JP2014167168A - Apparatus and method for forming fine particle - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a fine particle forming apparatus which can uniformly deposit predetermined silicon nanoparticles on a carbon powder by using a carbon powder as an object to be deposited and depositing silicon as a deposition material.SOLUTION: A catalyst metal is carried on the surface of a carbon powder by irradiating plasma of nanoparticles (a deposition body) from above while agitating a carbon powder (an object to be deposited 7), which is a carrier accommodated in an agitation vessel 73. In this process, an arm part 89 of a stamp 85 ascends a slope formed by obliquely cutting an edge 90 of an upper opening in conjunction with rotation of the agitation vessel 73. When the arm part 89 ascends to the uppermost stage, the arm part 89 is dropped suddenly to a lower step by a level difference 90c to crush a mass of the object to be deposited 7 located below the arm part 89. Since silicon of a deposition material must conduct electricity, specific resistance thereof must be kept at 0.1 Ωcm or less.

Description

  The present invention relates to a fine particle forming apparatus and a method for attaching nano fine particles to a carrier. In particular, the present invention relates to an apparatus for attaching nanoparticles such as silicon to a powder or sheet such as carbon and a method for manufacturing the same.

  In recent years, research and development have been made on the density of energy of a negative electrode material for a lithium battery by using a carbon-based material or various materials mixed with the carbon. Among them, silicon is one of the materials that can have a very high density as a negative electrode material, and has been studied in various fields. Although research using only negative electrode material with silicon has also been made, it has been difficult to prolong the life because of a large volume change. However, the power storage capacity of this silicon is hard to throw away, and if the safety and stability are ensured while the storage capacity remains somehow, further uses of lithium batteries will be expanded.

  Therefore, in order to achieve the above-mentioned stabilization, various methods have been conventionally used, for example, mixing carbon pulverized particles with carbon powder or mixing carbon in silane gas.

JP 2007-204810 A JP 2007-254762 A

  However, the conventional fine particle forming method has a problem that uniform nanoparticles do not adhere to the entire surface of the carbon powder and can be removed even if attached.

    In addition, there was no method capable of directly attaching uniform nanoparticles to the carbon sheet substrate.

  The present invention has been made in view of such circumstances, and an object thereof is a fine particle forming apparatus capable of uniformly adhering silicon nanoparticles to the surface of a carbon powder or sheet as a deposition target, and a method thereof. Is to provide.

  In order to solve the above-described problems of the prior art and achieve the above-described object, the fine particle forming apparatus of the present invention is configured to place a deposition target, which is a sheet or roll-up sheet-like carbon, on an insulating support. While being moved and while removing electricity by bringing a metal plate into contact with the sheet from the upper surface, a vapor deposition material for a semiconductor or a conductor doped with impurities is applied from the upper vacuum arc vapor deposition source to the vapor deposition target. Fly to and deposit.

  Preferably, in the fine particle forming apparatus of the present invention, a mechanism for removing droplets and particles such as a vane filter is attached between the vacuum arc vapor deposition source and the deposition target.

  Preferably, the fine particle forming apparatus of the present invention is characterized in that the vapor deposition material is silicon and the vapor deposition material is a carbon-based powder.

  Preferably, in the fine particle forming apparatus of the present invention, the impurity is doped so that the specific resistance of silicon as the deposition material is 0.1 Ωcm or less.

  Preferably, in the fine particle forming apparatus of the present invention, the carbon-based powder on which the silicon is deposited is used as a negative electrode material of a battery.

  In the fine particle forming method of the present invention, a sheet or roll-up sheet-like carbon is deposited or moved on an insulating support, and a metal plate is brought into contact with the sheet from the upper surface to remove static electricity. On the other hand, a vapor deposition material of a conductor in which a semiconductor or a non-conductive material is doped with impurities is ejected from the upper vacuum arc vapor deposition source onto the vapor deposition target.

  ADVANTAGE OF THE INVENTION According to this invention, the fine particle formation apparatus and its method which can adhere the vapor deposition material which is silicon, for example as a nanoparticle, without forming a dama on the surface of a to-be-deposited body can be provided.

FIG. 1 is a schematic view of a fine particle forming apparatus according to an embodiment of the present invention. FIG. 2 is a view for explaining the function of the scraper of the fine particle forming apparatus shown in FIG. FIG. 3 is a histogram of the particle size distribution of each discharge voltage and capacitor capacity when silicon is supported on carbon powder by the fine particle forming apparatus of the embodiment of the present invention. FIG. 4 is a view for explaining a scraper and a stamp of the fine particle forming apparatus shown in FIG. FIG. 5 is an external view of the stirring container of the fine particle forming apparatus shown in FIG. FIG. 6 is a diagram for explaining a part of the structure of the stamp shown in FIG. FIG. 7 is a diagram for explaining the change in the distance between the stamp according to the embodiment of the present invention and the bottom surface of the stirring vessel in time series. FIG. 8 is a partial cross-sectional view of the stamp shown in FIG.

In the fine particle forming apparatus and method according to an embodiment of the present invention, the metal plate is placed on the insulating support by moving or depositing the deposition target, which is a sheet or roll-up sheet-like carbon, on the insulating support. From above, a vapor deposition material of a conductor in which impurities are doped in a semiconductor or a non-conductive material flies to the vapor-deposited material from above and is vapor-deposited while being brought into contact with a sheet and removing electricity.
A mechanism for removing droplets and particles, such as a vane filter, may be attached between the vacuum arc deposition source and the deposition target.
In the case of a silicon target, the electrical conductivity and thermal conductivity are poor compared to a metal target, so when discharging, silicon droplets or particles are more likely to be generated than the arc spot of the silicon target. Installation of these removal mechanisms is effective.

The vapor deposition material is, for example, silicon, and the vapor deposition material is, for example, a carbon-based powder.
Impurities are doped so that the specific resistance of silicon as the vapor deposition material is 0.1 Ωcm or less.
Such carbon-based powder deposited with silicon is used as a negative electrode material of a battery.

  According to this embodiment, silicon nanoparticles can be deposited uniformly and with good adhesion on a carrier such as carbon powder, rod, or sheet.

In addition, when forming silicon nanoparticles on a single carbon sheet or rolled carbon sheet, these sheets are placed on or moved on an insulator support base, and a grounded metal is placed on the upper surface of the sheet. Keep the plates in contact. The vacuum arc evaporation source is disposed above.
In this state, by discharging the vacuum arc evaporation source and irradiating the carbon sheet with plasma to form nanoparticles, the electric charge on the upper surface of the carbon sheet can escape to the metal plate along the upper surface of the sheet. It can prevent the sheet from being perforated. In the case of a metal support base, as in the case of applying an overvoltage to the capacitor, since the electric charge escapes to the metal support base due to dielectric breakdown due to charge-up, the perforation of the carbon sheet cannot be prevented.
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The silicon nanoparticles have a discharge voltage of 70 V and a capacitor capacity in the range of 1 nm to 4 nm in the range of 360 μF to 720 μF. Further, when the discharge voltage is 100 V and the capacitor capacity is 720 μF to 1080 μF, it becomes 3 nm to 5 nm. When the discharge voltage is 150V to 20V and the capacitor capacity is 1800 μF, silicon nanoparticles of 10 nm to 20 nm are formed. As described above, the size of the silicon nanoparticles tends to increase as the discharge voltage and the capacitor capacity increase, but it is also a feature of the silicon target that there are many amorphous nanoparticles of about several tens of nanometers.
Suitably, the said support | carrier is carbon powder with a particle size of 1 micrometer-1 mm or less. The carbon powder may be any carbon-based powder, such as graphite-based vulcan, ketjen black, graphene (for example, three-dimensional graphene), carbon nanotube, fullerene, carbon coil, graphite nanofiber, etc. Also good.
It can also be supported on all types of carbon-based sheets. Further, other semiconductors such as germanium may be used.

Hereinafter, a fine particle forming apparatus according to an embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is a schematic view of a fine particle forming apparatus 1 using coaxial vacuum arc deposition 5.
The fine particle forming apparatus 1 shown in FIG. 1 is, for example, a vacuum arc plasma generating apparatus 3 while stirring carbon powder such as a vulcanizer (deposited body 7) that is a carrier housed in a stirring container 73 that is a cylindrical container in a vacuum. The catalyst metal is supported on the surface of the alumina powder by irradiating plasma of nanoparticles (deposited body: silicon), which is a catalyst metal generated using the above.
A vacuum chamber 2 shown in FIG. 1 has a cylindrical shape.
In the vacuum chamber 2, a stirrer 3 and a coaxial vacuum arc deposition source 5 are accommodated.

[Agitator 3]
The stirrer 3 includes a stirring vessel 73 for containing the deposition target 7, scrapers 75 a and 75 b that are fixed blades for stirring the deposition target 7, and lumps (lumps) of the deposition target 7 generated during the stirring process. And a stamp 85 for crushing.
The vapor-deposited body 7 is, for example, titania powder (TiO225) which is a powder having a particle diameter of 1 μm to 1 mm.

A rotation mechanism 72 that rotates the stirring vessel 73 about its central axis 80 is connected to the center of the lower surface of the stirring vessel 73.
The rotation mechanism 72 is disposed below the fixed table 71.
The material of the stirring vessel 73 is, for example, stainless steel, and the inner wall (inner side surface and bottom surface 73a) is buffed. The diameter of the upper opening of the stirring vessel 73 is, for example, 60 to 300 mm. The upper opening may be oval.
The inner wall of the stirring vessel 73 is stainless steel.

FIG. 2 is a diagram for explaining the functions of the scrapers 75a and 75b of the fine particle forming apparatus 1. FIG. 2A is a diagram for explaining the arrangement of the scrapers 75a and 75b in the planar direction as viewed from the upper open side of the stirring vessel 73, and FIG. 2B is an illustration of the arrangement as viewed from the side of the scraper 75a. It is a figure for doing.
As shown in FIG. 2A, scrapers 75 a and 75 b are fixed around the stirring vessel 73.
The scrapers 75a and 75b are made of stainless steel, for example. The scrapers 75a and 75b are formed of a rod having a diameter of about 1 mm to 5 mm, and the outside is covered with a Teflon (registered trademark) tube.

The scraper 75a extends from the upper open portion of the stirring vessel 73 into the stirring vessel 73, contacts the vicinity of the inner peripheral surface of the bottom surface 73a of the stirring vessel 73, and extends inward while contacting the bottom surface 73a from the contacted portion. Yes.
The scraper 75b extends from the upper open portion of the stirring vessel 73 into the stirring vessel 73, contacts the vicinity of the central axis of the bottom surface 73a, and extends toward the inner peripheral surface while contacting the bottom surface 73a. .
Further, a gap 76 is formed between the tip of the scraper 75b and the scraper 75a.

The vapor-deposited body 7 in the stirring vessel 73 collides with the scraper 75b, moves toward the gap 76 (toward the inner peripheral surface of the stirring vessel 73), and collides with the scraper 75a through the gap 76 to enter the central axis. Move towards 80. A part of the vapor-deposited body 7 collides with the scrapers 75a and 75b, is directed upward, and moves over them.
In this way, by forming the scrapers 75a and 75b, the vapor-deposited body 7 in the stirring vessel 73 is directed from the central axis 80 toward the inner peripheral surface, from the inner peripheral surface toward the central axis 80, and in the depth direction. And can be efficiently stirred.
Thus, when silicon is deposited on the carbon powder, a histogram of the particle size distribution of silicon nanoparticles as shown in the histogram of FIG. 3 is shown.

  Further, since the scrapers 75a and 75b are fixed and the stirring vessel 73 is rotated without driving the scrapers 75a and 75b, the driving mechanism can be simplified.

FIG. 4 is a view for explaining the scrapers 75a and 75b and the stamp 85 of the fine particle forming apparatus 1. FIG.
As shown in FIG. 4, a stamp 85 is disposed around the stirring vessel 73 in addition to the scrapers 75a and 75b.
The stamp 85 supports the stamp head 87 which strikes the bottom surface 73a in the stirring vessel 73 and the stamp head in order to pulverize the lumps of the deposition target (powder carrier) 7 generated in the stirring process by the scrapers 75a and 75b. Arm portion 89 for

  The stamp 85 has a first operation in which the stamp head 87 collides with the bottom surface 73a of the stirring container 73 in a process in which the stirring container 73 rotates about the central axis 80, and the stamp head 87 is in contact with the bottom surface 73a. The second operation for holding and the third operation for gradually separating the stamp head 87 from the bottom surface 73a are repeated.

As shown in FIG. 5, the circular edge 90 of the upper opening of the stirring vessel 73 is notched obliquely and forms a slope that smoothly slopes in the direction in which the central axis 80 extends.
The edge 90 of the upper opening of the stirring container 73 has a first edge 90a that is not inclined, a second edge 90b that is smoothly inclined in a direction away from the bottom surface 73a, and a step 90c.
The step 90b is 3 to 20 mm, for example.

  The arm portion 89 has a stamp head 87 fixed to one end on the side disposed in the stirring vessel 73, and the other end is fixed to a stamp head holding portion 93 as shown in FIGS. 4 and 6. The diameter of the arm part 89 is, for example, about 1 mm to 5 mm.

The vicinity of the center of the arm portion 89 in the longitudinal direction is in contact with the edge 90 of the upper opening of the stirring vessel 73. The arm portion 89 is urged toward the bottom surface 73 a of the stirring vessel 73 by a spring 95.
Thereby, the arm part 89 always makes the vicinity of the center part contact the edge part 90 in the process in which the stirring vessel 73 rotates around the central axis 80.
The arm portion 89 is dropped toward the bottom surface 73a at the step 90c of the edge portion 90 described above to cause the stamp head 87 to collide with the bottom surface 73a, and the stamp head 87 is brought into contact with the bottom surface 73a at the first edge portion 90a. Is held for a predetermined period. Thereafter, the stamp head 87c and the bottom surface 73a are brought into a non-contact state at the second edge 90b. This operation is performed while the stirring vessel 73 makes one rotation around the central axis 80, and the first, second, and third operations described above are repeated during the rotation.

FIG. 7 is a diagram for explaining the change over time of the distance between the stamp head 87 and the bottom surface 73a of the stirring vessel 73 during the rotation of the central shaft 80 described above.
As shown in FIG. 7, the stamp head 87 and the bottom surface 73 a of the stirring container 73 periodically contact.
That is, as the arm portion 89 climbs the slope of the edge portion 90, the stamp head 87 gradually rises upward from the bottom surface 73a (floor surface).
The depth of the deposition target 7 in the stirring vessel 73 and the amount of movement of the stamp head 87 in the vertical movement are set so that the stamp head 87 does not come out of the surface of the deposition target 7.
In addition, the rotation speed of the stirring container 73 is 20-100 rpm, for example.

The tip 87a of the stamp head 87 is inclined in a direction away from the bottom surface 73a of the stirring vessel 73, for example, as shown in FIG. Thereby, the vapor-deposited body 7 can collide with the stamp head 87a according to the rotation of the stirring vessel 73, and can be efficiently drawn between the stamp head 87 and the bottom surface 73a. For this reason, it is possible to increase the probability of completely crushing the lumps of the deposition object 7.
Further, in the stirring device 3, the scrapers 75 a and 75 b and the arm portion 89 of the stamp 85 are set to have very small diameters and the stamp head 87 is set so as not to come out from the surface of the deposition target 7. The amount of nanoparticles (vapor deposition body) from the vacuum arc deposition source 5 colliding with the scrapers 75a and 75b and the stamp head 87 can be reduced.

  In the fine particle forming apparatus 1, discharge is periodically performed with a pulse as a trigger, as will be described later. As the discharge cycle becomes shorter, the amount of lumps is increased, so control is performed to increase the rotation speed of the stirring vessel 73. For structural reasons, the collision period of the stamp 85 with the bottom surface 73 a is proportional to the rotational speed of the stirring vessel 73. Note that the rotation speed of the stirring container 73 after the elapse of a predetermined time from the start of rotation of the stirring container 73 may be faster than the rotation speed within the predetermined time.

[Coaxial vacuum arc deposition source 5]
The coaxial vacuum arc evaporation source 5 includes a cylindrical evaporation material 11 made of silicon attached to a cathode electrode, a hat-like insulator 14 made of alumina (hereinafter referred to as a hat-type insulator), a trigger electrode 13, Have
The vapor deposition material 11, the hat-type insulator 14, and the trigger electrode 13 attached to the cathode electrode are attached in close contact with each other concentrically.

The anode electrode 23 is made of stainless steel and has a cylindrical shape. The anode electrode 23 is concentrically attached to the vapor deposition material 11 attached to the cathode electrode.
The coaxial vacuum arc deposition source 5 is attached to the wall surface of the vacuum chamber 2 via a support column (not shown) and a vacuum flange (not shown).

Moreover, the power supply device 6 is shown by a simple wiring diagram in FIG.
The power supply device 6 includes a trigger power supply 31, an arc power supply 32, and a capacitor unit 33.
The trigger power source 31 is composed of a pulse transformer, and transforms a pulse voltage in units of μS with an input of 200 V to about 17 times, and outputs a trigger pulse with a positive polarity in units of 3.4 kV and several μS.

The arc power supply 32 is a DC power supply with a capacity of 100 V and several A, and charges the capacitor unit 33. Since the charging time requires about 1 second, the discharge cycle is 1 Hz.
The capacitor unit 33 has a voltage of 720 to 1800 μF and a withstand voltage of 100V. The capacitor unit 33 is charged at 100 V by the arc power source 32.

  The positive output terminal of the trigger power supply 31 is connected to the trigger electrode 13, the negative terminal is connected to the same potential as the negative output terminal of the arc power supply 32, and further connected to the cathode electrode. Both terminals of the capacitor unit 33 are connected between the positive and negative terminals of the arc power supply 32.

The vacuum exhaust system 9 includes a turbo molecular pump 51, a partition valve 52, a rotary pump 53, and an adjustment valve 54.
The turbo molecular pump 51 to the rotary pump 53 are connected by a metal pipe, and the vacuum chamber 2 is evacuated. By performing evacuation, the inside of the vacuum chamber 2 is kept at 10 −4 Pa or less.

Hereinafter, an operation example of the fine particle forming apparatus 1 shown in FIG. 1 will be described.
[Operation example of coaxial vacuum arc deposition source 5]
The electric charge is charged at 100 V by the arc power source 32. Here, the capacitor unit 33 is set to 720 to 1800 μF.
By applying a trigger pulse of 3.4 kV from the trigger power supply 31 to the trigger electrode 13 and applying it between the vapor deposition material 11 attached to the cathode electrode and the trigger electrode 13 via the hat-type insulator 14, a hat-type Creeping discharge occurs on the insulator 14 surface, the electric charge stored in the capacitor unit 33 is discharged between the vapor deposition material 11 and the anode electrode 23, a large amount of current flows into the cathode electrode, and it is attached to the cathode electrode made of platinum. The deposited material 11 is formed from a liquid phase to a gas phase, and further silicon plasma is formed.

  At this time, since a large amount of current (2000 A to 5000 A) flows in the cathode electrode between 200 μS and 500 μS, a magnetic field is formed in the vapor deposition material 11 attached to the cathode electrode. Electrons in the plasma fly under the coaxial vacuum arc deposition source 5 under the Lorentz force generated by the magnetic field formed by the deposition material 11 attached to the cathode electrode.

  The atomic ions of silicon, which is the deposition material in the plasma, are polarized and attracted to electrons flying in front of the coaxial vacuum arc deposition source 5 by the Coulomb force. To fly to.

  On the other hand, ions of silicon, which is a deposition material in plasma, are polarized and fly forward of the coaxial vacuum arc deposition source 5 by Coulomb force. As a result, platinum ions grow using the carbon powder 7a as a nucleus, and platinum particles in nanometer units are formed.

  The carbon powder is agitated by rotating the stirring container 73 on the scrapers 75a and 75b while irradiating silicon atomic ions in this way. This is continued to form silicon nanoparticles uniformly in the carbon powder.

More specifically, atomic silicon ions are irradiated toward the carbon powder 7 in the stirring vessel 73. Here, the stirring container 73 is rotated by the rotating mechanism 72, and the vapor deposition body 7 such as carbon in the stirring container 73 is stirred by the scrapers 75a and 75b.
The deposition object 7 appears on the stirring vessel 73 and is exposed to platinum ions by colliding with the scrapers 75a and 75b. By continuing this one after another, silicon fine particles are uniformly formed on the particles of all the vapor-deposited bodies 7 in the stirring vessel 73.

  The present invention is used for production of lithium batteries and other secondary battery materials.

DESCRIPTION OF SYMBOLS 1 ... Fine particle formation apparatus 3 ... Agitation apparatus 5 ... Coaxial type vacuum arc vapor deposition source 7 ... Deposited body 73 ... Agitation container 75a, 75b ... Scraper 85 ... Stamp 87 ... Stamp head 89 ... Arm part 90 ... Edge

Claims (6)

A sheet or roll-wound sheet-like carbon is deposited or moved on an insulating support, and a metal plate is brought into contact with the sheet from the upper surface while removing electricity to remove a semiconductor or non-conductive material. An apparatus for forming fine particles, in which a vapor deposition material for a conductor doped with impurities is ejected from an upper vacuum arc vapor deposition source to the vapor deposition target. The fine particle forming apparatus according to claim 1, wherein a mechanism for removing droplets and particles such as a vane filter is attached between the vacuum arc vapor deposition source and the deposition target. The fine particle forming apparatus according to claim 1, wherein the vapor deposition material is silicon and the vapor deposition material is a carbon-based powder. The fine particle forming apparatus according to claim 3, wherein the impurity is doped so that a specific resistance of silicon as the vapor deposition material is 0.1 Ωcm or less. The fine particle forming apparatus according to claim 3 or 4, wherein the carbon-based powder on which the silicon is deposited is used for a negative electrode material of a battery. A semiconductor or non-conductor while discharging a sheet or roll-rolled sheet-like carbon placed on or moved on an insulating support, and removing electricity by bringing a metal plate into contact with the sheet from the upper surface A method for forming fine particles, wherein a vapor deposition material of a conductor doped with impurities is ejected from an upper vacuum arc vapor deposition source onto the vapor deposition target.