JP2014081762A - Processing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a technique for making it possible to easily input an operation command into a processing device regardless of the degree of skill of an operator in the handling of a processing device.SOLUTION: A processing device for processing a work piece comprises: holding means for holding a work piece; processing means for processing a work piece held by the holding means; input means with a plurality of buttons for inputting an operation command to operate the processing means; and display means for displaying a plurality of input screens for inputting operation commands through the input means. The input means has a first jump button that displays a first input screen on the display means.

Description

  The present invention relates to a machining apparatus provided with an input means for inputting an operation command, and more particularly to a technique for easily inputting an operation command to the machining apparatus.

  Conventionally, for example, various processing apparatuses such as a cutting apparatus, a grinding apparatus, a polishing apparatus, and a laser processing apparatus are known as processing apparatuses used in a semiconductor manufacturing process and an electronic component manufacturing process.

  In order to process the workpiece with the processing apparatus, it is necessary to make various settings on the processing apparatus side in addition to inputting the processing conditions to the processing apparatus. A configuration in which such various settings are performed by a touch panel display monitor is known, and there is a document that discloses a technique related to the display monitor (see, for example, Patent Document 1).

JP 2012-000701 A

  In particular, various processing devices such as cutting devices, grinding devices, polishing devices, laser processing devices, tool cutting devices, cleaning devices, tape mount devices, and division devices used in semiconductor manufacturing processes and electronic component manufacturing processes start processing. A lot of work such as attachment of a processing tool and origin search is required before starting, and various setting work for carrying out this work is also required.

  Here, when executing a specific setting operation on a display monitor as disclosed in Patent Document 1, the operator displays an input screen for performing the specific setting operation, and then performs an operation. It is necessary to input a command.

  However, when the proficiency level of the worker is low, it is difficult to reach the input screen on the display monitor, and there is a possibility that the operation command may not be input. For example, in a configuration that finally reaches the desired input screen by switching the screen multiple times by button operation multiple times from the state of the top menu screen, it takes time to start the operation command, In addition, once a button operation is mistaken, it will be necessary to start over from the beginning.

  In recent years, with the expansion of functions of processing equipment, the types and procedures of work have increased and complicated, and operation command input screens exist in various ways, so the level of proficiency in handling processing equipment is particularly low. The worker has a problem that it takes a very long time to reach an appropriate input screen each time.

  Furthermore, even an operator who has a high level of skill in handling a processing apparatus has been required to switch a variety of input screens each time to display a target input screen.

  The present invention has been made in view of the above problems, and the object of the present invention is to easily input an operation command to the processing apparatus regardless of the level of skill of the operator in handling the processing apparatus. Is to provide technology for

According to the invention of claim 1,
A processing device for processing a workpiece,
Holding means for holding the workpiece;
Processing means for processing the workpiece held by the holding means;
An input means having a plurality of buttons for inputting an operation command for operating the processing means;
Display means for displaying each of a plurality of input screens for inputting operation commands with the input means;
With
The input means is provided with a processing apparatus having a first jump button for displaying a first input screen on the display means.

According to the invention of claim 2,
Acts as the first jump button when multiple buttons are pressed simultaneously,
A processing apparatus according to claim 1 is provided.

According to the invention of claim 3,
The first input screen displayed by pressing the first jump button is
The setting can be changed.
A processing apparatus according to claim 1 or claim 2 is provided.

  Since the processing apparatus of the present invention has the first jump button for displaying the first input screen, the target input screen (first input screen) can be easily displayed regardless of the proficiency level. The work efficiency of command input work is improved.

  According to the second aspect of the invention, since the first jump button is formed by a combination of a plurality of buttons, it is not necessary to increase the number of buttons, and the input means can be configured in a compact manner.

  Further, according to the invention described in claim 3, for example, the first jump button can be arbitrarily set so as to jump to the input screen frequently used for each worker. Can be improved.

It is a perspective view of the processing apparatus (cutting apparatus) suitable for implementation of this invention. It is a block diagram shown about the structure of a control apparatus. It is a figure shown about the structure of a control apparatus, and a jump key x input screen table. It is a figure explaining the hierarchy of an input screen. It is a figure shown about the structural example of a top menu screen. It is a figure shown about the structural example of an input screen.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. As an example of the processing apparatus, an external perspective view of a semiconductor wafer cutting apparatus 2 is shown in FIG. The cutting device 2 includes a processing device main body 4 in which processing means such as a cutting unit 10 having a cutting blade is accommodated in a housing 8, a display monitor 6 mounted on the housing 8 of the processing device main body 4, and the like. Is done.

  A chuck table 12 is disposed adjacent to the cutting unit 10 so as to be movable in the X-axis direction. Reference numeral 14 denotes a cassette mounting table (elevator) on which a cassette 24 capable of accommodating a plurality of wafers 22 is mounted, and is configured to be movable in the vertical direction. As a holding means for holding the wafer 22 during processing, it is conceivable that a holding means using an edge clamp (a form in which the end is clamped) is used in addition to a table such as the chuck table 12.

  As shown in the schematic diagram of FIG. 2, the cutting device 2 is provided with a control device 30 for automatically controlling the cutting device 2. The control device 30 is constituted by a microcomputer, and stores a CPU (Central Processing Unit) 31 that performs arithmetic processing according to a control program, a ROM (Read Only Memory) 32 that stores a control program and various databases, and arithmetic results. A readable / writable RAM (random access memory) 33 and an input / output interface 34 are provided.

  The ROM 32 stores a control program for automatically controlling the cutting unit 10 and the like and various databases assumed to be read by the control program.

  The RAM 33 reads a control program and various data, and temporarily stores machining conditions input by an operator.

  Connected to the input / output interface 34 is a display monitor 6 (see FIG. 1) that functions as an input means for inputting processing conditions and operation commands for operating the apparatus, and also functions as a display means for displaying various information. . In addition, it is good also as a structure which each provides an input means and a display means by providing two display monitors.

  Various drive devices such as a motor that rotates the cutting unit 10 and a motor that moves the chuck table 12 are connected to the input / output interface 34, and various drive devices are machined based on the calculation results obtained by executing the control program. It is driven according to conditions.

  FIG. 3 is a functional block diagram for explaining characteristic functions in the present invention. In FIG. 3, the control device 30 and the display monitor 6 are shown.

  As shown in FIG. 3, the control device 30 uses the CPU 31, ROM 32, and RAM 33 shown in FIG. 2 to input a database 36, a jump key determination unit 37, a jump key × input screen table 38, and a jump. As the key registration unit 39 and the input screen reading unit 40, various functional units that function respectively are configured.

  As shown in FIG. 4, the input screen database 36 stores a plurality of input screens 57a to 57x. Also, in FIG. 4, the concept of the hierarchy of the screen is expressed in a tree diagram form, and is displayed according to an operation command on the top menu screen 57a (input screen) as shown in FIG. The input screens 57b to 57e express that they are associated with the top menu screen 57a. In addition, when the display monitor 6 is actually operated, it is expressed that by moving the operation from the top menu screen 57a, it is possible to move to the input screen under the operation.

  In FIG. 3, each input screen stored in the input screen database 36 is provided with a screen key GK as one-to-one correspondence with the jump key JK as information. For example, the jump key JK is a key (F1) output when the button F1 in FIG. 5 is pressed, and the screen key GK is a key (001) for specifying the input screen 57x shown in FIG. It is.

  In FIG. 3, the jump key × input screen table 38 stores a data table for storing the jump key JK and the screen key GK in a one-to-one correspondence. Specifically, for example, when the jump key JK = F1 is specified at the registration number T001, the screen key GK = 001 is specified, and when the jump key JK = F2 is specified at the registration number T002, the screen key GK = 002. Is specified. That is, the jump key JK and the screen key GK are stored in association with each other.

  The information stored in the jump key × input screen table 38 can be updated by the jump key registration unit 39. That is, for example, what is stored in a one-to-one correspondence between the jump key JK = F1 and the screen key GK = 001 for the registration number T001, and a pair of the jump key JK = F1 and the screen key GK = 002 for the registration number T001. It is to change so that it corresponds with one.

  In addition, the jump key registration unit 39 can newly register the jump key JK = Ctrl + F1 and the screen key GK = C001 on a one-to-one basis as the registration number T101 in the jump key × input screen table 38. ing. The operation of the jump key registration unit 39 can be operated by the operator using the display monitor 6.

  Such update / new registration of the jump key × input screen table 38 by the jump key registration unit 39 is performed, for example, when the input screen 57x (screen key GK = 001) is displayed in FIG. Can be performed by long-pressing a button to be assigned (for example, button F1 or two buttons of button Ctrl and button F1) for several seconds.

  With the above configuration, the one-to-one correspondence between the jump key JK and the screen key GK can be easily updated and newly registered as desired by the operator. Assuming that the operator arbitrarily updates and newly registers the jump key × input screen table 38, the jump key × input screen table 38 (correspondence table between the jump key and the input screen) is displayed on the display monitor 6. It is preferable that the data can be output or externally output by printout or the like.

  In FIG. 3, when the jump key JK is input from the display monitor 6, the jump key determination unit 37 refers to the jump key input screen table 39 and selects the screen key GK corresponding to the jump key JK on a one-to-one basis. Extract. For example, when the jump key JK = F1, the screen key GK = 001 is extracted.

  In FIG. 3, the input screen reading unit 40 extracts an input screen corresponding to the screen key GK extracted by the jump key determination unit 37 from the input screen database 36 and displays the input screen on the display monitor 6. To do. For example, when the screen key GK = 001, the input screen 57x (FIG. 6) to which the 001 is assigned as unique information is displayed.

  Then, in this manner, there are a plurality of hierarchized input screens as shown in FIG. 4, and the input screen 57x is instantaneously pushed without going through the steps to reach the input screen 57x in order. It is possible to jump up and display on the display monitor 6.

The present invention can be implemented as described above.
That is, it is a cutting device (processing device) 2 for processing a wafer 22 as a workpiece, and includes a chuck table (holding means) 12 for holding the workpiece 22 and a wafer 22 held by the chuck table 12. A display unit (input unit) 6 provided with a cutting unit (processing unit) 10 for processing, a plurality of buttons (F1, Ctrl, etc.) for inputting an operation command for operating the cutting unit 10, and a display monitor 6 And a display monitor (display means) 6 for displaying each of a plurality of input screens for inputting operation commands. The display monitor 6 displays a first input screen (input screen 57x) on the display monitor 6. A cutting device 2 having a jump button (for example implemented with button F1) is realized.

  This makes it possible to reach the desired input screen instantly by operating the jump button regardless of the level of proficiency in handling the processing apparatus, and shorten the time required for inputting the necessary operation command. It becomes possible. In addition, this time reduction reduces the burden on the operator and can reduce the labor related to the input of necessary operation commands.

  In the above embodiment, each function of the input unit, the display unit, and the jump button is realized by the touch panel display monitor 6. However, the present invention is not limited to this example, and each function is realized individually. It is good also as a structure which provides this apparatus.

  Moreover, in the above embodiment, it is possible to act as a first jump button by simultaneously pressing a plurality of buttons (two buttons of the button Ctrl and the button F1).

  As a result, for example, by combining a plurality of buttons that exist in the past or are generally installed, a jump button (a button for inputting a jump key) can be realized, and the number of buttons needs to be increased. When it is eliminated (the number of buttons can be reduced), the input means (display monitor 6) for realizing the jump button can be made compact.

  In the above embodiment, the first input screen displayed when the first jump button is pressed can be changed. In other words, the jump key × input screen table 38 can be updated and newly registered.

  Thereby, for example, a jump button can be set for an input screen frequently used for each worker, and workability can be improved for each worker.

  In addition, although the above embodiment demonstrated using the cutting apparatus 2 as a processing apparatus, in addition to this, implementing this invention in various processing apparatuses, such as a grinding apparatus, a polishing apparatus, a laser processing apparatus, and a washing | cleaning apparatus. Is possible.

2 Cutting device 6 Display monitor 30 Control device 36 Input screen database 37 Jump key determination unit 38 Jump key × input screen table 39 Jump key registration unit 40 Input screen reading unit 57a Top menu screen 57x Input screen

Claims (3)

A processing device for processing a workpiece,
Holding means for holding the workpiece;
Processing means for processing the workpiece held by the holding means;
An input means having a plurality of buttons for inputting an operation command for operating the processing means;
Display means for displaying each of a plurality of input screens for inputting operation commands with the input means;
With
The input means has a first jump button for displaying a first input screen on the display means. Acts as the first jump button when multiple buttons are pressed simultaneously,
The processing apparatus according to claim 1. The first input screen displayed when the first jump button is pressed is
The setting can be changed.
The processing apparatus according to claim 1 or 2, characterized in that

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