JP7349278B2 - processing equipment - Google Patents

Description

The present invention relates to processing equipment.

2. Description of the Related Art Conventionally, processing apparatuses are known that hold a workpiece such as a semiconductor wafer on a chuck table, and cut the held workpiece along streets to divide it into individual device chips. This type of processing equipment is equipped with a touch panel type operation panel that displays an image of the wafer surface captured by an imaging unit and a plurality of operation keys, and various operations of the processing equipment can be performed via this operation panel. (For example, see Patent Document 1).

Further, in the processing apparatus, the operation history and measured values of each mechanism are recorded as a log.

Japanese Patent Application Publication No. 2010-49466

When an error occurs in the processing device, the operator needs to find the cause of the error, but even if the operator refers to the log recorded in the processing device, it may not be possible to find the cause of the error.

The present invention has been made in view of the above, and an object of the present invention is to provide a processing device in which the cause of an error can be easily discovered.

In order to solve the above-mentioned problems and achieve the objects, the present invention provides a processing device that includes a holding table, a processing section, an imaging section, a touch panel, and a control section that controls each mechanism. The control unit includes an image recording unit that continuously records the screen displayed on the touch panel as an image, a contact detection unit that detects the coordinates of the touch panel touched and operated by an operator, and an error detection unit that detects an error. The image recording unit records the image with an arbitrary mark displayed at the coordinates detected by the contact detection unit , and records the image within a preset time before and after the error. It is characterized in that the images are accumulated and the images recorded at other times are erased after a predetermined period of time has elapsed .

According to the present invention, it is possible to provide a processing device in which the cause of an error can be easily discovered.

FIG. 1 is a perspective view schematically showing a configuration example of a processing device according to an embodiment. FIG. 2 is a plan view showing a configuration example of a wafer processed by the processing apparatus according to the embodiment. FIG. 3 is a schematic front view showing a configuration example of a light source of the imaging unit according to the embodiment. FIG. 4 is a block diagram schematically showing an example of the functional configuration of the processing device according to the embodiment. FIG. 5 is a diagram conceptually showing generation of frame-by-frame images according to the embodiment. FIG. 6 is a diagram illustrating a display example of an image of an operation screen that constitutes a frame-by-frame image according to the embodiment. FIG. 7 is a diagram illustrating a display example of an image of an operation screen that constitutes a frame-by-frame image according to the embodiment. FIG. 8 is a diagram illustrating a display example of an image of an operation screen that constitutes a frame-by-frame image according to the embodiment. FIG. 9 is a diagram illustrating a display example of an image of an operation screen that constitutes a frame-by-frame image according to the embodiment. FIG. 10 is a diagram illustrating a display example of an image of an operation screen that constitutes a frame-by-frame image according to the embodiment. FIG. 11 is a diagram illustrating a display example of an image of an operation screen that constitutes a frame-by-frame image according to the embodiment. FIG. 12 is a diagram illustrating a display example of an image of an operation screen that constitutes a frame-by-frame image according to the embodiment. FIG. 13 is a diagram illustrating a display example of an image of an operation screen that constitutes a frame-by-frame image according to the embodiment. FIG. 14 is a diagram illustrating a display example of an image of an operation screen that constitutes a frame-by-frame image according to the embodiment. FIG. 15 is a flowchart illustrating an example of processing by the processing apparatus according to the embodiment. FIG. 16 is a block diagram schematically showing an example of the functional configuration of a processing device according to a modification. FIG. 17 is a diagram schematically showing a processing example of image information according to a modification.

Embodiments of the present invention will be described in detail below with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. Further, the constituent elements described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the configurations described below can be combined as appropriate. Further, various omissions, substitutions, or changes in the configuration can be made without departing from the gist of the present invention.

In the embodiment described below, an XYZ orthogonal coordinate system is set, and the positional relationship of each part will be explained with reference to this XYZ orthogonal coordinate system. One direction in the horizontal plane is defined as the X-axis direction, a direction perpendicular to the X-axis direction in the horizontal plane is defined as the Y-axis direction, and a direction perpendicular to each of the X-axis direction and the Y-axis direction is defined as the Z-axis direction. The XY plane including the X and Y axes is parallel to the horizontal plane. The Z-axis direction perpendicular to the XY plane is the vertical direction.

A processing apparatus 1 according to an embodiment will be described with reference to the drawings. FIG. 1 is a perspective view schematically showing a configuration example of a processing device according to an embodiment. FIG. 2 is a plan view showing a configuration example of a wafer processed by the processing apparatus according to the embodiment. FIG. 3 is a schematic front view showing a configuration example of a light source of the imaging unit according to the embodiment. FIG. 4 is a block diagram schematically showing an example of the functional configuration of the processing device according to the embodiment.

The processing apparatus 10 (an example of a processing apparatus) according to the embodiment is a cutting apparatus that cuts the wafer 100 along a street (dividing line) 103. As shown in FIG. 1, the processing apparatus 10 basically includes a chuck table 11 that holds a wafer 100, an imaging unit 12, a processing unit 13, a driving means 14, a Z-axis moving means 15, a touch panel 17, and a control. A unit 40 is provided.

As shown in FIG. 2, the wafer (workpiece) 100 is attached to the surface of an adhesive tape 107 attached to an annular frame 108. Further, the wafer 100 is divided into a plurality of regions by a plurality of streets 103 formed in a grid pattern on the front surface 101, and devices 104 having a semiconductor chip structure such as an IC or an LSI are formed in the divided regions. The back surface 102 of the wafer 100 configured in this manner is attached to an adhesive tape 107 attached to an annular frame 108 with the front surface 101 facing upward.

The chuck table 11 (an example of a holding table) has a holding surface 11a that attracts and holds the wafer 100, and is rotatably connected to a motor 19. Furthermore, the chuck table 11 is provided so as to be movable in the X-axis direction, which is horizontal to the holding surface 11a, by an X-axis moving means 22 of a well-known configuration including a ball screw 20, a nut, a pulse motor 21, and the like. Thereby, the processing apparatus 10 can move the wafer 100 held on the chuck table 11 in the X-axis direction relative to the imaging unit 12 and the processing unit 13.

The imaging unit 12 is an electron microscope equipped with an image sensor such as a CCD (Charge Coupled Device) or a CMOS (Complementary Metal Oxide Semiconductor). The imaging unit 12 images the surface 101 of the wafer 100 held on the holding surface 11a of the chuck table 11. The imaging unit 12 is capable of imaging the surface 101 of the wafer 100 by switching between low magnification (Lo) macro imaging and high magnification (Hi) micro imaging. The area portion (street) to be cut is detected based on the image information (key pattern) acquired by the imaging unit 12, and is used for positioning of the processing operation by the processing unit 13. The imaging unit 12 includes a light source 23 that irradiates illumination light onto the surface of the wafer 100 held on the holding surface 11a of the chuck table 11, as shown in FIG. The light source 23 includes an epi-light source 231 that illuminates the wafer 100 from directly above, and an oblique light source 232 that illuminates the wafer 100 from an oblique direction.

The processing unit 13 forms a cutting groove (kerf) by cutting the wafer 100 held on the holding surface 11a of the chuck table 11 along a street 103 using a rotating ring-shaped ultra-thin cutting blade 24. . The imaging unit 12 is integrated by being attached and supported by a part of the housing 25 for the processing unit 13, and can be moved in the Z-axis direction by a Z-axis moving means 15 such as a ball screw, nut, pulse motor 26, etc. It is set in. Further, the Y-axis moving means 27 for moving the imaging unit 12 and the processing unit 13 in the Y-axis direction relative to the holding surface 11a of the chuck table 11 includes a ball screw 28, a nut, a pulse motor 29, etc. Together with the shaft moving means 22, the driving means 14 is configured.

Under the control of the control unit 40, the touch panel 17 displays an image of the surface 101 of the wafer 100 captured by the imaging unit 12 and various information necessary for processing, and also receives input operations necessary for processing from the operator. . The touch panel 17 is disposed at a location on the housing of the processing device 10 where it is easy to see and operate. The touch panel 17 includes a display device and an input device. The touch panel 17 may be configured with a touch screen display including a display device such as a liquid crystal display or an organic EL display, and a touch screen for specifying input positions and coordinates on the display surface of the display device.

The processing apparatus 10 configured as described above is configured to move the chuck table 11 relative to the processing unit 13 in the X-axis direction using the The machining feed is made relative to the Thereby, the streets 103 on the wafer 100 can be cut to form cutting grooves (kerfs). Subsequently, the processing apparatus 10 rotates the wafer 100 by 90 degrees by rotating the chuck table 11, and then repeats the same cutting process in the processing unit 13 for all streets 103 newly arranged in the X-axis direction. This allows the wafer 100 to be divided into individual devices 104.

The storage 30 shown in FIG. 4 stores control programs that implement functions such as various processes executed by the control unit 40, data used for processing by such control programs, and the like. The storage 30 can be implemented using an HDD (Hard Disk Drive), a semiconductor memory, or the like. The storage 30 may also be used as a temporary work area when a processor included in the control unit 40 executes instructions written in a control program.

The storage 30 includes an image storage section 31 that stores image information of an operation screen displayed on the touch panel 17. The image information stored in the image storage section 31 is composed of a plurality of images of an operation screen continuously recorded by an image recording section 44, which will be described later. The image information stored in the image storage unit 31 includes continuous operation screens that are sequentially switched and displayed on the touch panel 17 in response to a series of arbitrary operations performed by the operator during alignment teaching, manual alignment, etc. A plurality of images recorded in the same manner are exemplified. Further, the image constituting the image information includes a mark indicating the coordinates (coordinates on the operation screen) detected by the contact detection section 43, which will be described later. In other words, this mark is displayed on the image of the operation screen in such a manner that the position operated (touched) by the operator on the operation screen displayed on the touch panel 17 can be clearly displayed on the image of the operation screen. Incorporated.

The control unit 40 includes an arithmetic processing device such as a CPU (Central Processing Unit), a storage device such as a ROM (Read Only Memory) or a RAM (Random Access Memory), and an input/output interface device. The control unit 40 is a computer that can execute a control program and the like for controlling each of the above-mentioned components according to a series of processing steps performed by the processing apparatus 10 using such a device.

As shown in FIG. 4, the control unit 40 includes a central control section 41, a screen display control section 42, a contact detection section 43, an image recording section 44, and an image display control section 45. It realizes or executes the functions or actions of various processes described below.

The central control unit 41 controls the overall operation of the processing device 10 according to processing conditions set by the operator via the touch panel 17. Further, the central control unit 41 controls the imaging operation of the imaging unit 12 having the light source 23 during alignment and kerf check.

The screen display control unit 42 controls the display of the touch panel 17 according to the operation details input by the operator via the touch panel 17. For example, in manual alignment, the screen display control unit 42 sequentially switches operation screens and displays them on the touch panel 17 according to a series of operations performed by an operator.

The contact detection unit 43 detects the coordinates of the touch panel 17 touched and operated by the operator. That is, the contact detection unit 43 detects the position on the operation screen operated (touched) by the operator.

The image recording unit 44 continuously records the screen (operation screen) displayed on the touch panel 17 as an image. The image recording unit 44 continuously captures and records images (still images) of the operation screen, for example, in the background of the display control of the operation screen executed by the screen display control unit 42. The image recording unit 44 continuously records a plurality of images of the operation screen that are sequentially switched and displayed on the touch panel 17 in response to a series of arbitrary operations performed by the operator. The image recording unit 44 stores the recorded image information of the operation screen in the image storage unit 31 in the order (chronologically) of the operator's operations. When storing image information in the image storage section 31, the image recording section 44 can associate and store the date and time when the image was recorded and the details of the operation. The operation contents can be general operation contents that all operators can specify, such as kerf check and alignment teaching. When recording the image of the operation screen, the image recording section 44 can record the image of the operation screen with an arbitrary mark displayed at the coordinates detected by the contact detection section 43. In addition, when recording the image of the operation screen, the image recording unit 44 records the position on the operation screen operated (touched) by the operator based on the coordinates of the touch panel 17 detected by the contact detection unit 43. It may also be recorded in association with the screen image.

The image display control section 45 controls the display of image information stored in the image storage section 31. That is, the image display control unit 45 displays a plurality of images on the operation screen that are sequentially switched and displayed on the touch panel 17 in accordance with a series of arbitrary operations performed by the operator, in the order of the operator's operations (in chronological order). Continuously display along. The image display control unit 45 controls the operation by, for example, reproducing a frame-by-frame image in which a plurality of images of the operation screen that are continuously recorded in the background of a series of operations performed by the operator are arranged in chronological order. Multiple images on the screen can be displayed sequentially in the order of operations. When continuously displaying the images of the operation screen, the image display control section 45 can display the images of the operation screen with arbitrary marks displayed at the coordinates detected by the contact detection section 43. In addition, when continuously displaying images on the operation screen, the image display control unit 45 allows an arbitrary position to be displayed at the position operated (touched) by the operator, based on the position on the operation screen detected by the contact detection unit 53. A mark etc. may be added. Thereby, for example, the position operated (touched) by the operator during alignment teaching, manual alignment, etc. is identifiably displayed on the image of the operation screen.

Images of operation screens recorded by the processing apparatus according to the embodiment will be described with reference to FIGS. 5 to 14. FIG. 5 is a diagram conceptually showing generation of frame-by-frame images according to the embodiment. 6 to 14 are diagrams showing display examples of images of the operation screen that constitute the frame-by-frame image according to the embodiment.

As shown in FIG. 5, the image recording unit 44 records a plurality of images (still images) on the operation screen that are sequentially switched and displayed on the touch panel 17 in response to a series of arbitrary operations performed by the operator. Continuously record in chronological order (chronological order). The image recording unit 44 records images 17-1 to 17-9 of the operation screens shown in FIGS. 6 to 14 in the order of operations. The image display control unit 45 generates a frame-by-frame image 17-10 in which images of a plurality of operation screens recorded by the image recording unit 44 during manual alignment are arranged in chronological order, for example. By reproducing the generated frame-by-frame image 17-10, the image display control unit 45 can continuously display a plurality of images of the operation screen recorded by the image recording unit 44 on the touch panel 17 in the order of operation. In this way, the processing apparatus 10 can allow the operator to visually confirm a series of operations on the operation screen performed by the operator during manual alignment, for example.

An image 17-1 shown in FIG. 6 is an example of an image that is first displayed as a frame-by-frame image 17-10. An image 17-1 shown in FIG. 6 is a recording of the entire operation screen 50-1 that displays the cut status in manual alignment. The operation screen 50-1 shown in FIG. 6 includes a main area 51 and a sub area 52. In the display area 51-1 provided in the main area 51, for example, various buttons are provided inside along the outer periphery of the area. For example, a wafer map 60 is displayed in the display area 51-1 shown in FIG. The wafer map 60 shows a schematic diagram of the shape of the wafer 100 (circular shape) and the streets 103 (a plurality of horizontal lines), and can visually show the progress of cutting. The sub-region 52 is provided with a window adjustment button 52-1, a θ adjustment button 52-2, a light amount button 52-3, a focus button 52-4, a magnification change button 52-5, etc. necessary for manual alignment.

Image 17-2 shown in FIG. 7 is an example of an image that is reproduced next to image 17-1 as frame-by-frame image 17-10. An image 17-2 shown in FIG. 7 is a recording of an operation screen 50-2 displayed during a kerf check in manual alignment. In the operation screen 50-2 shown in FIG. 7, a plurality of images, such as calf images 62-1 to 62-4, are displayed in the display area 51-1 of the main area 51. The kerf image 62-1 shows a set area on the wafer 100 where a kerf check is to be performed. The kerf images 62-2 to 62-4 are images in which a cutting groove (kerf) corresponding to the set area of the kerf image 62-1 is enlarged at a predetermined magnification, and are displayed with mutually different contrasts.

Image 17-3 shown in FIG. 8 is an example of an image that is reproduced next to image 17-2 as frame-by-frame image 17-10. An image 17-3 shown in FIG. 8 is a recording of the operation screen 50-3 that is displayed when a kerf check error occurs during manual alignment. On the operation screen 50-3 shown in FIG. 8, a calf image 63, for example, is displayed in the display area 51-1 of the main area 51. The kerf image 63 includes an image 63-1 of a cut groove (kerf) and an image 63-2 of the street 103, and shows that the position of the cut groove (kerf) is shifted from the street 103.

Further, in the image 17-3 shown in FIG. 8, when reproduced as a frame-by-frame image 17-10, a mark 71 superimposed on the alarm release button 52-6 provided in the sub-area 52 is displayed. The mark 71 indicates the position on the operation screen 50-3 that is operated (touched) by the operator in a series of operations related to manual alignment when the operation screen 50-3 shown in FIG. 8 is displayed on the touch panel 17. There is. That is, it can be confirmed by the mark 71 that the operator operated the alarm release button 52-6 at the time when the image 17-3 shown in FIG. 8 was recorded.

Image 17-4 shown in FIG. 9 is an example of an image that is reproduced next to image 17-3 as frame-by-frame image 17-10. An image 17-4 shown in FIG. 9 is a recording of an operation screen 50-4 displayed when performing error recovery in manual alignment. The main area 51 of the operation screen 50-4 is provided with, for example, a kerf check retry button 51-2, a kerf check teach button 51-3, a stop correction button 51-4, and a continue cut button 51-5. Further, the sub-area 52 of the operation screen 50-4 is provided with, for example, a cut position correction button 52-7, a hairline correction button 52-8, and the like.

Further, in the image 17-4 shown in FIG. 9, when reproduced as a frame-by-frame image 17-10, a mark 72 superimposed on the stop correction button 51-4 provided in the main area 51 is displayed. The mark 72 indicates a position on the operation screen 50-4 that is operated (touched) by the operator in a series of operations related to manual alignment when the operation screen 50-4 shown in FIG. 9 is displayed on the touch panel 17. There is. That is, it can be confirmed by the mark 72 that the stop correction button 51-4 was operated by the operator at the time when the image 17-4 shown in FIG. 9 was recorded.

Image 17-5 shown in FIG. 10 is an example of an image that is reproduced next to image 17-4 as frame-by-frame image 17-10. An image 17-5 shown in FIG. 10 is a recording of an operation screen 50-5 displayed when performing stop correction in manual alignment. On the operation screen 50-5, the same calf image 63 as the operation screen 50-3 shown in FIG. 8 is displayed in the display area 51-1 of the main area 51. In addition, the display area 51-1 shown in FIG. 10 includes a hairline image 63-3 in addition to the cut groove (kerf) image 63-1 and the street 103 image 63-2 shown in FIG. The scene where the cutting position is specified is shown.

Further, the main area 51 of the operation screen 50-5 is provided with, for example, a direction key 51-6. When the image 17-5 shown in FIG. 10 is reproduced as a frame-by-frame image 17-10, a mark 73 superimposed on the direction key 51-6 provided in the main area 51 is displayed. The mark 73 indicates a position on the operation screen 50-5 that is operated (touched) by the operator in a series of operations related to manual alignment when the operation screen 50-5 shown in FIG. 10 is displayed on the touch panel 17. There is. That is, it can be confirmed by the mark 73 that the operator operated the direction key 51-6 at the time when the image 17-5 shown in FIG. 10 was recorded.

Image 17-6 shown in FIG. 11 is an example of an image that is reproduced next to image 17-5 as frame-by-frame image 17-10. An image 17-6 shown in FIG. 11 is a recording of the operation screen 50-5 after the operator operates the direction key 51-6. The operation screen 50-5 shown in FIG. 11 has the same configuration as the operation screen shown in FIG. When the image 17-6 shown in FIG. 11 is reproduced as a frame-by-frame image 17-10, a mark 74 superimposed on the cut position correction button 52-7 provided in the sub-area 52 is displayed. The mark 74 indicates a position on the operation screen 50-5 that is operated (touched) by the operator in a series of operations related to manual alignment when the operation screen 50-5 shown in FIG. 11 is displayed on the touch panel 17. There is. That is, it can be confirmed by the mark 74 that the operator operated the cut position correction button 52-7 at the time when the image 17-6 shown in FIG. 11 was recorded.

Image 17-7 shown in FIG. 12 is an example of an image that is reproduced next to image 17-6 as frame-by-frame image 17-10. Image 17-7 shown in FIG. 12 is a recording of operation screen 50-1 displayed on touch panel 17 after the operator operates cut position correction button 52-7 on operation screen 50-5 shown in FIG. It is something. The operation screen 50-1 shown in FIG. 12 has the same configuration as the operation screen shown in FIG.

Image 17-8 shown in FIG. 13 is an example of an image that is reproduced next to image 17-7 as frame-by-frame image 17-10. An image 17-8 shown in FIG. 13 is the same operation screen 50-2 as in FIG. 7, and the operation screen 50-2 is displayed during the kerf check via the cut status display shown in FIG. is recorded.

Image 17-9 shown in FIG. 14 is an example of an image that is reproduced next to image 17-8 as frame-by-frame image 17-10. Image 17-9 shown in FIG. 14 is the same operation screen 50-3 as in FIG. 8, and the operation screen 50-3 that is displayed when a kerf check error is recorded through the kerf check shown in FIG. 13. This is what I did. On the operation screen 50-3 shown in FIG. 14, a calf image 64, for example, is displayed in the display area 51-1 of the main area 51. The kerf image 64 includes an image 64-1 of a cut groove (kerf) and an image 64-2 of the street 103, and shows that the position of the cut groove (kerf) is shifted from the street 103.

By reproducing the frame-by-frame images 17-10 shown in FIGS. 6 to 14, a series of operations performed by the operator on the operation screens (50-1 to 50-5, etc.) can be confirmed. For example, by checking images 17-4 to 17-6 that are played back as frame-by-frame images 17-10, it can be determined that the kerf check error recorded in image 17-9 indicates that the cut position was not corrected correctly. The cause can be determined.

For example, the processing by the processing device 10 according to the embodiment is particularly useful when a cut deviation occurs during manual alignment in which an operator manually performs θ alignment, sets an alignment target, and aligns streets from the target. be. Specifically, when a kerf check error occurs in which the cutting groove (kerf) deviates from the threshold value, it is assumed that the operator performs an operation to re-specify the cutting position. At this time, if a kerf check error occurs again because the cut position specified by the operator is incorrect, if the operator's operation is recorded as an image, the cut position specified by the operator will be correct. You can easily check whether you made a mistake or not.

FIG. 15 is a flowchart illustrating an example of processing by the processing apparatus according to the embodiment. The processing of the processing apparatus 10 shown in FIG. 15 is executed by each part of the control unit 40.

As shown in FIG. 15, the image display control unit 45 reads image information of the operation screen from the image storage unit 31 (step S101). The image information read by the image display control unit 45 is designated by the operator. The operator can specify image information by specifying the date and time and operation details.

Subsequently, the image display control unit 45 generates a frame-by-frame image using the image information read in step S101 (step S102). The frame-by-frame images are generated so that they can be played back in chronological order.

Subsequently, the image display control unit 45 displays the frame-by-frame image generated in step S102 (step S103), and ends the process shown in FIG. 15.

In the above embodiment, an example has been described in which the processing device 10 displays a frame-by-frame image (for example, image 17-10) generated from a plurality of images (still images) on the operation screen on the touch panel 17. does not need to be particularly limited. For example, the operator may transmit the information to an external information processing device that is operated remotely, a server that manages information on the processing device 10, or the like.

Further, in the above embodiment, an example has been described in which a frame-by-frame image is generated from a plurality of images (still images) on the operation screen, but there is no need to be particularly limited to this example. For example, the image recording unit 44 may record a moving image of the operation screen.

[Modified example]
FIG. 16 is a block diagram schematically showing an example of the functional configuration of a processing device according to a modification. As shown in FIG. 16, the processing apparatus 10 according to the modification includes an error detection section 46 that detects errors. The error detection unit 46 detects, for example, a kerf check error that occurs during manual alignment.

The image recording unit 44 starts recording images of the operation screen in response to a series of operations by the operator, but accumulates images recorded within a preset time before and after the error, and records images at other times. The image will be deleted after a predetermined period of time has elapsed. FIG. 17 is a diagram schematically showing a processing example of image information according to a modification.

As shown in FIG. 17, after a predetermined period of time has elapsed, the image recording unit 44 determines image information J ₂ and J ₃ of the images stored in the image storage unit 31 as image information to be stored as is, and ₁ and _J4 are determined to be image information to be deleted. The predetermined time may be, for example, the elapsed time from the end of a series of operations performed by the operator. The image information J ₂ is information of an image recorded by the image recording unit 44 from the time of detection of the error E ₁ detected by the error detection unit 46 to a time T ₁ a certain period of time back. The image information J ₃ is information of an image recorded by the image recording unit 44 from the time of detection of the error E ₁ detected by the error detection unit 46 to the time T ₂ after a certain period of time has elapsed. The image information _J1 is information of an image recorded by the image recording unit 44 before the time _T1 , which is a certain period of time back from the time when the error _E1 was detected, and the image information _J4 is information about the image recorded from the time when the error _E1 was detected. This is information about an image recorded by the image recording unit 44 after time _T2 , which has elapsed for a certain period of time.

[Other embodiments]
The processing device 1 according to the present invention can be modified in various ways without departing from the gist of the present invention. For example, the present invention is not limited to the cutting device described as an example of the processing device 1, but may be a laser processing device or a grinding device.

Further, each component of the processing apparatus 1 described in the above embodiment is functionally conceptual, and does not necessarily need to be physically configured as shown in the drawings. In other words, the specific form of dispersion/integration of the processing equipment 1 is not limited to the one shown in the diagram, and all or part of it may be functionally or physically distributed in arbitrary units depending on various loads and usage conditions. or can be integrated and configured. In the control unit 40, each part may be distributed or integrated as appropriate depending on the processing content of each part included in the control unit 40. For example, the screen display control section 42 and the image display control section 45 of the control unit 40 may be implemented in the control unit 40 in a functionally or physically integrated state.

10 processing device 11 chuck table 12 imaging unit 13 processing unit 17 touch panel 23 light source 30 storage 31 image storage section 40 control unit 41 central control section 42 screen display control section 43 contact detection section 44 image recording section 45 image display control section 46 error detection Part 100 Wafer (workpiece)
103 Street (planned dividing line)
104 devices

Claims (1)

A processing device,
Equipped with a holding table, a processing section, an imaging section, a touch panel, and a control section that controls each mechanism,
The control unit is
an image recording unit that continuously records the screen displayed on the touch panel as an image;
a contact detection unit that detects the coordinates of the touch panel touched and operated by an operator;
An error detection unit that detects an error ;
The image recording section is
Recording the image with an arbitrary mark displayed at the coordinates detected by the contact detection unit ,
Accumulate the images recorded within a preset time before and after the error,
A processing device characterized in that images recorded at other times are erased after a predetermined period of time has elapsed .

Images