CN114077224A - Processing device - Google Patents

Abstract

The invention provides a processing device, which can inhibit the increase of the area for displaying the number keys and can improve the operability for inputting a plurality of digits. The processing device comprises: a holding table; a processing unit for processing the workpiece held by the holding table; an operation panel for inputting processing conditions; and a control unit that controls the operation panel. The control unit causes the operation panel to display a plurality of input fields corresponding to a plurality of items included in the processing condition, causes the numeric keys to be displayed when one of the plurality of input fields is selected, causes the numeric keys to be displayed when the numeric keys are selected, causes the numeric keys with digit distinction corresponding to a plurality of numeric values including numbers input through the numeric keys in respectively different positions to be displayed, and causes the control unit to input the numeric values of the selected numeric keys with digit distinction to the one input field when the numeric keys are selected.

Description

Processing device

Technical Field

The present invention relates to a processing apparatus.

Background

When setting the machining conditions of a machining device having a touch panel, an operator operates the touch panel to input the machining conditions. At this time, the operator inputs predetermined information (numerical values, character strings, etc.) to the processing apparatus by touch operation of input keys included in an input unit (a numeric keypad, a keyboard, etc.) displayed on the touch panel. For example, patent document 1 discloses a machining device equipped with an operation panel on which a numeric value setting key for setting a numeric value is arranged.

Patent document 1: japanese patent laid-open No. 2001-84015

However, in the conventional processing apparatus, the input keys displayed on the touch panel are densely arranged at narrow intervals, and when the number of digits of the input numerical value is large, the operator may input wrong information. When erroneous information is input to the touch panel, the machining device may machine the workpiece in accordance with an unexpected machining condition, thereby causing a machining failure. Further, since the machining conditions of the machining device are set to a number from a decimal point or less to 10 or more, there is a problem that when a plurality of number setting keys are always displayed as in the machining device of patent document 1: the numeric keys for inputting numeric values become smaller, and operability at the time of input is degraded.

Disclosure of Invention

Accordingly, an object of the present invention is to provide a processing device capable of suppressing an increase in the area in which numeric keys are displayed and suppressing erroneous input when a plurality of digits are input.

According to one aspect of the present invention, there is provided a processing apparatus including: a holding table that holds a workpiece; a processing unit for processing the workpiece held by the holding table; an operation panel for inputting processing conditions; and a control unit that controls the operation panel, wherein the control unit causes the operation panel to display a plurality of input fields corresponding to a plurality of items included in the processing condition, the control unit causes the numeric keys to be displayed when one of the plurality of input fields is selected, the control unit causes the plurality of digit-distinguishing numeric keys to be displayed when the numeric key is selected, the plurality of digit-distinguishing numeric keys correspond to a plurality of numeric values including numbers input through the numeric keys at respectively different positions, and the control unit inputs the selected numeric value of the digit-distinguishing numeric key to the one of the input fields when the digit-distinguishing numeric key is selected.

In the processing apparatus, it is preferable that the number-difference numeric key is selected by a flick operation from the numeric key.

Preferably, in the processing apparatus, the control means includes a range setting unit that sets a range of numerical values that can be input to each of the plurality of input fields, and the control means displays only the number-distinguishing numeric keys that fall within the range set by the range setting unit.

Preferably, the processing apparatus further includes a digit storage unit that stores a plurality of input fields in association with digits of numeric values that have been input to the plurality of input fields in the past, and when one input field is selected, the control unit displays only digit-distinguishing numeric keys that match the digits stored in the digit storage unit.

The processing apparatus according to the present invention has, for example, the following effects: the operability for inputting a plurality of digits can be improved while suppressing the numeric keys for inputting numeric values from becoming small and the operability for inputting numeric values from deteriorating.

Drawings

Fig. 1 is a perspective view showing a configuration example of a processing apparatus according to an embodiment.

Fig. 2 is a diagram schematically showing an example of a functional configuration of a processing apparatus according to the embodiment.

Fig. 3 is a diagram showing a display example of device data of the embodiment.

Fig. 4 is a diagram for explaining an example of input processing for the input field of the embodiment.

Fig. 5 is a diagram for explaining another example of input processing for the input field of the embodiment.

Fig. 6 is a diagram for explaining still another example of input processing to the input field according to the embodiment.

Fig. 7 is a flowchart illustrating an example of processing procedures of input processing in the processing apparatus according to the embodiment.

Fig. 8 is a diagram showing an example of digital data according to the embodiment.

Fig. 9 is a diagram for explaining a modification of the input processing for the input field according to the embodiment.

Fig. 10 is a perspective view schematically showing a configuration example of a processing apparatus according to modification 1 of the embodiment.

Fig. 11 is a perspective view schematically showing a configuration example of a processing apparatus according to modification 2 of the embodiment.

Description of the reference symbols

1: a processing device; 10: a chuck table; 12: a shooting unit; 20: a processing unit; 30: a touch panel (operation panel); 31: a display unit; 32: an input section; 40: a control unit; 41: a display control unit; 42: a range setting unit; 50: a memory; 100: a workpiece unit; 101: a workpiece; 500: device data; 501: an input field; 510: digital data; 511: digital information.

Detailed Description

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. The components described below include those that can be easily conceived by those skilled in the art, and substantially the same ones. The following structures may be combined as appropriate. Various omissions, substitutions, and changes in the structure may be made without departing from the spirit of the invention.

[ embodiment ]

A machining apparatus 1 according to an embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a perspective view showing a configuration example of a processing apparatus 1 according to an embodiment. Fig. 2 is a diagram schematically showing an example of the functional configuration of the processing apparatus 1 according to the embodiment.

As shown in fig. 1, a processing apparatus 1 according to the embodiment includes a main body 2 as a box-shaped housing. As shown in fig. 1, the processing apparatus 1 includes a chuck table 10, a processing unit 20, a touch panel 30, and a control unit 40. The control unit 40 is electrically connected to the chuck table 10, the processing unit 20, and the touch panel 30.

The workpiece 101 to be processed by the processing apparatus 1 is, for example, a disc-shaped semiconductor wafer or an optical device wafer made of silicon, sapphire, gallium arsenide, or the like. The workpiece 101 is supported by an opening of the annular frame 102 via the adhesive tape 103, thereby constituting a workpiece unit 100 including the workpiece 101.

The chuck table 10 holds the workpiece unit 100 by the holding surface 11. The chuck table 10 communicates with a suction source, not shown, and suctions and holds the workpiece unit 100 by negative pressure supplied from the suction source. The chuck table 10 can be moved in the X-axis direction by an X-axis moving unit 22 described later and can be rotated about the Z-axis by a rotation driving source not shown.

In the present embodiment, as shown in fig. 2, the processing apparatus 1 further includes an imaging unit 12, a driving unit 14, and a Z-axis moving unit 15. The control unit 40 is electrically connected to the photographing unit 12, the driving unit 14, and the Z-axis moving unit 15.

As shown in fig. 1 and 2, the imaging unit 12 is an electron microscope equipped with an image sensor such as a CCD (Charge Coupled Device) or a CMOS (Complementary Metal Oxide Semiconductor). The imaging unit 12 images the front surface of the workpiece 101 held on the holding surface of the chuck table 10. The imaging unit 12 is integrally attached to and supported by a part of a housing for the processing unit 20, and is provided so as to be movable in the Z-axis direction by a Z-axis moving unit 15 including a ball screw, a nut, a pulse motor, and the like. The imaging unit 12 may have, for example, a light source that irradiates illumination light on the front surface of the workpiece 101 held by the holding surface of the chuck table 10.

The machining unit 20 machines the workpiece 101 held by the chuck table 10. The machining unit 20 is, for example, a pair of cutting units each having a cutting tool. The cutting tools of the pair of cutting units are opposite to each other in the Y-axis direction and both rotate around the Y-axis. The machining unit 20 performs cutting machining on the workpiece 101 by the rotating cutting tool. The machining unit 20 can be moved in the Y-axis direction by the Y-axis moving unit 27 and can be moved in the Z-axis direction by the Z-axis moving unit 15. The Y-axis moving unit 27 for moving the imaging unit 12 or the machining unit 20 relative to the holding surface of the chuck table 10 in the Y-axis direction is constituted by a ball screw, a nut, a pulse motor, and the like, and constitutes the driving unit 14 together with the X-axis moving unit 22.

The machining apparatus 1 relatively moves the chuck table 10 and the machining unit 20 by the X-axis moving unit 22, the Y-axis moving unit 27, and the Z-axis moving unit 15, thereby machining the workpiece 101 held by the chuck table 10.

The machining unit 20 included in the machining apparatus 1 is not limited to a cutting unit that performs cutting of the workpiece 101 by a cutting tool. In addition, the processing unit 20 may be, for example, a grinding unit that grinds the same workpiece 101 using a grinding wheel or the like, a polishing unit that polishes the same workpiece 101 using a polishing pad or the like, or a laser processing unit that irradiates the same workpiece 101 with a laser beam to perform laser processing.

As shown in fig. 1, the touch panel 30 is provided in the main body 2 with the display surface facing outward. The touch panel 30 is disposed in a portion that is easy to observe and easy to handle on the housing of the processing apparatus 1. The touch panel 30 displays an image of the front surface of the workpiece 101 captured by the imaging unit 12 and various information necessary for the machining process under the control of the control unit 40, and accepts an input operation and the like necessary for the machining process from an operator. In the present embodiment, the touch panel 30 is an example of an operation panel.

As shown in fig. 2, the touch panel 30 includes: a display unit 31 for displaying various information related to the processing apparatus 1; and an input unit 32 that receives various operation inputs related to the machining apparatus 1, such as setting inputs of machining conditions, from an operator. The display unit 31 includes a display device such as a liquid crystal display or an organic EL display. The input unit 32 has, for example, a touch screen that specifies a contact position and coordinates of an object on the display surface of the display device.

In the present embodiment, a case where the touch panel 30 is an example of an output unit that outputs information will be described, but the present invention is not limited thereto. The output unit may be realized by an electronic device such as a speaker or a communication device.

As shown in fig. 2, the processing apparatus 1 has a memory 50. The memory 50 stores programs that realize functions such as various processes executed by the control unit 40, data for processing based on the programs, and the like. The memory 50 is electrically connected to the control unit 40. The memory 50 may be implemented by an HDD (Hard Disk Drive), a semiconductor memory, or the like. The memory 50 may be used as a temporary work area when a processor included in the control unit 40 executes a command described in the control program.

In the present embodiment, a case where the machining device 1 includes the memory 50 will be described, but the machining device 1 is not limited to this. For example, the memory 50 may be a storage device accessible to the processing apparatus 1, such as a computer and an electronic device outside the processing apparatus 1, and another processing apparatus 1.

The memory 50 can store various data such as device data 500 and digital data 510. The equipment data 500 includes, for example, data for displaying an input field in which an operator can set the processing conditions of the workpiece 101. The device data 500 is prepared for each kind of device. For example, the kind of the device is managed by the serial number of the device. The device data 500 is displayed on the touch panel 30 as a device data screen having a plurality of input fields, for example. The device data 500 associates an input field with a numeric value or default value entered for the input field. When the serial number of a device is instructed to the control unit 40, the value of each setting item associated with the serial number of the device is input to the input field.

The digital data 510 includes data associating an input field of the device data 500 and the like with the digital numbers of a plurality of numeric values input to the input field in the past. The digital data 510 includes data showing a range of numerical values that can be input to the input field. The memory 50 storing the digital data 510 functions as a digital storage unit. In the present embodiment, a case where the digital data 510 is different from the device data 500 is described, but the digital data 510 is not limited to this. Digital data 510 may be included in device data 500.

In the present embodiment, the processing for inputting numerical values in the input field shown in the device data 500 is described, but the processing in the processing apparatus 1 is not limited to this. The present invention can be applied to, for example, a process when an operator inputs numerical values to a plurality of input fields of alignment data, cleaning data, conveyance data, notch inspection data, and the like.

The control unit 40 controls the respective mechanisms (the X-axis moving unit 22, the Y-axis moving unit 27, and the Z-axis moving unit 15) that drive the processing apparatus 1. The control unit 40 controls each part of the machining apparatus 1 to realize the machining process of the machining apparatus 1. The control unit 40 controls each part of the machining apparatus 1 including the chuck table 10 and the machining unit 20 according to the machining conditions input and set by the operator, for example, to realize the machining process of the workpiece 101.

The control unit 40 has: an arithmetic Processing device such as a CPU (Central Processing Unit); a storage device such as a ROM (Read Only Memory) or a RAM (Random Access Memory); and an input/output interface device. The control unit 40 is a computer capable of executing a control program or the like for controlling the above-described components in accordance with a series of machining processes performed by the machining apparatus 1 using the above-described apparatus.

The control unit 40 controls all operations of the machining apparatus 1 in accordance with the machining conditions set by the operator via the input unit 32 of the touch panel 30. The control unit 40 has a display control unit 41 and a range setting unit 42. The control unit 40 executes a program to realize functions, actions, and the like of each unit.

The display control unit 41 controls display on the display unit 31 of the touch panel 30. The display control unit 41 causes the touch panel 30 to display a plurality of input fields corresponding to a plurality of items included in the processing conditions of the devices of the workpiece 101. When one of the plurality of input fields is selected, the display control section 41 causes the numeric keys to be displayed. The display control unit 41 detects a gesture based on the contact detected by the input unit 32, the position of the touch panel 30 at which the contact is detected, a change in the position at which the contact is detected, and the like. The gesture is an operation performed by the operator with respect to the touch panel 30. The display control unit 41 detects gestures such as touch (touch), tap (tap), long press (long touch), release (release), and flick (flick).

When the numeric key is selected by the 1 st gesture, the display control unit 41 inputs the numeric value indicated by the numeric key to the input field. The 1 st gesture includes, for example, a touch, tap, or the like gesture. When the numeric key is selected by the 2 nd gesture, the display control unit 41 causes the display of a plurality of digit-distinct numeric keys corresponding to a plurality of numeric values including the number input by the numeric key at respectively different digits (digits). The 2 nd gesture includes, for example, a long press, a flick, or the like gesture. For example, when the numeric key of "1" is selected, the display control unit 41 causes the numeric-position-differentiated numeric keys such as "0.1", "0.01", "10" and "100", which indicate that the selected numeric key of "1" is included in different numeric positions (digits), to be displayed. That is, each digit distinguishing numeric key shows that the number selected by the numeric key is multiplied by 10ⁿ(n is a positive or negative integer).

The display control unit 41 may display the number-difference numeric keys by the 1 st gesture. In this case, when the numeric key is selected by the 1 st gesture including touch, tap, long press, flick, or the like, the number-distinguishing numeric key is displayed in the vicinity of the selected numeric key.

Next, when the operator performs a 2 nd gesture of sliding the touched position onto the number-difference numeric keys and then stopping the touch on the number-difference numeric keys while touching the touch panel 30, the display control unit 41 inputs the numeric value of the number-difference numeric keys to the input field. When the operator performs the 2 nd gesture of stopping the contact on the numeric key without sliding the contact on the numeric difference numeric key, the display control unit 41 inputs the numeric value of the numeric key to the input field.

When the digit difference numeric key is selected, the display control section 41 inputs the numeric value of the selected digit difference numeric key to the one input field. The display control unit 41 detects that the digit-distinguishing numeric key is selected by flicking operation from the numeric key to the digit-distinguishing numeric key. Thus, the processing device 1 enables the operator to select the digit-number-distinguishing numeric key by successive operations from the numeric keys to the digit-distinguishing numeric keys, and thus the operability of the digit-distinguishing numeric key can be improved. As a result, the processing device 1 does not need to always display the number-difference numeric keys, and therefore the numeric keys do not need to be reduced in size, and input errors of the numbers can be prevented.

The range setting unit 42 sets a range of numerical values that can be input to each of the plurality of input fields. For example, when setting a range of numeric values that can be input to the input field, the range setting unit 42 associates information indicating the range of numeric values with the items in the input field of the device data 500. For example, when the input field can input a numerical value of 1 to 5000, the range setting unit 42 associates information indicating that the input field can be input with a range of 1 to 5000, for example, with the input field. The display control unit 41 causes only the numeric keys representing the numeric values within the range set by the range setting unit 42 to be displayed in the vicinity of the numeric keys.

The above description explains a configuration example of the processing apparatus 1 according to the present embodiment. The above-described configuration described with reference to fig. 1 and 2 is only an example, and the configuration of the processing apparatus 1 according to the present embodiment is not limited to this example. The functional structure of the processing apparatus 1 of the present embodiment can be flexibly changed in accordance with the specification and the operation.

(example of input processing in input field)

Next, an example of the input processing executed by the processing device 1 according to the embodiment will be described. Fig. 3 is a diagram showing a display example of device data 500 of the embodiment. Fig. 4 is a diagram for explaining an example of input processing for the input field of the embodiment. Fig. 5 and 6 are diagrams for explaining another example of input processing for the input field of the embodiment.

The device data 500 shown in fig. 3 is displayed as a device data screen on the display unit 31 of the touch panel 30 under the control of the control unit 40. The device data 500 has a plurality of input fields 501. The plurality of input fields 501 are configured to be able to input numerical values input by an operation of an operator. In the example shown in fig. 3, the machine data 500 includes a plurality of input fields 501 corresponding to a plurality of items such as "spindle rotation speed", "tool height", "feed speed", "indexing", "workpiece shape and size", and "thickness". The control unit 40 controls the display unit 31 of the touch panel 30 so that an input key unit 600 for an operator to input a numerical value is displayed in the vicinity of the device data 500. For example, when the operator selects any of the plurality of input fields 501, the control section 40 may display the input key section 600, or may always display the input key section 600.

The input key section 600 has a plurality of numeric keys 610 and a plurality of operation keys 620. The plurality of numeric keys 610 are keys of "0" to "9" for the operator to input numeric values. The plurality of operation keys 620 are keys for the operator to select commands such as determination, movement, deletion, shift-up, and the like, for example.

In the example shown in fig. 3, the operator selects the input field 501 corresponding to the "band" in the item of "thickness" for the device data 500. In this case, the control unit 40 displays the input key unit 600 together with the device data 500, and controls the display unit 31 of the touch panel 30 so that the display state when the input field 501 is selected is achieved.

In the case 1001 shown in fig. 4, the control unit 40 displays the device data 500 and the input key section 600, which are not shown, on the display section 31. With the touch panel 30, the operator's finger touches the position of the numeric key 610 of "9". Then, as shown in case 1002, the operator immediately moves the finger in contact with touch panel 30 away from the position of numeric key 610 of "9". In this case, the control unit 40 detects a touch operation to the numeric key 610 of "9" by means of the touch panel 30. The control section 40 recognizes that the numeric key 610 of "9" is selected, inputs the numeric value indicated by the numeric key 610 of "9" to the input field 501, and updates the display of the device data 500. Thus, the machining apparatus 1 displays the device data 500 to the operator, in which the numerical value of "9" is input to the input field 501 corresponding to the "band" in the item of "thickness".

In the case 1001 shown in fig. 5, the control unit 40 displays the device data 500 and the input key section 600, which are not shown, on the display section 31 as shown in fig. 4. The operator continues the state in which the finger is in contact with the position of numeric keypad 610 of "9" on touch panel 30 for a predetermined time or longer. The predetermined time includes, for example, a time set for determining whether or not the number difference numeric keys 630 are displayed. When the control unit 40 detects a long press operation on the ten key 610 of "9" through the input unit 32, the display unit 31 is controlled so as to display a plurality of digit number distinguishing ten keys 630 as shown in case 1010. When the control unit 40 detects a touch operation on the ten key 610 of "9" through the input unit 32, the display unit 31 may be controlled so that the plurality of number-difference ten keys 630 are displayed.

In the example shown in fig. 5, the control unit 40 displays a plurality of digit number distinguishing numeric keys 630 on both sides of the numeric key 610 of "9". The plurality of digit distinguishing numeric keys 630 are, for example, a plurality of keys corresponding to a plurality of numeric values in which the number of "9" input through the numeric key 610 exists in different digits (digits). The plurality of number-distinguishing numeric keys 630 include, for example, four keys for distinguishing between numbers below the decimal point of "0.9", "0.09", "0.009", "0.0009" and four keys for distinguishing between numbers of integers of "90", "900", "9000" and "90000". The number difference numeric keys 630 of "0.9", "0.09", "0.009", and "0.0009" are overlapped with the numeric keys 610 of "8", "5", and "2", and are displayed in a column shape along the numeric keys 610. The number distinguishing numeric keys 630 of "90", "900", "9000" and "90000" overlap the numeric keys 610 of "+/-", "0", shown in a column along the numeric keys 610. The plurality of number-distinguishing numeric keys 630 may be set in advance for each input field 501, or a range of numeric values that can be input may be set for each input field 501 by the range setting unit 42.

Next, at the field 1011, the operator slides the finger indicating the numeric key 610 of "9" to the numeric difference numeric key 630 of "9000" while contacting the touch panel 30. At the position 1012, the operator moves the finger touching the numeric key 630 for the digit of "9000" away from the touch panel 30. The control unit 40 detects a series of operations of the operator from the field 1011 to the field 1012 as flick operations to the number-distinguishing numeric key 630 of "9000" through the input unit 32. In this case, the control section 40 recognizes that the digit difference numeric key 630 of "9000" is selected, inputs the numeric value indicated by the digit difference numeric key 630 of "9000" to the input field 501, and updates the display of the device data 500. Thus, the machining apparatus 1 displays to the operator the device data 500 indicating that the numerical value of "9000" is input to the input field 501 corresponding to the "band" in the "thickness" item. Similarly, the processing apparatus 1 may display a plurality of number difference number keys 630 for the number keys 610 of "1" to "8".

For example, when the operator inputs "7500" into the input field 501, the numerical value of "7" is input into the input field 501 by first tapping the numeric key 610 of "7". When the operator performs a long-press operation on the ten key 610 of "5" to display the digit number difference ten key 630 of "500", the operator performs a flick operation on the digit number difference ten key 630 of "500", thereby inputting a numeric value of "7500" into the input field 501. Thus, the operator can input "7500" of four bits to the input field 501 by two operations, i.e., a flick operation from the long press operation. That is, when "7500" is input to the input field 501, the processing device 1 can reduce the number of operations to two times compared with the number keys 610 of "7", "5", "0", and "0" that are operated four times, and thus can improve the efficiency of the input operation.

For example, when the operator inputs "0.0125" to the input field 501, the operator first performs a long-press operation on the number key 610 of "1" and, when the digit number difference number key 630 of "0.01" is displayed, performs a flick operation on the digit number difference number key 630 of "0.01", thereby inputting a numerical value of "0.01" to the input field 501. Then, the operator taps the number key 61 of "2" and taps the number key 610 of "5", thereby inputting the numerical value of "0.0125" to the input field 501. Thus, the operator can input "0.0125" of four decimal places or less to the input field 501 by three times of flick operation and two flick operations in total. That is, when "0.0125" is input to the input field 501, the processing device 1 can reduce the number of operations to three times as compared with five times of operations on the ten keys 610 of ".", "0", "1", "2", and "5", and thus can improve the efficiency of the input operation.

As described above, when a numerical value of a plurality of digits is input to the input field 501, the processing device 1 can reduce the number of operations of the numeric keys 610 by displaying the digit distinguishing numeric keys 630, and thus can suppress erroneous input. For example, in the case where the plurality of numeric keys 610 displayed on the touch panel 30 are densely arranged at narrow intervals, the processing device 1 can suppress erroneous input by reducing the number of times of operation of the numeric keys 610. As a result, when the number of input bits is large, the machining device 1 can reduce the number of operations as compared with the case where only the numeric key 610 is operated a plurality of times, and thus can suppress erroneous input and improve operability. Further, the processing apparatus 1 displays the number-distinguishing ten-key 630 in a superimposed manner on the ten-key 610, and thereby can display the plurality of number-distinguishing ten-keys 630 even when the plurality of ten-keys 610 displayed on the display unit 31 are arranged densely at narrow intervals.

The processing device 1 does not always display the plurality of number-difference numeric keys 630 on the input key unit 600, and displays the numeric keys 610 when the numeric keys are continuously touched for a predetermined time or more and are selected, so that the selection can be performed by a flick operation. As a result, the machining device 1 does not need to reduce the size of the displayed keys, and thus can further suppress erroneous input by the operator.

In the present embodiment, the case where the processing device 1 displays the plurality of number keys 630 on the left and right sides is described, but the present invention is not limited thereto. For example, if the processing device 1 displays the number-distinguishing numeric keys 630 at positions adjacent to the numeric keys 610, the processing device may be configured to display a plurality of number-distinguishing numeric keys 630 at arbitrary positions such as upper, lower, left, right, and oblique directions of the numeric keys 610. For example, the processing device 1 may be configured to display the number difference numeric keys 630 so as to overlap with a part of the numeric keys 610 selected by the operator.

For example, in the machining apparatus 1, the range setting unit 42 sets a range of 1 to 5000 as a range of numerical values that can be input to the input field 501. In this case, the processing apparatus 1 can limit the number of keys of the numeric keys 630.

In a case 1101 shown in fig. 6, the control unit 40 displays the device data 500 and the input key section 600, which are not shown, on the display section 31. The operator continues the state in which the finger is in contact with the position of numeric keypad 610 of "5" on touch panel 30 for a predetermined time or longer. When the control unit 40 detects a long press operation on the ten key 610 of "5" through the input unit 32, the number difference ten key 630 to be displayed is determined in accordance with the range of numerical values that can be input in the input field 501. For example, the control unit 40 determines three digit distinguished number keys 630 of '50', '500', and '5000' falling within the range of 1 to 5000. As shown in case 1102, the control unit 40 controls the display unit 31 so that three number difference numeric keys 630 of "50", "500", and "5000" are displayed around the numeric key 610 of "5".

Further, for example, it is assumed that the input field 501 for the "thickness" of the tape has an input range of 0.01 to 5.00mm set by the range setting unit 42. In this case, when the processing device 1 detects that the numeric key 310 of "9" is selected for a predetermined time or more, two number-distinguishing numeric keys 630 of "0.09" and "0.9" falling within the range can be displayed around the numeric key 310 of "9". As a result, the processing device 1 can further suppress erroneous input to the input field 501 because the operator can select the numeric keypad 630 having the number of digits that can be input to the input field 501.

(input processing of input field)

Next, an example of a processing procedure of the input processing executed by the processing apparatus 1 of the embodiment will be described. Fig. 7 is a flowchart illustrating an example of processing procedures of input processing in the processing apparatus 1 according to the embodiment. The processing steps shown in fig. 7 are realized by the control unit 40 of the processing apparatus 1 executing a program. The processing steps shown in fig. 7 are performed in the case of displaying the device data 500.

As shown in fig. 7, the control unit 40 of the processing apparatus 1 displays the device data 500 on the touch panel 30 (step 2001). The control unit 40 controls the display unit 31 of the touch panel 30 to display the device data 500 having the plurality of input fields 501, for example. Thereby, the display unit 31 displays an apparatus data screen having a plurality of input fields 501. When the process of step 2001 is ended, the control unit 40 advances the process to step 2002.

The control unit 40 determines whether or not the input field 501 is selected (step 2002). For example, when the contact position of the object on the display surface provided by the input unit 32 of the touch panel 30 is the position of the input field 501 of the device data screen, the control unit 40 determines that the input field 501 is selected. If it is determined that the input field 501 is not selected (no in step 2002), the control unit 40 advances the process to step 2015, which will be described later. When determining that the input field 501 has been selected (yes at step 2002), the control unit 40 advances the process to step 2003.

The control unit 40 displays the numeric keys 610 on the touch panel 30 (step 2003). For example, the control unit 40 displays the input key section 600 described above, thereby displaying the plurality of numeric keys 610 in an operable manner. When the process of step 2003 is terminated, the control unit 40 advances the process to step 2004.

The control unit 40 determines whether or not the numeric keypad 610 is selected for a predetermined time or longer (step 2004). For example, when the state where the contact position of the object on the display surface provided by the input unit 32 of the touch panel 30 is the position of the numeric key 610 continues for a predetermined time or longer, the control unit 40 determines that the numeric key 610 is selected. If it is determined that numeric keypad 610 is selected for the predetermined time or longer (yes at step 2004), control section 40 advances the process to step 2005.

The control unit 40 determines the digit distinguishing number keys 630 corresponding to the number keys 610 (step 2005). For example, when the range setting unit 42 does not set a range of numeric values that can be input to the corresponding input field 501, the control unit 40 specifies the plurality of number-distinguishing numeric keys 630 preset in the numeric keys 610. For example, when the range setting unit 42 sets a range of numeric values that can be input to the corresponding input field 501, the control unit 40 specifies the number-distinguishing numeric keys 630 that fit within the range. When the process of step 2005 is ended, the control unit 40 advances the process to step 2006.

The control unit 40 causes the digit distinguishing number keys 630 to be displayed in the vicinity of the number keys 610 (2006). For example, the control unit 40 controls the display unit 31 so that the plurality of number difference numeric keys 630 are displayed in the vicinity of the numeric key 610 selected by the operator. When the process of step 2006 is terminated, the control unit 40 advances the process to step 2007.

The control unit 40 determines whether the determination operation of the number difference numeric key 630 is detected (step 2007). For example, when a flick operation to the digit-distinguishing ten keys 630 is detected via the input unit 32, the control section 40 determines that a determination operation to the digit-distinguishing ten keys 630 is detected. If it is determined that the operation for specifying the number-difference numeric key 630 has been detected (yes in step 2007), the control unit 40 advances the process to step 2008.

The control unit 40 inputs the numerical value of the number difference numeric key 630 to the input field 501 (step 2008). For example, the control unit 40 specifies the numerical value of the numeric difference key 630 for which the specifying operation is detected, inputs the numerical value into the input field 501, and updates the display content of the display unit 31. When the control unit 40 ends the process of step 2008, the process proceeds to step 2013, which will be described later.

If it is determined that the determination operation of the numeric difference keys 630 has not been detected (no in step 2007), the control unit 40 advances the process to step 2009. The control unit 40 determines whether or not the erasing condition of the number difference numeric key 630 is satisfied (step 2009). The erasing condition of the digit number keys 630 includes, for example, detection of any of the following operations: the operator's finger moves away from the touch panel 30; selecting other number keys 610; selecting other input fields 501; and so on. When detecting any operation, the control unit 40 determines that the erasing condition of the digit number key 630 is satisfied. If it is determined that the erasure condition for the number-difference numeric keys 630 is not satisfied (no in step 2009), the control unit 40 returns the process to step 2007 described above and continues the process. When determining that the erasing condition for the number difference numeric keys 630 is satisfied (yes in step 2009), the control unit 40 advances the process to step 2010.

The control unit 40 erases the displayed digit difference number keys 630 (step 2010). For example, the control unit 40 controls the display unit 31 to erase the plurality of digit distinguishing numeric keys 630 displayed in the vicinity of the numeric key 610 selected by the operator. As a result, the display unit 31 is in a state where the plurality of number-difference ten keys 630 are erased and only the ten keys 610 are displayed. When the process of step 2010 is terminated, the control unit 40 advances the process to step 2013, which will be described later.

If it is determined that the numeric keypad 610 is not selected for the predetermined time or longer (no at step 2004), the control unit 40 advances the process to step 2011. The control unit 40 determines whether or not the determination operation of the numeric keys 610 is detected (step 2011). For example, when the touch operation on the numeric keypad 610 is detected via the input unit 32, the control unit 40 determines that the determination operation on the numeric keypad 610 is detected. If it is determined that the operation for specifying the numeric keypad 610 has not been detected (no in step 2011), the control unit 40 advances the process to step 2013, which will be described later.

If it is determined that the operation for specifying the numeric keypad 610 has been detected (yes at step 2011), the control unit 40 advances the process to step 2012. The control unit 40 inputs the numerical value of the numeric key 610 to the input field 501 (step 2012). For example, the control unit 40 specifies the numerical value of the numeric keypad 610 for which the specifying operation is detected, inputs the numerical value into the input field 501, and updates the display content of the display unit 31. When the process of step 2012 is terminated, the control unit 40 advances the process to step 2013.

The control unit 40 determines whether or not the erasing condition of the numeric keys 610 is satisfied (step 2013). The erasing condition of the numeric key 610 includes, for example, detection of any of the following operations: the operator's finger moves away from the touch panel 30; releasing the selection of the input field 501; and so on. When detecting any operation, control section 40 determines that the erasing condition of numeric key 610 is satisfied. If it is determined that the erasing condition of the numeric keys 610 is not satisfied (no in step 2013), the control section 40 advances the process to step 2015, which will be described later. If it is determined that the erasing condition for the numeric keys 610 is satisfied (yes in step 2013), the control unit 40 advances the process to step 2014.

The control unit 40 erases the number keys 610 displayed on the touch panel 30 (step 2014). For example, the control unit 40 causes the display unit 31 to erase the input key unit 600 described above, thereby erasing the plurality of numeric keys 610. When the process of step 2014 is finished, the control unit 40 proceeds to step 2015.

The control unit 40 determines whether or not the device data 500 is erased (step 2015). For example, when the storage operation, the end operation, or the like of the device data 500 is detected via the input unit 32, the control unit 40 determines that the device data 500 is erased. When determining that the device data 500 has not been erased (no in step 2015), the control unit 40 returns the process to step 2002 described above and continues the process. When determining that the device data 500 is erased (yes at step 2015), the control unit 40 advances the process to step 2016.

The control section 40 saves the input value in the input field 501 and erases the device data 500 (step 2016). For example, the control unit 40 controls the touch panel 30 so as to store the device data 500 reflecting the numerical value input to the input field 501 in the memory 50 and erase the displayed device data 500. Thereby, the display unit 31 erases the displayed device data screen. When the process of step 2016 is terminated, the control unit 40 terminates the process shown in fig. 7.

(modification of input processing)

Next, an example of changing the number of the display number-distinguishing numeric keys 630 in accordance with a numeric value that has been input in the past in the input field 501 will be described. Fig. 8 is a diagram showing an example of digital data 510 according to the embodiment. Fig. 9 is a diagram for explaining a modification of the input processing for the input field according to the embodiment.

As shown in fig. 8, the digital data 510 is data in which the input fields 501 are associated with digital information 511 corresponding to each of the plurality of input fields 501. The memory 50 storing the digital data 510 functions as a digital storage unit. The digital data 510 is updated by the control unit 40 when, for example, the input value in the input field 501 is changed. The digital data 510 has a plurality of digital information 511. The digit information 511 includes information indicating the number of digits or numeric values of the past numeric values that were input to the input field 501. For example, the digital information 511 includes information indicating "20" for the first time, "22" for the second time, and the like. In this case, the digit information 511 indicates that there is a high possibility that a numerical value of two digits is input to the input field 501. For example, the digital information 511 includes information showing "3 bits" for the first time, "2 bits" for the second time, and the like. In this case, the numerical digit information 511 indicates that there is a high possibility that a numerical value from 3 bits to 2 bits is input to the input field 501. The digital data 510 stores an arbitrary number of times, for example, the number of bits of the input value of the last three times, and can display only the digital bits corresponding to the input of the last three times, by updating each time the input value is updated.

In a case 1201 shown in fig. 9, the control unit 40 displays the device data 500 and the input key unit 600, which are not shown, on the display unit 31. The operator continues the state in which the finger is in contact with the position of numeric keypad 610 of "5" on touch panel 30 for a predetermined time or longer. When the long-press operation of the numeric keypad 610 of "5" is detected via the input unit 32, the control section 40 extracts the numeric digit information 511 corresponding to the input field 501 from the numeric digit data 510. In this case, the digital information 511 indicates "3 bits" for the first time and "2 bits" for the second time. The control unit 40 determines the displayed digit distinguished number key 630 based on the extracted digit information 511. For example, the control unit 40 determines two number distinguishing numeric keys 630 of "50" and "500" below 3 bits. The control unit 40 controls the display unit 31 so that the two number distinguishing numeric keys 630 of "50" and "500" are positioned on the left and upper sides of the numeric key 610 of "5" as shown in the case 1202.

Thus, the processing device 1 can display only the number-distinguishing numeric keys 630 corresponding to the number information 511 indicating the past input result of the input field 501 in the range in which the input to the input field 501 is possible. As a result, the processing device 1 displays only the number keys 630 differing according to the number of digits in the past that have been input to the input field 501, and thus, the wrong number keys 630 are not selected, and erroneous input to the input field 501 can be further suppressed.

The modification of the input process described above can be realized by adding or replacing the process of specifying the displayed digit-distinguishing numeric keys 630 from the digit information 511 in step 2005 of the processing procedure shown in fig. 7.

The processing apparatus 1 of the above embodiment may combine the input processing and the technical idea of the modification.

[ 1 st modification ]

The machining device 1 according to modification 1 of the above embodiment will be described below. Fig. 10 is a perspective view schematically showing a configuration example of the processing apparatus 1 according to modification 1 of the embodiment. In the following embodiments, the same portions are denoted by the same reference numerals, and redundant description thereof is omitted. In the example shown in fig. 10, the processing apparatus 1 omits the main body 2 described above for simplicity of explanation.

As shown in fig. 10, a machining device 1 according to modification 1 of the embodiment is a laser machining device that irradiates a workpiece 101 with a laser beam. The machining apparatus 1 includes a chuck table 10, a machining unit 20, a touch panel 30, and a control unit 40 as a basic configuration. The processing apparatus 1 further includes an imaging unit 12, a driving unit 14, and a Z-axis moving unit 15. The machining unit 20 includes a laser irradiation unit 5 instead of the cutting tool.

The laser irradiation unit 5 includes, for example, an oscillator, an intensity adjustment unit (attenuator), a polarization direction setting unit, a mirror element condensing lens, and the like. The laser irradiation unit 5 is controlled by the control unit 40.

The machining apparatus 1 machines a workpiece 101 divided by streets as lines to be divided along the streets. The machining device 1 irradiates, for example, a laser beam having a wavelength that is transparent to the workpiece 101, and continuously forms a modified layer (modified region) along the streets inside the workpiece 101. In addition, the processing apparatus 1 may have the following functions: the workpiece 101 is divided by applying an external force along the streets whose strength is reduced by the formation of the modified layer. The machining device 1 irradiates a laser beam having a wavelength that is absorptive for the workpiece 101, for example, and forms a cut groove along the streets on the front surface of the workpiece 101. The cutting groove may be a depth of half-cutting or full-cutting the workpiece 101.

The above description deals with a configuration example of the machining device 1 according to modification 1 of the present embodiment. The above-described configuration described with reference to fig. 10 is only an example, and the configuration of the machining device 1 according to modification 1 of the present embodiment is not limited to this example. The functional structure of the processing apparatus 1 according to modification 1 of the present embodiment can be flexibly modified depending on the specification and the operation.

In the processing device 1 shown in fig. 10, the input key unit 600 is displayed on the touch panel 30. For example, the operator keeps the touch panel 30 in a state where the finger is in contact with the position of the numeric keypad 610 of "8" for a predetermined time or longer. When the long-press operation of the numeric key 610 of "8" is detected by the input unit 32, the control unit 40 controls the touch panel 30 so that the plurality of number-difference numeric keys 630 are displayed.

The plurality of number-distinguishing numeric keys 630 are keys having different numbers of numeric keys 610 of "8", for example. The plurality of number-distinguishing numeric keys 630 include, for example, four keys for distinguishing numeric digits up to a decimal point such as "0.8", "0.08", "0.008", and "0.0008", and four keys for distinguishing numeric digits of integers such as "80", "800", "8000", and "80000".

When the processing apparatus 1 detects a flick operation from the numeric key 610 of "8" to the numeric difference numeric key 630 of "800", the numerical value indicated by the numeric difference numeric key 630 of "800" is input to the input field 501, and the display of the device data 500 is updated. Thus, the machining apparatus 1 displays the device data 500 to the operator, in which the numerical value of "800" is input to the input field 501 corresponding to the "band" in the item of "thickness".

As described above, the machining device 1 according to modification 1 does not need to operate the numeric keypad 610 multiple times as in the above-described embodiment, and therefore can contribute to preventing an erroneous input of an input operation to the input field 501 by the operator. As a result, when the number of input digits is large, the processing device 1 can reduce the number of operations compared to the case where the numeric keypad 610 is operated multiple times, and thus can suppress erroneous input and improve operability.

[ modification 2 ]

The machining device 1 according to modification 2 of the above embodiment will be described below. Fig. 11 is a perspective view schematically showing a configuration example of the processing apparatus 1 according to modification 2 of the embodiment. In the following embodiments, the same portions are denoted by the same reference numerals, and redundant description thereof is omitted. In the example shown in fig. 11, the processing apparatus 1 omits the main body 2 for simplicity of explanation.

As shown in fig. 11, a machining apparatus 1 according to modification 2 of the embodiment is a grinding apparatus that grinds a workpiece accommodated in cassettes 91 and 92. The machining apparatus 1 includes a chuck table 10, a machining unit 20, a touch panel 30, and a control unit 40 as a basic configuration. The machining unit 20 includes a grinding unit instead of the cutting tool, the laser irradiation unit, and the like described above.

The processing unit 20 includes, for example: a grinding wheel 25 having a grinding whetstone 21 arranged in a ring shape; a main shaft 23; and a servo motor 24. The grinding wheel 25 is attached to the lower end of the spindle 23 and rotates with the rotation of the spindle 23. The main spindle 23 supports the grinding wheel 25 rotatably about a rotation axis, not shown, substantially parallel to a Z-axis direction parallel to the vertical direction. The servo motor 24 functions as a rotation drive source that supplies rotation power to the main shaft 23.

The machining apparatus 1 holds a workpiece unit 100 including a disk-shaped workpiece such as a semiconductor wafer by a chuck table 10, and grinds the workpiece by pressing a grinding wheel 25, in which a grinding whetstone 21 is annularly arranged, against the workpiece unit 100 by a feed mechanism while rotating the grinding wheel.

The above description deals with a configuration example of the processing apparatus 1 according to modification 2 of the present embodiment. The above-described configuration described with reference to fig. 11 is only an example, and the configuration of the processing apparatus 1 according to modification 2 of the present embodiment is not limited to this example. The functional configuration of the processing apparatus 1 according to modification 2 of the present embodiment can be flexibly modified depending on the specification and the operation.

The processing device 1 shown in fig. 11 displays the input key unit 600 on the touch panel 30. For example, the operator continues the state where the finger is in contact with the position of numeric keypad 610 of "1" for a predetermined time or longer with respect to touch panel 30. When detecting a long press operation on the number key 610 of "1" through the input unit 32, the control unit 40 controls the touch panel 30 to display a plurality of number difference number keys 630.

The plurality of number-distinguishing numeric keys 630 are keys having different numbers of numeric keys 610 of "1", for example. The plurality of number-distinguishing numeric keys 630 include, for example, four keys for distinguishing numeric digits up to a decimal point such as "0.1", "0.01", "0.001", and "0.0001", and four keys for distinguishing numeric digits of integers such as "10", "100", "1000", and "10000".

When the processing apparatus 1 detects a flick operation from the numeric key 610 of "1" to the numeric difference numeric key 630 of "10000", the numerical value indicated by the numeric difference numeric key 630 of "10000" is input to the input field 501, and the display of the device data 500 is updated. Thus, the machining apparatus 1 displays to the operator the device data 500 in which the numerical value of "10000" is input to the input field 501 corresponding to the "band" in the item of "thickness".

In this way, the machining device 1 according to modification 2 does not need to operate the numeric keypad 610 multiple times as in the above-described embodiment, and therefore can contribute to preventing an erroneous input of an input operation to the input field 501 by the operator. As a result, when the number of input digits is large, the processing device 1 can reduce the number of operations compared to the case where the numeric keypad 610 is operated a plurality of times, and thus can suppress erroneous input and improve operability.

In addition, the technical ideas of the processing apparatus 1 according to the above-described embodiment can be applied to the 1 st modification and the 2 nd modification of the embodiment.

In the above-described embodiment, 1 st modification example, and 2 nd modification example, the following cases are explained: when the operator presses the numeric keys 610 for a long time, the processing device 1 displays the number-distinguishing numeric keys 630 around the numeric keys 610, but the present invention is not limited thereto. For example, the processing apparatus 1 may be configured to: when the operator touches the numeric keys 610, the number difference numeric keys 630 are displayed around the numeric keys 610. In this case, when the operator moves a finger, a contact object, or the like away from the numeric keys 610, the processing device 1 inputs the numeric value indicated by the numeric keys 610 into the input field 501. When the operator performs a flick operation to move to the numeric keypad 630 while keeping a finger, a contact object, or the like touching the touch panel 30 and releases the contact on the numeric keypad 630, the processing device 1 inputs a numeric value for digit distinction indicated by the numeric keypad 630 to the input field 501.

Claims (4)

1. A processing device, comprising:

a holding table that holds a workpiece;

a processing unit for processing the workpiece held by the holding table;

an operation panel for inputting processing conditions; and

a control unit for controlling the operation panel,

wherein the content of the first and second substances,

the control unit causes the operation panel to display a plurality of input fields corresponding to a plurality of items included in the processing conditions,

when one of the plurality of input fields is selected, the control unit causes the numeric keys to be displayed,

when the numeric key is selected, the control unit causes a plurality of digit-distinguishing numeric keys corresponding to a plurality of numeric values including numbers input through the numeric key at respectively different digits to be displayed,

when the number key is selected, the control unit inputs the value of the selected number key to the input field.

2. The processing device according to claim 1,

the number-difference numeric keys are selected by a flick operation from the numeric keys.

3. The processing device according to claim 1,

the control unit includes a range setting unit for setting a range of numerical values that can be input to each of the plurality of input fields,

the control means displays only the number-distinguishing numeric keys within the range set by the range setting section.

4. The processing device according to claim 1,

the processing apparatus further includes a digital storage unit for storing a plurality of input fields in association with the digital values of the numerical values input to the plurality of input fields in the past,

when an input field is selected, the control unit displays only the number difference numeric keys corresponding to the number stored in the number storage section.

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