JP2015098063A - Processing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a processing device which can achieve efficient maintenance.SOLUTION: A processing device (2) includes a chuck table (12) for holding a workpiece, processing means (8) for processing the workpiece held on the chuck table, display means (14), and input means (14), and includes storage means (16b) which stores maintenance item information (20a, 20b, 20c) relating to various kinds of maintenance items, and guide information (22a, 22b) for guiding execution methods of the respective maintenance items in accordance with execution procedures. When selection information corresponding to a desired maintenance item is input by the input means based on the various kinds of maintenance item information displayed on the display means, the guide information corresponding to the maintenance item is displayed on the display means. When update information (24a, 24b) for instructing update of the guide information is input by input means, the guide information updated according to a following procedure is displayed on the display means.

Description

  The present invention relates to a processing apparatus for processing a workpiece such as a semiconductor wafer.

  A workpiece such as a semiconductor wafer, a resin substrate, or an optical device wafer is processed by a processing apparatus such as a cutting apparatus, a grinding apparatus, or a laser processing apparatus. These processing devices are equipped with sensors for sensing the state of each part, input interfaces for inputting user instructions, etc., and based on sensing information obtained by various sensors, instruction information from the input interfaces, etc. The operation is controlled.

  As described above, since the processing apparatus is controlled based on sensing information obtained by various sensors, instruction information from the input interface, and the like, periodic maintenance for realizing an appropriate operation is recommended ( For example, see Patent Document 1). The maintenance items are various, for example, confirmation of sensing states of various sensors, confirmation of response of an input interface including an emergency stop button and the like.

JP 2011-218450 A

  By the way, in this maintenance, there are many cases where a plurality of maintenance items are continuously confirmed. Therefore, if the implementation procedure is mistaken, a long waiting time occurs, and the efficiency of maintenance may be reduced.

  For example, if the operation check of the emergency stop button is performed at the initial stage of maintenance, initial work for restarting the machining equipment is required, and it takes a long time to perform other maintenance items. Resulting in.

  The present invention has been made in view of such problems, and an object of the present invention is to provide a processing apparatus capable of realizing efficient maintenance.

  According to the present invention, a chuck table for holding a workpiece, a processing means for processing the workpiece held on the chuck table, a display means for displaying information, and an input means for inputting information are provided. A processing device provided with storage means for storing maintenance item information regarding various maintenance items of the processing device and guide information for guiding the execution method of each maintenance item according to an execution procedure, the display When the selection information corresponding to the desired maintenance item is input by the input means based on the various maintenance item information displayed on the means, the guide information corresponding to the maintenance item is displayed on the display means, When update information for instructing update of the guide information is input by the input means, the guide information updated in accordance with the next procedure is displayed on the display means. Processing apparatus is provided which is characterized in that.

  The processing apparatus according to the present invention displays guide information for guiding a maintenance execution method, and can display guide information updated in accordance with the next procedure based on an input from the user. Implementation procedures can be confirmed as maintenance progresses.

  That is, in the processing apparatus of the present invention, guide information corresponding to the next procedure is displayed based on an input from the user. For example, the efficiency is erroneously displayed when, for example, all the implementation procedures are displayed at once. The possibility of selecting a bad procedure can be kept low. Thus, according to this invention, the processing apparatus which can implement | achieve an efficient maintenance can be provided.

It is a figure which shows typically the structural example of the processing apparatus which concerns on this Embodiment. FIG. 2A is an image diagram schematically showing a display state of maintenance item information, and FIG. 2B is an image diagram schematically showing a display state of guide information, and FIG. FIG. 5 is an image diagram schematically showing a display state of updated guide information.

  Embodiments of the present invention will be described below with reference to the accompanying drawings. FIG. 1 is a diagram schematically illustrating a configuration example of a processing apparatus according to the present embodiment. In this embodiment, a processing device (cutting device, dicer) for cutting a workpiece such as a semiconductor wafer will be described. However, the processing device according to the present invention includes a grinding device (grinder), a polishing device, and laser processing. An apparatus etc. may be sufficient.

  As shown in FIG. 1, the processing apparatus 2 which concerns on this Embodiment is provided with the base 4 which supports each structure. A housing 6 that covers the upper surface of the base 4 is provided above the base 4. A space is formed inside the housing 6, and a cutting unit (processing means) 8 for cutting a workpiece (not shown) is accommodated.

  In addition, an opening for connecting the inside and the outside of the housing 6 is formed at the front lower portion of the housing 6, and doors 6 a and 6 b for opening and closing the opening are attached. The workpiece is accommodated in the housing 6 through the opening.

  The workpiece to be processed by the processing apparatus 2 is, for example, a disk-shaped semiconductor wafer, and is supported by an annular frame via a dicing tape attached to the back side. The surface of the workpiece is partitioned into a plurality of areas by streets (division lines) arranged in a lattice pattern, and a device such as an IC is provided in each area.

  The cutting unit 8 includes an annular blade 10. The blade 10 is attached to one end of a horizontally supported spindle (not shown), and rotates by the rotational force of a motor (not shown) connected to the other end of the spindle. The cutting unit 8 is moved in the index feed direction (Y-axis direction) by an index feed mechanism (not shown).

  A chuck table 12 is disposed at a position close to the cutting unit 8. The chuck table 12 is connected to a rotation mechanism (not shown) such as a motor, and rotates around a vertical axis (Z axis). The chuck table 12 is moved in the machining feed direction (X-axis direction) by a machining feed mechanism (not shown).

  The upper surface of the chuck table 12 is a holding surface for sucking and holding the workpiece. This holding surface is connected to a suction source (not shown) through a flow path (not shown) formed inside the chuck table 12.

  A touch panel (display means, input means) 14 serving as a user interface is provided on the front surface 6 c of the housing 6. The touch panel 14 is connected to a control device 16 provided inside the housing 6.

  The control device 16 is connected to each component such as the cutting unit 8, the chuck table 12, the rotation mechanism, the processing feed mechanism, and the indexing feed mechanism, and has been described above based on the processing conditions set via the touch panel 14. Control the operation of each configuration.

  The control device 16 includes a processing unit 16a that executes processing necessary for control of each component, and a storage unit (storage unit) 16b that stores various types of information. The storage unit 16b stores, for example, maintenance item information related to maintenance items displayed on the touch panel 14 in maintenance work described later, guide information related to an execution procedure of each maintenance item, and the like. The specific functions and the like of the processing unit 16a and the storage unit 16b will be described later.

  An emergency stop button 18 that performs an emergency stop of the processing apparatus 2 is provided at a position adjacent to the touch panel 14. When the emergency stop button 18 is pressed, for example, the power supply to the motor connected to the spindle is stopped and the rotation of the blade 10 is stopped.

  For example, the processing device 2 cuts the blade 10 that rotates at a high speed into a workpiece that is sucked and held by the chuck table 12, and relatively moves the cutting unit 8 and the chuck table 12 in the processing feed direction. Cut the workpiece.

  By the way, this processing apparatus 2 is provided with a plurality of sensors (not shown) for sensing the state of each configuration described above. Each sensor is connected to the control device 16, and the control device 16 controls the processing device 2 based on sensing information obtained from the sensor. Therefore, in order to properly operate the processing apparatus 2, it is necessary to periodically perform maintenance such as operation check of the sensor.

  Next, an example of maintenance work performed by the processing apparatus 2 of the present embodiment will be described. First, the user of the processing device 2 instructs the control device 16 to shift to the maintenance mode through the touch panel 14. When instructed to shift to the maintenance mode, the processing unit 16a of the control device 16 reads the maintenance item information from the storage unit 16b and displays it on the touch panel 14.

  FIG. 2A is an image diagram schematically showing a display state of maintenance item information. As shown in FIG. 2A, the touch panel 14 has maintenance item information 20a representing "1. daily inspection", maintenance item information 20b representing "2. monthly inspection", and "3. Semiannual inspection". Maintenance item information 20c representing is displayed.

  However, the maintenance item information displayed on the touch panel 14 is not limited to this, and can be arbitrarily changed. In order to change the maintenance item information displayed on the touch panel 14, the maintenance item information stored in the storage unit 16b may be changed.

  In the state shown in FIG. 2A, the user selects and touches any maintenance item information 20a to 20c. As a result, maintenance item information corresponding to the touched area is notified (input) to the control device 16 as selection information. Here, the description will be continued assuming that the maintenance item information 20a representing “1. daily inspection” is notified to the control device 16 as selection information.

  When the selection information described above is notified to the control device 16, the processing unit 16 a reads guide information related to the maintenance item indicated by the selection information from the storage unit 16 b and displays it on the touch panel 14. At this stage, guide information indicating the content of the maintenance to be performed first is displayed on the touch panel 14.

  FIG. 2B is an image diagram schematically showing a display state of guide information. As shown in FIG. 2B, the touch panel 14 has guide information 22a regarding “1-1. Inspection at the time of spindle rotation” which is the first maintenance to be performed in “1. Daily inspection”. It is displayed.

  In the state shown in FIG. 2B, the user refers to the content of the guide information 22a and performs maintenance of the processing apparatus 2 according to the guide information 22a. Here, according to the guide “Please check whether the door is locked and closed when the spindle is rotated”, the spindle is rotated and whether or not the doors 6a and 6b are locked in the closed state is determined. Check.

  After the maintenance is performed according to the guide information 22a, the update information 24a displayed as “next” is selected and touched below the guide information 22a. As a result, update information 24a instructing to update the guide information 22a is notified (input) to the control device 16.

  When the update information 24 a is notified to the control device 16, the processing unit 16 a reads guide information corresponding to the next procedure indicated by the update information 24 a from the storage unit 16 b and displays it on the touch panel 14. That is, at this stage, guide information indicating the content of the maintenance to be performed second is displayed on the touch panel 14.

  FIG. 2C is an image diagram schematically showing a display state of the updated guide information. As shown in FIG. 2C, the touch panel 14 has guide information 22b regarding “1-2. Emergency stop button check” which is the second maintenance to be performed in “1. Daily check”. It is displayed.

  In the state shown in FIG. 2C, the user refers to the content of the guide information 22b and performs maintenance of the processing apparatus 2 according to the guide information 22b. Here, the emergency stop button 18 is pressed according to the guide “Please confirm whether the spindle stops rotating by pressing the emergency stop button” to check whether the spindle stops.

  After the maintenance is performed according to the guide information 22b, the update information 24b displayed as “next” is selected and touched below the guide information 22b. As a result, update information 24b instructing to update the guide information 22b is notified (input) to the control device 16.

  When the update information 24 b is notified to the control device 16, the processing unit 16 a reads guide information corresponding to the next procedure indicated by the update information 24 b from the storage unit 16 b and displays it on the touch panel 14. When such a procedure is repeated and all the maintenance corresponding to the selected maintenance item information 20a is performed, the maintenance of the processing apparatus 2 ends.

  As described above, the processing apparatus 2 according to the present embodiment displays guide information that guides the maintenance method and displays guide information that is updated according to the next procedure based on input from the user. Therefore, the user can confirm an efficient implementation procedure as the maintenance progresses.

  That is, in the processing apparatus 2 of the present embodiment, guide information corresponding to the next procedure is displayed based on the input from the user. For example, when displaying all the implementation procedures at once, The possibility of erroneously selecting an inefficient procedure can be kept low. Thus, according to this Embodiment, the processing apparatus 2 which can implement | achieve an efficient maintenance can be provided.

  In addition, this invention is not limited to description of the said embodiment, A various change can be implemented. For example, in the processing apparatus 2 of the above-described embodiment, the guide information 22a and 22b using only characters is displayed on the touch panel 14, but the guide information may be a figure or a video. Of course, it is also possible to display guide information that combines characters, diagrams, and moving images.

  In addition to the display of guide information, notification by voice or the like may be performed. In this case, the processing unit 16a generates an arbitrary sound from a speaker (not shown) of the processing device 2. For example, the voice may be such that the content of the guide information is read out.

  Further, in the present embodiment, the processing apparatus 2 is described by taking an example of maintenance (periodic inspection) that is periodically performed. However, for the maintenance of the present invention, for example, replacement of the blade 10, chuck table 12 Exchange etc. are included. That is, in the present invention, maintenance means maintenance, inspection, repair, replacement, etc. of each component.

  In addition, the configurations, methods, and the like according to the above-described embodiments can be changed as appropriate without departing from the scope of the object of the present invention.

2 Processing device 4 Base 6 Case 6a, 6b Door 6c Front 8 Cutting unit (processing means)
10 blade 12 chuck table 14 touch panel (display means, input means)
16 Control Device 16a Processing Unit 16b Storage Unit (Storage Unit)
18 Emergency stop button 20a, 20b, 20c Maintenance item information 22a, 22b Guide information 24a, 24b Update information

Claims (1)

A processing apparatus comprising: a chuck table for holding a workpiece; a processing means for processing the workpiece held on the chuck table; a display means for displaying information; and an input means for inputting information. And
A storage means for storing maintenance item information related to various maintenance items of the processing apparatus and guide information for guiding an execution method of each maintenance item along an execution procedure,
When the selection information corresponding to the desired maintenance item is input by the input means based on the various maintenance item information displayed on the display means, the guide information corresponding to the maintenance item is displayed on the display means. ,
When the update information instructing to update the guide information is input by the input means, the guide information updated in accordance with the next procedure is displayed on the display means.

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