KR101967490B1 - 이온 에너지 분석기, 그 내부에서의 전기 신호화 방법, 그 제작 방법 및 작동 방법 - Google Patents

이온 에너지 분석기, 그 내부에서의 전기 신호화 방법, 그 제작 방법 및 작동 방법 Download PDF

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KR101967490B1
KR101967490B1 KR1020137028485A KR20137028485A KR101967490B1 KR 101967490 B1 KR101967490 B1 KR 101967490B1 KR 1020137028485 A KR1020137028485 A KR 1020137028485A KR 20137028485 A KR20137028485 A KR 20137028485A KR 101967490 B1 KR101967490 B1 KR 101967490B1
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grid
ion
plasma
energy analyzer
selection
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Korean (ko)
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KR20140030168A (ko
Inventor
리 첸
바톤 레인
메릿 펑크
지안핑 자오
래드하 선다라라잔
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도쿄엘렉트론가부시키가이샤
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/488—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with retarding grids
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
    • H05H1/0081—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature by electric means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Plasma Technology (AREA)
  • Drying Of Semiconductors (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
KR1020137028485A 2011-03-28 2012-03-28 이온 에너지 분석기, 그 내부에서의 전기 신호화 방법, 그 제작 방법 및 작동 방법 Expired - Fee Related KR101967490B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161468187P 2011-03-28 2011-03-28
US61/468,187 2011-03-28
PCT/US2012/030960 WO2012135351A2 (en) 2011-03-28 2012-03-28 Ion energy analyzer, methods of electrical signaling therein, and methods of manufacturing and operating the same

Publications (2)

Publication Number Publication Date
KR20140030168A KR20140030168A (ko) 2014-03-11
KR101967490B1 true KR101967490B1 (ko) 2019-04-09

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KR1020137028485A Expired - Fee Related KR101967490B1 (ko) 2011-03-28 2012-03-28 이온 에너지 분석기, 그 내부에서의 전기 신호화 방법, 그 제작 방법 및 작동 방법

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Country Link
US (3) US9087677B2 (cg-RX-API-DMAC7.html)
JP (1) JP6023787B2 (cg-RX-API-DMAC7.html)
KR (1) KR101967490B1 (cg-RX-API-DMAC7.html)
CN (1) CN103534780B (cg-RX-API-DMAC7.html)
TW (1) TWI505318B (cg-RX-API-DMAC7.html)
WO (1) WO2012135351A2 (cg-RX-API-DMAC7.html)

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Also Published As

Publication number Publication date
US20120248311A1 (en) 2012-10-04
US9087677B2 (en) 2015-07-21
WO2012135351A2 (en) 2012-10-04
CN103534780A (zh) 2014-01-22
JP6023787B2 (ja) 2016-11-09
TWI505318B (zh) 2015-10-21
US8816281B2 (en) 2014-08-26
WO2012135351A3 (en) 2012-11-15
CN103534780B (zh) 2016-07-06
US8847159B2 (en) 2014-09-30
KR20140030168A (ko) 2014-03-11
US20120248310A1 (en) 2012-10-04
TW201250764A (en) 2012-12-16
JP2014513390A (ja) 2014-05-29
US20120248322A1 (en) 2012-10-04

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