JP2015000408A - 摺動部材および摺動部材製造方法 - Google Patents
摺動部材および摺動部材製造方法 Download PDFInfo
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Abstract
Description
(1)周期平行DLCは鏡面DLCに対して摩耗粉が微細化し、40%を超える摩擦低減効果が得られる。
(2)周期平行DLCの移着膜は、酸素に富んだ金属酸化物含有層とカーボン移着層の2層構造となる。
(3)周期平行DLCの低摩擦化要因は強固に固着されたカーボン移着膜の生成とDLC膜・移着膜の平滑化であると考えられる。
1a 摺動面
2 第2部材
2a 摺動面
3 周期構造部
4 非晶質炭素(DLC)
5 凹部
6 凸部
P1 膜形成工程
P1a 周期構造形成工程
P1b 成膜工程
P2 摩耗工程
Claims (6)
- 第1部材の摺動面に、凸部頂点が非平坦面となって連続的に高さが変化するグレーティング状凹凸の周期構造を有する非晶質炭素膜を形成する膜形成工程と、
第1部材の摺動面と第2部材の摺動面とを相対的に摺動させて,前記周期構造を犠牲層として摩滅させる摩耗工程とを備えたことを特徴とする摺動部材の製造方法。 - 前記非晶質炭素膜は,前記第1部材の基材表面に予め凸部頂点が非平坦面となって連続的に高さが変化するグレーティング状の凹凸の周期構造形成を行った後、成膜して形成することを特徴とする請求項1に記載の摺動部材の製造方法。
- 前記第2部材の少なくとも摺動面が,前記摩耗工程において酸化物の摩耗粉を生じる材質としていることを特徴とする請求項1または請求項2に記載の摺動部材の製造方法。
- 前記第1部材の基材表面にあらかじめ形成する周期構造は、加工闘値近傍の照射強度で 直線偏光のレーザを照射し、その照射部分をオーバーラップさせながら走査して、自己組織的に形成されていることを特徴とする請求項2又は請求項3のいずれかに記載の摺動部材の製造方法。
- 前記請求項1〜請求項4のいずれか1項に記載の摺動部材の製造方法を用いる摺動部材であって、
凸部頂点が非平坦面となって連続的に高さが変化するグレーティング状凹凸の周期構造を有する非晶質炭素膜の凹凸が20nm以上100nm以下かつ非晶質炭素膜の膜厚以下であることを特徴とする摺動部材。 - 凸部頂点が非平坦面となって連続的に高さが変化するグレーティング状凹占の周期構造を有する非晶質炭素膜の周期ピッチが10μm以下であることを特徴とする請求項5に記載の摺動部材。
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20140015365A (ko) * | 2011-02-28 | 2014-02-06 | 산요 시키소 가부시키가이샤 | 잉크젯 잉크용 공중합체 및 그것을 사용한 잉크젯 잉크용 안료 분산체 및 잉크젯 잉크 |
JP2016133177A (ja) * | 2015-01-20 | 2016-07-25 | キヤノンマシナリー株式会社 | 摺動面構造および摺動面構造の製造方法 |
JP2019108921A (ja) * | 2017-12-18 | 2019-07-04 | キヤノンマシナリー株式会社 | 摺動面構造 |
JP2020076119A (ja) * | 2018-11-06 | 2020-05-21 | 株式会社ダイセル | 炭素移着膜が形成された摺動部材 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04182916A (ja) * | 1990-11-19 | 1992-06-30 | Hitachi Ltd | 磁気ヘッド |
JP2001200849A (ja) * | 2000-01-19 | 2001-07-27 | Toyota Motor Corp | 摺動部材及び組み合わされた2つの摺動部材 |
JP2008088847A (ja) * | 2006-09-29 | 2008-04-17 | Denso Corp | スクロール型圧縮機 |
JP2011168845A (ja) * | 2010-02-19 | 2011-09-01 | Japan Science & Technology Agency | 摺動材及びその表面加工方法 |
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- 2013-06-13 JP JP2013124710A patent/JP6096065B2/ja active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04182916A (ja) * | 1990-11-19 | 1992-06-30 | Hitachi Ltd | 磁気ヘッド |
JP2001200849A (ja) * | 2000-01-19 | 2001-07-27 | Toyota Motor Corp | 摺動部材及び組み合わされた2つの摺動部材 |
JP2008088847A (ja) * | 2006-09-29 | 2008-04-17 | Denso Corp | スクロール型圧縮機 |
JP2011168845A (ja) * | 2010-02-19 | 2011-09-01 | Japan Science & Technology Agency | 摺動材及びその表面加工方法 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20140015365A (ko) * | 2011-02-28 | 2014-02-06 | 산요 시키소 가부시키가이샤 | 잉크젯 잉크용 공중합체 및 그것을 사용한 잉크젯 잉크용 안료 분산체 및 잉크젯 잉크 |
JP2016133177A (ja) * | 2015-01-20 | 2016-07-25 | キヤノンマシナリー株式会社 | 摺動面構造および摺動面構造の製造方法 |
JP2019108921A (ja) * | 2017-12-18 | 2019-07-04 | キヤノンマシナリー株式会社 | 摺動面構造 |
JP2020076119A (ja) * | 2018-11-06 | 2020-05-21 | 株式会社ダイセル | 炭素移着膜が形成された摺動部材 |
JP7417916B2 (ja) | 2018-11-06 | 2024-01-19 | 株式会社ダイセル | 炭素移着膜が形成された摺動部材 |
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