JP6433178B2 - Processing equipment - Google Patents

Description

  The present invention relates to a machining apparatus including a touch operation panel that inputs machining conditions by a touch operation.

  In the manufacturing process of semiconductor devices and electronic components, a plate-shaped workpiece made of various materials such as a semiconductor wafer and a ceramic substrate is ground to a predetermined thickness by grinding with a grinding wheel mounted on the spindle of a grinding machine. Then, the plate-like workpiece is divided into individual device chips by a cutting blade or a laser processing device mounted on the spindle of the cutting device.

  In recent years, processing apparatuses such as a grinding apparatus, a cutting apparatus, and a laser processing apparatus are often equipped with a touch panel with good operability as an operation panel at a position where an operator such as an operator can easily operate (for example, Japanese Patent Application Laid-Open No. 2003-2003). No. 158094).

  In the processing apparatus, when an operator operates a touch-type operation panel (hereinafter referred to as a touch operation panel), various processing conditions are input, and optimal processing is performed under processing conditions suitable for various workpieces.

  When an operator inputs various machining conditions, a desired input field on the touch operation panel is selected by touching, etc., and then a numerical input keyboard is displayed on the touch operation panel to meet the machining conditions. The procedure of inputting a numerical value is taken.

JP 2003-158094 A

  However, numerical input using a keyboard by displaying a numerical input keyboard on a touch operation panel, which has been common in the past, requires a lot of time to touch the screen and requires time to get used to the operation. However, even if used to the operation, there is a problem that an input error or a numerical error is likely to occur due to a touch position shift.

  The present invention has been made in view of the above points, and the object of the present invention is to perform a touch operation capable of displaying an image that allows numerical input in fewer steps in a numerical input column on the touch operation panel. It is providing the processing apparatus provided with the panel.

According to the present invention, the holding means having the holding surface for holding the workpiece, the processing means for processing the workpiece held by the holding means, and the touch operation panel for inputting the processing conditions of the processing means. The touch operation panel displays at least a processing condition setting screen in which one or a plurality of input fields for inputting numerical data of processing conditions are arranged, and is displayed on the touch operation panel. When an operator touches an input field for inputting numerical data, a circular image for numerical input having an arrow pointing to the input field is displayed in the vicinity of the input field, and the operator touches the outer periphery of the circular image. Then, the numerical value in the input field increases by tracing in the first direction along the outer periphery, and the numerical value in the input field decreases by tracing in the second direction opposite to the first direction. Processing apparatus is provided, wherein.

  Preferably, the operator touches the outer periphery of the circular image displayed in the vicinity of the input field for which numerical data is desired to be input, and the numerical value in the input field is set to a predetermined value by tracing in the first direction along the outer periphery. When the circular image is displayed on the touch operation panel when the numerical value of the input field is decreased by a predetermined interval by increasing the interval and tracing in the second direction, the position overlapping the circular image or A first icon that accepts a touch operation for increasing the numerical value of the input field one by one and a second icon that accepts a touch operation for decreasing the numerical value of the input field one by one are displayed in the vicinity.

  According to the present invention, when an operator touches an input field for inputting numerical data on the touch operation panel of the processing apparatus, a circular image for numerical input can be displayed in the vicinity of the input field. The numerical value in the input field can be easily changed to a desired numerical value by touching the part by the operator and tracing along the outer periphery.

1 is an external perspective view of a cutting device to which the present invention is applied. It is a figure which shows an example of a process condition setting screen. It is a figure of the state which displayed the circular image for numerical input in the vicinity of the column for numerical input of the spindle rotation speed Z2 of a process condition setting screen. 4A is an explanatory diagram for inputting a numerical value by touching and tracing the outer periphery of the circular image, and FIG. 4B is a numerical value input by touching an icon displayed at a position overlapping the circular image. It is explanatory drawing.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Referring to FIG. 1, an external perspective view of a cutting device 2 including a touch operation panel according to an embodiment of the present invention is shown. The mechanical part of the cutting device 2 is accommodated in an exterior cover 4 formed by combining a plurality of panels.

  A chuck table 6 is configured to be rotatable and movable in the X-axis direction. As is well known, the chuck table 6 is provided with a plurality of clamps 8 for clamping an annular frame that supports the wafer via a dicing tape.

  The cutting device 2 includes a first cutting unit 10 and a second cutting unit 12 that are arranged in alignment in the Y-axis direction. Both the first cutting unit 10 and the second cutting unit 12 are guided by a guide rail 14 extending in the Y-axis direction and are movable in the Y-axis direction, and are also movably arranged in the Z-axis direction (height direction). Has been. The cutting device 2 is a so-called facing dual dicer having two spindles.

  Reference numeral 16 denotes a cassette mounting table for mounting a cassette containing a plurality of wafers therein, and is configured to be movable in the vertical direction (Z-axis direction). Reference numeral 18 denotes a display lamp for displaying the operating status of the cutting device 2, which lights up in green when the cutting device 2 is operating normally, and flashes red when some failure occurs.

  Reference numeral 20 denotes a touch panel touch operation panel capable of inputting information by touch operation. An operator can input an operation command of the apparatus using the touch operation panel, and an operation status of the apparatus is displayed on the touch operation panel 20. The 22 and 24 are emergency stop buttons. When the operator presses the emergency stop buttons 20 and 24, the operation of the cutting device 2 can be stopped immediately.

  Referring to FIG. 2, an example of the processing condition setting screen 30 displayed on the touch operation panel 20 is shown. The machining condition setting screen 30 has a device area 32, a cut area 34, an auto setup area 36, and an auto down area 38.

  The device area 32 has a plurality of numerical data input fields 40, the cut area 34 has a plurality of numerical data input fields 42, and the auto setup area 36 has a plurality of numerical data input fields 44. The auto-down area 38 has 46 for inputting a plurality of numerical data.

  For example, when it is desired to change the spindle rotation speed Z2 of the second cutting unit 12, the operator touches the input field 42 corresponding to the spindle rotation speed Z2. In response to this touch operation, as shown in FIG. 3, a circular image 48 for numerical input is displayed in the vicinity of the touched input field 42. The outer peripheral part 48a of the circular image 48 functions as an input part for numerical data.

  Therefore, as shown in FIG. 4A, when the operator's hand 50 touches the outer peripheral portion 48a of the circular image 48 and traces the outer peripheral portion 48a in the clockwise direction indicated by the arrow R, an input field is displayed. The value of 42 increases. Conversely, when tracing in the counterclockwise direction indicated by the arrow L, the numerical value in the input field 42 decreases.

  Preferably, when tracing in the clockwise direction indicated by arrow R, the numerical value in the input field 42 increases by a predetermined interval, and when tracing in the counterclockwise direction indicated by arrow L, the numerical value in the input field 42 decreases by a predetermined interval. It is set to be.

  In the present embodiment, when the circular image 48 is displayed on the processing condition setting screen 30 adjacent to the touched input field 42, the numerical value of the input field 42 is incremented by one at a position overlapping the circular image 48. An icon 52 for accepting a touch operation for causing the touch panel to be displayed and an icon 54 for accepting a touch operation for reducing the numerical value in the input field 42 one by one are displayed simultaneously. In this embodiment, the icons 52 and 54 are displayed at positions overlapping the circular image 48, but the icons 52 and 54 may be set to be displayed in the vicinity of the circular image 48.

  As shown in FIG. 4B, when the operator's hand 50 touches the icon 52, the numerical value in the input field 42 can be increased by one according to the number of touches. On the other hand, when the icon 54 is touched, the numerical value in the input field 42 can be decreased one by one according to the number of touches.

  In the above-described embodiment, the example in which the present invention is applied to the touch operation panel 20 of the cutting apparatus 2 has been described. However, the present invention is not limited to this, and a grinding apparatus, a polishing apparatus, and a laser having a touch operation screen. The present invention can be similarly applied to other processing apparatuses such as a processing apparatus.

2 Cutting device 20 Touch operation panel 30 Machining condition setting screen 32 Device area 34 Cut area 36 Auto setup area 38 Auto down area 40, 42, 44, 46 Input field 48 Circular image 48a Peripheral part 52, 54 Icon

Claims (2)

A processing apparatus comprising: a holding unit having a holding surface that holds a workpiece; a processing unit that processes the workpiece held by the holding unit; and a touch operation panel that inputs processing conditions of the processing unit. There,
The touch operation panel displays at least a processing condition setting screen in which one or more input fields for inputting numerical data of processing conditions are arranged,
When an operator touches an input field desired to input numerical data displayed on the touch operation panel, a circular image for numerical input having an arrow pointing to the input field is displayed near the input field. The operator touches the outer periphery of the circular image and traces in the first direction along the outer periphery to increase the value in the input field, and the input by tracing in the second direction opposite to the first direction. A processing apparatus characterized in that the numerical value in the column decreases. The operator touches the outer periphery of the circular image displayed in the vicinity of the input field in which numerical data is desired to be input, and the numerical value in the input field is increased by a predetermined interval by tracing the first direction along the outer periphery Then, by tracing in the second direction, the value in the input field decreases by a predetermined interval,
When the circular image is displayed on the touch operation panel, a first icon for accepting a touch operation for incrementing the numerical value of the input field one by one at or near the position where the circular image overlaps, and the input The processing apparatus according to claim 1, wherein a second icon for receiving a touch operation for decreasing the numerical value of the column one by one is displayed.