JP2014531743A5 - - Google Patents

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JP2014531743A5
JP2014531743A5 JP2014527148A JP2014527148A JP2014531743A5 JP 2014531743 A5 JP2014531743 A5 JP 2014531743A5 JP 2014527148 A JP2014527148 A JP 2014527148A JP 2014527148 A JP2014527148 A JP 2014527148A JP 2014531743 A5 JP2014531743 A5 JP 2014531743A5
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Japan
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target
sensors
light beam
amplified light
mixture
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JP2014527148A
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Japanese (ja)
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JP2014531743A (ja
JP5977828B2 (ja
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Priority claimed from US13/249,504 external-priority patent/US8993976B2/en
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JP2014527148A 2011-08-19 2012-07-10 光ビームアラインメントのためのエネルギセンサ Active JP5977828B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201161525561P 2011-08-19 2011-08-19
US61/525,561 2011-08-19
US13/249,504 2011-09-30
US13/249,504 US8993976B2 (en) 2011-08-19 2011-09-30 Energy sensors for light beam alignment
PCT/US2012/046093 WO2013028272A1 (en) 2011-08-19 2012-07-10 Energy sensors for light beam alignment

Publications (3)

Publication Number Publication Date
JP2014531743A JP2014531743A (ja) 2014-11-27
JP2014531743A5 true JP2014531743A5 (https=) 2015-08-13
JP5977828B2 JP5977828B2 (ja) 2016-08-24

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JP2014527148A Active JP5977828B2 (ja) 2011-08-19 2012-07-10 光ビームアラインメントのためのエネルギセンサ

Country Status (7)

Country Link
US (1) US8993976B2 (https=)
EP (1) EP2745650A4 (https=)
JP (1) JP5977828B2 (https=)
KR (1) KR101949839B1 (https=)
CN (1) CN103748967B (https=)
TW (1) TWI536869B (https=)
WO (1) WO2013028272A1 (https=)

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US9209595B2 (en) * 2014-01-31 2015-12-08 Asml Netherlands B.V. Catalytic conversion of an optical amplifier gas medium
US9271381B2 (en) * 2014-02-10 2016-02-23 Asml Netherlands B.V. Methods and apparatus for laser produced plasma EUV light source
WO2015172816A1 (de) * 2014-05-13 2015-11-19 Trumpf Laser- Und Systemtechnik Gmbh Einrichtung zur überwachung der ausrichtung eines laserstrahls und euv-strahlungserzeugungsvorrichtung damit
JP6678180B2 (ja) * 2015-03-03 2020-04-08 エーエスエムエル ネザーランズ ビー．ブイ． 放射センサ装置
US9927292B2 (en) 2015-04-23 2018-03-27 Asml Netherlands B.V. Beam position sensor
JP6649958B2 (ja) 2015-10-02 2020-02-19 ギガフォトン株式会社 極端紫外光生成システム
WO2017077584A1 (ja) 2015-11-03 2017-05-11 ギガフォトン株式会社 極端紫外光生成装置
US9536631B1 (en) * 2015-11-19 2017-01-03 Asml Netherlands B.V. Systems and methods to avoid instability conditions in a source plasma chamber
JPWO2017090167A1 (ja) * 2015-11-26 2018-09-13 ギガフォトン株式会社 極端紫外光生成装置
WO2017130346A1 (ja) * 2016-01-28 2017-08-03 ギガフォトン株式会社 極端紫外光生成装置
WO2017154111A1 (ja) * 2016-03-08 2017-09-14 ギガフォトン株式会社 極端紫外光生成装置
WO2017163345A1 (ja) * 2016-03-23 2017-09-28 ギガフォトン株式会社 極端紫外光生成装置及び極端紫外光の重心位置の制御方法
US9778022B1 (en) 2016-09-14 2017-10-03 Asml Netherlands B.V. Determining moving properties of a target in an extreme ultraviolet light source
US10149375B2 (en) 2016-09-14 2018-12-04 Asml Netherlands B.V. Target trajectory metrology in an extreme ultraviolet light source
JP6775606B2 (ja) * 2017-01-12 2020-10-28 ギガフォトン株式会社 極端紫外光生成システム
WO2018131146A1 (ja) * 2017-01-13 2018-07-19 ギガフォトン株式会社 極端紫外光生成システム
WO2018172012A1 (en) * 2017-03-20 2018-09-27 Asml Netherlands B.V. Lithographic system, euv radiation source, lithographic scanning apparatus and control system
JP6866471B2 (ja) 2017-03-27 2021-04-28 ギガフォトン株式会社 Ｅｕｖ光生成装置
JP7225224B2 (ja) 2017-10-26 2023-02-20 エーエスエムエル ネザーランズ ビー．ブイ． プラズマをモニタするためのシステム
WO2019192841A1 (en) * 2018-04-03 2019-10-10 Asml Netherlands B.V. Spatial modulation of a light beam
KR102524267B1 (ko) * 2018-09-12 2023-04-20 사이머 엘엘씨 가스 방전 스테이지의 바디의 계측
NL2023633A (en) * 2018-09-25 2020-04-30 Asml Netherlands Bv Laser system for target metrology and alteration in an euv light source
WO2020086901A1 (en) * 2018-10-26 2020-04-30 Asml Netherlands B.V. Monitoring light emissions
TWI886110B (zh) 2019-01-30 2025-06-11 荷蘭商Ａｓｍｌ荷蘭公司 估計移動目標之性質之方法及裝置
KR20210127948A (ko) 2019-02-26 2021-10-25 에이에스엠엘 네델란즈 비.브이. 극자외 광원 내의 타겟 공급 제어 장치 및 방법
TWI853016B (zh) * 2019-04-29 2024-08-21 荷蘭商Ａｓｍｌ荷蘭公司 使用機械濾光器之度量衡裝置及方法
US11320744B2 (en) * 2020-05-22 2022-05-03 Taiwan Semiconductor Manufacturing Co., Ltd. Method and apparatus for controlling extreme ultraviolet light
CN115669232A (zh) * 2020-05-28 2023-01-31 Asml荷兰有限公司 极紫外光源的对准
KR20230031288A (ko) * 2020-07-06 2023-03-07 에이에스엠엘 네델란즈 비.브이. 레이저-대-액적 정렬을 위한 시스템 및 방법
CN112629654A (zh) * 2020-12-11 2021-04-09 苏州瑞派宁科技有限公司 检测装置、激光等离子光源及其调节方法
DE102020134109B3 (de) * 2020-12-18 2022-05-25 Primes GmbH Meßtechnik für die Produktion mit Laserstrahlung Vorrichtung und Verfahren zur Fokuslagen-Bestimmung

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US7217940B2 (en) * 2003-04-08 2007-05-15 Cymer, Inc. Collector for EUV light source
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US7633070B2 (en) 2006-12-18 2009-12-15 Kla-Tencor Technologies Corporation Substrate processing apparatus and method
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US8173985B2 (en) 2009-12-15 2012-05-08 Cymer, Inc. Beam transport system for extreme ultraviolet light source
US8000212B2 (en) 2009-12-15 2011-08-16 Cymer, Inc. Metrology for extreme ultraviolet light source

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