JP2009278029A - Dicing apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a dicing apparatus allowing various kinds of processing conditions to be set easily and having high operability. <P>SOLUTION: A work is photographed partially by dividing the work into two or more photographic areas. The obtained partial images are compounded to generate an image of the whole work. The obtained image of the whole work is displayed on a console panel 20, and thereby processing conditions for the work can be set while looking at the image of the whole work. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a dicing apparatus, and more particularly to a dicing apparatus that automatically cuts a workpiece in accordance with preset machining conditions.

  Generally, a dicing apparatus is configured to include a work table that is movable in the horizontal direction and a blade that is movable forward and backward with respect to the work table. A rotating blade is brought into contact with the surface of the work held on the table to divide the work into a die shape.

In this dicing apparatus, the workpiece is cut along a cutting line set for each workpiece. Patent Documents 1 to 3 describe a method of photographing a work held on a work table with a camera and detecting the position of a cutting line set for the work from the obtained image. Patent Documents 4 to 5 describe a method in which a work held on a work table is photographed with a camera, a predetermined pattern is recognized, and a blade is positioned with respect to a cutting line.
JP-A-6-232253 JP-A-6-232254 JP-A-6-232255 JP-A-6-120335 JP-A-11-87278

  By the way, as described above, the workpiece is cut along the cutting line, but the cutting order may be different and needs to be set for each workpiece in advance. In the conventional dicing apparatus, the operator manually inputs the coordinates of the line to be cut and the number of the line to be cut and sets it while confirming whether or not it operates correctly. For this reason, there is a drawback in that setting takes a lot of time and operation efficiency is lowered.

  The present invention has been made in view of such circumstances, and an object thereof is to provide a dicing apparatus that can easily set various processing conditions and has high operability.

  In order to achieve the above object, the invention according to claim 1 is a dicing apparatus that cuts a workpiece placed on the work table according to preset machining conditions, and a part of the workpiece placed on the workpiece table. An image taking means for taking an enlarged image with a microscope, a moving means for relatively moving the work table and the image taking means, and combining the partial images of the work obtained by the image taking means, Image combining means for generating an entire image, display means, display control means for displaying the entire image of the work generated by the image combining means on the display means, and the display means for displaying the entire image of the work And a setting means for setting machining conditions for the workpiece on the screen.

  According to the first aspect of the present invention, the entire image is generated from the partial image of the work obtained by photographing with the photographing means, and the whole image is displayed on the display means. Then, the machining conditions for the workpiece are set on the screen of the display means on which the entire image of the workpiece is displayed. Thereby, the machining conditions for the workpiece can be set efficiently.

  In the invention according to claim 2, in order to achieve the object, the setting means includes, as processing conditions, an order of lines to be cut, an alignment execution position, a kerf check execution line, a correction line performed during cutting, The dicing apparatus according to claim 1, wherein at least one of cutting conditions is set.

  According to the invention of claim 2, on the screen of the display means on which the entire image of the workpiece is displayed, the order of the lines to be cut, the alignment execution position, the kerf check execution line, the correction line to be performed during cutting, Cutting conditions and the like can be set. Thereby, the order of the lines to be cut easily and reliably, the alignment execution position, the kerf check execution line, the correction line to be performed during the cutting, the cutting conditions of each line, and the like can be set.

  In order to achieve the above object, the invention according to claim 3 is a recording unit that records the entire image of the workpiece generated by the image synthesizing unit in association with the machining condition set by the setting unit; Index display control means for displaying the whole image of each work recorded in the recording means on the display means, and selection means for selecting a work to be processed from the works indexed on the display means; The display control means causes the display means to display the entire image of the workpiece selected by the selection means, while the setting means sets a new machining condition for the workpiece selected by the selection means. The dicing apparatus according to claim 1, wherein the dicing apparatus is provided.

  According to the third aspect of the invention, the machining conditions set for the workpiece are stored in the storage unit together with the entire image of the workpiece, and can be recalled as necessary. When calling a machining condition for a specific workpiece, the whole workpiece image stored in the storage means is displayed as an index on the display means, and one of them is selected. Thereby, processing conditions can be easily set and the operating efficiency of the apparatus can be improved.

  The invention according to claim 4 is characterized in that, in order to achieve the object, the display control means displays a cut line in a distinguishable manner so as to be superimposed on the entire image of the workpiece displayed on the display means. A dicing apparatus according to claim 1, 2 or 3 is provided.

  According to the fourth aspect of the present invention, the cut lines are displayed so as to be distinguishable from each other over the entire workpiece image displayed in the display control. Thereby, the cutting condition of a workpiece | work can be grasped | ascertained easily.

  According to the present invention, various processing conditions can be easily set, and operability can be improved.

  Hereinafter, preferred embodiments of a dicing apparatus according to the present invention will be described in detail with reference to the accompanying drawings.

<Configuration of dicing machine>
FIG. 1 is a perspective view showing an external configuration of a dicing apparatus to which the present invention is applied. As shown in the figure, the dicing apparatus 10 of the present embodiment includes a supply / collection unit 12 that supplies and collects a workpiece W to be processed, a processing unit 14 that processes the workpiece W, and a workpiece W after processing. A cleaning unit 16 for cleaning, a transport unit 18 for transporting the workpiece W, an operation panel 20 for performing various operations, and a control unit (not shown) for controlling the overall operation are configured.

  The supply / collection unit 12 that supplies and collects the workpiece W includes a load port 22, and a cassette (not shown) in which a number of workpieces W are stored is set in the load port 22. The workpiece W to be processed is stored in the cassette while being mounted on a predetermined frame F.

  As shown in FIG. 2, the processing unit 14 that processes the work W includes a work table 24 that holds the work W by suction, a pair of blades 26 </ b> A and 26 </ b> B that cut the work W held by the work table 24, The camera unit 28 is configured to magnify and photograph the surface of the workpiece W held on the table 24 (a so-called twin spindle type processing unit).

  The work table 24 is provided on an X-axis table 30 installed horizontally, and is driven by a θ-axis motor (not shown) built in the work table main body 24A to rotate around a central axis (θ-axis). To do.

  The X-axis table 30 is slidably provided on a pair of X-axis guides 34 and 34 that are horizontally disposed at a predetermined interval on an X-axis base 32 that is horizontally disposed. A linear motor 36 is disposed between the pair of X-axis guides 34, 34, and the X-axis table 30 is driven by the linear motor 36 so that the top of the X-axis guides 34, 34 is illustrated. Slide in the X direction. The X-axis table 30 slides on the X-axis guides 34, 34, whereby the work table 24 moves horizontally in the X direction in the figure.

  The pair of blades 26A and 26B are respectively disposed above the work table 24, and are disposed so that the cutting direction thereof is parallel to the movement direction of the work table 24 (the X direction in the drawing). The rotation axis is arranged so as to be orthogonal to the moving direction of the work table 24).

  Each blade 26A, 26B is attached to a spindle 38A, 38B, and is driven to rotate by the spindle 38A, 38B.

  The spindles 38A and 38B are respectively attached to blade Z-axis tables 40A and 40B installed vertically. The blade Z-axis tables 40A and 40B are slidably provided on a pair of blade Z-axis guides 44 and 44 provided on the blade Y-axis tables 42A and 42B, respectively. The blade Y-axis tables 42A and 42B are installed vertically, and the blade Z-axis tables 40A and 40B are connected to driving means (not shown) (for example, a feed screw mechanism) provided on the blade Y-axis table. It is driven to slide on the blade Z-axis guides 44, 44 in the Z direction (direction perpendicular to the XY plane). The blade Z-axis tables 40A and 40B slide on the blade Z-axis guides 44 and 44, so that the blades 26A and 26B move vertically in the Z direction and are perpendicular to the work table 24. Move forward and backward.

  The blade Y-axis tables 42A and 42B provided with the blade Z-axis tables 40A and 40B are slidably provided on a pair of blade Y-axis guides 48 and 48 provided on the Y-axis base 46. It has been. The Y-axis base 46 is formed in a portal shape, and is erected vertically across the blade X-axis base 32. The blade Y-axis tables 42A and 42B are driven by driving means (not shown) provided on the Y-axis base 46 (for example, a feed screw mechanism) to move the Y-axis tables 48 and 48 for blades in the Y direction in the figure. Slide to. Then, when the blade Y-axis tables 42A and 42B slide on the blade Y-axis guides 48 and 48, the blades 26A and 26B move horizontally in the Y direction in the figure, and their cutting positions change. .

  The camera unit 28 includes a microscope that magnifies a subject image and a camera (electronic camera) that captures an image magnified by the microscope. As shown in FIG. 2, the camera unit 28 is installed vertically above the work table 24 and photographs the work W held on the work table 24 so as to look down from directly above.

  The camera unit 28 is attached to a camera Z-axis table 50 installed vertically. The camera Z-axis table 50 is slidably provided on a pair of camera Z-axis guides 54, 54 provided on the camera Y-axis table 52. The camera Y-axis table 52 is installed vertically, and the camera Z-axis table 50 is driven by a driving means (not shown) provided on the camera Y-axis table 52 (for example, a feed screw mechanism). Slide on the camera Z-axis guide 54 in the Z direction. When the camera Z-axis table 50 slides on the camera Z-axis guide 54, the camera unit 28 moves vertically in the Z direction and moves forward and backward vertically with respect to the work table 24.

  The Y-axis table 52 provided with the camera Z-axis table 50 is slidably provided on a pair of camera Y-axis guides 58 and 58 provided on the Y-axis base 46. The camera Y-axis table 52 is driven by driving means (not shown) provided on the Y-axis base 46 (for example, a feed screw mechanism), and slides on the camera Y-axis guides 58 and 58 in the Y direction in the figure. To do. Then, the camera Y-axis table 52 slides on the camera Y-axis guides 58, 58, whereby the camera unit 28 moves horizontally in the Y direction in the figure. The horizontal shooting position changes.

  The processing unit 14 configured as described above makes the rotating blades 26A and 26B contact the surface of the work W held on the work table 24 while moving the work table 24 holding the work W horizontally. Then, the work W is divided into a rhinoid shape.

  As shown in FIG. 1, the cleaning unit 16 includes a spin cleaning device 16A, and the processed workpiece W is spin cleaned by the spin cleaning device 16A.

  The transport unit 18 includes a handling robot 18A, and the handling robot 18A transports the workpiece W between the units. That is, the handling robot 18A takes out the workpiece W from the cassette of the supply / recovery unit 12 and transports it to the processing unit 14, and also collects the workpiece W processed by the processing unit 14 from the processing unit 14 to obtain a cleaning unit. 16 to transport. Further, the workpiece W after being cleaned by the cleaning unit 16 is recovered from the cleaning unit 16, transported to the supply / recovery unit 12, and stored in the cassette of the supply / recovery unit 12.

  The operation panel 20 includes a display 20A for displaying predetermined information and a touch panel 20B disposed on the display screen of the display (see FIG. 3).

  FIG. 3 is a block diagram illustrating a configuration of a control system of the dicing apparatus 10 according to the present embodiment.

  The control unit 60 includes a CPU 62, a RAM 64, and a ROM 66. The CPU 62 executes various processes in accordance with a predetermined control program, and controls the overall operation of the dicing apparatus. The ROM 66 stores a control program executed by the CPU 62 and various data necessary for control.

  The linear motor 36 and various driving means provided in the processing unit 14 operate according to commands from the control unit 60. Similarly, the spin cleaning device 16 </ b> A provided in the cleaning unit 16 and the handling robot 18 </ b> A provided in the transport unit 18 operate according to commands from the control unit 60.

  The display of the display 20 </ b> A is controlled by the control unit 60, and operation information on the touch panel 20 </ b> B is input to the control unit 60.

  The camera units 28 </ b> A and 28 </ b> B provided in the processing unit 14 take an image in response to a command from the control unit 60 and output the obtained image to the control unit 60.

  In addition, a storage unit 68 is connected to the control unit 60, and data such as machining conditions is stored in the storage unit 68. The storage unit 68 is composed of, for example, a flash memory, an HDD, and the like, and data is read and written according to instructions from the control unit 60.

<Processing condition setting method>
The workpiece W is machined according to preset machining conditions. Therefore, it is necessary to set processing conditions in advance. Hereinafter, a method for setting the machining conditions will be described.

  The machining conditions are set for each type of workpiece W. In the dicing apparatus 10 of the present embodiment, the machining conditions are set by executing a model registration process.

  The model registration process is started by inputting an instruction to execute the model registration process on the operation panel. In this case, first, alignment processing is executed. FIG. 4 is a flowchart showing an alignment processing procedure.

  When an instruction to execute model registration processing is input from the operation panel 20, the workpiece W is taken out from the cassette of the supply / collection unit 12 and set in the work table 24. And it is conveyed to a predetermined alignment position.

  When the workpiece W is conveyed to the alignment position, the camera unit 28 images the surface of the workpiece W. Then, the video is displayed on the operation panel 20 in real time. The operator determines the cutting position by looking at the image displayed on the operation panel 20 (step S10). Here, the operator determines the left end and the right end of the cutting position on the foremost side of the work by looking at the image, and determines the cutting position (designates the position on the operation panel 20).

  When the cutting position is determined, the control unit 60 executes a model (work) registration process (step S11). Here, the positional relationship between the cutting position and the workpiece registered this time and the image are captured, and the data is temporarily stored (for example, temporarily stored in the RAM 64).

  Next, a test alignment process is executed (step S12). That is, alignment is actually executed to check whether the workpiece exists in the correct positional relationship. The alignment is performed using a known technique.

  When the alignment is normally performed, the control unit 60 stores the temporarily stored data in the recipe for the processing conditions (step S13). This recipe is prepared for each workpiece and stored in the storage unit 68.

  Thereafter, the control unit 60 captures an image of the entire workpiece by photographing the workpiece W held on the workpiece table 24 with the camera unit 28 (step S14).

  By the way, as described above, since the camera unit 28 shoots a part of the workpiece W in an enlarged manner through the microscope, it cannot shoot the entire shape of the workpiece.

  Therefore, the work W is partially photographed in a plurality of times, and the obtained image (partial image) is synthesized to generate an image of the entire work.

  For example, as shown in FIG. 5A, it is assumed that the shooting area of the camera unit 28 is set for the workpiece W as shown by a broken line. In this case, as shown in FIG. 5B, individual imaging areas are set so that the imaging parts overlap, and the work W is partially imaged in multiple times (in the upper right corner of each imaging area or The sign in the upper left corner is a sign indicating the shooting order). The control unit 60 stores the obtained image data of each shooting area in the RAM 64 together with the position information of the shooting area.

  FIG. 6A is an example of an image of each shooting area shot in this way. The controller 60 synthesizes the individual images based on the position information of the shooting area, as shown in FIG. Then, an image of the entire workpiece is generated as shown in FIG. Since this type of synthesis method is a known technique, a description of a specific image processing method is omitted.

  In this way, the control unit 60 takes a partial image of the workpiece W in a plurality of times, and synthesizes the obtained partial images to generate an image of the entire workpiece. The control unit 60 stores the obtained image of the entire workpiece in the storage unit 68 in association with the processing condition recipe (step S15).

  The alignment process is completed through the series of steps described above. Thereafter, the control unit 60 causes the operation panel 20 to display an image of the entire shape of the obtained workpiece.

  FIG. 7 is a diagram illustrating a display example of the operation panel 20. As shown in the figure, on the operation panel 20, an image of the entire shape of the work is displayed in a predetermined work display area 70, and various operation buttons are displayed in a predetermined operation area 72.

  The operator sets various machining conditions by operating the operation buttons displayed in the operation area 72 while confirming the image of the entire shape of the work displayed in the work display area 70. For example, the order of lines to be cut, the alignment execution position, the kerf check execution line, the correction line to be performed during cutting, the cutting conditions for each line, and the like are set.

  The setting of conditions is performed, for example, by calling a setting screen for the corresponding condition on the menu screen. In this case, the display on the operation panel 20 is switched as necessary, and a required condition can be input.

  Further, for example, the order of the lines to be cut, the alignment execution position, the kerf check execution line, the correction line to be performed during cutting, the cutting conditions for each line, etc. are touched on the workpiece image displayed in the workpiece display area 70. Then, it may be possible to directly instruct. Thereby, the processing conditions can be set more easily.

  The information on the individual processing conditions set in this way is recorded in the processing condition recipe stored in the storage unit 68.

  The operator inputs all necessary machining condition information and then gives a machining execution instruction.

  As described above, in the dicing apparatus 10 according to the present embodiment, various processing conditions can be set while viewing an actual workpiece image. As a result, it is possible to easily set the processing conditions and to effectively prevent setting errors.

  Note that the display on the operation panel 20 shown in FIG. 7 is an example, and other display forms may be employed.

  In the present embodiment, the operation instruction is input using the touch panel 20B, but the configuration of the input device is not limited to this. An operation instruction may be input using an input device such as a mouse or a joystick.

  As described above, the recipe for the machining conditions is stored in the storage unit 68 together with the image of the entire workpiece. Therefore, when machining the same workpiece again, if the recipe for the corresponding machining conditions is read out, the machining is easily performed. Conditions can be set. In this case, the processing condition recipe can be easily read by displaying the entire workpiece image on the operation panel 20, selecting the entire workpiece image, and reading the processing condition recipe.

  FIG. 8 is a diagram showing an example of a recipe selection screen for this processing condition. As shown in the figure, the entire image of the workpiece corresponding to each processing condition recipe stored in the storage unit 68 is displayed in a list on the operation panel 20. More specifically, indexes are displayed as thumbnail images (reduced images) in the index display area 73 set on the display screen of the operation panel 20. The operator selects (touches) the thumbnail image of the workpiece displayed as an index in the index display area 73, and reads the recipe of the set machining conditions. Thereby, the recipe of the past process conditions can be read easily and reliably.

  The processing conditions read in this way can be corrected and changed as necessary. In this case, setting of a new machining condition is performed while displaying an image of the entire workpiece on the operation panel 20 as described above.

  When the processing conditions are corrected or changed, the corrected and corrected portion of the recipe is rewritten and recorded in the storage unit 68. That is, it is updated.

  Instead of updating, it may be recorded as separate data. Further, the operator may select whether to record as separate data or to update and record, and record according to the selection result.

  In the above example, the work images are indexed by thumbnail images. However, the images of the work may be selected by sequentially feeding the frames one by one and returning them one by one.

  In addition, the operator may arbitrarily switch these displays (switching between index display and single frame display).

  Also, the number of images to be displayed in an index may be arbitrarily set by the operator.

  In this example, the entire image of the workpiece is used for setting the machining conditions. However, it is preferable to display the entire image of the workpiece on the operation panel 20 even during the machining. Thereby, it is possible to easily confirm the type of workpiece currently being machined.

  Further, when the entire workpiece image is displayed on the operation panel 20 even during machining in this way, it is preferable to display a line indicating the cut line so as to overlap the entire workpiece image as shown in FIG. . Thereby, the cut line can be easily identified, and the progress of processing can be easily confirmed. In this case, it is more preferable to display a line indicating the cut line in real time.

  In the above embodiment, the case where the present invention is applied to a so-called twin spindle type dicing apparatus has been described as an example. However, the present invention is similarly applied to a single type dicing apparatus (a dicing apparatus having only one blade). be able to.

  In the above embodiment, there is only one camera unit. However, in a twin spindle type dicing apparatus, a camera unit may be installed corresponding to each blade.

The perspective view which shows the external appearance structure of a dicing apparatus Plan view showing the configuration of the processing section Block diagram showing the configuration of the control system of the dicing apparatus Flow chart showing alignment procedure Conceptual diagram of how to shoot a workpiece Conceptual diagram of the method for generating the entire image of the workpiece Figure showing a display example of the operation panel The figure which shows an example of the selection screen of the recipe of process conditions The figure which shows the example of a display of the operation panel during work processing

Explanation of symbols

  DESCRIPTION OF SYMBOLS 10 ... Dicing apparatus, 12 ... Supply / collection part, 14 ... Processing part, 16 ... Cleaning part, 18 ... Conveying part, 20 ... Operation panel, 20A ... Display, 20B ... Touch panel, 24 ... Work table, 26A, 26B ... Blade 28 ... Camera unit 60 ... Control unit 68 ... Storage unit

Claims (4)

In a dicing machine that cuts a workpiece placed on a workpiece table according to preset machining conditions,
Imaging means for magnifying and photographing a part of the work placed on the work table with a microscope,
Moving means for relatively moving the work table and the photographing means;
Image synthesizing means for synthesizing the partial images of the work obtained by the photographing means, and generating an entire image of the work;
Display means;
Display control means for causing the display means to display an entire image of the work generated by the image composition means;
Setting means for setting processing conditions for the workpiece on the screen of the display means on which the entire image of the workpiece is displayed;
A dicing apparatus comprising:   The setting means sets at least one of an order of lines to be cut, an alignment execution position, a kerf check execution line, a correction line to be performed during cutting, and a cutting condition for each line as the processing conditions. 2. The dicing apparatus according to 1. A recording unit that records the entire image of the workpiece generated by the image synthesizing unit in association with the machining conditions set by the setting unit;
Index display control means for displaying the whole image of each workpiece recorded in the recording means on the display means;
Selecting means for selecting a workpiece to be processed from the workpieces indexed on the display means;
The display control means causes the display means to display the entire image of the workpiece selected by the selection means, while the setting means changes the machining conditions of the workpiece selected by the selection means to new machining conditions. The dicing apparatus according to claim 1, wherein the dicing apparatus is set.   4. The dicing apparatus according to claim 1, wherein the display control unit displays the cut line so as to be distinguishable on the entire image of the workpiece displayed on the display unit.

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