JP2014513390A5 - - Google Patents

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Publication number
JP2014513390A5
JP2014513390A5 JP2014502755A JP2014502755A JP2014513390A5 JP 2014513390 A5 JP2014513390 A5 JP 2014513390A5 JP 2014502755 A JP2014502755 A JP 2014502755A JP 2014502755 A JP2014502755 A JP 2014502755A JP 2014513390 A5 JP2014513390 A5 JP 2014513390A5
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Japan
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grid
ion
incident
energy analyzer
substrate
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JP2014502755A
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JP6023787B2 (ja
JP2014513390A (ja
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Priority claimed from PCT/US2012/030960 external-priority patent/WO2012135351A2/en
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Publication of JP2014513390A5 publication Critical patent/JP2014513390A5/ja
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JP2014502755A 2011-03-28 2012-03-28 イオンエネルギーアナライザ、イオンエネルギーアナライザを有する診断用ウエハ Expired - Fee Related JP6023787B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161468187P 2011-03-28 2011-03-28
US61/468,187 2011-03-28
PCT/US2012/030960 WO2012135351A2 (en) 2011-03-28 2012-03-28 Ion energy analyzer, methods of electrical signaling therein, and methods of manufacturing and operating the same

Publications (3)

Publication Number Publication Date
JP2014513390A JP2014513390A (ja) 2014-05-29
JP2014513390A5 true JP2014513390A5 (cg-RX-API-DMAC7.html) 2015-05-14
JP6023787B2 JP6023787B2 (ja) 2016-11-09

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JP2014502755A Expired - Fee Related JP6023787B2 (ja) 2011-03-28 2012-03-28 イオンエネルギーアナライザ、イオンエネルギーアナライザを有する診断用ウエハ

Country Status (6)

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US (3) US9087677B2 (cg-RX-API-DMAC7.html)
JP (1) JP6023787B2 (cg-RX-API-DMAC7.html)
KR (1) KR101967490B1 (cg-RX-API-DMAC7.html)
CN (1) CN103534780B (cg-RX-API-DMAC7.html)
TW (1) TWI505318B (cg-RX-API-DMAC7.html)
WO (1) WO2012135351A2 (cg-RX-API-DMAC7.html)

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