JP3957705B2 - プラズマ処理装置 - Google Patents
プラズマ処理装置 Download PDFInfo
- Publication number
- JP3957705B2 JP3957705B2 JP2004159531A JP2004159531A JP3957705B2 JP 3957705 B2 JP3957705 B2 JP 3957705B2 JP 2004159531 A JP2004159531 A JP 2004159531A JP 2004159531 A JP2004159531 A JP 2004159531A JP 3957705 B2 JP3957705 B2 JP 3957705B2
- Authority
- JP
- Japan
- Prior art keywords
- plasma processing
- photon detection
- plasma
- detection sensor
- processing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32917—Plasma diagnostics
- H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/12—Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing
- G01R31/1227—Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing of components, parts or materials
- G01R31/1263—Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing of components, parts or materials of solid or fluid materials, e.g. insulation films, bulk material; of semiconductors or LV electronic components or parts; of cable, line or wire insulation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/02—Details
- H01J2237/0203—Protection arrangements
- H01J2237/0206—Extinguishing, preventing or controlling unwanted discharges
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Drying Of Semiconductors (AREA)
- Plasma Technology (AREA)
Description
2…半導体ウエハ
3…ウエハステージ
4…プラズマ
5…紫外光誘起電流測定用のフォトン検出センサ
6…データ処理装置
10…Si半導体基板
11…第1のSiO2膜
12…電極
13…第2のSiO2膜
14…導線
15…電流計
16…バイアス電源
Claims (5)
- 被処理基板が設置されるウエハステージを備えたチャンバを有し、前記被処理基板にプラズマを照射して加工するプラズマ処理装置において、前記ウエハステージの前記被処理基板設置面の周辺部分に紫外光誘起電流測定用のフォトン検出センサを設置し、当該フォトン検出センサを、半導体基板と、前記半導体基板上に設けた絶縁膜と、前記絶縁膜中に埋め込まれた電極層と、前記電極層にバイアス電圧を印加する手段と、前記電極層を流れる電流を検出する手段とによって構成し、さらに、前記フォトン検出センサを構成する絶縁膜を、前記被処理基板上に形成する絶縁膜、あるいは形成された絶縁膜であってエッチング処理するものと同じ材料で形成したことを特徴とする、プラズマ処理装置。
- 請求項1に記載のプラズマ処理装置において、前記フォトン検出センサはさらに、前記絶縁膜上に形成された第2の電極を備えることを特徴とする、プラズマ処理装置。
- 請求項1または2に記載のプラズマ処理装置において、前記フォトン検出センサは前記ウエハステージの前記被処理基板設置面の周辺部分に複数個配置されていることを特徴とする、プラズマ処理装置。
- 請求項2に記載のプラズマ処理装置において、前記第2の電極はAl薄膜で形成されていることを特徴とする、プラズマ処理装置。
- 請求項4に記載のプラズマ処理装置において、前記Al薄膜は、波長が17nmから90nmの紫外光を透過させることを特徴とする、プラズマ処理装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004159531A JP3957705B2 (ja) | 2004-05-28 | 2004-05-28 | プラズマ処理装置 |
US11/060,598 US20050263247A1 (en) | 2004-05-28 | 2005-02-18 | Plasma processing apparatus and plasma processing method |
US12/585,119 US20090325328A1 (en) | 2004-05-28 | 2009-09-03 | Plasma processing apparatus and plasma processing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004159531A JP3957705B2 (ja) | 2004-05-28 | 2004-05-28 | プラズマ処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005340632A JP2005340632A (ja) | 2005-12-08 |
JP3957705B2 true JP3957705B2 (ja) | 2007-08-15 |
Family
ID=35423921
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004159531A Expired - Fee Related JP3957705B2 (ja) | 2004-05-28 | 2004-05-28 | プラズマ処理装置 |
Country Status (2)
Country | Link |
---|---|
US (2) | US20050263247A1 (ja) |
JP (1) | JP3957705B2 (ja) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7967930B2 (en) * | 2006-10-30 | 2011-06-28 | Applied Materials, Inc. | Plasma reactor for processing a workpiece and having a tunable cathode |
US20080099450A1 (en) * | 2006-10-30 | 2008-05-01 | Applied Materials, Inc. | Mask etch plasma reactor with backside optical sensors and multiple frequency control of etch distribution |
US20080099437A1 (en) * | 2006-10-30 | 2008-05-01 | Richard Lewington | Plasma reactor for processing a transparent workpiece with backside process endpoint detection |
US8012366B2 (en) * | 2006-10-30 | 2011-09-06 | Applied Materials, Inc. | Process for etching a transparent workpiece including backside endpoint detection steps |
US9218944B2 (en) | 2006-10-30 | 2015-12-22 | Applied Materials, Inc. | Mask etch plasma reactor having an array of optical sensors viewing the workpiece backside and a tunable element controlled in response to the optical sensors |
US8002946B2 (en) * | 2006-10-30 | 2011-08-23 | Applied Materials, Inc. | Mask etch plasma reactor with cathode providing a uniform distribution of etch rate |
US7976671B2 (en) * | 2006-10-30 | 2011-07-12 | Applied Materials, Inc. | Mask etch plasma reactor with variable process gas distribution |
US8017029B2 (en) * | 2006-10-30 | 2011-09-13 | Applied Materials, Inc. | Plasma mask etch method of controlling a reactor tunable element in accordance with the output of an array of optical sensors viewing the mask backside |
JP2009059879A (ja) * | 2007-08-31 | 2009-03-19 | Oki Electric Ind Co Ltd | 紫外光モニタリングシステム |
US7956106B2 (en) * | 2007-10-30 | 2011-06-07 | Chung Shan Institute Of Science And Technology, Armaments Bureau, M.N.D. | Organic siloxane composite material containing polyaniline/carbon black and preparation method thereof |
JP2009283838A (ja) * | 2008-05-26 | 2009-12-03 | Oki Semiconductor Co Ltd | 紫外光モニタリングシステム |
JP5271768B2 (ja) * | 2009-03-26 | 2013-08-21 | ラピスセミコンダクタ株式会社 | プラズマモニタリング方法 |
US8497591B2 (en) | 2010-12-29 | 2013-07-30 | General Electric Company | System and method for off-highway vehicle engine cranking |
EP2782430B1 (en) * | 2011-11-22 | 2016-08-03 | National Institute of Advanced Industrial Science And Technology | Plasma evaluation apparatus |
CN105259527B (zh) * | 2015-10-09 | 2018-08-17 | 国网新疆电力公司检修公司 | 一种对不同紫外成像仪检测结果进行校准的测试方法 |
JP6832804B2 (ja) * | 2017-07-20 | 2021-02-24 | 東京エレクトロン株式会社 | 基板載置台及び基板検査装置 |
US20200088784A1 (en) * | 2018-04-27 | 2020-03-19 | Femtometrix, Inc. | Systems and methods for determining characteristics of semiconductor devices |
WO2024129472A1 (en) * | 2022-12-16 | 2024-06-20 | Lam Research Corporation | Method and apparatus to bias an electrostatic chuck |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5863327A (en) * | 1997-02-10 | 1999-01-26 | Micron Technology, Inc. | Apparatus for forming materials |
TW525213B (en) * | 2000-02-16 | 2003-03-21 | Hitachi Ltd | Process monitoring methods in a plasma processing apparatus, monitoring units, and a sample processing method using the monitoring units |
US7157710B1 (en) * | 2003-11-19 | 2007-01-02 | Kaiser Systems, Inc. | Corona discharge detection |
-
2004
- 2004-05-28 JP JP2004159531A patent/JP3957705B2/ja not_active Expired - Fee Related
-
2005
- 2005-02-18 US US11/060,598 patent/US20050263247A1/en not_active Abandoned
-
2009
- 2009-09-03 US US12/585,119 patent/US20090325328A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
JP2005340632A (ja) | 2005-12-08 |
US20050263247A1 (en) | 2005-12-01 |
US20090325328A1 (en) | 2009-12-31 |
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