an object to be attracted by the vortex flow forming body 1. This cylindrical body 4 fixes one end of the cylindrical body 4 to the flanged ring plate 2 while allowing the fluid attracted by the negative pressure generated by the vortex flow forming body 1 to pass therethrough while preventing the attracted object from entering the recess 13. In other words, it is fixed coaxially with the recessed part 13. The inner diameter of the constricted portion of the cylindrical body 4 is smaller than the inner diameter of the concave portion 13 and the maximum diameter of the object to be attracted, and the other end thereof is enlarged in diameter toward the object to be attracted. The height of the cylinder 4 is set in accordance with the flow rate of the fluid supplied from the fluid supply pump to the suction device 10 or the type of the attracted object. In addition, the shape of the cylinder 4 is not limited to a cylinder, and may be a rectangular cylinder, an oval cylinder, or the like.

Next, the suction operation of the suction device 10 described above will be described. When a fluid is supplied from the fluid supply pump to the supply port 16 of the vortex flow forming body 1, the fluid is discharged from the discharge port 14 into the recess 13 through the communication path 18, the annular path 17, and the supply path 19. The fluid discharged to the recessed portion 13 is vortexed and rectified in the recessed portion 13, and then flows out from the opening of the recessed portion 13. At this time, at a position opposite to the opening 41 of the cylindrical body 4, for example, there is a raspberry, the external fluid is restricted from flowing into the recessed portion 13, and the centrifugal force of the vortex flow and the entrainment effect make the unit volume The density of the flow molecules becomes smaller, and a negative pressure is generated in the concave portion 13. As a result, the fluid around the suction device 10 starts to flow into the recessed portion 13 through the opening 41 of the cylinder 4, and the berries are pushed to the suction device 10 side by the surrounding fluid. The raspberry attracted by the suction device 10 is, for example, the front end part of the raspberry being sunk into the opening 41 of the cylinder 4 for positioning. On the other hand, the main fluid flowing out from the opening of the recessed portion 13 does not pass through the opening of the flanged annular plate 2 but passes through a flow path formed between the flanged annular plate 2 and the end surface 12 to the fluid device 10. Outside.

According to the suction device 10 described above, the inflow of the surrounding fluid is restricted by the cylinder 4, and the object to be sucked, which is located away from the negative pressure generation area, can be sucked. In addition, since the cylindrical body 4 has a retractable corrugated shape, even if an eccentricity occurs when the attraction device 10 attracts the object to be attracted, the cylindrical body 4 can still deform in accordance with the shape of the object to be attracted and held stably. In addition, since the cylindrical body 4 has a corrugated shape, it is possible to suppress damage to the attracted object caused by the object being brought into contact with the cylindrical body 4. Moreover, since the cylindrical body 4 has a corrugated shape, it is possible to easily secure a vertical gap between the suction device 10 and the object to be attracted. In other words, even with the uneven height of the attracted object, the elasticity of the barrel 4 can still absorb the unevenness.

In addition, according to the suction device 10 described above, since the main fluid flowing out of the recess 13 does not flow out of the suction device 10 through the opening 41 of the cylinder 4, the fluid flowing out of the opening 41 of the cylinder 4 and the suction can be suppressed. Object conflict, which makes the attracted object tremble or rotate. In addition, the fluid flowing out of the vortex flow forming body 1 can be guided in a direction away from the position of the object to be attracted.

In addition, according to the above-mentioned suction device 10, since a vortex is formed to attract the object to be attracted by the Bernoulli effect, compared with the case of vacuum suction, even if the opening 41 of the cylinder 4 is not completely blocked by the object of attraction (Ie, no vacuum state is formed), can still be attracted to keep the attracted. In addition, since the sucked fluid is discharged outside the suction device 10 and does not enter the recessed portion 13 or the ejection port 14, it is possible to prevent the supply path of the fluid from being contaminated by the attracted matter.

2. Modification Example The above-mentioned embodiment may be modified as follows. In addition, the following modifications may be combined with each other.

2-1. Modification 1
The shapes of the main body 11 and the recessed portion 13 of the vortex flow forming body 1 according to the above embodiment are not limited to a cylindrical shape, and may be, for example, a corner column or an elliptical column. In addition, an inclined surface having an enlarged diameter toward the opening may be formed on the inner peripheral side surface 111 of the main body 11 facing the recessed portion 13. Also, a convex portion forming a fluid flow path may be formed in the concave portion 13 between the peripheral side surface and the inner peripheral side surface 111 of the main body 11 (for example, see FIG. 13 of Japanese Patent Laid-Open No. 2016-159405 ). The number of the discharge ports 14 and the supply channels 19 provided in the vortex flow forming body 1 is not limited to two, and may be one or three or more. The arrangement of the ejection outlets 14 is not limited to the bottom side of the inner peripheral side surface 111 in the axial center, and may be located at the axial center or the end surface 12 side. The formation of the inclined surface 15 may be omitted. The shape of the supply port 16 is not limited to a circular shape, and may be, for example, a rectangle or an ellipse. The supply port 16 may be formed not only on the upper surface of the main body 11 but also on the side. Moreover, the two supply paths 19 do not extend parallel to each other.

Further, in the suction device 10 according to the above embodiment, a radiation flow forming body that forms a device that attracts an object to be attracted by the Bernoulli effect may be used instead of the vortex flow forming body 1 (see, for example, Japanese Patent (See Figure 12 of 2016-159405). This radiation flow forming body includes: a columnar body; a flat end surface formed on the body; a recessed portion formed on the end surface; and a radiation flow that discharges fluid into the recessed portion to form a radial flow to generate a negative pressure to attract the attracted object. Forming means. Here, this radiation flow formation means is an example of the "fluid flow formation means" which concerns on this invention.

Further, in the suction device 10 according to the above-mentioned embodiment, a non-contact chuck using an electric fan, which is a device for forming a vortex to attract an object by the Bernoulli effect, may be used instead of the vortex flow forming body 1 (for example, (See Japanese Patent Laid-Open No. 2011-138948). This non-contact chuck includes: a columnar body; a flat end surface formed on the body; a concave portion formed on the end surface; and a vortex flow of a fluid formed in the concave portion to generate a negative pressure to attract the attracted object. Forming means. Here, the vortex flow forming means is an example of the "fluid flow forming means" related to the present invention.

In the suction device 10 according to the above embodiment, a vortex flow forming body 5 described below may be used instead of the vortex flow forming body 1.

FIG. 10 is a perspective view showing an example of a lower surface of the vortex flow forming body 5. FIG. 11 is a perspective view showing an example of the upper surface of the vortex flow forming body 5. Fig. 12 is a sectional view taken along the line D-D in Fig. 11. The vortex-forming body 5 shown in these figures is a device that forms a vortex and uses the Bernoulli effect to attract an object to be attracted. The vortex-flow forming body 5 includes a main body 51 having a generally circular columnar shape with a circular cross-section through-hole 52 in the center (an example of the "recess" according to the present invention), and is formed below the main body 51 and attracted A flat first end surface 53 opposite to the object; a flat second end surface 54 formed on the upper surface of the main body 51; two ejection ports 55 formed on the inner peripheral surface 511 of the main body 51 facing the through hole 52; Two supply ports 56 on the outer peripheral surface 512 of the main body 51; two linear fluid passages 57 (an example of the "fluid flow forming means" related to the present invention) connecting the ejection port 55 and the supply port 56; approximately disk-shaped A cover body 58; and four spacers 59 of a holding member that hold the cover body 58 in a substantially parallel and relatively fixed manner relative to the second end surface 54.

The periphery of a cross section substantially perpendicular to the central axis of the main body 51 has a shape in which a part of the opposing periphery is cut into a linear circle, respectively. The inner peripheral surface 511 of the main body 51 is formed so that the fluid ejected from the ejection port 55 is guided in a direction away from the attracted object and is discharged from the through hole 52. More specifically, it is formed to be guided toward the opening of the second end surface 54 and discharged from the through hole 52. More specifically, the area of the cross section of the inner peripheral surface 511 substantially perpendicular to the central axis of the main body 51 is such that the diameter gradually increases from the opening of the first end surface 53 to the opening of the second end surface 54. That is, it is formed into an inclined plane.

The through-hole 52 is formed to extend linearly in the direction of the central axis of the main body 51. The through-hole 52 is opened in the first end surface 53 and is opened in the second end surface 54.

The first surface 53 and the second end surface 54 are formed substantially perpendicular to the central axis of the main body 51.

The two discharge ports 55 are formed in the center axis direction of the main body 51 on the inner peripheral surface 511. It is formed point-symmetrically with respect to the central axis of the main body 51. The two supply ports 56 are formed at the center of the center axis direction of the main body 51 on the peripheral surface 512. It is formed point-symmetrically with respect to the central axis of the main body 51. In addition, they are respectively connected to a fluid supply pump (not shown) through a pipe.

The two fluid passages 57 are formed to extend in a tangential direction with respect to the inner periphery of the main body 51. It is formed by extending substantially parallel to each other. It is formed so as to extend substantially perpendicular to the central axis of the main body 51. The diameter is reduced in front of each of the discharge ports 55. The two fluid passages 57 eject fluid from the ejection port 55 into the through hole 52. The fluid ejected into the through-hole 52 flows along the inner peripheral surface of the main body 51 by the Coanda effect. A vortex is formed in the through hole 52. Most of the fluid molecules constituting the formed vortex flow out from the through hole 52 along the second end face 54 at an angle of about 45 degrees with respect to the direction in which the fluid passage 57 supplying the fluid molecules extends. The vortex flow formed in the through-hole 52 generates a negative pressure in the central portion of the through-hole 52 by the still fluid entrained (entrained) in the central portion of the through-hole 52. This negative pressure attracts the plate-like member facing the first end surface 53. The angle at which fluid molecules flow out from the through-hole 52 along the second end surface 54 is determined based on the diameter or depth of the through-hole 52 and the flow velocity of the fluid. The above-mentioned angle of about 45 degrees is only an example.

The cover 58 has the same shape as the outer periphery of a cross section substantially perpendicular to the central axis of the main body 51. The cover 58 covers the through-hole 52 and restricts an external fluid (specifically, a gas or a liquid) from flowing into the through-hole 52.

Each of the four spacers 59 has a cylindrical shape. The four spacers 59 are attached at equal intervals along the second end surface 54. At this time, it is attached from the second end surface 54 toward the cover 58 so as to extend substantially perpendicularly, and connects the main body 51 and the cover 58. Each spacer 59 is locked to the main body 51 and the cover 58 by a screw, for example. The four spacers 59 are formed between the second end surface 54 and the cover 58 to form a flow path for the fluid flowing out of the through-hole 52. The fluid passing through this flow path flows out of the vortex flow forming body 5. The height of the four spacers 59 (in other words, the gap between the second end surface 54 and the cover 58) is set in accordance with the flow rate of the fluid supplied from the fluid supply pump to the vortex flow forming body 5. The four spacers 59 are preferably attached to the second end surface 54 at positions that do not hinder the flow path of the fluid flowing out of the through-hole 52. This is to prevent the fluid flowing out of the through-hole 52 from colliding with the spacer 59 and causing turbulence. Although the flow path of the fluid flowing out of the through-hole 52 is determined according to the diameter or depth of the through-hole 52 and the flow rate of the fluid, the four spacers 59 are, for example, approximately 45 in a direction not extending in the direction extending from the fluid passage 57. The angle of degree is preferably on the line.

When the vortex flow forming body 5 described above is supplied with fluid through the pipe, the supplied fluid is ejected from the ejection port 55 into the through hole 52 through the supply port 56 and the fluid passage 57. The fluid ejected into the through-hole 52 is rectified into a vortex flow in the through-hole 52. And most of the fluid constituting the vortex flow is guided to the inner peripheral surface 511 and flows out from the through hole 52 along the second end surface 54. At this time, when there is an object to be attracted opposite to the first end surface 53, in a state where external fluid (specifically, gas or liquid) is restricted from flowing into the through-hole 52, the centrifugal force of the vortex flow and the swirling The density of fluid molecules per unit volume in the central portion becomes smaller. That is, a negative pressure is generated at the center of the vortex. As a result, the attracted object is pushed by the surrounding fluid and approaches the first end surface 53 side.

As described above, the majority of the fluid molecules flowing out of the through-hole 52 from the vortex flow forming body 5 flow out along the second end surface 54. Therefore, even if the amount of fluid molecules flowing out along the first end surface 53 is present, only A small amount. Therefore, the fluid flowing along the first end surface 53 collides with the attracted object, and compared with the case where the fluid does not flow out from the second end surface 54 side, the phenomenon of vibration or rotation of the attracted object can be suppressed. As a result, it is possible to further stably attract, hold, and transport the attracted object. In addition, damage to the attracted object due to vibration (unevenness) can be suppressed. That is, the vortex flow forming body 5 can be used by separating only the attractive force of the vortex flow formed in the through hole 52.

2-2. Modification 2
The shape of the annular plate 21 with the flanged annular plate 2 according to the above embodiment is not limited to a circular ring, and may be, for example, an angular ring or an oval ring. Also, the outer diameter of the annular plate 21 does not need to be larger than the outer diameter of the end face 12, and the inner diameter of the annular plate 21 does not need to be smaller than the inner diameter of the end face 12. Furthermore, a mesh or a porous material (porous material) may be attached to the opening of the annular plate 21 (for example, see FIG. 6 of Japanese Patent Publication No. 2016-159405). In addition, the guide portion 22 may be omitted in the flanged annular plate 2.

The number of the spacers 3 according to the above embodiment is not limited to four, and may be three or less or five or more. In addition, the arrangement of the spacer 3 is not limited to the outer edge of the end surface 12 and may be at the center or inner edge in the radial direction. The spacers 3 are not necessarily formed at equal intervals. The cross-sectional shape of the spacer 3 is not limited to a circular shape, and may be, for example, a rectangle or an ellipse.

In addition, in the suction device 10 according to the above embodiment, a ring-shaped plate 6 described below may be used instead of the ring-shaped plate 2 and the spacer 3 with a flange.

FIG. 13 is a perspective view showing an example of the vortex flow forming body 1 to which the annular plate 6 is detachably attached. Fig. 14 is a perspective view viewed from a different direction from Fig. 13. The annular plate 6 shown in these figures includes an annular plate main body 61 (an example of a "plate body" related to the present invention) and four retaining members 62. Each of the retaining members 62 is pushed outward to expand and is held in the retaining member. The vortex flow forming body 1 is sandwiched between 62 and mounted on the vortex flow forming body 1. The ring-shaped plate body 61 has a circular shape, and allows a fluid attracted by the negative pressure generated by the vortex flow forming body 1 to pass through. The four holding members 62 are detachably fixed to the main body 11 at one end side, and hold the ring-shaped plate main body 61 facing the end surface 12 at the other end side. The four holding members 62 hold the ring-shaped plate main body 61 between the end surface 12 and the ring-shaped plate main body 61 so as to form a flow path for the fluid flowing from the recessed portion 13. The ring-shaped plate body 61 and the four holding members 62 are integrally formed.

The ring-shaped plate main body 61 is made of a plate spring material and has a ring shape. The annular plate main body 61 is formed so that the outer diameter thereof is substantially the same as the outer diameter of the end surface 12, and the inner diameter thereof is substantially the same as the inner diameter of the end surface 12 (in other words, the diameter of the opening of the recessed portion 13). The annular plate member 61 includes four spacers 611. The four spacers 611 are respectively provided between the end surface 12 and the ring-shaped plate main body 61 so as to form a space therebetween. The main body 11 is sandwiched (clamped) between the claw portion 621 of the holding member 62 described later, and is formed. A flow path for a fluid flowing from the recessed portion 13. The four spacers 611 are formed on the outer edge of the annular plate main body 61 at equal intervals. The four spacers 611 are formed into a circle by embossing and have substantially the same height. The height of the four spacers 611 defines the gap between the end surface 12 and the annular plate body 61, and the height is set in accordance with the flow rate of the fluid supplied from the fluid supply pump to the suction device 10. For example, the height is set so that the fluid flowing out from the recessed portion 13 does not pass through the opening of the ring-shaped plate main body 61, but a flow path formed between the end surface 12 and the ring-shaped plate main body 61 by the spacer 611. At this time, in order not to reduce the attractive force of the suction device 10, it is preferable to make the height of the spacer 611 as low as possible.

Each of the four holding members 62 is an elongated leaf spring material extending from the peripheral edge of the annular plate body 61 at equal intervals, and is formed by being bent substantially perpendicularly to the annular plate body 61. The leaf spring material is formed longer than the axial length of the main body 11. When the leaf spring material is bent, its angle is adjusted so that when the annular plate 6 is attached to the vortex flow forming body 1, the side of the main body 11 of the vortex flow forming body 1 is pushed by the restoring force (elastic force) of each holding member 62. Press and hold the main body 11 between the holding members 62. Claw portions 621 are formed at the ends of the four holding members 62, respectively. The claw portion 621 is an outer edge (in other words, is hooked and fixed) hanging from the upper surface of the main body 11. The claw portion 621 is an end portion of a plate spring material that becomes the holding member 62, and is formed by being bent substantially vertically inward with respect to a direction in which the plate spring material extends. At this time, the angle at which the leaf spring material is bent is such that when the annular plate 6 is mounted on the vortex flow forming body 1, the upper surface and the bottom surface of the main body 11 of the vortex flow forming body 1 are pressed by the restoring force (elastic force) of the claw portion 621. , Adjust to clamp the main body 11 between the claw portion 621 and the spacer 611. When attaching the annular plate 6 to the vortex flow forming body 1 in the claw portion 621, V-bending processing is applied to the upper surface.

When the annular plate 6 is used as described above, the annular plate 6 can be detachably attached to the vortex flow forming body 1 without using a tool, so it can be easily removed and sandwiched between the vortex flow forming body 1 and the annular plate 6. The dust, or the cleaning of the ring plate 6 alone.

Hereinafter, modifications of the annular plate 6 will be described.
FIG. 15 is a perspective view showing an example of a vortex flow forming body 1A of a ring plate 6A of a modification example in which the ring plate 6 is detachably mounted. FIG. 16 is a perspective view viewed from a different direction from FIG. 15. The annular plate 6A shown in these figures is different from the annular plate 6 in that the support member is fixed to the main body side surface of the vortex flow forming body 1A and the point where the spacer is not provided. These differences will be described below.

Compared with the vortex flow forming body 1, the vortex flow forming body 1A further includes four groove portions 112. Four groove portions 112 are formed on the side surface of the main body 11 at equal intervals. The four groove portions 112 are formed on the upper surface side than the axial center of the side surface of the main body 11. The four groove portions 112 are formed such that their length in the peripheral direction is shorter than 1/4 of the peripheral arc of the end surface 12. Each of the four groove portions 112 is formed by three V-shaped grooves (in other words, slits) which are arranged in the axial direction and extend in the peripheral direction. Each of the four groove portions 112 is locked with a claw portion 621A of an annular plate 6A described later.

The annular plate 6A includes an annular plate body 61 and four holding members 62A. Since the ring-shaped plate body 61 is the same as the ring-shaped plate 6 described above, description thereof is omitted. The four holding members 62A have one end detachably fixed to the main body 11, and the other end side supports the annular plate main body 61 facing the end surface 12. The four holding members 62A form a gap between the end surface 12 and the ring-shaped plate main body 61, and hold the ring-shaped plate main body 61 to form a flow path for the fluid flowing out of the recessed portion 13. The ring-shaped plate body 61 and the four holding members 62A are integrally formed.

Each of the four holding members 62A is an elongated leaf spring material extending from the peripheral edge of the annular plate body 61 at equal intervals, and is formed by being bent substantially perpendicularly to the annular plate body 61. The leaf spring material is formed to be longer than 1/2 the length of the main body 11 in the axial direction and shorter than the entire length of the main body 11 in the axial direction. When the leaf spring material is bent, the angle is adjusted so that when the annular plate 6A is attached to the vortex flow forming body 1A, the side of the main body 11 of the vortex flow forming body 1A is pressed by the restoring force (elastic force) of each holding member 62A The main body 11 is sandwiched between the holding members 62A. The end portions of the four holding members 62A are each formed with a claw portion 621A. The claw portion 621A is locked to the groove portion 112 of the main body 11 by a restoring force (elastic force) of the holding member 62A (in other words, it is locked and fixed). As a result, the position in the up-down direction with respect to the vortex-flow forming body 1A of the annular plate 6A is fixed. The claw portion 621A is formed by applying a V-bend process to the upper portion of the leaf spring member serving as the holding member 62A when the annular plate 6A is attached to the vortex flow forming body 1A so as to project from the upper surface.

When the ring-shaped plate 6A described above is used, in addition to the advantages of the ring-shaped plate 6 described above, the ring-shaped plate 6A has the necessary advantage that a spacer is not formed. This is because the claw portion 621A of the annular plate 6A is locked to the groove portion 112 of the vortex flow forming body 1A, and the position in the vertical direction with respect to the vortex forming body 1A of the annular plate 6A is fixed. The reason why there is a gap between 12 and the annular plate body 61. In addition, there is an advantage that a groove of the main body 11 to which the annular plate 6A is locked can be changed, and a gap between the end surface 12 and the annular plate main body 61 can be adjusted.

Next, FIG. 17 is a perspective view showing an example of the vortex flow forming body 1 of another modification example in which the annular plate 6B is detachably mounted. The annular plate 6B shown in the same figure is different from the aforementioned annular plate 6 in that the guide plate 612 is provided. The guide portion 612 has a cylindrical shape and is formed to surround the peripheral side surface of the main body 11 (in other words, the periphery of the opening of the recessed portion 13) when the annular plate 6B is mounted on the vortex flow forming body 1. The guide portion 612 is formed such that its inner peripheral surface does not contact the outer peripheral side surface of the main body. The length of the guide portion 612 in the axial direction is shorter than 1/2 of the length in the axial direction of the main body 11 in the illustrated example, but may be longer. The guide portion 612 restricts the flow of the fluid flowing out from the recessed portion 13 of the vortex flow forming body 1 along the end surface 12 and guides the fluid away from the position of the object to be attracted (correctly the position before the start of suction). In particular, the guide portion 612 restricts the flow of the fluid flowing from the recessed portion 13 along the end surface 12 in a direction having a radial component. Then, the fluid is guided in a direction including a directional component of the suction direction of the attracted object. More specifically, the fluid flowing from the recessed portion 13 is guided upward along the inner peripheral surface of the guide portion 612 toward the figure.

Next, FIG. 18 is a perspective view showing an example of the vortex flow forming body 1 of another modification example in which the annular plate 6C is detachably mounted. The annular plate 6C shown in the figure is fixed to the main body 11 of the vortex flow forming body 1 by screwing the claw portions 621B of the holding members 62B by screwing, and the annular plate main body 61A can be attached to the vortex forming body 1 with a tool. The point of disassembly is different from the point of the ring-shaped plate body 61A in which a spacer is not used. The claw portion 621B is different from the claw portion 621 of the annular plate 6 only in the point where it is formed flat. The claw portion 621B is fastened to the upper surface of the main body 11 to thereby fix the position of the annular plate 6C with respect to the vortex flow forming body 1 in the up-down direction. As a result, a gap is maintained between the end surface 12 and the annular plate body 61A. Therefore, the annular plate 6C does not require a spacer. In addition, the claw portion 621B may be fixed to the upper surface of the main body 11 of the vortex flow forming body 1 by magnetic force or frictional force instead of being screw-locked.

2-3. Modification 3
19 to 21 are diagrams showing modifications of the cylindrical body 4 according to the embodiment. The cylindrical body 4A shown in FIG. 19 is different from the cylindrical body 4 in the point that the inner diameter of the constricted portion is small. The inside of the constriction of the cylindrical body 4A is formed to be 1/2 or less of the inner diameter of the concave portion 13 of the vortex flow forming body 1. Therefore, when the cylindrical body 4A is used, an object to be attracted can be kept smaller. The cylindrical body 4B shown in FIG. 20 is different from the cylindrical body 4 in that a point having a plurality of notches is provided at an end portion on the side holding the attracted object. More specifically, the end of the cylinder 4B has a zigzag shape, and is enlarged in diameter toward the object to be attracted. In addition, the shape of the notch may be a semicircle, a semi-oval, or a rectangle. The three cylindrical bodies 4C shown in FIG. 21 are different from the cylindrical body 4 in that the inner diameter of the constricted portion is small, and the cylindrical body group is formed by each cylindrical body. The inner diameter of the constricted portion of each of the cylinders 4C is ½ or less of the inner diameter of the concave portion 13 forming the vortex flow forming body 1, and one end thereof is arranged so as to face the concave portion 13. When the cylinder 4C is used, a plurality of objects to be attracted can be attracted at a time. The number of the cylinders 4C may be two or four or more.

22 to 24 are diagrams showing other modified examples of the cylindrical body 4 according to the embodiment. The cylindrical body 4D shown in Fig. 22 is different from the cylindrical body 4 in a point having no corrugated shape. The end portion on the attracted object side holding the cylinder 4D is enlarged in diameter toward the attracted object. The cylindrical body 4E shown in FIG. 23 does not have a corrugated shape, and the opening area at the end portion holding the attracted object is formed to be larger than the opening area (and the recessed portion 13) The point where the opening area) is small is different from the cylindrical body 4. More specifically, the cylindrical body 4E is gradually reduced in diameter from an end portion fixed to the side of the annular plate 2 with a flange across the center in the axial direction, and the end portion on the side of the attracted object is increased in diameter toward the attracted object. In addition, as a modification, the diameter may be gradually reduced across the end portion on the side holding the attracted object. The cylindrical body 4F shown in FIG. 24 is different from the cylindrical body 4 in that it does not have a corrugated shape, and has a plurality of notches at the end portion holding the attracted object. More specifically, the end of the cylinder 4F has a plurality of notches in a semi-oval shape, and expands its diameter toward the object to be attracted. The shape of the notch may be a semicircle or a rectangle.

In addition, the cylindrical body 4 or the cylindrical bodies 4A to 4C shown in Figs. 19 to 21 according to the above embodiment may be in a corrugated state, such as the cylindrical body 4E shown in Fig. 23, and fixed to the ring with a flange. The end on one side of the plate 2 is gradually reduced in diameter across the axial center. Alternatively, the diameter may be gradually reduced across the end on the side holding the attracted object. In addition, the three cylindrical bodies 4C shown in FIG. 21 may be made like the cylindrical bodies 4D shown in FIG. 22 and have no corrugated shape.

2-4. Modification 4
FIG. 25 is a side view showing an example of a suction device 10A according to a modification of the suction device 10. The suction device 10A shown in the figure is different from the suction device 10 in that the cylindrical body 4G is screw-locked to the vortex flow forming body 1 without the flanged ring plate 2. The screw lock is an example of a fixing method.

The cylindrical body 4G shown in the figure is fixed at one end to the end surface 12 of the vortex flow forming body 1, and has a plurality of holes 42 for fluid flow flowing out of the recessed portion 13 of the vortex flow forming body 1 on its side wall. The cylindrical body 4 according to the embodiment is different. The plurality of hole portions 42 are formed at equal intervals so that the fluid flowing out of the vortex flow forming body 1 flows out along the end surface 12.

According to this suction device 10A, since the main fluid flowing out of the vortex flow forming body 1 does not pass through the opening of the cylinder 4G, but flows out of the suction device 10A through the hole portion 42, the fluid flowing out of the opening of the cylinder 4G Conflicts with the object to be attracted can suppress the phenomenon of the object being trembling or rotating.

2-5. Modification 5
The suction device 10 or 10A according to the above embodiment is not limited to foods, and may be used for suctioning and holding a plate-like or sheet-like member such as a semiconductor wafer or a glass substrate for transportation. At this time, a plurality of suction devices 10 or 10A may be attached to the plate-shaped frame according to the size of the object to be attracted (see, for example, Figures 10 and 11 of Japanese Patent Laid-Open No. 2016-159405).

1‧‧‧ vortex formation

2‧‧‧ with flange ring plate

3‧‧‧ spacer

4, 4A, B, 4C, 4D, 4E, 4F, 4G‧‧‧

5‧‧‧ vortex formation

6, 6A‧‧‧ ring plate

10, 10A‧‧‧ Attraction device

11‧‧‧ main body

12‧‧‧face

13‧‧‧ recess

14‧‧‧ spout

15‧‧‧ inclined surface

16‧‧‧ supply port

17‧‧‧Circle

18‧‧‧ communication hole

19‧‧‧ Supply Road

21‧‧‧ ring plate

22‧‧‧Guide

41‧‧‧ opening

42‧‧‧ Hole

51‧‧‧Subject

52‧‧‧through hole

53‧‧‧first end face

54‧‧‧ 2nd end face

55‧‧‧Spout

56‧‧‧ supply port

57‧‧‧ fluid pathway

58‧‧‧ Cover

59‧‧‧ spacer

61, 61A‧‧‧ ring plate body

62, 62A, 62B ‧‧‧ holding members

111‧‧‧ side of the inner periphery

112‧‧‧Slot

221, 511‧‧‧ inner peripheral surface

512‧‧‧ peripheral surface

611‧‧‧ spacer

612‧‧‧Guide

621, 621A, 621B‧‧‧Claw

FIG. 1 is a perspective view of an example of the suction device 10.

Fig. 2 is a top view of an example of the suction device 10.

FIG. 3 is a side view of an example of the suction device 10.

FIG. 4 is a bottom view of an example of the suction device 10.

Fig. 5 is a sectional view taken along the line A-A in Fig. 2.

FIG. 6 is a perspective view of an example of the vortex flow forming body 1.

FIG. 7 is a top view of an example of the vortex flow forming body 1.

Fig. 8 is a sectional view taken along line B-B in Fig. 7.

Fig. 9 is a sectional view taken along the line C-C in Fig. 8.

FIG. 10 is a perspective view showing an example of a lower surface of the vortex flow forming body 5.

FIG. 11 is a perspective view showing an example of the upper surface of the vortex flow forming body 5.

Fig. 12 is a sectional view taken along the line D-D in Fig. 11.

FIG. 13 is a perspective view showing an example of the vortex flow forming body 1 to which the annular plate 6 is detachably attached.

Fig. 14 is a perspective view viewed from a different direction from Fig. 13.

FIG. 15 is a perspective view showing an example of the vortex flow forming body 1A in which the annular plate 6A is detachably attached.

FIG. 16 is a perspective view viewed from a different direction from FIG. 15.

FIG. 17 is a perspective view showing an example of the vortex flow forming body 1 to which the annular plate 6B is detachably attached.

FIG. 18 is a perspective view showing an example of the vortex flow forming body 1 to which the annular plate 6C is detachably attached.

Fig. 19 is a perspective view showing an example of the cylinder 4A.

Fig. 20 is a perspective view showing an example of the cylinder 4B.

Fig. 21 is a perspective view showing an example of the cylinder 4C.

Fig. 22 is a perspective view showing an example of the cylinder 4D.

Fig. 23 is a perspective view showing an example of the cylinder 4E.

Fig. 24 is a perspective view showing an example of the cylinder 4F.

Fig. 25 is a side view showing an example of the suction device 10A.

Claims (6)

A suction device, comprising: Columnar body A flat end surface formed on the main body; A recess formed on the end surface; A fluid flow forming means for forming a vortex flow of fluid in the recessed portion or ejecting the fluid into the recessed portion to form a radiant flow thereby generating a negative pressure to attract the attracted object; A plate body formed in a manner that the fluid attracted by the negative pressure can pass through; One end side is fixed to the main body, and the other end side holds a holding member that opposes the plate body and the end surface, and holds the plate body between the end surface and the plate body to form a fluid for flowing out of the recessed portion. Holding members of the gap; and The fluid sucked by the negative pressure is allowed to pass through one side, and the attracted object is prevented from entering the recessed portion, and one end thereof is fixed to one or more cylinders of the plate body. The suction device according to item 1 of the patent application scope, wherein the one or more cylinders have a corrugated shape. According to the suction device described in the first or second scope of the patent application, wherein the one or more cylinders are plural cylinders. The suction device according to any one of claims 1 to 3, wherein the other end of the one or more cylinders has a plurality of notches. In the suction device according to any one of claims 1 to 4, the opening area of the other end of the one or more cylinders is smaller than the opening area of the recess. A suction device, comprising: Columnar body A flat end surface formed on the main body; A recess formed on the end surface; A fluid flow forming means for forming a vortex flow of fluid in the recessed portion or ejecting the fluid into the recessed portion to form a radiant flow thereby generating a negative pressure to attract the attracted object; A cylinder that has one end fixed to the end surface while allowing the fluid attracted by the negative pressure to pass therethrough and prevents the attracted object from entering the recess. The cylinder is provided with a hole on the side wall for the fluid to flow out of the recess .