JP2014176095A5 - - Google Patents
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- JP2014176095A5 JP2014176095A5 JP2014044851A JP2014044851A JP2014176095A5 JP 2014176095 A5 JP2014176095 A5 JP 2014176095A5 JP 2014044851 A JP2014044851 A JP 2014044851A JP 2014044851 A JP2014044851 A JP 2014044851A JP 2014176095 A5 JP2014176095 A5 JP 2014176095A5
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- JP
- Japan
- Prior art keywords
- region
- electrode
- piezoelectric layer
- boundary
- layer
- Prior art date
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- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 19
- 229910052721 tungsten Inorganic materials 0.000 claims 19
- 239000010937 tungsten Substances 0.000 claims 19
- WPPDFTBPZNZZRP-UHFFFAOYSA-N aluminum copper Chemical compound [Al].[Cu] WPPDFTBPZNZZRP-UHFFFAOYSA-N 0.000 claims 8
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 3
- 229910052750 molybdenum Inorganic materials 0.000 claims 3
- 239000011733 molybdenum Substances 0.000 claims 3
- 229910052814 silicon oxide Inorganic materials 0.000 claims 3
- 229910000449 hafnium oxide Inorganic materials 0.000 claims 2
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 claims 2
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/796,824 | 2013-03-12 | ||
| US13/796,824 US9450565B2 (en) | 2013-03-12 | 2013-03-12 | Border ring mode suppression in solidly-mounted bulk acoustic wave resonator |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014176095A JP2014176095A (ja) | 2014-09-22 |
| JP2014176095A5 true JP2014176095A5 (cg-RX-API-DMAC10.html) | 2017-04-13 |
| JP6568339B2 JP6568339B2 (ja) | 2019-08-28 |
Family
ID=51529263
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014044851A Active JP6568339B2 (ja) | 2013-03-12 | 2014-03-07 | 強固に固定されたバルク弾性波共振器における境界リングモード抑制 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US9450565B2 (cg-RX-API-DMAC10.html) |
| JP (1) | JP6568339B2 (cg-RX-API-DMAC10.html) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2016147688A1 (ja) * | 2015-03-16 | 2016-09-22 | 株式会社村田製作所 | 弾性波装置及びその製造方法 |
| CN107408936B (zh) * | 2015-03-16 | 2020-12-11 | 株式会社村田制作所 | 弹性波装置及其制造方法 |
| US9985194B1 (en) | 2015-05-13 | 2018-05-29 | Qorvo Us, Inc. | Spurious mode suppression in bulk acoustic wave resonator |
| US10686425B2 (en) | 2017-06-30 | 2020-06-16 | Texas Instruments Incorporated | Bulk acoustic wave resonators having convex surfaces, and methods of forming the same |
| US10615772B2 (en) | 2017-06-30 | 2020-04-07 | Texas Instruments Incorporated | Acoustic wave resonators having Fresnel surfaces |
| US10622966B2 (en) | 2017-07-26 | 2020-04-14 | Texas Instruments Incorporated | Bulk acoustic wave resonators having a phononic crystal acoustic mirror |
| US10855251B2 (en) | 2017-08-08 | 2020-12-01 | Texas Instruments Incorporated | Unreleased plane acoustic wave resonators |
| US10277194B2 (en) | 2017-09-15 | 2019-04-30 | Globalfoundries Singapore Pte. Ltd. | Acoustic MEMs resonator and filter with fractal electrode and method for producing the same |
| US11233496B2 (en) | 2018-02-21 | 2022-01-25 | Vanguard International Semiconductor Singapore Pte. Ltd. | Acoustic resonator and filter with electrode having zig-zag edge and method for producing the same |
| JP2020053966A (ja) | 2018-09-24 | 2020-04-02 | スカイワークス グローバル プライベート リミテッド | バルク弾性波デバイスにおける多層隆起フレーム |
| JP7456734B2 (ja) * | 2019-06-17 | 2024-03-27 | 太陽誘電株式会社 | 弾性波デバイス、フィルタおよびマルチプレクサ |
| US11469735B2 (en) * | 2018-11-28 | 2022-10-11 | Taiyo Yuden Co., Ltd. | Acoustic wave device, filter, and multiplexer |
| CN111384909B (zh) * | 2018-12-27 | 2025-12-12 | 天津大学 | 电极厚度不对称的体声波谐振器、滤波器和电子设备 |
| US10879872B2 (en) * | 2019-04-19 | 2020-12-29 | Akoustis, Inc. | BAW resonators with antisymmetric thick electrodes |
| WO2021200677A1 (ja) | 2020-03-31 | 2021-10-07 | 株式会社村田製作所 | 弾性波装置 |
| DE102021209875A1 (de) | 2020-09-18 | 2022-03-24 | Skyworks Global Pte. Ltd. | Akustische volumenwellenvorrichtung mit erhöhter rahmenstruktur |
| WO2022061618A1 (zh) * | 2020-09-23 | 2022-03-31 | 华为技术有限公司 | 谐振器及其制备方法、滤波器、电子设备 |
| JP7878827B2 (ja) | 2020-09-30 | 2026-06-23 | スカイワークス グローバル プライベート リミテッド | パターン状質量負荷層を有する弾性波フィルタ、弾性波ダイ及び無線周波数モジュール |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FI107660B (fi) | 1999-07-19 | 2001-09-14 | Nokia Mobile Phones Ltd | Resonaattorirakenne |
| US6936837B2 (en) * | 2001-05-11 | 2005-08-30 | Ube Industries, Ltd. | Film bulk acoustic resonator |
| WO2005034345A1 (en) * | 2003-10-06 | 2005-04-14 | Philips Intellectual Property & Standards Gmbh | Resonator structure and method of producing it |
| EP1935093A2 (en) * | 2005-09-30 | 2008-06-25 | Nxp B.V. | Improvements in or relating to thin-film bulk-acoustic wave (baw) resonators |
| JP2008182543A (ja) * | 2007-01-25 | 2008-08-07 | Ube Ind Ltd | 薄膜圧電共振器とそれを用いた薄膜圧電フィルタ |
| JPWO2009013938A1 (ja) * | 2007-07-20 | 2010-09-30 | 株式会社村田製作所 | 圧電共振子及び圧電フィルタ装置 |
| KR101543812B1 (ko) * | 2007-08-14 | 2015-08-11 | 아바고 테크놀로지스 제너럴 아이피 (싱가포르) 피티이 리미티드 | Ｂａｗ 구조체, ｂａｗ 구조의 형성 방법 및 ｂａｗ 구조를 포함하는 반도체 다이 |
| KR101312222B1 (ko) * | 2007-08-14 | 2013-09-27 | 아바고 테크놀로지스 제너럴 아이피 (싱가포르) 피티이 리미티드 | 다층 전극 제조 방법, ｂａｗ 공진기 및 그 제조 방법 |
| JP5172844B2 (ja) * | 2007-08-24 | 2013-03-27 | 太陽誘電株式会社 | 圧電薄膜共振子、それを用いたフィルタ、そのフィルタを用いたデュプレクサおよびそのフィルタまたはそのデュプレクサを用いた通信機 |
| JP5563739B2 (ja) * | 2008-02-20 | 2014-07-30 | 太陽誘電株式会社 | 圧電薄膜共振器、フィルタ、デュープレクサ、通信モジュール、および通信装置 |
| EP2277265A1 (en) * | 2008-04-29 | 2011-01-26 | Nxp B.V. | Bulk acoustic wave resonator |
| WO2010095640A1 (ja) * | 2009-02-20 | 2010-08-26 | 宇部興産株式会社 | 薄膜圧電共振器およびそれを用いた薄膜圧電フィルタ |
| US8198958B1 (en) * | 2009-03-30 | 2012-06-12 | Triquint Semiconductor, Inc. | Power amplifier matching RF system and method using bulk acoustics wave device |
| JP2011160232A (ja) * | 2010-02-01 | 2011-08-18 | Ube Industries Ltd | 薄膜圧電共振器およびそれを用いた薄膜圧電フィルタ |
| US9401692B2 (en) * | 2012-10-29 | 2016-07-26 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Acoustic resonator having collar structure |
| JP2012244616A (ja) * | 2011-05-24 | 2012-12-10 | Taiyo Yuden Co Ltd | 圧電薄膜共振子、フィルタおよびモジュール |
-
2013
- 2013-03-12 US US13/796,824 patent/US9450565B2/en active Active
-
2014
- 2014-03-07 JP JP2014044851A patent/JP6568339B2/ja active Active
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