JP2014216180A5 - - Google Patents

Download PDF

Info

Publication number
JP2014216180A5
JP2014216180A5 JP2013092436A JP2013092436A JP2014216180A5 JP 2014216180 A5 JP2014216180 A5 JP 2014216180A5 JP 2013092436 A JP2013092436 A JP 2013092436A JP 2013092436 A JP2013092436 A JP 2013092436A JP 2014216180 A5 JP2014216180 A5 JP 2014216180A5
Authority
JP
Japan
Prior art keywords
charged particle
particle beam
sample
magnetic field
magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2013092436A
Other languages
English (en)
Japanese (ja)
Other versions
JP6061771B2 (ja
JP2014216180A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2013092436A priority Critical patent/JP6061771B2/ja
Priority claimed from JP2013092436A external-priority patent/JP6061771B2/ja
Priority to EP14165693.4A priority patent/EP2797099B1/en
Priority to US14/260,452 priority patent/US9070532B2/en
Publication of JP2014216180A publication Critical patent/JP2014216180A/ja
Publication of JP2014216180A5 publication Critical patent/JP2014216180A5/ja
Application granted granted Critical
Publication of JP6061771B2 publication Critical patent/JP6061771B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2013092436A 2013-04-25 2013-04-25 試料ホルダおよびそれを用いた荷電粒子線装置 Expired - Fee Related JP6061771B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2013092436A JP6061771B2 (ja) 2013-04-25 2013-04-25 試料ホルダおよびそれを用いた荷電粒子線装置
EP14165693.4A EP2797099B1 (en) 2013-04-25 2014-04-23 Magnetic field applying sample holder; and charged particle beam apparatus using same
US14/260,452 US9070532B2 (en) 2013-04-25 2014-04-24 Charged particle beam apparatus sample holder with magnetic field generating element and sample holding element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013092436A JP6061771B2 (ja) 2013-04-25 2013-04-25 試料ホルダおよびそれを用いた荷電粒子線装置

Publications (3)

Publication Number Publication Date
JP2014216180A JP2014216180A (ja) 2014-11-17
JP2014216180A5 true JP2014216180A5 (enExample) 2016-03-10
JP6061771B2 JP6061771B2 (ja) 2017-01-18

Family

ID=50513179

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013092436A Expired - Fee Related JP6061771B2 (ja) 2013-04-25 2013-04-25 試料ホルダおよびそれを用いた荷電粒子線装置

Country Status (3)

Country Link
US (1) US9070532B2 (enExample)
EP (1) EP2797099B1 (enExample)
JP (1) JP6061771B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6554066B2 (ja) * 2016-05-31 2019-07-31 株式会社日立製作所 磁場計測用電子顕微鏡、及び磁場計測法
JP6355703B2 (ja) * 2016-11-29 2018-07-11 株式会社メルビル 試料ホルダー
JP6786121B2 (ja) * 2017-01-24 2020-11-18 国立大学法人東北大学 電子線ホログラムの作成方法、磁場情報測定方法および磁場情報測定装置
CN112038039B (zh) * 2020-05-27 2021-08-24 中国科学院宁波材料技术与工程研究所 一种磁场发生装置及可施加磁场的透射电子显微镜样品杆
US20240258064A1 (en) * 2021-08-20 2024-08-01 Forschungszentrum Jülich GmbH Magnetization device for an electron microscope and method

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58169762A (ja) * 1982-03-30 1983-10-06 Internatl Precision Inc 電子線装置
JPH08264146A (ja) 1995-03-24 1996-10-11 Hitachi Ltd 透過電子顕微鏡
US6476913B1 (en) * 1998-11-30 2002-11-05 Hitachi, Ltd. Inspection method, apparatus and system for circuit pattern
DE19945344A1 (de) * 1999-09-22 2001-03-29 Leo Elektronenmikroskopie Gmbh Teilchenoptisches Beleuchtungs- und Abbildungssystem mit einer Kondensor-Objektiv-Einfeldlinse
JP3469213B2 (ja) * 2001-03-29 2003-11-25 株式会社日立製作所 磁場印加試料観察システム
JP2005294181A (ja) * 2004-04-05 2005-10-20 Jeol Ltd バルク試料ホルダ
JP4759733B2 (ja) 2005-09-15 2011-08-31 国立大学法人東北大学 電子顕微鏡
JP2011003533A (ja) * 2009-05-20 2011-01-06 Jeol Ltd 磁区観察装置
JP5645386B2 (ja) 2009-09-30 2014-12-24 株式会社日立製作所 電磁場印加装置
JP2012129137A (ja) * 2010-12-17 2012-07-05 Hitachi Ltd 磁場印加試料保持装置およびそれを用いた荷電粒子線装置

Similar Documents

Publication Publication Date Title
JP2014216180A5 (enExample)
EP3808501A4 (en) MAGNETIC CLAMP AND MAGNETIC FORCE GENERATION MECHANISM FOR MAGNETIC CLAMP
MX2016007523A (es) Aparato y metodo de disrupcion de camara.
HUE048375T2 (hu) Készülékek és eljárások optikai effektusrétegek elõállítására, amelyek orientált nem gömb alakú mágnes vagy mágnesezhetõ pigmentrészecskéket tartalmaznak
HUE048695T2 (hu) Készülékek és eljárások optikai effektusrétegek elõállítására, amelyek orientált nem gömb alakú mágneses vagy mágnesezhetõ pigmentrészecskéket tartalmaznak
CN105301733A8 (zh) 透镜移动装置
BR112015027529A2 (pt) lente fotográfica, e aparelho eletrônico
EP2972352A4 (en) NANOPIPETTE DEVICE AND METHOD FOR SUBCELLULAR ANALYSIS
FR3010924B1 (fr) Dispositif et procede de marquage laser d'une lentille ophtalmique
FR2991807B1 (fr) Dispositif et procede de focalisation d'impulsions
EP2975393A4 (en) MALDI SAMPLE PREPARATION AND SAMPLE PREPARATION
EP2963436A4 (en) MAGNETIC SCANNING DEVICE AND METHOD FOR MAGNETIC SCANNING THEREFOR
IL245915B (en) Radiation source, metrology apparatus, lithographic system and device manufacturing method
DE102011054997A8 (de) Leseverstärker mit Negativ-Kapazitäts-Schaltung und Vorrichtung mit demselben
EP3043555A4 (en) DATA STORAGE METHOD AND DEVICE THEREFOR
EP3062146A4 (en) Laser device, and exposure device and inspection device provided with laser device
EP3493894A4 (en) MANIPULATION OF CATEGORIZATION DATA USING A TIME-OF-FLIGHT MASS SPECTROMETER AND MATRIX-AIDED LASER DESORPTION / LASER IONIZATION SPECTROMETER
EP3018515A4 (en) CONTROL METHOD FOR A PICTURE RECORDING DEVICE AND REPLACEABLE LENS
EP2973639A4 (en) COMPACT HIGH VOLTAGE PLASMA SOURCE FOR NEUTRON GENERATION
EP2963868A4 (en) METHOD AND DEVICE FOR LONG-TERM STORAGE OF DOME-SUBJECT PATH INFORMATION
EP3040299A4 (en) Thread pickup device, thread takeup device, and thread splicing method
JP2012230017A5 (enExample)
EP2797099A3 (en) Magnetic field applying sample holder; and charged particle beam apparatus using same
JP2014500802A5 (enExample)
JP2013120833A5 (enExample)