JP2014515789A - 蒸着アプリケーションのための測定装置及び方法 - Google Patents
蒸着アプリケーションのための測定装置及び方法 Download PDFInfo
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Abstract
Description
Claims (15)
- 蒸着アプリケーション、とりわけ有機発光ダイオード(OLED)の大量生産において、第1の蒸発源の蒸着速度すなわち前記第1の蒸発源によって基板上に蒸着される層の厚さを求めるための測定機器であって、
気化物質の少なくとも1つの膜が蒸着され得る面を与えるための移動式要素であって、前記膜は第2の蒸発源によって蒸着位置に蒸着される、前記移動式要素と、
前記移動式要素上に蒸着される膜の前記厚さを求めるための厚さ検出器であって、前記移動式要素上に蒸着される膜の前記厚さが検出される検出位置において、前記移動式要素と向かい合って配置される、前記厚さ検出器と、
前記移動式要素を搬送するためのアクチュエータ装置と
を含む測定機器であって、
前記測定機器は、前記移動式要素を前記蒸着位置から前記検出位置まで供給し、
前記測定機器は、前記第2の蒸発源によって前記移動式要素上に蒸着される前記少なくとも1つの膜の前記厚さに応じて、前記第1の蒸発源の前記蒸着を更に測定し且つ/又は制御する、
測定機器。 - 前記測定機器が、特定の時間遅延の範囲内で前記移動式要素を前記蒸着位置から前記検出位置まで更に供給し、
特定の検出時点について、前記測定機器が、前記移動式要素の特定の表面領域を前記蒸着時点に更に相関させ、それによりこの表面領域内の前記膜の前記厚さが前記蒸着時点との相関関係において検出され得る、
請求項1に記載の測定機器。 - 前記機器が、前記蒸着位置における蒸着点及び前記検出位置における検出点に関連して、前記蒸着時点と前記検出時点との間の時間遅延を調節し、前記時間遅延が数秒から数分の範囲内にある、請求項2に記載の測定機器。
- 前記アクチュエータ装置が搬送速度を調節し、前記厚さ検出器が前記膜の前記厚さを光学的に検出し、前記アクチュエータ装置が送り装置及びカセットを含み、前記膜の最適な厚さの厚さ値が約10nmから200nmの範囲内にある、請求項1に記載の測定機器。
- 前記アクチュエータ装置が、送り装置、カセット、及び少なくとも1つの偏向滑車を含むカセットテープシステム形式で提供され、
前記移動式要素が、テープ形式で提供されるバンド式コンベアであり、
前記バンド式コンベアが、10nmから200nmの厚さの膜を扱う、
請求項1に記載の測定機器。 - 請求項1に記載の測定機器を含む蒸発装置であって、基板上に少なくとも1つの層を蒸着させるための多数のシャワーノズルを有するシャワーヘッド形式の第1の蒸発源と、前記測定機器によって与えられる移動式要素上に少なくとも1つの膜を蒸着させるための第2の蒸発源とを更に含み、
前記測定機器によって与えられる前記アクチュエータ装置が、前記移動式要素上に膜が蒸着され得るように、前記移動式要素を前記第2の蒸発源に沿って搬送し、
前記蒸発装置が、前記基板上に蒸着される任意の層の前記厚さとは独立に、前記移動式要素上に膜厚を与える、
蒸発装置。 - 前記移動式要素は、搬送速度が前記基板の送り速度に一致するように前記基板の前記送り速度と同じ送り速度で、前記基板上に層が前記蒸着されるのと同時に、前記第2の蒸発源によって膜が蒸着され得る面を与え、
更に前記蒸発装置が、層の厚さを求めるために、とりわけ前記測定機器によって与えられる特定の時間遅延情報に基づき、第1の蒸発源によって前記基板上に蒸着される層の前記厚さに対し、測定される膜厚を相関させる、
請求項6に記載の蒸発装置。 - 前記測定機器が、従来の水晶発振器の位置と向かい合った位置に、又は従来の水晶発振器が代わりに配置され得る位置に配置され、
前記基板及び前記移動式要素に蒸着させるための気化物質が、前記蒸発装置に配置される蒸発器によって与えられ、
前記蒸発装置が、前記第2の蒸発源のサイズ、前記第2の蒸発源の幾何学的配置、蒸着点における前記移動式要素と前記第2の蒸発源との間の距離、及び/又は前記搬送速度のうちの少なくとも1つにより、前記移動式要素上に蒸着される前記膜の前記厚さを調節し、
前記第2の蒸発源及び前記測定機器が、前記移動式要素上に様々な材料を独立に蒸着させ、単一層膜を測定する、
請求項6に記載の蒸発装置。 - 蒸着アプリケーション、とりわけ有機発光ダイオード(OLED)の大量生産において、第1の蒸発源の蒸着速度すなわち前記第1の蒸発源によって基板上に蒸着される層の厚さを求める方法であって、
基板上に少なくとも1つの層が蒸着され得るように前記基板を前記第1の蒸発源に沿って通過させるステップと、
基板を通過させるステップと同時に、蒸着位置において移動式要素上に少なくとも1つの膜が蒸着され得るように、前記移動式要素を第2の蒸発源に沿ってアクチュエータ装置によって搬送するステップと、
前記第2の蒸発源により前記移動式要素上に少なくとも1つの膜を蒸着させるステップであって、それぞれの膜は、前記基板上に蒸着されるそれぞれの層の前記厚さの目標値に応じて規定される厚さで与えられる、前記蒸着させるステップと、
それぞれの膜に、前記膜の最適な厚さの厚さ値を与えるために、前記アクチュエータ装置を調節するステップと
を含む、方法。 - 検出位置内の前記蒸着膜の前記厚さを厚さ検出器によって検出するステップであって、一定の時間遅延の後に検出が行われても良いように前記検出位置が前記蒸着位置と異なる、検出するステップを更に含み、
特定の検出時点について、前記測定機器が、前記移動式要素の特定の表面領域を前記蒸着時点に更に相関させ、これによりこの表面領域内の前記膜の前記厚さが前記蒸着時点との相関関係において検出され得る、
請求項9に記載の方法。 - 前記機器が、前記移動式要素を前記蒸着位置から前記検出位置まで供給し、
検出の測定値が、基板上に蒸着される層の前記厚さに比例する、
請求項10に記載の方法。 - 初期較正が、従来の水晶発振器に使用されるツーリングプロセスと同様のツーリングプロセスによって行われる、請求項9に記載の方法。
- 蒸着アプリケーション、とりわけ有機発光ダイオード(OLED)の大量生産において、第1の蒸発源の蒸着速度すなわち前記第1の蒸発源によって基板上に蒸着される層の厚さを求めるためのシステムであって、
請求項6に記載の蒸発装置と、
蒸発チャンバーと
を含み、
第2の蒸発源が、前記第1の蒸発源の前記蒸着速度に応じた膜厚を有する少なくとも1つの膜を蒸着できるように、前記蒸発装置によって与えられる前記第2の蒸発源が前記蒸発装置によって与えられる前記第1の蒸発源と通信し、
測定機器は、基板上に蒸着される層の前記厚さとは独立に、移動式要素上に蒸着される膜の厚さを調節する、
システム。 - 前記厚さ検出器は別にして、前記測定機器が前記蒸発チャンバー内に完全に配置され、
前記厚さ検出器の少なくとも測定ヘッドが前記蒸発チャンバーの外側に設置され、前記移動式要素がのぞき窓を介して観測され、
前記基板及び前記移動式要素に蒸着させるための気化物質が、前記蒸発装置の本体構造内に配置される蒸発器によって与えられる、
請求項13に記載のシステム。 - 計算装置上で実行されるときに請求項9に記載の方法のステップを作り出すためのコード手段を含む、コンピュータプログラム。
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PCT/IB2012/051871 WO2012143840A1 (en) | 2011-04-20 | 2012-04-16 | Measurement device and method for vapour deposition applications |
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EP (1) | EP2699710A1 (ja) |
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