JP2014231123A - Processing device and information exchange method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a processing device and an information exchange method that allow optional writing to be carried out and displayed.SOLUTION: A processing device includes: a chuck table for holding a workpiece; processing means for processing the workpiece held by the chuck table: imaging means for imaging a surface of the workpiece held by the chuck table; control means for controlling the processing means and the imaging means; and a touch panel 40 for displaying an operation screen for inputting and setting a processing condition for the image imaged by the imaging means and the control means. On the touch panel 40, a memo screen 45 can be displayed on which free writing can be carried out, and on the memo screen 45, a result of pressing the touch panel 40 is displayed along a pressed track and thereby optional writing information PI can be displayed on the touch panel 40.

Description

  The present invention relates to a processing apparatus and an information exchange method.

  In the manufacturing process of semiconductor devices and electronic components, a plate-shaped workpiece made of various materials such as semiconductor wafers and ceramic substrates is ground to a predetermined thickness by grinding with a grinding wheel mounted on the spindle of a grinding machine. Then, it is divided into individual device chips by a cutting blade or a laser processing device mounted on the spindle of the cutting device.

  In recent years, processing devices such as a grinding device, a cutting device, and a laser processing device often have a touch panel with good operability mounted at a position where an operator such as an operator can easily see (for example, see Patent Document 1). In the processing apparatus, when an operator operates a touch panel, various processing conditions are input, and optimal processing is performed according to various workpieces.

  Further, since the processing apparatus is used by a large number of operators, a message board (message board) can be attached to leave a message to the operators (see, for example, Patent Document 2). The message to the operator is different from the processing conditions, for example, alerting, providing information that is desired to be known other than the processing, and its contents and uses are various.

  In addition, with the spread of the Internet, processing devices have also been brought online and can be remotely operated from device manufacturers. Moreover, the content displayed on the touch panel of a processing apparatus can also be confirmed online by the terminal device of an apparatus manufacturer (for example, refer patent document 3).

JP 2003-158094 A Japanese Patent Application No. 2011-279865 Japanese Patent Application No. 2012-158811

  When a message board is mounted on the processing apparatus, the message board may come into contact with the operator depending on the mounting location. In addition, since there are many processing devices in which the message board is mounted only in a high place or a low place, it is difficult for the operator to see the message board, and there is a possibility that alerts, messages, etc. will not be sufficiently distributed.

  In addition, when operating a processing device online from a device manufacturer, even if the device manufacturer's engineer and operator interact with each other while looking at the content displayed on the touch panel, the content to be explained with, for example, pictures or drawings is sufficient. There is a risk that communication will not be possible.

  For this reason, there is a demand for a processing apparatus capable of writing arbitrary pictures such as pictures and drawings and displaying the arbitrary writing.

  The present invention has been made in view of the above, and an object of the present invention is to provide a processing apparatus and an information exchange method capable of performing arbitrary writing and displaying the arbitrary writing.

  In order to solve the above-described problems and achieve the object, a processing apparatus of the present invention includes a chuck table that holds a workpiece, a processing unit that processes the workpiece held on the chuck table, Imaging means for imaging the surface of the workpiece held on the chuck table, control means for controlling the processing means and the imaging means, images taken by the imaging means, and processing conditions for the control means And a touch panel that displays an operation screen for input setting, wherein the touch panel can display a write-free memo screen, and the memo screen is a locus pressed by a result of pressing the touch panel. And any writing information can be displayed on the touch panel.

  In order to solve the above-described problems and achieve the object, an information exchange method of the present invention is an information exchange method between a terminal device connected to the processing device via a communication line, and the processing device Includes transmission / reception means for transmitting / receiving screen information of the memo screen to / from the terminal device via a communication line, and the terminal device transmits / receives screen information of the memo screen to / from the processing device via a communication line. A line for connecting the terminal device to the processing apparatus via the communication line, and a display means for displaying the memo screen; and an input means for inputting information to the memo screen displayed on the display means A connection step; an information transmission step for transmitting the screen information of the memo screen to the terminal device from the processing device via the communication line; and the screen received in the information transmission step. Information is displayed on the display means of the terminal device, the input step of inputting information to the screen information by the input means, and the screen information to which information has been added in the input step is processed via the communication line. A display step of transmitting to the apparatus and displaying on the memo screen of the processing apparatus.

  According to the processing apparatus of the present invention, a memo screen that can be written freely can be displayed on the touch panel, and the memo screen is displayed along a trajectory of a result of pressing the touch panel, and arbitrary writing information is displayed on the touch panel. Can be displayed. For this reason, arbitrary writing can be performed on the memo screen displayed on the touch panel, and the arbitrary writing can be displayed on the memo screen.

  According to the information exchange method of the present invention, the line connection step for connecting the processing device and the terminal device, the information transmission step for transmitting screen information of the memo screen from the processing device to the terminal device, and the screen information for the terminal device. An input step for inputting information to the screen information, and a display step for transmitting the screen information to which the information has been added in the input step to the processing device and displaying it on the memo screen of the processing device. For this reason, the processing device can write arbitrary information on the memo screen, and the terminal device can input information to the screen information of the memo screen. Further, the processing device can display the memo screen on the touch panel, and the terminal device can display the screen information of the memo screen on the display means. Therefore, arbitrary writing can be performed between the processing device and the terminal device, the arbitrary writing can be displayed on the processing device and the terminal device, and information can be transmitted between the processing device and the terminal device by transmitting and receiving the arbitrary writing. Can be exchanged.

FIG. 1 is a diagram illustrating a schematic configuration example of a processing apparatus according to an embodiment. FIG. 2 is a schematic block diagram illustrating a configuration example of a control unit of the machining apparatus according to the embodiment. FIG. 3 is a diagram illustrating a schematic configuration example of an operation screen displayed on the touch panel included in the processing apparatus according to the embodiment. FIG. 4 is a diagram illustrating a configuration example of a memo screen displayed on the touch panel included in the processing apparatus according to the embodiment. FIG. 5 is a schematic block diagram illustrating a configuration example of a terminal device connected to the processing device according to the embodiment via the Internet. FIG. 6 is a diagram illustrating a display example of a memo screen displayed on the touch panel included in the processing apparatus according to the embodiment. FIG. 7 is a flowchart illustrating an example of a work process of the information exchange method between the processing device and the terminal device according to the embodiment. FIG. 8 is a diagram for explaining an information exchange method between the processing device and the terminal device according to the embodiment.

  DESCRIPTION OF EMBODIMENTS Embodiments (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the contents described in the following embodiments. The constituent elements described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the structures described below can be combined as appropriate. In addition, various omissions, substitutions, or changes in the configuration can be made without departing from the scope of the present invention.

Embodiment
FIG. 1 is a diagram illustrating a schematic configuration example of a processing apparatus according to an embodiment. FIG. 2 is a schematic block diagram illustrating a configuration example of a control unit of the machining apparatus according to the embodiment. FIG. 3 is a diagram illustrating a schematic configuration example of an operation screen displayed on the touch panel included in the processing apparatus according to the embodiment. FIG. 4 is a diagram illustrating a configuration example of a memo screen displayed on the touch panel included in the processing apparatus according to the embodiment. FIG. 5 is a schematic block diagram illustrating a configuration example of a terminal device connected to the processing device according to the embodiment via the Internet.

  The processing apparatus 1 according to the embodiment is a dicing apparatus for cutting a plate-shaped workpiece made of various materials such as a semiconductor wafer and a ceramic substrate. In the present embodiment, as shown in FIGS. 1 and 2, the processing apparatus 1 includes a chuck table 10, a processing unit 20, an imaging unit 30, a touch panel 40, a transmission / reception unit 50, and a control unit 60. It is configured to include. In the processing apparatus 1, an emergency cutoff switch 3 (so-called EMO switch) is disposed below the touch panel 40 with respect to the apparatus body 2. The processing device 1 is connected to the terminal device 100 via the Internet 200. Moreover, the processing apparatus 1 is installed in the customer side, for example. Here, that the processing apparatus 1 is installed on the customer side is, for example, that it is installed in a customer's factory that processes the workpiece.

  The chuck table 10 sucks and holds a workpiece placed on the surface (corresponding to a holding surface) of a disk-shaped porous ceramic by the action of negative pressure from a vacuum suction source (not shown). The processing means 20 rotatably supports a spindle 22 on which a cutting blade 21 is mounted by a spindle housing 23 and processes a workpiece held on the chuck table 10. The imaging unit 30 is configured by, for example, a CCD (Charge Coupled Device) camera, and images the surface of the workpiece held on the chuck table 10.

  The touch panel 40 is disposed on the apparatus main body 2 at a position where it is easy to operate for an operator such as an operator and is easy to see. For example, as shown in FIG. 3, the touch panel 40 can select and display one of a home screen 41 as an operation screen OP, a processing recipe list screen 42, a device setting condition screen 43, a kerf check screen 44, and the like. It is. In addition, the touch panel 40 displays an operation screen OP for inputting and setting processing conditions for the image captured by the imaging unit 30 and the control unit 60. Each of the screens 41 to 44 has, for example, a hierarchical structure (tree structure) in which the home screen 41 is the highest layer, and the processing recipe list screen 42, the device setting condition screen 43, and the A kerf check screen 44 is arranged. In the processing recipe list screen 42, a first processing recipe screen 42a, a second processing recipe screen 42b, and a third processing recipe screen 42c are arranged in the lower hierarchy. The screens 41 to 44 and the recipe screens 42a to 42c include a memo screen display button 45a, a jump menu display button b1, a numeric input keyboard display button b2, and a character input keyboard for displaying a write-free memo screen 45 described later. The display button b3 and the axis operation keyboard display button b4 are always displayed so that they can be pressed. In the present embodiment, the screens 41 to 44 and the recipe screens 42a to 42c are not free to write, that is, cannot be freely drawn.

  The jump menu display button b1 displays a button for executing a basic operation of the processing apparatus 1 on the operation screen OP and the memo screen 45 so as to be pressed. The numeric input keyboard display button b2 is for displaying the numeric input keyboard on the operation screen OP and the memo screen 45 so as to be pressed. The character input keyboard display button b3 is for displaying the character input keyboard on the operation screen OP and the memo screen 45 so as to be pressed. The axis operation keyboard display button b4 is used to display a keyboard for operating the workpiece on the operation screen OP and the memo screen 45 so as to be pressed.

  The memo screen 45 can be freely drawn (free writing) and can be written freely. The memo screen 45 is displayed on the touch panel 40 when the memo screen display button 45 a displayed on the operation screen OP is pressed by the operator 301. As shown in FIG. 4, the memo screen 45 is displayed along the trajectory of the result of pressing the touch panel 40, and arbitrary writing information PI formed by pressing the touch panel 40 can be displayed on the touch panel 40. The memo screen 45 is a screen that is displayed so as to be superimposed on the operation screen OP, and is a screen associated with the operation screen OP.

  The memo screen 45 is arbitrarily written by the operator 301, an area for displaying arbitrary write information PI formed in accordance with the writing, a memo screen display button 45a, a reset button 45b, and a transmittance adjustment slide button. 45c, a share button 45d, and a memo screen end button 45e. In the present embodiment, the arbitrary writing information PI is displayed along a locus in which the operator 301 presses the touch panel 40 with a finger 301a (see FIG. 6) or a stylus pen.

  The memo screen display button 45a is always displayed on the operation screen OP, and is for displaying the memo screen 45 on the operation screen OP. The reset button 45b is for resetting, that is, erasing arbitrary write information PI on the memo screen 45. The transmittance adjustment slide button 45c is used to adjust the transmittance of the memo screen 45 superimposed on the operation screen OP. The transmittance adjustment slide button 45c is displayed on the touch panel 40 so that it can be moved up and down. For example, the transmittance adjustment slide button 45c makes the memo screen 45 black and opaque at the lower end of the vertical movement range, and makes the memo screen 45 colorless and transparent at the upper end of the vertical movement range. Further, the transmittance adjustment slide button 45c changes the memo screen 45 from opaque to transparent continuously or stepwise as it moves from the lower end to the upper end of the vertical movement range. The share button 45 d is for sharing screen information of the memo screen 45 (hereinafter simply referred to as “memo information”) with the terminal device 100. The memo screen end button 45e is used to end the memo screen 45, that is, close the memo screen 45 and return to the operation screen OP immediately before the memo screen 45 is displayed.

  As shown in FIG. 2, the transmission / reception means 50 transmits / receives memo information to / from the terminal device 100 via the Internet 200 which is a communication line. In the present embodiment, the memo information includes, for example, arbitrary writing information PI displayed along the locus of pressing the touch panel 40, position information of the transmittance adjustment slide button 45c (that is, transmittance information of the memo screen 45), and the like. The operation screen OP immediately before the memo screen 45 is displayed, that is, link information that links the operation screen OP covered with the memo screen 45 and the memo screen 45, device information such as the type and machine number of the processing device 1, and the memo Information on the date and time when the screen 45 was written.

  The control means 60 controls each of the processing means 20, the imaging means 30, the touch panel 40 and the transmission / reception means 50. The control unit 60 also controls the X-axis moving unit 71, the θ-axis rotating unit 72, the Y-axis moving unit 73, and the Z-axis moving unit 74 of the driving unit 70, respectively. The control unit 60 includes, for example, a microprocessor 61, a display control unit 62, an image processing unit 63, a communication control unit 64, a storage unit 65, and a panel display screen storage unit 66. . When the transmission / reception means 50 is connected to the terminal device 100 via the Internet 200, the communication control unit 64 is stored in the storage unit 65 every predetermined time interval or whenever any writing is performed on the memo screen 45. The memo information is transmitted from the transmission / reception means 50 to the terminal device 100 via the Internet 200. Further, when the share button 45d on the memo screen 45 is pressed by the operator 301, the communication control unit 64 connects the transmission / reception means 50 to the Internet 200, and then transmits the memo information to the terminal device 100 via the Internet 200. Send it. The storage unit 65 stores memo information every predetermined time interval or every time any writing is performed on the memo screen 45. The panel display screen storage unit 66 stores display screen information in which display patterns such as buttons and keyboards constituting the operation screen OP such as the home screen 41 and the calf check screen 44 are set.

  The terminal device 100 is a so-called computer. The terminal device 100 is connected to the processing device 1 via the Internet 200. As shown in FIG. 5, the terminal device 100 includes, for example, a display unit 101, an input unit 102, a processing unit 103, a storage unit 104, and a transmission / reception unit 105. The terminal device 100 is installed on the device manufacturer side, for example. Here, the installation of the terminal device 100 on the device manufacturer side means, for example, that it is installed in the service center of the device manufacturer that manufactures the processing device 1.

  The display means 101 is a visual display device for displaying the memo screen 45. The display means 101 also displays an operation screen OP similar to the touch panel 40 of the processing apparatus 1. The input unit 102 is an input device for inputting information to the memo screen 45 displayed on the display unit 101. The processing means 103 is composed of a CPU that performs calculations for executing various programs. The storage means 104 is a storage device for storing memo information. The storage unit 104 stores memo information every time information is added to the memo screen 45 displayed on the display unit 101 at predetermined time intervals. The transmission / reception means 105 is for transmitting / receiving memo information to / from the processing apparatus 1 via the Internet 200. In addition, when the transmission / reception means 105 is connected to the processing apparatus 1 via the Internet 200, the information is added to the storage means 104 every time information is added to the memo screen 45 displayed on the display means 101 at predetermined time intervals. The stored memo information is transmitted from the transmission / reception means 105 to the processing apparatus 1 via the Internet 200.

  The processing apparatus 1 configured as described above captures an image of the workpiece held on the chuck table 10 by the imaging means 30 and generates image data. Based on the image data, the processing means 20 and the workpiece are processed. After the alignment is adjusted, the cutting blade 21 of the processing means 20 is rotated at a high speed, and the processing means 20 is relatively cut and fed in the Z-axis direction by the Z-axis moving means 74 with respect to the chuck table 10. In contrast, the chuck table 10 is processed and fed relatively in the X-axis direction by the X-axis moving means 71, and the machining means 20 is indexed and fed relative to the chuck table 10 in the Y-axis direction by the Y-axis moving means 73. Then, the cut line is formed by cutting the line to be divided of the workpiece. Further, the machining apparatus 1 cuts all the planned division lines in the same direction, then rotates the chuck table 10 by 90 degrees around the Z axis by the θ-axis rotating means 72, and repeats the same cutting by the machining means 20. Thus, the work piece is divided into individual devices.

  Next, a method of using the memo screen 45 will be described with reference to FIGS. 4 and 6 to 8. FIG. 6 is a diagram illustrating a display example of a memo screen displayed on the touch panel included in the processing apparatus according to the embodiment. FIG. 7 is a flowchart illustrating an example of a work process of the information exchange method between the processing device and the terminal device according to the embodiment. FIG. 8 is a diagram for explaining an information exchange method between the processing device and the terminal device according to the embodiment.

  For example, when leaving a memo on the kerf check screen 44 during the kerf check, first, in the processing apparatus 1, the memo screen display button 45a on the kerf check screen 44 displayed on the touch panel 40 is pressed by the operator 301. The memo screen 45 is displayed on the kerf check screen 44 in an overlapping manner. Next, when the operator 301 writes in the area in the memo screen 45 by the operator 301, as shown in FIG. 4, arbitrary processing information PI corresponding to the writing is displayed in the area. Further, the transmittance adjustment slide button 45c is at an intermediate position in the vertical movement range, and the operator 301 visually recognizes the kerf check screen 44 through the memo screen 45.

  Next, the processing apparatus 1 can perform any writing such as memo writing and message memo at the time of kerf check, that is, memo writing for the operator 301 himself writing to the memo screen 45, messages to other operators 301, etc. If this is done, arbitrary write information PI is displayed on the touch panel 40. At this time, the processing apparatus 1 blinks or blinks the memo screen display button 45a to notify the operator 301 who performed arbitrary writing or other operators 301 that there is arbitrary writing on the memo screen 45. Inform.

  Next, during the full auto operation, for example, when leaving a message to turn off the power of the processing apparatus 1 after the full auto operation, the processing apparatus 1 first makes a memo on an arbitrary operation screen OP displayed on the touch panel 40. When the screen display button 45a is pressed by the operator 301, the memo screen 45 is displayed over the arbitrary operation screen OP. Next, when the operator 301 writes in the area in the memo screen 45 by the operator 301, the processing apparatus 1 displays arbitrary write information PI corresponding to the writing in the area as shown in FIG. In addition, the operator 301 moves the transmittance adjustment slide button 45c to the lower end of the vertical movement range so that the other operator 301 does not perform an erroneous operation on the arbitrary operation screen OP, so that The operation screen OP is made invisible.

  Next, as shown in FIGS. 7 and 8, for example, when the processing device 1 and the terminal device 100 share the memo screen 45, the memo is performed by a line connection step, an information transmission step, an input step, and a display step, which will be described later. Share screen 45. That is, the information exchange method between the processing device 1 and the terminal device 100 includes a line connection step, an information transmission step, an input step, and a display step. When the memo screen 45 is shared between the processing device 1 and the terminal device 100, the operator 301 and the engineer 302 usually exchange with each other by voice.

(Line connection step)
In the line connection step, first, the share button 45d is pressed by the operator 301 to connect the processing device 1 and the terminal device 100 via the Internet 200 (step ST1). In this step ST1, when the operator 301 depresses the memo screen display button 45a on the arbitrary operation screen OP displayed on the touch panel 40 of the processing apparatus 1, the processing apparatus 1 displays the memo on the arbitrary operation screen OP. A screen 45 is displayed. Further, when the share button 45 d on the memo screen 45 is pressed by the operator 301, the processing device 1 connects the processing device 1 to the Internet 200 via the transmission / reception means 50. At this time, the processing apparatus 1 stores memo information in the storage unit 65 every time a predetermined time interval or arbitrary writing is performed on the memo screen 45. Since the terminal device 100 is normally always connected to the Internet 200 via the transmission / reception means 105 by step ST1, the processing device 1 and the terminal device 100 are connected via the Internet 200. Further, the terminal device 100 can remotely control the processing device 1. As described above, the line connection step is a step of connecting the terminal device 100 to the processing apparatus 1 via the Internet 200.

(Information transmission step)
In the information transmission step, first, the control means 60 of the processing device 1 transmits memo information from the processing device 1 to the terminal device 100 (step ST2). In step ST <b> 2, when the transmission / reception unit 50 is connected to the Internet 200, the control unit 60 of the processing apparatus 1 receives the memo information stored in the storage unit 65 from the transmission / reception unit 50 via the Internet 200. It transmits to the transmission / reception means 105. As described above, the information transmission step is a step of transmitting the memo information from the processing device 1 to the terminal device 100 via the Internet 200.

(Input step)
In the input step, first, the input means 102 inputs information corresponding to the input operation of the engineer 302 to the memo information (step ST3). In step ST3, the storage unit 104 stores the memo information after the memo information transmitted from the processing apparatus 1 in step ST2 is received by the transmission / reception unit 105. In step ST3, the display unit 101 receives memo information from the storage unit 104 and displays the memo information. In step ST <b> 3, the input unit 102 inputs information corresponding to the input operation of the engineer 302 to the memo information displayed on the display unit 101. In step ST3, the display unit 101 reproduces the display on the touch panel 40 of the processing apparatus 1. The display unit 101 displays the buttons 45a to 45e via the input unit 102 so that the buttons 45a to 45e can be pressed. In step ST <b> 3, the terminal device 100 displays information input by the engineer 302 on the display unit 101 in a color different from the arbitrary writing information PI written by the processing device 1. In step ST3, the storage unit 104 stores memo information to which information is input every time a predetermined time interval or memo information is added.

  As described above, the input step is a step in which the screen information (memo information) received in the information transmission step is displayed on the display means 101 of the terminal device 100 and information is input to the screen information (memo information) by the input means 102. is there.

(Display step)
In the display step, first, the control means 60 of the processing apparatus 1 displays the memo information to which information has been added by the input means 102 on the processing apparatus 1 (step ST4). In this step ST4, the transmission / reception means 105 sends the memo information for which information has been input in step ST3 from the storage means 104 to the transmission / reception means 105 every time a predetermined time interval or memo information is added. It transmits to the transmission / reception means 50 of the processing apparatus 1 via the Internet 200. In step ST4, the memo screen 45 on the touch panel 40 stores the memo information received by the transmission / reception means 50 in the storage unit 65, and then sends it to the touch panel 40 via the display control unit 62. To display. As described above, the display step is a step of transmitting the screen information (memo information) added with the information in the input step to the processing device 1 via the Internet 200 and displaying the screen information on the memo screen 45 of the processing device 1.

  Through the line connection step, the information transmission step, the input step, and the display step, the memo screen 45 allows the memo information to be transmitted and received in real time in both directions between the processing device 1 and the terminal device 100, and the processing device 1 and the terminal. Share with the device 100.

  As described above, according to the processing apparatus 1 according to the present embodiment, the touch panel 40 can display the memo screen 45 that is free to write, and the memo screen 45 is a locus that the result of pressing the touch panel 40 is pressed. And arbitrary writing information PI can be displayed on the touch panel 40. That is, the touch panel 40 can display arbitrary writing information PI generated by the operator 301 performing arbitrary writing on the memo screen 45 and any writing information PI generated by the operator 301 performing arbitrary writing on the memo screen 45. . In addition, since the touch panel 40 is disposed at a position where visibility and operability are good for the operator 301, the processing apparatus 1 can use the memo screen 45 of the touch panel 40 to write arbitrary information such as a message or alert. PI can be transmitted to the operator 301. Further, since the memo screen 45 is freely writable, the operators 301 can communicate with each other regarding the contents to be explained with pictures and drawings.

  Further, according to the information exchange method between the processing device 1 and the terminal device 100 connected via the Internet 200 according to the present embodiment, the processing device 1 and the terminal device 100 are connected by the line connection step, and the information transmission step. The memo information of the processing device 1 is transmitted to the terminal device 100, the information is input to the memo screen displayed on the terminal device 100 in the input step, and the memo information transmitted to the processing device 1 in the display step is displayed on the memo screen of the touch panel 40. 45. For this reason, the processing device 1 can perform arbitrary writing on the memo screen 45, and the terminal device 100 can also input memo information on the memo screen. In addition, the processing device 1 and the terminal device 100 can exchange memo information on which arbitrary writing has been performed. That is, the information exchange method between the processing device 1 and the terminal device 100 allows the operator 301 and the engineer 302 to write on the same screen (memo screen 45). , The operator 301 and the engineer 302 can communicate with each other.

  In the above embodiment, the processing apparatus 1 is a dicing apparatus that cuts the workpiece with the cutting blade 21. However, the grinding apparatus that grinds the workpiece with a grinding wheel, or the workpiece is a laser or water. A cutting device for cutting with a jet may be used. That is, the processing apparatus 1 may be a processing apparatus that performs processing such as cutting or cutting on the workpiece, and may be a processing apparatus that includes the touch panel 40 that can display a memo screen 45 that can be written freely. . Thereby, also in various processing apparatuses, arbitrary write information PI can be transmitted to the operator 301 by using the touch panel 40 as a message board.

  In the above embodiment, the display device 101 and the input device 102 are separate from each other in the terminal device 100. However, for example, the terminal device 100 may include a touch panel that serves as both the display device 101 and the input device 102. . As a result, the engineer 302 can easily perform free drawing (free writing) on the memo screen 45.

  Moreover, in the said embodiment, since the terminal device 100 produces the database which classified the various information contained in the memo information transmitted / received with the processing apparatus 1 and the terminal device 100, the tendency and frequency of the inquiry from a customer side. It is also possible to derive an answer example or a manual for an inquiry with a high tendency or frequency in advance. As a result, the response time for the inquiry can be shortened and the efficiency can be improved, and the time during which the processing in the processing apparatus 1 is interrupted by the inquiry can also be shortened.

DESCRIPTION OF SYMBOLS 1 Processing apparatus 10 Chuck table 20 Processing means 30 Imaging means 40 Touch panel 45 Memo screen 50 Transmission / reception means 60 Control means 100 Terminal device 101 Display means 102 Input means 105 Transmission / reception means 200 Internet (communication line)
OP operation screen PI Optional writing information

Claims (2)

A chuck table for holding the workpiece, and a processing means for processing the workpiece held on the chuck table;
Imaging means for imaging the surface of the workpiece held by the chuck table;
Control means for controlling the processing means and the imaging means;
A touch panel for displaying an image picked up by the image pickup means and an operation screen for inputting and setting processing conditions for the control means,
The touch panel can display a memo screen that is free to write,
The said memo screen is displayed along the locus | trajectory which the result of having pressed the said touch panel pressed, and the processing apparatus which can display arbitrary writing information on the said touch panel. An information exchange method between a processing device according to claim 1 and a terminal device connected via a communication line,
The processing device includes a transmission / reception means for transmitting / receiving screen information of the memo screen with the terminal device via a communication line,
The terminal device transmits / receives the screen information of the memo screen to / from the processing device via a communication line, display means for displaying the memo screen, and information on the memo screen displayed by the display means. An input means for inputting, a line connection step for connecting the terminal device to the processing apparatus via the communication line;
An information transmission step of transmitting the screen information of the memo screen from the processing device to the terminal device via the communication line;
An input step of displaying the screen information received in the information transmission step on the display means of the terminal device, and inputting information to the screen information by the input means;
A display step of transmitting the screen information to which the information has been added in the input step to the processing device via the communication line and displaying the information on the memo screen of the processing device. .

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