JP2023068917A - Processing device - Google Patents

Abstract

To make partial information included in a display image non-display when storing the display image displayed on a display unit.SOLUTION: A processing device comprises: a chuck table which holds a workpiece; a processing unit which processes the workpiece held on the chuck table; an imaging unit which images the surface of the workpiece held on the chuck table; a display unit which can display an image captured by the imaging unit and display an input image to be used for input of information; and a control unit. The control unit comprises: a storage part; a display unit control part which controls display of the display unit; and a screen storage control part which can store the display image displayed on the display unit in the storage part in such a state that a portion becomes non-display. Preferably, the screen storage control part stores the display image in the storage part by blackening a portion of the display image or making the portion a mosaic image.SELECTED DRAWING: Figure 4

Description

The present invention relates to a processing apparatus including a processing unit that processes a workpiece and a display unit that can display various information and images.

2. Description of the Related Art In the manufacturing process of device chips used in electronic equipment such as mobile phones and computers, grid-like dividing lines called streets are set on the surface of a wafer made of a semiconductor such as silicon. Devices, such as ICs (Integrated Circuits) and LSIs (Large Scale Integrations), are formed in respective regions defined by the dividing lines on the surface of the wafer. After that, by dividing the wafer along the dividing lines, individual device chips can be manufactured.

A workpiece such as a wafer is divided by a cutting device having a cutting unit equipped with an annular cutting blade, or by irradiating the workpiece with a laser beam along the line to be divided to process the workpiece by laser processing. It is carried out with a laser processing device capable of A processing device represented by a cutting device and a laser processing device includes an imaging unit that captures an image of a workpiece in order to identify a position to be processed or to evaluate a processing result (for example, Patent Documents 1 to 4).

Further, the processing apparatus includes a display unit that displays various information. The display unit displays an image of the surface of the workpiece imaged by the imaging unit. The display unit is, for example, a display with a touch panel, and is also used for inputting various commands to the processing device.

JP 2010-10445 A JP 2016-197702 A JP-A-2000-48203 JP-A-5-326700

2. Description of the Related Art When a problem is detected in a processing device while a workpiece is being processed by the processing device, the processing device may automatically stop. Alternatively, a problem in the processing apparatus may be detected from a captured image obtained by capturing an image of the workpiece by the imaging unit after finishing the processing of the workpiece. In these cases, the display unit displays the status of the malfunction that has caused the processing apparatus to stop.

Then, the user of the processing apparatus may store the display image displayed on the display unit as screen data in the control unit, send the screen data to the manufacturer of the processing apparatus, and request analysis of the problem. However, the display unit may display information that should not be disclosed to the outside or information that should not be stored in the control unit. Therefore, sending a display image containing such information to the manufacturer of the processing apparatus may pose a problem.

SUMMARY OF THE INVENTION The present invention has been made in view of such a problem, and an object of the present invention is to provide a processing that can hide part of the information contained in the display image when saving the display image displayed on the display unit. to provide the equipment.

According to one aspect of the present invention, a chuck table that holds a workpiece, a machining unit that processes the workpiece held on the chuck table, and a surface of the workpiece held on the chuck table. , a display unit capable of displaying an image captured by the imaging unit and capable of displaying an input screen used for inputting information, and a control unit, wherein the control unit is , a storage unit, a display unit control unit that controls display of the display unit, and a screen storage control unit that can store a display image displayed on the display unit in the storage unit in a partially hidden state. A processing apparatus is provided comprising:

Preferably, the screen save control unit paints a part of the display image black or converts it into a mosaic image and saves the display image in the storage unit.

A control unit of a processing apparatus according to an aspect of the present invention includes a screen saving control section that can save a display image displayed on the display unit in a storage section in a state in which a part of the display image is hidden. A user of the processing apparatus can select a part of the display image displayed on the display unit that has a problem in saving or disclosing information, hide the part, and save the display image in the storage unit. Therefore, it is possible to transmit the display image in which the information, etc. that is problematic to disclose is not displayed to the manufacturer of the processing apparatus.

Therefore, the present invention provides a processing device capable of hiding part of the information included in the display image when saving the display image displayed on the display unit.

It is a perspective view showing a cutting device (processing device) typically. FIG. 4 is a perspective view schematically showing a workpiece held on a chuck table; FIG. 3 is a plan view schematically showing a processing condition input screen; FIG. 10 is a plan view schematically showing a processing condition input screen on which part of information is hidden; 4 is a plan view schematically showing a display image including a captured image; FIG. FIG. 4 is a plan view schematically showing a display image in which a part of the area is hidden;

An embodiment according to one aspect of the present invention will be described with reference to the accompanying drawings. The processing apparatus according to the present embodiment is, for example, a cutting apparatus for processing a workpiece such as a semiconductor wafer, or a processing apparatus such as a laser processing apparatus. FIG. 2 includes a perspective view schematically showing the workpiece 1 to be processed by the processing apparatus. First, the workpiece 1 will be described.

The workpiece 1 is, for example, a circular wafer made of a semiconductor material such as silicon, and a plurality of planned division lines 3 are set on the front surface 1a of the workpiece 1 so as to cross each other. Devices 5 such as ICs and LSIs are formed in each region partitioned by the planned division lines 3 . By dividing the workpiece 1 along the dividing lines 3, individual device chips can be manufactured.

The workpiece 1 may be other than a circular wafer made of a semiconductor material such as silicon, and the material, shape, structure, etc. of the workpiece 1 are not limited. For example, a rectangular substrate made of a material such as ceramics, resin, or metal can be used as the workpiece 1 . There are no restrictions on the type, quantity, arrangement, etc. of the device 5 .

A processing device is used to divide the workpiece 1 . When the workpiece 1 is carried into the processing apparatus, the workpiece 1 is integrated with an adhesive tape 7 called a dicing tape and an annular frame 9 made of metal to form a frame unit 11. be. Then, the workpiece 1 is carried into the processing apparatus while being contained in the frame unit 11 and processed.

The frame unit 11 includes an annular frame 9 and an adhesive tape 7 stuck to close an opening 9 a of the annular frame 9 . Adhesive tape 7 exposed at the opening 9a of the annular frame 9 is adhered to the back surface 1b side of the workpiece 1. As shown in FIG. That is, the workpiece 1 is supported by the annular frame 9 via the adhesive tape 7 .

FIG. 1 is a perspective view schematically showing a cutting device 2, which is an example of a processing device according to this embodiment. However, the processing device according to this embodiment is not limited to the cutting device 2 . The processing device may be a laser processing device that performs laser processing on the workpiece 1, or a grinding device that grinds the workpiece 1 from the back surface 1b side to thin the workpiece 1. A polishing apparatus that polishes and planarizes the 1b side may also be used. An example in which the processing device is the cutting device 2 will be described below.

A cutting device (processing device) 2 includes a base 4 that supports each component. A cassette support base 16 on which a cassette 18 containing a plurality of frame units 11 is placed is provided at a corner portion 12 of the upper surface of the base 4 . Note that FIG. 1 shows only the outline of the cassette 18 for convenience of explanation. The frame unit 11 is transported to the cutting device 2 while being accommodated in the cassette 18 .

A rectangular opening 4a is formed on the side of the cassette support table 16 so that the longitudinal direction is along the X-axis direction (processing feed direction). In the opening 4a, a ball screw type X-axis movement mechanism (processing feed mechanism) (not shown), a table cover 6 covering the upper part of the X-axis movement mechanism, and a bellows-shaped dust and drip proof cover 8 are arranged. there is The X-axis movement mechanism has an X-axis movement table (not shown) covered with a table cover 6, and moves this X-axis movement table in the X-axis direction.

A chuck table 10 is arranged on the upper surface of the X-axis moving table so as to be exposed from the table cover 6 . The chuck table 10 has a function of sucking and holding the workpiece 1 placed on the holding surface 10a exposed upward. The chuck table 10 is connected to a rotation drive source (not shown) such as a motor, and rotates around a rotation axis substantially parallel to the Z-axis direction (vertical direction). Also, the chuck table 10 moves in the X-axis direction together with the X-axis moving table and the table cover 6 by the X-axis moving mechanism.

A chuck table 10 for sucking and holding the workpiece 1 has a porous member having the same diameter as the workpiece 1 on its upper surface. The upper surface of the porous member serves as a holding surface 10a for holding the workpiece 1 by suction. A suction path is formed inside the chuck table 10 , one end of which is connected to a suction source such as an ejector provided outside the chuck table 10 . The other end of the suction channel reaches the porous member.

The cutting device 2 includes, in a region adjacent to the opening 4a, a transfer unit (not shown) that transfers the workpiece 1 from the cassette 18 to the chuck table 10 or the like. A cutting unit (processing unit) 14 that cuts (processes) the workpiece 1 with an annular cutting blade is disposed above the chuck table 10 . A support structure 20 for supporting the cutting unit 14 is arranged on the upper surface of the base 4 . The support structure 20 has arms at its top which extend over and across the opening 4a.

An indexing feed unit 22a for moving the cutting unit 14 in the Y-axis direction (indexing feed direction) is provided on the upper front portion of the support structure 20 . The indexing unit 22a includes a pair of Y-axis guide rails 24 extending along the Y-axis direction on the front surface of the support structure 20. As shown in FIG. A Y-axis moving plate 26 is slidably mounted on the pair of Y-axis guide rails 24 . A nut portion (not shown) is provided on the back side (rear side) of the Y-axis moving plate 26, and a Y-axis ball screw 28 parallel to the Y-axis guide rail 24 is screwed into this nut portion.

A Y-axis pulse motor (not shown) is connected to one end of the Y-axis ball screw 28 . By rotating the Y-axis ball screw 28 with the Y-axis pulse motor, the Y-axis moving plate 26 moves along the Y-axis guide rail 24 in the Y-axis direction.

A lifting unit 22b is provided on the front surface (front surface) of the Y-axis moving plate 26 to move the cutting unit 14 up and down along the Z-axis direction (vertical direction). The lifting unit 22b has a pair of Z-axis guide rails 30 along the Z-axis direction on the surface of the Y-axis moving plate 26. As shown in FIG. A Z-axis moving plate 32 is slidably attached to the pair of Z-axis guide rails 30 .

A nut portion (not shown) is provided on the back side (rear side) of the Z-axis moving plate 32, and a Z-axis ball screw provided along a direction parallel to the Z-axis guide rail 30 is attached to the nut portion. 34 are screwed together. A Z-axis pulse motor 36 is connected to one end of the Z-axis ball screw 34 . By rotating the Z-axis ball screw 34 with this Z-axis pulse motor 36 , the Z-axis moving plate 32 moves along the Z-axis guide rail 30 . to move in the Z-axis direction.

A cutting unit (processing unit) 14 is fixed below the Z-axis moving plate 32 . The cutting unit 14 includes a spindle (not shown) along the Y-axis direction and a rotary drive source (not shown) connected to the proximal end of the spindle. A cutting blade having an annular cutting edge (grindstone portion) is passed through a through hole at the tip of the spindle, and the cutting blade is fixed to the spindle. When the rotary drive source is operated to rotate the spindle, the cutting blade rotates.

At a position adjacent to the cutting unit 14, an image pickup unit 38 for picking up an image of the workpiece 1 sucked and held by the chuck table 10 and detecting the position of the planned division line 3 is provided. The imaging unit 38 has an imaging element such as a CCD sensor or a CMOS sensor, and can image the upper surface of the workpiece 1 . The indexing feed unit 22a controls the positions of the cutting unit 14 and the imaging unit 38 in the Y-axis direction, and the lifting unit 22b controls the positions of the cutting unit 14 and the imaging unit 38 in the Z-axis direction.

When cutting the workpiece 1 held on the chuck table 10 , first, the imaging unit 38 captures an image of the surface 1 a of the workpiece 1 to detect the position and orientation of the dividing line 3 . Then, the chuck table 10 is rotated to align the direction of the dividing line 3 with the X-axis direction (processing feed direction). Also, the chuck table 10 and the cutting unit 14 are moved relatively to align the cutting blade with the dividing line 3 of the workpiece 1 .

Next, the cutting unit 14 is lowered to a predetermined height while rotating the cutting blade, and the chuck table 10 is processed and fed along the X-axis direction. When the rotating cutting blade contacts the workpiece 1, the workpiece 1 is cut. Individual device chips are obtained by cutting the workpiece 1 along all the dividing lines 3 . When the imaging unit 38 takes an image of the cut surface 1a of the workpiece 1, the state of the machining marks and the quality of the formed device chip can be confirmed.

A cleaning unit 40 for cleaning the workpiece 1 after cutting is disposed at a position opposite to the cassette support 16 with respect to the opening 4a. The cleaning unit 40 includes a spinner table 42 that rotates while holding the workpiece 1 and an injection nozzle (not shown) that ejects cleaning water from above onto the workpiece 1 held by the spinner table 42 . The workpiece 1 cleaned by the cleaning unit 40 is stored in the cassette 18 again.

The cutting device (processing device) 2 further includes a display unit 44 capable of displaying various information. The display unit 44 displays information indicating the state of the cutting device 2 and the work piece 1, information indicating the progress of machining, information indicating the presence or absence of an abnormality, and the like. Or notify the administrator, etc. Also, the display unit 44 has a function of displaying an image captured by the imaging unit 38 . The display unit 44 is, for example, a monitor such as a liquid crystal display.

Further, the display unit 44 may incorporate an input device such as a touch panel. If the display unit 44 is a display with a touch panel, the user or the like of the cutting device 2 can use the display unit 44 to input various commands to the cutting device 2 and operate the cutting device 2 . In this case, the display unit 44 displays an input screen for commands and the like. That is, the display unit 44 can display an image captured by the imaging unit 38 and an input screen used for inputting information. An example in which the display unit 44 is a display with a touch panel will be described below.

The cutting device (processing device) 2 further includes a control unit 46 that controls each component of the cutting device 2 . The control unit 46 controls a processing feed unit (not shown), an index feed unit 22a, a cutting unit (processing unit) 14, an imaging unit 38, a chuck table 10, a cleaning unit 40, a display unit 44, various transport devices, and the like. . Then, the machining of the workpiece 1 in the cutting device 2 is advanced.

The control unit 46 is configured by a computer including, for example, a processing device such as a CPU or microprocessor, and a storage device such as flash memory or hard disk drive. By operating the processing device according to software such as programs stored in the storage device, the software and the processing device (hardware resources) function as concrete means in cooperation.

The control unit 46 may automatically stop the operation of the cutting device 2 when some trouble is detected in the cutting device 2 while the workpiece 1 is being processed by the cutting device (processing device) 2 . Alternatively, a malfunction of the cutting device 2 may be detected from an image obtained by the imaging unit 38 capturing an image of the workpiece 1 after the machining of the workpiece 1 is completed. In these cases, the display unit 44 displays information such as malfunctions occurring in the cutting device 2 .

Then, the user of the cutting device 2 saves the display image displayed on the display unit 44 as screen data in the control unit 46, sends this screen data to the manufacturer of the cutting device 2, and requests analysis of the defect. There is However, the display unit 44 may display information that should not be disclosed to the outside or information that should not be stored in the control unit 46 . Sending a display image containing such information to the manufacturer of the cutting device 2 may pose a problem.

Therefore, the cutting device (processing device) 2 according to the present embodiment is configured so that when the display image displayed on the display unit 44 is saved, part of the information included in the display image can be hidden. . As a result, among the information included in the display image displayed on the display unit 44, confidential information can be hidden, only items related to malfunctions of the cutting device 2 can be selected, and specific information can be selected to display the cutting device 2. Can be sent to manufacturer. Therefore, it is possible to realize smooth information sharing between the user and the manufacturer of the cutting device 2, and it is possible to expect appropriate and early countermeasures against defects.

In the following, a configuration that enables saving of a display image displayed on the display unit 44 in a state in which a part of the display image is hidden will be described, focusing on the configuration and functions of the control unit 46. 2 continues.

The control unit 46 includes a storage section 48 capable of storing various information such as information on the workpiece 1 , processing conditions for machining the workpiece 1 , and images of the workpiece 1 captured by the imaging unit 38 . The information that can be stored in the storage unit 48 is not limited, and includes a control program for controlling each component of the cutting device 2, an operation screen to be displayed on the display unit 44, detection conditions for detecting defects occurring in the cutting device 2, and the like. , any information may be stored.

The control unit 46 includes a display unit control section 50 that controls display on the display unit 44 . The display unit control section 50 controls the display unit 44 to display a predetermined image on the display unit 44 . For example, the display unit control section 50 causes the display unit 44 to display a processing condition input screen used for inputting the processing conditions for the workpiece 1 . FIG. 3 is a plan view schematically showing an example of the processing condition input screen 54 displayed on the display unit 44. As shown in FIG.

The machining condition input screen 54 includes, for example, an input field 56 for information about the workpiece 1 and the device 5, an input field 58 for conditions about the operation of the cutting device 2, an input field 60 for auto-setup conditions, and an input field 60 for auto-setup conditions. An input field 62 for down conditions is included. Further, an input determination button 72 for storing the processing conditions input on the processing condition input screen 54 in the storage unit 48, and an input mode end button 74 for ending the input mode of the processing conditions on the processing condition input screen 54. and are included in the processing condition input screen 54 .

For example, the input field 56 for information on the workpiece 1 and the device 5 includes input items 64 regarding the management number, ID number, unit of size, shape, size, and thickness of the workpiece 1 . The input field 58 for the conditions regarding the operation of the cutting device 2 includes input items 66 regarding the spindle speed, cutting mode, cutting method, cutting tool, feed rate, and index amount.

The auto-setup condition input field 60 includes input items 68 related to timing selection, execution interval (distance), and execution interval (number of lines). The auto-down condition input field 62 includes input items 70 of specification length and down amount. The operator inputs predetermined information and values to each of these input items 64 , 66 , 68 , 70 and touches the input determination button 72 to store the processing conditions in the storage unit 48 .

When a problem occurs in the cutting device 2, the manufacturer of the cutting device 2 may ask the user of the cutting device 2 about the conditions of the machining performed by the cutting device 2 in order to verify the problem. At this time, it is conceivable that the user of the cutting device 2 stores the image data of the processing condition input screen 54 shown in FIG. . However, the processing condition input screen 54 displayed on the display unit 44 may contain information that should not be disclosed to others.

The control unit 46 of the cutting device 2 further includes a screen saving control section 52 that can save the display image displayed on the display unit 44 in the storage section 48 in a partially hidden state. For example, the display unit 44 displays a non-display area setting button 76 for hiding part of the processing condition input screen 54 .

When the non-display area setting button 76 is touched, the display unit control section 50 displays a setting screen for the non-display area arranged in the display image of the display unit 44 . FIG. 4 is a plan view schematically showing the processing condition input screen 54 with some information hidden. For example, when a rectangular non-display area 78 is provided on the processing condition input screen 54, a first corner 78a of the non-display area 78, a second corner 78b diagonal to the first corner 78a, The position and range of the non-display area 78 may be input by specifying the respective positions of .

For example, the operator touches the display unit 44 with a finger at the position where the first corner 78a is to be set, drags the finger to the position where the second corner 78b is to be set, and releases the finger from the display unit 44. . However, the range of the non-display area 78 is not limited to a rectangular shape, nor is the method of selecting the non-display area 78 limited to this.

For example, the worker selects the input fields 56, 58, 60, 62 containing the information to be hidden, or the input items 64, 66, 68, 70 to be hidden, thereby displaying the hidden area 78. You may enter the position and range of In this case, the entire input field or input item selected from the display image displayed on the display unit 44 is the non-display area 78 . Alternatively, other areas may be selected as the non-display area 78 by the operator specifying areas, input fields, or input items that are not to be hidden from the display image.

When a specific area is specified as the non-display area 78, the control unit 46 performs processing on the display image displayed on the display unit 44 so that the information displayed in the area cannot be read. For example, the non-display area 78 of the display image on the display unit 44 is blacked out or made into a mosaic image. Alternatively, the non-display area 78 may be filled with a color other than black, or replaced with an image representing a specific pattern, pattern, logo, other information, or the like.

The screen save control unit 52 saves the display image displayed on the display unit 44 in the storage unit 48 in a state where a part of the display image is hidden. Afterwards, the user of the cutting device (processing device) 2 reads out the partially hidden display image stored in the storage unit 48 from the storage unit 48, stores it in another storage medium, and stores it in another storage medium. By sending the medium to the manufacturer of the cutting device 2, the display image can be sent to the manufacturer. Alternatively, the user can transmit the display image stored in the storage unit 48 to the manufacturer via wireless communication or wired communication.

Further, the display unit control section 50 may cause the display unit 44 to display an image of the workpiece 1 captured by the imaging unit 38 . Then, the screen storage control section 52 may store in the storage section 48 the display image displayed on the display unit 44 in a state in which part or all of the image showing the workpiece 1 is not displayed.

FIG. 5 is a plan view schematically showing the display unit 44 that displays the display image 80. As shown in FIG. The display image 80 includes a display field 82 for information about the workpiece 1 and a captured image 86 formed by capturing the workpiece 1 by the imaging unit 38 . The display field 82 includes display items 84 related to the management number and ID number of the workpiece 1 .

Also, in the captured image 86 shown in FIG. 5, the dividing lines 3 set on the surface 1a of the workpiece 1 that intersect each other, and the plurality of devices 5 formed in the regions partitioned by the dividing lines 3 are shown. , appears. For example, the element pattern included in the device 5 and the alignment pattern 13 formed in one corner of the device 5 are captured in the captured image 86 . In addition, machining marks formed on the workpiece 1 after being cut by the cutting unit 14 of the cutting device 2 may appear in the captured image 86 .

When a problem occurs in the cutting device 2, the user of the cutting device 2 sends the display image 80 displayed on the display unit 44 to the manufacturer of the cutting device 2 so that the manufacturer of the cutting device 2 can analyze the cause of the problem. Situation is assumed. However, the element pattern formed in the device 5 and the shape of the alignment pattern 13 may be information that should be kept secret from the manufacturer of the device 5 . In addition, there are cases where symbols and characters indicating the manufacturer's name, product number, etc. are printed on the device 5, and there are cases where disclosure of these is not desired.

Therefore, the cutting device 2 according to the present embodiment is configured such that a portion of the captured image 86, which is a portion of the display image 80 appearing on the display unit 44, can be specified as a non-display area. For example, a display image 80 shown on the display unit 44 includes a non-display area setting button 88 for designating part of the display image 80 as a non-display area. Then, when the non-display area setting button 88 is touched, the display unit control section 50 preferably displays a screen for setting the non-display area arranged in the display image 80 of the display unit 44 .

FIG. 6 is a plan view schematically showing a display image 80 in which some information is hidden. In the display image 80 shown in FIG. 6, a non-display area 90 is set in part of the display items 84 of the display field 82 . Furthermore, in the display image 80 shown in FIG. 6, a non-display area 92 is set in part of the element pattern formed in the device 5 and the alignment pattern 13 .

The screen saving control unit 52 saves the display image 80 displayed on the display unit 44 in the storage unit 48 in a state where a part of the display image 80 is hidden. In particular, when an image of the workpiece 1 imaged by the imaging unit 38 is displayed on the display unit 44, the screen saving control unit 52 causes the image of the workpiece 1 to be partially or entirely hidden. The display image displayed on the display unit 44 in the state can be stored in the storage unit 48 .

As described above, in the cutting device (processing device) 2 according to the present embodiment, the display image displayed on the display unit 44 can be saved in the storage unit 48 in a state in which a part of the display image is hidden. The user of the cutting device 2 can select a part of the display image displayed on the display unit 44 that has a problem with storage or information disclosure, hide it, and save the display image in the storage unit 48. . Therefore, it is possible to transmit a display image in which information having a problem in disclosure is not displayed to the manufacturer of the cutting device 2 or the like.

It should be noted that the present invention is not limited to the description of the above embodiments, and can be implemented with various modifications. For example, in the above embodiment, the case where a part of the display image displayed on the display unit 44 is set as a non-display area and the display image is stored in the storage unit 48 has been described. However, one aspect of the present invention is not limited to this.

That is, the display image stored in the storage unit 48 as the display image displayed on the display unit 44 in advance is read out from the storage unit 48, the non-display area is set later on the display image, and the other part is the non-display area. The displayed image may be stored again in the storage unit 48 in the displayed state. In this way, the screen storage control section 52 may store the display image that was displayed on the display unit 44 at a certain time in the past in the storage section 48 in a state in which a part of the image is not displayed.

Further, the state in which the display image saved in the storage unit 48 by the screen saving control unit 52 is partially hidden does not necessarily mean that the display image is partially hidden by the non-display area. For example, it includes a state in which a set of a display image displayed on the display unit 44 and data indicating aspects such as the position, shape, size, etc. of the non-display area is formed.

That is, the screen save control unit 52 may save the display image and the data as a set in the storage unit 48 . In this case, the user of the cutting device 2 can read out only the display image saved in the storage unit 48 to check the display image in a state in which none of the portions are hidden. That is, in this case, the information shown in the area where the non-display area of the display image is set is not lost.

In addition, the structures, methods, and the like according to the above-described embodiments can be modified as appropriate without departing from the scope of the present invention.

REFERENCE SIGNS LIST 1 workpiece 1a front surface 1b back surface 3 division line 5 device 7 adhesive tape 9 annular frame 9a opening 11 frame unit 13 alignment pattern 2 cutting device (processing device)
4 base 4a opening 6 table cover 8 dust and drip proof cover 10 chuck table 10a holding surface 12 corner 14 cutting unit (processing unit)
16 Cassette support 18 Cassette 20 Support structure 22a Indexing unit 22b Elevating unit 24, 30 Guide rails 26, 32 Moving plate 28, 34 Y-axis ball screw 36 Z-axis pulse motor 38 Imaging unit 40 Cleaning unit 42 Spinner table 44 Display unit 46 Control unit 48 Storage unit 50 Display unit control unit 52 Screen storage control unit 54 Processing condition input screen 56, 58, 60, 62 Input field 64, 66, 68, 70 Input item 72 Input determination button 74 Input mode end button 76 Non-display Area setting button 78 Non-display area 78a First corner 78b Second corner 80 Display image 82 Display field 84 Display item 86 Captured image 88 Non-display area setting button 90, 92 Non-display area

Claims (2)

a chuck table for holding a workpiece;
a machining unit for machining the workpiece held on the chuck table;
an imaging unit for imaging the surface of the workpiece held on the chuck table;
a display unit capable of displaying an image captured by the imaging unit and displaying an input screen used for inputting information;
A processing device comprising a control unit,
The control unit is
a storage unit;
a display unit control unit that controls the display of the display unit;
a screen saving control unit capable of saving the display image displayed on the display unit in the storage unit in a partially hidden state;
A processing device comprising: 2. The processing apparatus according to claim 1, wherein the screen save control unit paints a part of the display image black or converts it into a mosaic image and saves the display image in the storage unit.

Images