JP2015020434A5 - - Google Patents

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Publication number
JP2015020434A5
JP2015020434A5 JP2014133380A JP2014133380A JP2015020434A5 JP 2015020434 A5 JP2015020434 A5 JP 2015020434A5 JP 2014133380 A JP2014133380 A JP 2014133380A JP 2014133380 A JP2014133380 A JP 2014133380A JP 2015020434 A5 JP2015020434 A5 JP 2015020434A5
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JP
Japan
Prior art keywords
conveyor
microscale
path
gap region
thin film
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JP2014133380A
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English (en)
Japanese (ja)
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JP2015020434A (ja
JP6293589B2 (ja
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Priority claimed from US13/944,843 external-priority patent/US9348231B2/en
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Publication of JP2015020434A publication Critical patent/JP2015020434A/ja
Publication of JP2015020434A5 publication Critical patent/JP2015020434A5/ja
Application granted granted Critical
Publication of JP6293589B2 publication Critical patent/JP6293589B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2014133380A 2013-07-17 2014-06-27 高分子薄膜におけるデジタル・マイクロスケール・パターンの連続的生産 Expired - Fee Related JP6293589B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/944,843 US9348231B2 (en) 2013-07-17 2013-07-17 Continuously producing digital micro-scale patterns on a thin polymer film
US13/944,843 2013-07-17

Publications (3)

Publication Number Publication Date
JP2015020434A JP2015020434A (ja) 2015-02-02
JP2015020434A5 true JP2015020434A5 (enExample) 2017-08-10
JP6293589B2 JP6293589B2 (ja) 2018-03-14

Family

ID=51211592

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014133380A Expired - Fee Related JP6293589B2 (ja) 2013-07-17 2014-06-27 高分子薄膜におけるデジタル・マイクロスケール・パターンの連続的生産

Country Status (6)

Country Link
US (1) US9348231B2 (enExample)
EP (1) EP2827192B1 (enExample)
JP (1) JP6293589B2 (enExample)
KR (1) KR102093603B1 (enExample)
CN (1) CN104290317B (enExample)
TW (1) TWI631424B (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6037914B2 (ja) * 2013-03-29 2016-12-07 富士フイルム株式会社 保護膜のエッチング方法およびテンプレートの製造方法
US9884437B2 (en) 2014-06-20 2018-02-06 Palo Alto Research Center Incorporated Integral vasculature
EP2974813A1 (de) * 2014-07-17 2016-01-20 MTU Aero Engines GmbH Anlage und verfahren zur generativen herstellung und/oder reparatur von bauteilen
US10384432B2 (en) 2016-02-19 2019-08-20 Palo Alto Research Center Incorporated Hierarchical laminates fabricated from micro-scale, digitally patterned films
WO2018052895A2 (en) * 2016-09-16 2018-03-22 3M Innovative Properties Company Method of making a nanostructured cylindrical roll
US10710283B2 (en) 2016-12-22 2020-07-14 Palo Alto Research Center Incorporated Membrane surface hydrophobicity through electro-hydrodynamic film patterning
GB201701182D0 (en) * 2017-01-24 2017-03-08 Univ Birmingham Surface enhanced raman scattering apparatus and method
NO342507B1 (en) * 2017-03-29 2018-06-04 Condalign As A method for forming av body comprising at least one through-going passage
EP3671342B1 (en) * 2018-12-20 2021-03-17 IMEC vzw Induced stress for euv pellicle tensioning
US11732378B2 (en) * 2019-10-02 2023-08-22 Palo Alto Research Center Incorporated Three dielectric electrohydrodynamic patterning
CN112644158B (zh) * 2020-06-28 2023-02-28 正扬科技有限公司 连续式紫外光固化装置
CN112895408B (zh) * 2020-12-28 2022-05-20 杭州电子科技大学 基于相场模型的聚合物表面微结构可控成形机理研究方法
US20240012330A1 (en) * 2021-02-21 2024-01-11 The Regents Of The University Of California Roll-to-roll based 3d printing through computed axial lithography

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2476282A (en) * 1945-01-09 1949-07-19 American Viscose Corp Textile products and production thereof
US4166089A (en) * 1969-11-13 1979-08-28 Agfa-Gevaert N.V. Corona free pinning of extruded polymer film
US6391217B2 (en) * 1999-12-23 2002-05-21 University Of Massachusetts Methods and apparatus for forming submicron patterns on films
US6964793B2 (en) * 2002-05-16 2005-11-15 Board Of Regents, The University Of Texas System Method for fabricating nanoscale patterns in light curable compositions using an electric field
KR20050025545A (ko) * 2001-05-16 2005-03-14 보드 오브 리전츠, 더 유니버시티 오브 텍사스 시스템 전기장을 사용하여 광 중합 화합물내에 나노스케일의패턴을 생성하기 위한 방법 및 시스템
JP2003343964A (ja) * 2002-05-29 2003-12-03 Glocal:Kk 冷凍装置
US6908861B2 (en) * 2002-07-11 2005-06-21 Molecular Imprints, Inc. Method for imprint lithography using an electric field
MY144124A (en) * 2002-07-11 2011-08-15 Molecular Imprints Inc Step and repeat imprint lithography systems
ITTO20020772A1 (it) * 2002-09-06 2004-03-07 Fiat Ricerche Metodo per la realizzazione di strutture tridimensionali
JP2006506474A (ja) * 2002-10-11 2006-02-23 イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー パターニングされたフィブリル表面を有するフィルム、ならびにフィルムを製造するための方法および装置
US7163611B2 (en) 2003-12-03 2007-01-16 Palo Alto Research Center Incorporated Concentration and focusing of bio-agents and micron-sized particles using traveling wave grids
TWI345804B (en) * 2005-08-17 2011-07-21 Lg Chemical Ltd Patterning method using coatings containing ionic components
KR100789581B1 (ko) 2005-08-17 2007-12-28 주식회사 엘지화학 이온 성분을 함유하는 코팅액을 이용한 패턴 형성 방법
JP2007062095A (ja) 2005-08-30 2007-03-15 Ricoh Co Ltd プラスチック成形品の製造方法、及びその製造装置
KR101265321B1 (ko) 2005-11-14 2013-05-20 엘지디스플레이 주식회사 스탬프 제조 방법, 그를 이용한 박막트랜지스터 및액정표시장치의 제조 방법
KR20090108853A (ko) * 2008-04-14 2009-10-19 삼성전자주식회사 무기물 패턴 형성용 조성물 및 그를 이용한 무기물패턴형성 방법
JP5542313B2 (ja) * 2008-06-18 2014-07-09 協立化学産業株式会社 パターン形成方法
JP5129665B2 (ja) * 2008-06-25 2013-01-30 パナソニック株式会社 プラズマ処理装置
CN101620348B (zh) 2008-07-04 2011-07-27 清华大学 触摸式液晶显示屏的制备方法

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