JP2014518015A - スピントルクトランスファーメモリセル構造および方法 - Google Patents
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- 239000004020 conductor Substances 0.000 claims description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 3
- 229910000859 α-Fe Inorganic materials 0.000 claims description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 2
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- 239000000126 substance Substances 0.000 claims 4
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
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- 229910052793 cadmium Inorganic materials 0.000 description 1
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- 239000000788 chromium alloy Substances 0.000 description 1
- WYDVQMAEAOAAAJ-UHFFFAOYSA-N chromium copper iron nickel Chemical compound [Fe][Cr][Cu][Ni] WYDVQMAEAOAAAJ-UHFFFAOYSA-N 0.000 description 1
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- -1 iron metal nitride Chemical class 0.000 description 1
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- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/14—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using thin-film elements
- G11C11/15—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using thin-film elements using multiple magnetic layers
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/16—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect
- G11C11/161—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using elements in which the storage effect is based on magnetic spin effect details concerning the memory cell structure, e.g. the layers of the ferromagnetic memory cell
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66984—Devices using spin polarized carriers
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Mram Or Spin Memory Techniques (AREA)
- Hall/Mr Elements (AREA)
- Semiconductor Memories (AREA)
Abstract
【選択図】図1A
Description
Claims (30)
- 第一の強磁性体と第二の強磁性体との間に非磁性体を含む環状スピントルクトランスファー(STT)スタックと、
前記環状STTスタックの少なくとも一部を囲む軟磁性体と、を備える、スピントルクトランスファー(STT)メモリセル構造。 - 前記軟磁性体と前記第一の強磁性体との間に形成された強磁性結合体をさらに備える、請求項1記載のメモリセル構造。
- 前記第一の強磁性体が遊離体であり、前記第二の強磁性体が固定体である、請求項2記載のメモリセル構造。
- 前記強磁性結合体が、前記遊離強磁性体と前記軟磁性体との間の平行結合を発生させるように構成されている、請求項3記載のメモリセル構造。
- 前記非磁性体が絶縁体である、請求項1〜4のいずれか1項記載のメモリセル構造。
- 前記非磁性体が導電体である、請求項1〜4のいずれか1項記載のメモリセル構造。
- 前記軟磁性体の透磁率が約500Hm−1を超える、請求項1〜4のいずれか1項記載のメモリセル構造。
- 前記環状STTスタックが、第一の電極と第二の電極との間に形成されている、請求項1〜4のいずれか1項記載のメモリセル構造。
- 遊離強磁性体と固定強磁性体との間に非磁性体を含む環状STTスタックと、
前記遊離強磁性体の少なくとも一部を囲む軟磁性体と、
前記軟磁性体と前記遊離強磁性体との間に形成された強磁性結合体と、を備える、STTメモリセル構造。 - 前記環状STTスタックおよび前記軟磁性体が、第一の電極と第二の電極との間に存在する、請求項9記載のメモリセル構造。
- 前記環状STTスタックが閉じた磁束経路を提供する、請求項9記載のメモリセル構造。
- 前記軟磁性体が、前記強磁性結合体を介して前記遊離強磁性体の磁化に影響する磁化によって磁化される、請求項9記載のメモリセル構造。
- 前記強磁性結合体が、酸化クロム(III)(Cr2O3)、硫化亜鉛(ZnS)、セレン化亜鉛(ZnSe)、窒化ホウ素(BN)、酸化アルミニウム(Al2O3)、および酸化マグネシウム(MgO)の少なくとも一つを含む、請求項9〜12のいずれか1項記載のメモリセル構造。
- 前記軟磁性体が、前記環状STTメモリセル構造に関連するプログラミング電流によって生成された磁場の少なくとも一部を制限する、請求項9〜12のいずれか1項記載のメモリセル構造。
- 前記強磁性結合体が、前記遊離強磁性体と前記軟磁性体との間に過渡の平行強磁性結合を提供する、請求項9〜12のいずれか1項記載のメモリセル構造。
- 環状STTメモリセルを動作させる方法であって、
第一の電極と第二の電極との間の環状STTスタックを流れる電流を供給することを含み、前記環状STTスタックが、
遊離強磁性体と固定強磁性体との間に形成された非磁性体を含み、
この場合、前記電流が前記遊離強磁性体の少なくとも一部を囲む軟磁性体に環状磁化を発生させ、
前記生じた環状磁化が、前記軟磁性体と前記遊離強磁性体との間の強磁性結合体を介して前記遊離強磁性体の磁化を変化させる、方法。 - 前記電流がプログラミング電流である、請求項16記載の方法。
- 前記STTメモリセルに伴う不可欠なスイッチング電流を低減することを含む、請求項16記載の方法。
- 前記軟磁性体の前記磁化が前記遊離強磁性体に力を及ぼす、請求項16〜18のいずれか1項記載の方法。
- STTメモリセル構造を形成する方法であって、
第一の電極と第二の電極との間に、第一の強磁性体と第二の強磁性体との間に形成された非磁性体を含む環状STTスタックを形成することと、
前記第一および第二の強磁性体、ならびに前記非磁性体の周りに結合体を形成することと、
前記結合体の周りに、前記第一の強磁性体の少なくとも一部を囲む軟磁性体を形成することと、を含む、方法。 - 前記結合体が前記第一の強磁性体と前記軟磁性体との間に平行結合を発生させる、請求項20記載の方法。
- 前記軟磁性体を形成することが、前記結合体の外面全体を包含するように前記軟磁性体を形成することを含む、請求項20記載の方法。
- 前記結合体を形成することが、前記第一の強磁性体の外面全体を包含するように前記結合体を形成することを含む、請求項20記載の方法。
- 前記軟磁性体が、前記STTメモリセル構造に関連するプログラミング電流によって生成された磁場の少なくとも一部を制限する、請求項20記載の方法。
- 前記第一の強磁性体が遊離強磁性体であり、前記第二の強磁性体が固定強磁性体である、請求項20記載の方法。
- 前記軟磁性体の透磁率が約500Hm−1を超える、請求項20〜25のいずれか1項記載の方法。
- 前記軟磁性体が、Mu−金属材料、パーマロイ材料、フェライト材料、および電磁鋼板材料の少なくとも一つである、請求項26記載の方法。
- STTメモリセル構造を形成する方法であって、
第一の電極と第二の電極との間に、遊離強磁性体と固定強磁性体との間に形成され、かつそれらに接触する非磁性体を含む環状STTスタックを形成することと、
前記環状スタックの周りに、前記第一の遊離強磁性体の外面全体を包含し、前記STTメモリセル構造の動作に関連する電流によって生成された磁場の少なくとも一部を制限する軟磁性体を形成することと、を含む、方法。 - 結合体の内面が前記遊離強磁性体の外面の少なくとも一部に接触するように、前記環状スタックと前記軟磁性体との間に前記結合体を形成することを含む、請求項28記載の方法。
- 前記電流が前記軟磁性体に環状磁化を発生させる、請求項28または29記載の方法。
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US13/108,385 | 2011-05-16 | ||
US13/108,385 US8472240B2 (en) | 2011-05-16 | 2011-05-16 | Spin torque transfer memory cell structures and methods |
PCT/US2012/036083 WO2012158347A2 (en) | 2011-05-16 | 2012-05-02 | Spin torque transfer memory cell structures and methods |
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JP2014518015A true JP2014518015A (ja) | 2014-07-24 |
JP5795685B2 JP5795685B2 (ja) | 2015-10-14 |
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US (2) | US8472240B2 (ja) |
EP (1) | EP2710633B1 (ja) |
JP (1) | JP5795685B2 (ja) |
KR (1) | KR101572343B1 (ja) |
CN (1) | CN103597599B (ja) |
TW (1) | TWI540704B (ja) |
WO (1) | WO2012158347A2 (ja) |
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US9166150B2 (en) | 2012-12-21 | 2015-10-20 | Intel Corporation | Electric field enhanced spin transfer torque memory (STTM) device |
US9019754B1 (en) | 2013-12-17 | 2015-04-28 | Micron Technology, Inc. | State determination in resistance variable memory |
US10411184B1 (en) | 2018-03-02 | 2019-09-10 | Samsung Electronics Co., Ltd. | Vertical spin orbit torque devices |
JP6952672B2 (ja) * | 2018-11-28 | 2021-10-20 | 株式会社東芝 | 磁気記憶装置 |
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EP2710633B1 (en) | 2018-01-31 |
WO2012158347A2 (en) | 2012-11-22 |
CN103597599A (zh) | 2014-02-19 |
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KR101572343B1 (ko) | 2015-12-04 |
WO2012158347A3 (en) | 2013-01-10 |
TW201301483A (zh) | 2013-01-01 |
US9165627B2 (en) | 2015-10-20 |
CN103597599B (zh) | 2016-08-24 |
US20130286727A1 (en) | 2013-10-31 |
TWI540704B (zh) | 2016-07-01 |
US8472240B2 (en) | 2013-06-25 |
US20120294077A1 (en) | 2012-11-22 |
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KR20140007475A (ko) | 2014-01-17 |
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