JP2014192329A - Pzt系強誘電体薄膜形成用組成物及びその製造方法並びに該組成物を用いたpzt系強誘電体薄膜の形成方法 - Google Patents
Pzt系強誘電体薄膜形成用組成物及びその製造方法並びに該組成物を用いたpzt系強誘電体薄膜の形成方法 Download PDFInfo
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- JP2014192329A JP2014192329A JP2013066421A JP2013066421A JP2014192329A JP 2014192329 A JP2014192329 A JP 2014192329A JP 2013066421 A JP2013066421 A JP 2013066421A JP 2013066421 A JP2013066421 A JP 2013066421A JP 2014192329 A JP2014192329 A JP 2014192329A
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- 238000005234 chemical deposition Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
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- WOWBFOBYOAGEEA-UHFFFAOYSA-N diafenthiuron Chemical compound CC(C)C1=C(NC(=S)NC(C)(C)C)C(C(C)C)=CC(OC=2C=CC=CC=2)=C1 WOWBFOBYOAGEEA-UHFFFAOYSA-N 0.000 description 1
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- 229910052746 lanthanum Inorganic materials 0.000 description 1
- SORGMJIXNUWMMR-UHFFFAOYSA-N lanthanum(3+);propan-2-olate Chemical compound [La+3].CC(C)[O-].CC(C)[O-].CC(C)[O-] SORGMJIXNUWMMR-UHFFFAOYSA-N 0.000 description 1
- JLRJWBUSTKIQQH-UHFFFAOYSA-K lanthanum(3+);triacetate Chemical compound [La+3].CC([O-])=O.CC([O-])=O.CC([O-])=O JLRJWBUSTKIQQH-UHFFFAOYSA-K 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
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- SGGOJYZMTYGPCH-UHFFFAOYSA-L manganese(2+);naphthalene-2-carboxylate Chemical compound [Mn+2].C1=CC=CC2=CC(C(=O)[O-])=CC=C21.C1=CC=CC2=CC(C(=O)[O-])=CC=C21 SGGOJYZMTYGPCH-UHFFFAOYSA-L 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- YKYONYBAUNKHLG-UHFFFAOYSA-N n-Propyl acetate Natural products CCCOC(C)=O YKYONYBAUNKHLG-UHFFFAOYSA-N 0.000 description 1
- ZTILUDNICMILKJ-UHFFFAOYSA-N niobium(v) ethoxide Chemical compound CCO[Nb](OCC)(OCC)(OCC)OCC ZTILUDNICMILKJ-UHFFFAOYSA-N 0.000 description 1
- 125000004433 nitrogen atom Chemical group N* 0.000 description 1
- 125000000962 organic group Chemical group 0.000 description 1
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- FJKROLUGYXJWQN-UHFFFAOYSA-N papa-hydroxy-benzoic acid Natural products OC(=O)C1=CC=C(O)C=C1 FJKROLUGYXJWQN-UHFFFAOYSA-N 0.000 description 1
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- 238000012545 processing Methods 0.000 description 1
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- 229940090181 propyl acetate Drugs 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
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- 238000011084 recovery Methods 0.000 description 1
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- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 229960004889 salicylic acid Drugs 0.000 description 1
- DCKVNWZUADLDEH-UHFFFAOYSA-N sec-butyl acetate Chemical compound CCC(C)OC(C)=O DCKVNWZUADLDEH-UHFFFAOYSA-N 0.000 description 1
- 238000000391 spectroscopic ellipsometry Methods 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 150000005846 sugar alcohols Polymers 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 125000004213 tert-butoxy group Chemical group [H]C([H])([H])C(O*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- WMOVHXAZOJBABW-UHFFFAOYSA-N tert-butyl acetate Chemical compound CC(=O)OC(C)(C)C WMOVHXAZOJBABW-UHFFFAOYSA-N 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 238000009283 thermal hydrolysis Methods 0.000 description 1
- UAXOELSVPTZZQG-UHFFFAOYSA-N tiglic acid Natural products CC(C)=C(C)C(O)=O UAXOELSVPTZZQG-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- JMXKSZRRTHPKDL-UHFFFAOYSA-N titanium ethoxide Chemical compound [Ti+4].CC[O-].CC[O-].CC[O-].CC[O-] JMXKSZRRTHPKDL-UHFFFAOYSA-N 0.000 description 1
- 150000004072 triols Chemical class 0.000 description 1
- NQPDZGIKBAWPEJ-UHFFFAOYSA-N valeric acid Chemical compound CCCCC(O)=O NQPDZGIKBAWPEJ-UHFFFAOYSA-N 0.000 description 1
- 229940005605 valeric acid Drugs 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
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Abstract
【解決手段】組成物100質量%中のPZT前駆体の割合が酸化物換算で17〜35質量%であり、組成物100質量%中のジオールの割合が16〜56質量%であり、ポリビニルピロリドン又はポリエチレングリコールの割合が上記PZT前駆体1モルに対してモノマー換算で0.01〜0.25モルであり、水の割合が上記PZT前駆体1モルに対して0.5〜3モルであることを特徴とする。但し、上記組成物100質量%中に炭素鎖6以上12以下の直鎖状モノアルコールを0.6〜10質量%の割合で更に含む組成物を除く。
【選択図】図1
Description
+(300clogηrel +(c+1.5clogηrel)2)1/2/(0.15c+0.003c2)
上記式中、「ηrel」は、ポリビニルピロリドン水溶液の水に対する相対粘度を示し、「c」は、ポリビニルピロリドン水溶液中のポリビニルピロリドン濃度(%)を示す。
先ず、金属原子比が115/52/48(Pb/Zr/Ti)となるように、PZT前駆体として酢酸鉛三水和物(Pb源)、テトラチタニウムイソプロポキシド(Ti源)、テトラジルコニウムブトキシド(Zr源)をそれぞれ秤量し、これらを反応容器内のプロピレングリコール、アセチルアセトンに添加して合成液を調製した。この合成液を、窒素雰囲気中、150℃の温度で60分間還流した後、減圧蒸留により脱溶媒した。
PZT前駆体1モルに対するポリビニルピロリドンの添加量及び製造後の組成物100質量%中に占めるジオールの割合を、以下の表1のように変更したこと以外は、実施例1−1と同様にして組成物を製造し、PZT強誘電体薄膜を形成した。
製造後の組成物100質量%中に占めるPZT前駆体の酸化物換算での割合、ジオールの割合及びPZT前駆体1モルに対するポリビニルピロリドンの添加量を、以下の表1に示す割合に変更したこと以外は、実施例1−1と同様にして組成物を製造し、PZT強誘電体薄膜を形成した。
製造後の組成物100質量%中に占めるジオールの添加量及びPZT前駆体1モルに対するポリビニルピロリドンの添加量を、以下の表1に示す割合に変更したこと以外は、実施例1−1と同様にして組成物を製造し、PZT強誘電体薄膜を形成した。
PZT前駆体1モルに対する超純水の添加量、ポリビニルピロリドンの添加量及び製造後の組成物100質量%中に占めるジオールの添加量を、以下の表1のように変更したこと以外は、実施例1−1と同様にして組成物を製造し、PZT強誘電体薄膜を形成した。
N−メチルホルムアミドを添加しなかったこと以外は、実施例1−2と同様にして組成物を製造し、PZT強誘電体薄膜を形成した。
実施例1−1〜5及び比較例1−1〜4−2で形成したPZT強誘電体薄膜について、膜厚、膜組織(クラックの有無、マイクロポアの有無)、及び電気特性(比誘電率)を評価した。また、組成物の保存安定性を評価した。これらの結果を以下の表1に示す。
Claims (6)
- PZT系強誘電体薄膜を形成するための組成物において、
前記組成物がPZT前駆体と、ジオールと、ポリビニルピロリドン又はポリエチレングリコールと、水とを含み、
前記組成物100質量%中の前記PZT前駆体の割合が酸化物換算で17〜35質量%であり、
前記組成物100質量%中の前記ジオールの割合が16〜56質量%であり、
前記ポリビニルピロリドン又はポリエチレングリコールの割合が前記PZT前駆体1モルに対してモノマー換算で0.01〜0.25モルであり、
前記水の割合が前記PZT前駆体1モルに対して0.5〜3モルである
ことを特徴とするPZT系強誘電体薄膜形成用組成物。
但し、前記組成物100質量%中に炭素鎖6以上12以下の直鎖状モノアルコールを0.6〜10質量%の割合で更に含む組成物を除く。 - 前記ジオールがプロピレングリコール又はエチレングリコールである請求項1記載のPZT系強誘電体薄膜形成用組成物。
- PZT系強誘電体薄膜形成用の組成物を製造する方法において、
前記組成物100質量%中の割合が酸化物換算で17〜35質量%となる量のPZT前駆体と、前記組成物100質量%中の割合が16〜56質量%となる量のジオールとを混合し反応させて合成液を調製する工程と、
前記合成液を130〜175℃の温度で0.5〜3時間還流する工程と、
前記還流を行った合成液を0〜50℃に冷却した後、PZT前駆体1モルに対して0.5〜3モルとなる量の水を添加し、100〜175℃の温度で0.5〜10時間再び還流する工程と、
前記再び還流を行った合成液にPZT前駆体1モルに対して0.01〜0.25モルとなる量のポリビニルピロリドン又はポリエチレングリコールを添加し、均一に分散させる工程と
を含むことを特徴とするPZT系強誘電体薄膜形成用組成物の製造方法。 - 前記ジオールがプロピレングリコール又はエチレングリコールである請求項3記載のPZT系強誘電体薄膜形成用組成物の製造方法。
- 下部電極を有する基板の前記下部電極上に請求項1又は2記載のPZT系強誘電体薄膜形成用組成物或いは請求項3又は4記載の方法で製造されたPZT系強誘電体薄膜形成用組成物を塗布し、仮焼した後、焼成して結晶化させることにより、前記下部電極上に薄膜を形成するPZT系強誘電体薄膜の形成方法。
- 請求項5記載の方法により形成されたPZT系強誘電体薄膜を有する薄膜コンデンサ、キャパシタ、IPD、DRAMメモリ用コンデンサ、積層コンデンサ、トランジスタのゲート絶縁体、不揮発性メモリ、焦電型赤外線検出素子、圧電素子、電気光学素子、アクチュエータ、共振子、超音波モータ、電気スイッチ、光学スイッチ又はLCノイズフィルタ素子の複合電子部品の製造方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
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JP2013066421A JP6075152B2 (ja) | 2013-03-27 | 2013-03-27 | Pzt系強誘電体薄膜形成用組成物の製造方法並びに該組成物を用いたpzt系強誘電体薄膜の形成方法 |
EP14155207.5A EP2784136B1 (en) | 2013-03-27 | 2014-02-14 | PZT-based ferroelectric thin film-forming composition, method of preparing the same, and method of forming PZT-based ferroelectric thin film using the same |
US14/181,677 US20140295197A1 (en) | 2013-03-27 | 2014-02-16 | Pzt-based ferroelectric thin film-forming composition, method of preparing the same, and method of forming pzt-based ferroelectric thin film using the same |
TW103105088A TWI601705B (zh) | 2013-03-27 | 2014-02-17 | Pzt系強介電體薄膜形成用組成物及其製造方法以及使用該組成物之pzt系強介電體薄膜的形成方法 |
KR1020140018262A KR102032575B1 (ko) | 2013-03-27 | 2014-02-18 | Pzt 계 강유전체 박막 형성용 조성물 및 그 제조 방법 그리고 그 조성물을 사용한 pzt 계 강유전체 박막의 형성 방법 |
CN201410055715.7A CN104072134B (zh) | 2013-03-27 | 2014-02-19 | Pzt系铁电薄膜形成用组合物及其制法和pzt系铁电薄膜形成法 |
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JP2017045992A (ja) * | 2015-08-28 | 2017-03-02 | 国立大学法人北陸先端科学技術大学院大学 | Pzt強誘電体膜の形成方法 |
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US10411183B2 (en) | 2014-03-27 | 2019-09-10 | Mitsubishi Materials Corporation | Composition for forming Mn-doped PZT-based piezoelectric film and Mn-doped PZT-based piezoelectric film |
WO2016153461A1 (en) * | 2015-03-20 | 2016-09-29 | Hewlett Packard Enterprise Development Lp | Memristive device with doped sol-gel switching layer |
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US20140295197A1 (en) | 2014-10-02 |
JP6075152B2 (ja) | 2017-02-08 |
KR20140118725A (ko) | 2014-10-08 |
KR102032575B1 (ko) | 2019-10-15 |
CN104072134B (zh) | 2018-04-10 |
EP2784136B1 (en) | 2016-07-20 |
TW201442984A (zh) | 2014-11-16 |
CN104072134A (zh) | 2014-10-01 |
TWI601705B (zh) | 2017-10-11 |
EP2784136A1 (en) | 2014-10-01 |
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