TWI505318B - 離子能量分析儀與其中之電訊號產生方法、及其製造與操作方法 - Google Patents
離子能量分析儀與其中之電訊號產生方法、及其製造與操作方法 Download PDFInfo
- Publication number
- TWI505318B TWI505318B TW101110830A TW101110830A TWI505318B TW I505318 B TWI505318 B TW I505318B TW 101110830 A TW101110830 A TW 101110830A TW 101110830 A TW101110830 A TW 101110830A TW I505318 B TWI505318 B TW I505318B
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- Prior art keywords
- ion
- grid
- plasma
- ion energy
- energy analyzer
- Prior art date
Links
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32917—Plasma diagnostics
- H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
- H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
- H01J49/488—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with retarding grids
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/0006—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature
- H05H1/0081—Investigating plasma, e.g. measuring the degree of ionisation or the electron temperature by electric means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
- Drying Of Semiconductors (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Sources, Ion Sources (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201161468187P | 2011-03-28 | 2011-03-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201250764A TW201250764A (en) | 2012-12-16 |
| TWI505318B true TWI505318B (zh) | 2015-10-21 |
Family
ID=46925972
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101110830A TWI505318B (zh) | 2011-03-28 | 2012-03-28 | 離子能量分析儀與其中之電訊號產生方法、及其製造與操作方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (3) | US9087677B2 (cg-RX-API-DMAC7.html) |
| JP (1) | JP6023787B2 (cg-RX-API-DMAC7.html) |
| KR (1) | KR101967490B1 (cg-RX-API-DMAC7.html) |
| CN (1) | CN103534780B (cg-RX-API-DMAC7.html) |
| TW (1) | TWI505318B (cg-RX-API-DMAC7.html) |
| WO (1) | WO2012135351A2 (cg-RX-API-DMAC7.html) |
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| TWI485024B (zh) * | 2013-01-15 | 2015-05-21 | Univ Nat Yunlin Sci & Tech | Laser processing device with auxiliary plate |
| TWI493194B (zh) * | 2013-07-15 | 2015-07-21 | Mpi Corp | Probe module with feedback test function |
| US9500675B2 (en) | 2013-07-15 | 2016-11-22 | Mpi Corporation | Probe module supporting loopback test |
| CN104422478B (zh) * | 2013-08-23 | 2017-05-17 | 中国科学院空间科学与应用研究中心 | 一种超高速撞击中瞬态等离子体参数测量的方法 |
| US20180218895A1 (en) * | 2013-12-31 | 2018-08-02 | DH Technologies Development Pte Ltd. | Method for Removing Trapped Ions from a Multipole Device |
| CN105607107B (zh) * | 2014-11-21 | 2018-05-04 | 中国科学院空间科学与应用研究中心 | 一种利用栅网调控的空间能量粒子的多方向探测装置 |
| US9595424B2 (en) | 2015-03-02 | 2017-03-14 | Lam Research Corporation | Impedance matching circuit for operation with a kilohertz RF generator and a megahertz RF generator to control plasma processes |
| US10553411B2 (en) * | 2015-09-10 | 2020-02-04 | Taiwan Semiconductor Manufacturing Co., Ltd. | Ion collector for use in plasma systems |
| US9761414B2 (en) | 2015-10-08 | 2017-09-12 | Lam Research Corporation | Uniformity control circuit for use within an impedance matching circuit |
| DE102016204679B4 (de) * | 2016-03-22 | 2019-03-21 | Airbus Defence and Space GmbH | Ionensensor |
| US10026592B2 (en) | 2016-07-01 | 2018-07-17 | Lam Research Corporation | Systems and methods for tailoring ion energy distribution function by odd harmonic mixing |
| KR102543349B1 (ko) * | 2016-07-11 | 2023-06-30 | 삼성전자주식회사 | 플라즈마 모니터링 장치 |
| US20180122670A1 (en) * | 2016-11-01 | 2018-05-03 | Varian Semiconductor Equipment Associates, Inc. | Removable substrate plane structure ring |
| KR20190014623A (ko) * | 2017-08-03 | 2019-02-13 | 삼성전자주식회사 | 플라즈마 공정 장치 및 이를 이용한 반도체 장치 제조 방법 |
| CN108022824A (zh) * | 2017-11-21 | 2018-05-11 | 中国科学技术大学 | 高精度离子能量分析仪 |
| US11153960B1 (en) * | 2018-06-08 | 2021-10-19 | Innoveering, LLC | Plasma-based electro-optical sensing and methods |
| JP7202972B2 (ja) | 2018-06-29 | 2023-01-12 | 東京エレクトロン株式会社 | プラズマ処理装置、プラズマ状態検出方法およびプラズマ状態検出プログラム |
| WO2020004091A1 (ja) | 2018-06-29 | 2020-01-02 | 東京エレクトロン株式会社 | プラズマ処理装置、プラズマ状態検出方法およびプラズマ状態検出プログラム |
| WO2021089127A1 (de) * | 2019-11-05 | 2021-05-14 | Ev Group E. Thallner Gmbh | Verfahren zur herstellung einer analysevorrichtung |
| EP3968353A1 (en) | 2020-09-10 | 2022-03-16 | Impedans Ltd | Apparatus for ion energy analysis of plasma processes |
| US11264212B1 (en) | 2020-09-29 | 2022-03-01 | Tokyo Electron Limited | Ion angle detector |
| CN112696329B (zh) * | 2020-12-14 | 2022-06-10 | 兰州空间技术物理研究所 | 一种离子推力器栅极绝缘连接结构及装配方法 |
| KR20250033239A (ko) * | 2022-06-30 | 2025-03-07 | 도쿄엘렉트론가부시키가이샤 | 조정 방법 및 플라즈마 처리 장치 |
| EP4625471A3 (en) * | 2022-11-25 | 2025-12-31 | Applied Materials, Inc. | ARMORED APPARATUS FOR THE ANALYSIS OF THE IONIC ENERGY OF PLASMA PROCESSES |
| US12555756B2 (en) | 2023-10-19 | 2026-02-17 | Tokyo Electron Limited | System and method to measure ion properties in a plasma system |
| WO2025159420A1 (ko) * | 2024-01-25 | 2025-07-31 | (주)아이씨디 | 플라즈마에서 대상물의 전위 제어 장치 및 그 전위 제어 방법 |
| US20260074174A1 (en) * | 2024-09-06 | 2026-03-12 | Applied Materials, Inc. | Retarding field energy analyzer with magnetic filter |
| CN119381231B (zh) * | 2024-09-27 | 2025-10-28 | 北京航天控制仪器研究所 | 一种离子能量筛选装置及方法 |
| CN119936953A (zh) * | 2025-01-21 | 2025-05-06 | 北京东方计量测试研究所 | 用于原位测量离子能量和通量的装置 |
| CN120468911B (zh) * | 2025-03-07 | 2025-11-04 | 中国科学院国家空间科学中心 | 一种自适应低能粒子探测系统 |
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2012
- 2012-03-28 US US13/433,078 patent/US9087677B2/en not_active Expired - Fee Related
- 2012-03-28 US US13/433,088 patent/US8816281B2/en not_active Expired - Fee Related
- 2012-03-28 JP JP2014502755A patent/JP6023787B2/ja not_active Expired - Fee Related
- 2012-03-28 TW TW101110830A patent/TWI505318B/zh not_active IP Right Cessation
- 2012-03-28 KR KR1020137028485A patent/KR101967490B1/ko not_active Expired - Fee Related
- 2012-03-28 CN CN201280023721.3A patent/CN103534780B/zh not_active Expired - Fee Related
- 2012-03-28 US US13/433,071 patent/US8847159B2/en not_active Expired - Fee Related
- 2012-03-28 WO PCT/US2012/030960 patent/WO2012135351A2/en not_active Ceased
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Also Published As
| Publication number | Publication date |
|---|---|
| US20120248311A1 (en) | 2012-10-04 |
| US9087677B2 (en) | 2015-07-21 |
| WO2012135351A2 (en) | 2012-10-04 |
| CN103534780A (zh) | 2014-01-22 |
| JP6023787B2 (ja) | 2016-11-09 |
| US8816281B2 (en) | 2014-08-26 |
| WO2012135351A3 (en) | 2012-11-15 |
| CN103534780B (zh) | 2016-07-06 |
| KR101967490B1 (ko) | 2019-04-09 |
| US8847159B2 (en) | 2014-09-30 |
| KR20140030168A (ko) | 2014-03-11 |
| US20120248310A1 (en) | 2012-10-04 |
| TW201250764A (en) | 2012-12-16 |
| JP2014513390A (ja) | 2014-05-29 |
| US20120248322A1 (en) | 2012-10-04 |
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