JP2014518009A5 - - Google Patents
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- Publication number
- JP2014518009A5 JP2014518009A5 JP2014508603A JP2014508603A JP2014518009A5 JP 2014518009 A5 JP2014518009 A5 JP 2014518009A5 JP 2014508603 A JP2014508603 A JP 2014508603A JP 2014508603 A JP2014508603 A JP 2014508603A JP 2014518009 A5 JP2014518009 A5 JP 2014518009A5
- Authority
- JP
- Japan
- Prior art keywords
- light
- process chamber
- processing system
- reflected
- photodetector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 claims 24
- 238000004140 cleaning Methods 0.000 claims 5
- 238000001514 detection method Methods 0.000 claims 2
- 230000001678 irradiating effect Effects 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- 238000012544 monitoring process Methods 0.000 claims 2
- 239000010453 quartz Substances 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- 230000003749 cleanliness Effects 0.000 claims 1
- 230000000737 periodic effect Effects 0.000 claims 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201161480839P | 2011-04-29 | 2011-04-29 | |
| US61/480,839 | 2011-04-29 | ||
| US13/440,564 | 2012-04-05 | ||
| US13/440,564 US9347132B2 (en) | 2011-04-29 | 2012-04-05 | Optical endpoint detection system |
| PCT/US2012/035469 WO2012149331A2 (en) | 2011-04-29 | 2012-04-27 | Optical endpoint detection system |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014518009A JP2014518009A (ja) | 2014-07-24 |
| JP2014518009A5 true JP2014518009A5 (enExample) | 2015-06-18 |
| JP6019105B2 JP6019105B2 (ja) | 2016-11-02 |
Family
ID=47066950
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014508603A Active JP6019105B2 (ja) | 2011-04-29 | 2012-04-27 | 光学的終点検出システム |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US9347132B2 (enExample) |
| JP (1) | JP6019105B2 (enExample) |
| KR (1) | KR101742478B1 (enExample) |
| CN (1) | CN103493192B (enExample) |
| SG (1) | SG194450A1 (enExample) |
| TW (1) | TWI538079B (enExample) |
| WO (1) | WO2012149331A2 (enExample) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10047457B2 (en) | 2013-09-16 | 2018-08-14 | Applied Materials, Inc. | EPI pre-heat ring |
| US10153141B2 (en) | 2014-02-14 | 2018-12-11 | Electronics And Telecommunications Research Institute | Apparatus for monitoring gas and plasma process equipment including the same |
| US10053777B2 (en) * | 2014-03-19 | 2018-08-21 | Applied Materials, Inc. | Thermal processing chamber |
| JP2018046044A (ja) * | 2016-09-12 | 2018-03-22 | 大陽日酸株式会社 | サセプタのクリーニング装置及びクリーニング方法 |
| US10043641B2 (en) | 2016-09-22 | 2018-08-07 | Applied Materials, Inc. | Methods and apparatus for processing chamber cleaning end point detection |
| CN109226131A (zh) * | 2018-10-11 | 2019-01-18 | 武汉华星光电半导体显示技术有限公司 | 清洗终点监测方法以及监测装置 |
| CN109365410B (zh) * | 2018-10-17 | 2020-09-18 | 北京航天控制仪器研究所 | 一种实现高效激光清洗的加工头装置及清洗方法 |
| CN114270487B (zh) | 2019-07-26 | 2025-10-10 | 应用材料公司 | 基板处理监控 |
| US11708635B2 (en) | 2020-06-12 | 2023-07-25 | Applied Materials, Inc. | Processing chamber condition and process state monitoring using optical reflector attached to processing chamber liner |
| US12009191B2 (en) | 2020-06-12 | 2024-06-11 | Applied Materials, Inc. | Thin film, in-situ measurement through transparent crystal and transparent substrate within processing chamber wall |
| US12031910B2 (en) | 2021-09-15 | 2024-07-09 | Applied Materials, Inc. | Transmission corrected plasma emission using in-situ optical reflectometry |
| US12469686B2 (en) | 2022-03-16 | 2025-11-11 | Applied Materials, Inc. | Process characterization and correction using optical wall process sensor (OWPS) |
| US12467136B2 (en) | 2022-03-16 | 2025-11-11 | Applied Materials, Inc. | Process characterization and correction using optical wall process sensor (OWPS) |
| USD1031743S1 (en) | 2022-05-06 | 2024-06-18 | Applied Materials, Inc. | Portion of a display panel with a graphical user interface |
| US20250038040A1 (en) * | 2023-07-27 | 2025-01-30 | Applied Materials, Inc. | Lift frames for central heating, and related processing chambers and methods |
| CN120072606A (zh) * | 2023-11-28 | 2025-05-30 | 北京北方华创微电子装备有限公司 | 半导体工艺设备及其控制方法 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6129807A (en) | 1997-10-06 | 2000-10-10 | Applied Materials, Inc. | Apparatus for monitoring processing of a substrate |
| JPH11140655A (ja) | 1997-11-14 | 1999-05-25 | Sony Corp | プラズマ処理装置 |
| JP3535785B2 (ja) | 1999-11-26 | 2004-06-07 | Ｎｅｃエレクトロニクス株式会社 | クリーニング終点検出装置およびクリーニング終点検出方法 |
| JP2002057149A (ja) | 2000-08-08 | 2002-02-22 | Tokyo Electron Ltd | 処理装置及びそのクリーニング方法 |
| JP2002246320A (ja) | 2001-02-20 | 2002-08-30 | Hitachi Ltd | プラズマ処理装置のプラズマクリーニング方法 |
| JP2004047020A (ja) * | 2002-07-15 | 2004-02-12 | Fuji Electric Holdings Co Ltd | 磁気ディスク媒体及び固定磁気ディスク装置 |
| KR100844273B1 (ko) | 2002-12-20 | 2008-07-07 | 동부일렉트로닉스 주식회사 | 챔버 세정장치 |
| US8460945B2 (en) | 2003-09-30 | 2013-06-11 | Tokyo Electron Limited | Method for monitoring status of system components |
| US20060021633A1 (en) * | 2004-07-27 | 2006-02-02 | Applied Materials, Inc. | Closed loop clean gas control |
| US7534469B2 (en) * | 2005-03-31 | 2009-05-19 | Asm Japan K.K. | Semiconductor-processing apparatus provided with self-cleaning device |
| EP1926125B1 (en) * | 2006-10-30 | 2011-02-16 | Applied Materials, Inc. | Endpoint detection for photomask etching |
| US20080176149A1 (en) | 2006-10-30 | 2008-07-24 | Applied Materials, Inc. | Endpoint detection for photomask etching |
| TWM350205U (en) | 2007-02-01 | 2009-02-01 | Applied Materials Inc | Gas injection nozzle |
-
2012
- 2012-04-05 US US13/440,564 patent/US9347132B2/en active Active
- 2012-04-26 TW TW101114953A patent/TWI538079B/zh not_active IP Right Cessation
- 2012-04-27 JP JP2014508603A patent/JP6019105B2/ja active Active
- 2012-04-27 SG SG2013075577A patent/SG194450A1/en unknown
- 2012-04-27 KR KR1020137031675A patent/KR101742478B1/ko active Active
- 2012-04-27 WO PCT/US2012/035469 patent/WO2012149331A2/en not_active Ceased
- 2012-04-27 CN CN201280019970.5A patent/CN103493192B/zh active Active
-
2016
- 2016-05-23 US US15/162,160 patent/US10179354B2/en active Active
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