JP5502617B2 - Fuel cell electrode manufacturing apparatus and method - Google Patents

Description

  The present invention relates to a fuel cell electrode manufacturing apparatus and method for manufacturing a fuel cell electrode by attaching nanoparticles to a carrier.

A configuration of an electrode for a fuel cell by a conventional wet method is shown in FIG. That is, platinum (particle size: 2 nm to 10 nm) is supported on carbon powder on the fuel electrode (hydrogen electrode) and air electrode (oxygen electrode) side.
On the hydrogen electrode side, electrons are released from hydrogen by the oxidation reaction of hydrogen by a platinum catalyst. The ionized hydrogen moves to the oxygen electrode side through the solid polymer solid electrolyte membrane. The emitted electrons generate electricity, and on the oxygen electrode side, the introduced oxygen (actually oxygen in the air) reacts with the electrons and hydrogen ions on the platinum surface to become water and is discharged from the fuel cell.
FIG. 20 illustrates a method for forming electrodes by supporting nanoparticle-sized platinum on porous carbon powder in a conventional wet method. In the conventional method, platinum and carbon powder pulverized in hydrochloric acid are added and stirred. At this point, platinum is dissolved in atomic ions, and is likely to collect in carbon protrusions and uneven portions, where it crystallizes to form nanoparticle platinum. Porous carbon not only adheres to the surface but also enters the pores to form platinum nanoparticles. These platinum nanoparticles and carbon nanoparticles are not bonded by chemical bonds, that is, metal bonds or covalent bonds, but only platinum crystallized nanoparticles are attached.

Next, this solution is filtered and washed. At this point, platinum having a weak adhesive force flows down from the carbon. This filtered residue is dried and a chemical solution such as a surfactant is added to form a slurry, which is then placed in an electrode mold and baked and hardened by hot pressing. The nanoparticle-sized platinum adhering to the carbon when heated and hardened by this hot press is heated so that it adheres to the carbon surface with some adhesion.
However, since hydrogen emits electrons at the three-phase interface between the solid electrolyte and platinum nanoparticles, the solid electrolyte adheres only to the carbon surface, so the platinum nanoparticles that have entered the pores cannot effectively contribute to electron emission. There is.

Electrochemical reaction of electrode made by wet method (made by Tanaka Kikinzoku) with 46% platinum supported on ketjen black carbon made by typical wet method by cyclic voltammetry method using rotating ring disk The amount of current generated at the oxygen electrode and the hydrogen electrode and the electromotive force were measured.
The result is shown in FIG. The amount of platinum placed on the working electrode is 1 μg. The electromotive force is the point at which the oxygen electrode current value (dashed line) moves away from zero, and is about 0.8 V from the figure. The maximum value of the hydrogen electrode current (dotted line) is 0.8 mA and the value of the oxygen electrode current is about −0.9 mA.

JP 2007-204810 A

  In the conventional wet method, the loading rate is very high at 46%, and in the manufacturing process, platinum is pulverized, dissolved in acid, dissolved, filtered and dried, and each company has its own solution (know-how by each company). There are many steps to mix and make a slurry and bake and harden. In addition, waste liquid is generated in the production stage, and there is a problem of loss of platinum or the like that is removed when cleaning the energy or acid for treating the waste liquid.

The present invention is for solving the above-mentioned conventional problems, and it is possible to produce a fuel cell electrode in which an equivalent performance can be obtained with a small carrying amount and the attached platinum is hardly detached. An object of the present invention is to provide an electrode manufacturing apparatus and method for a fuel cell.
In addition, the present invention can reduce the number of processes compared to the prior art and does not use a large amount of waste liquid or water because there is no acid or washing process in the production process. It is an object of the present invention to provide a fuel cell electrode manufacturing apparatus and method for manufacturing an electrode.

In order to solve the above-described problems of the prior art and achieve the above-described object, an apparatus for manufacturing a fuel cell electrode according to the present invention includes a vacuum chamber, a cathode electrode, a trigger electrode, an anode electrode, and a trigger made of metal as a deposition material. A coaxial vacuum arc evaporation source having a power source and an arc power source and a capacitor provided in parallel for generating arc plasma, and a powder form that is disposed opposite to the coaxial vacuum arc evaporation source and is a deposition target A container for containing the carrier; a stirring means for stirring the powdery carrier in the container; and a bottom surface in the container for pulverizing the lump of the powdery carrier generated in the stirring process by the stirring means and a grinding means for striking the said powdery carrier by depositing the metal a fuel cell electrode manufacturing apparatus for manufacturing an electrode for a fuel cell, the circular edge of the open- end of the container It is of the vessel Becomes a slope inclined in a direction in which the mandrel extends, has a step at a predetermined location, said grinding means, first the operation impinging stamp head to the bottom, in a state in which the stamp head is brought into contact with the bottom surface A second operation for holding and a third operation for separating the stamp head from the bottom surface are repeated in order, and the crushing means has an arm portion that abuts against the edge portion while being urged toward the bottom surface. The stamp head is brought into contact with the bottom surface when the arm portion falls toward the bottom surface at the step, and the stamp head is moved to the bottom surface when the arm portion reaches a predetermined position along the slope. Move away from.

In the fuel cell electrode manufacturing method of the present invention, a metal vapor deposition material from a coaxial vacuum arc evaporation source is supported on a vapor deposition body in a container, and the powder carrier of the vapor deposition body is stirred in the container. In the process, the bottom of the container is hit with a pulverizing means to pulverize the lump of the powdery carrier generated by the stirring, and deposit the metal on the powdery carrier to produce a fuel cell electrode. a fuel cell electrode manufacturing method, the circular edge of the open- end of the container becomes a slope inclined in a direction in which the mandrel extends within the container, has a step at a predetermined location, said grinding means has an arm portion in contact with the edge portion while being biased toward the bottom surface, an end portion of a side of the deposition target of the stamp surface of the plate-like scan Tanpuheddo enters the distance from the bottom surface orientation If you are inclined, said grinding means, said scan Tanpuhe The stamp is moved up and down with respect to the bottom surface so that the stamp surface of the stamp head collides with the bottom surface, and the stamp head contacts the bottom surface when the arm portion falls toward the bottom surface at the step. The stamp head is moved away from the bottom surface when the arm portion reaches a predetermined position along the slope.

According to the present invention, there is provided a fuel cell electrode manufacturing apparatus and method capable of manufacturing a fuel cell electrode that can obtain a small amount of load and equivalent performance, and that the attached platinum hardly desorbs. Can do.
In addition, the present invention can reduce the number of processes compared to the prior art and does not use a large amount of waste liquid or water because there is no acid or washing process in the production process. It is possible to provide a fuel cell electrode manufacturing apparatus and method capable of manufacturing an electrode.

FIG. 1 is a schematic view of a fine particle forming apparatus according to an embodiment of the present invention. FIG. 2 is a diagram for explaining the amount of current and electromotive force generated at the oxygen electrode and the hydrogen electrode when manufactured using a discharge voltage of 70 V and a capacitor capacity of 1080 μF. FIG. 3 is a diagram for explaining the amount of current and electromotive force generated at the oxygen electrode and hydrogen electrode when manufactured using a discharge voltage of 100 V and a capacitor capacity of 1080 μF. FIG. 4 is a diagram for explaining the amount of current and electromotive force generated at the oxygen electrode and the hydrogen electrode when manufactured using a discharge voltage of 150 V and a capacitor capacity of 1080 μF. FIG. 5 is a diagram for explaining the amount of current and electromotive force generated at the oxygen electrode and hydrogen electrode when manufactured using a discharge voltage of 200 V and a capacitor capacity of 1080 μF. FIG. 6 is a diagram for explaining the amount of current and the electromotive force generated at the oxygen electrode and the hydrogen electrode when manufactured using a discharge voltage of 300 V and a capacitor capacity of 1080 μF. FIG. 7 is a diagram for comparing and explaining the results of FIGS. 3 to 6. FIG. 8 is a view for explaining an image obtained by TEM observation of platinum nanoparticles when manufactured using a discharge voltage of 70 V and a capacitor capacity of 1080 μF. FIG. 9 is a diagram for explaining an image obtained by TEM observation of platinum nanoparticles when manufactured using a discharge voltage of 100 V and a capacitor capacity of 1080 μF. FIG. 10 is a diagram for explaining an image obtained by TEM observation of platinum nanoparticles when manufactured using a discharge voltage of 150 V and a capacitor capacity of 1080 μF. FIG. 11 is a diagram for explaining an image obtained by TEM observation of platinum nanoparticles when manufactured using a discharge voltage of 200 V and a capacitor capacity of 1080 μF. FIG. 12 is a diagram for explaining an image obtained by TEM observation of platinum nanoparticles when manufactured using a discharge voltage of 300 V and a capacitor capacity of 1080 μF. FIG. 13 is a view for explaining the function of the scraper of the fine particle forming apparatus shown in FIG. FIG. 14 is a view for explaining a scraper and a stamp of the fine particle forming apparatus shown in FIG. 15 is an external view of the stirring container of the fine particle forming apparatus shown in FIG. FIG. 16 is a diagram for explaining a part of the structure of the stamp shown in FIG. FIG. 17 is a diagram for explaining a change in the distance between the stamp according to the embodiment of the present invention and the bottom surface of the stirring vessel in time series. FIG. 18 is a partial cross-sectional view of the stamp shown in FIG. FIG. 19 is a diagram for explaining a configuration of an electrode for a fuel cell. FIG. 20 is a diagram for explaining a conventional wet method. FIG. 21 is a view for explaining the characteristics of the fuel cell electrode manufactured by the method of FIG.

Hereinafter, a fine particle forming apparatus according to an embodiment of the present invention will be described with reference to the drawings.
In the fine particle forming apparatus of the present embodiment, platinum nanoparticles are dispersed in the carbon powder by generating platinum plasma with an arc plasma deposition source, irradiating the lower carbon powder and stirring the powder. It adheres uniformly.

FIG. 1 is a schematic diagram of a fuel cell electrode manufacturing apparatus 1 using a coaxial vacuum arc deposition source 5.
The fuel cell electrode manufacturing apparatus 1 shown in FIG. 1 is, for example, a vacuum arc while stirring ketjen black carbon powder (deposited body 7) that is a carrier housed in a stirring container 73 that is a cylindrical container in a vacuum. A platinum ion, which is a catalytic metal generated using the plasma generator 3, is irradiated with plasma from above, and nanoparticles are formed on the surface of the ketjen black carbon powder to carry the catalytic metal.
A vacuum chamber 2 shown in FIG. 1 has a cylindrical shape.
In the vacuum chamber 2, a stirrer 3 and a coaxial vacuum arc deposition source 5 are accommodated.

[Coaxial vacuum arc deposition source 5]
The coaxial vacuum arc evaporation source 5 includes a cylindrical evaporation material 11 made of gold attached to a cathode electrode, a hat-like insulator 14 made of alumina (hereinafter referred to as a hat-type insulator), a trigger electrode 13, Have
The vapor deposition material 11, the hat-type insulator 14, and the trigger electrode 13 attached to the cathode electrode are attached in close contact with each other concentrically.

The anode electrode 23 is made of stainless steel and has a cylindrical shape. The anode electrode 23 is concentrically attached to the vapor deposition material 11 attached to the cathode electrode.
The coaxial vacuum arc deposition source 5 is attached to the wall surface of the vacuum chamber 2 via a support column (not shown) and a vacuum flange (not shown).

Moreover, the power supply device 6 is shown by a simple wiring diagram in FIG.
The power supply device 6 includes a trigger power supply 31, an arc power supply 32, and a capacitor unit 33.
The trigger power source 31 is composed of a pulse transformer, and transforms a pulse voltage in units of μS with an input of 200 V to about 17 times, and outputs a trigger pulse with a positive polarity in units of 3.4 kV and several μS.

The arc power supply 32 is a DC power supply with a capacity of 100 V and several A, and charges the capacitor unit 33. Since the charging time requires about 1 second, the discharge cycle is 1 Hz.
The capacitor unit 33 is 720 to 1080 μF and has a withstand voltage of 400V. The capacitor unit 33 is charged at about 150 V by the arc power source 32. This about 150V was determined based on experimental results as described later.
Here, an adjustment unit that can adjust at least one of the discharge voltage of the arc power supply 32 and the capacity of the capacitor unit 33 may be provided.
In this case, the adjustment means is used to adjust the plasma energy distribution to 10 eV to 30 eV. Moreover, it adjusts so that the particle size of platinum particle | grains may become 1 nm-20 nm using the said adjustment means.

  The positive output terminal of the trigger power supply 31 is connected to the trigger electrode 13, the negative terminal is connected to the same potential as the negative output terminal of the arc power supply 32, and further connected to the cathode electrode. Both terminals of the capacitor unit 33 are connected between the positive and negative terminals of the arc power supply 32.

The vacuum exhaust system 9 includes a turbo molecular pump 51, a partition valve 52, a rotary pump 53, and an adjustment valve 54.
The turbo molecular pump 51 to the rotary pump 53 are connected by a metal pipe, and the vacuum chamber 2 is evacuated. By performing evacuation, the inside of the vacuum chamber 2 is kept at 10 ⁻⁴ Pa or less.

In the present embodiment, the discharge voltage of the arc power supply 32 is changed to 70V, 100V, 150V, 200V, and 300V, and platinum nanoparticles are supported on the ketjen black carbon powder in a vacuum, and electricity is generated by a cyclic voltammetry method. A chemical reaction was performed to measure the amount of current and electromotive force generated at the oxygen electrode and the hydrogen electrode.
The results are shown in FIGS. The supporting rate of platinum is about 5%. The amount of platinum placed on the working electrode was 1 μg.

FIG. 7 shows a graph of the arc discharge voltage dependence of current. The left vertical axis shows the oxygen electrode current value at 0.8V. This current value is proportional to the magnitude of the electromotive force in this battery. The right vertical axis is the current value of the hydrogen electrode at 0.1V.
As a result, it can be seen that the electromotive force is the highest when discharged at 150 V, and the hydrogen current and oxygen current (not shown in the graph) are also high.
In addition, the electromotive force is almost the same when compared with the graph of the current-voltage characteristics of the powder carrying platinum nanoparticles supported by the conventional wet method described with reference to FIG. 21 and the current-voltage characteristics supported at 150 V by the arc plasma deposition source. .8V is obtained, and the hydrogen electrode current is about 1 mA for the powder supported by the arc plasma deposition source, and -1.5 mA for the oxygen electrode current, which is higher than the conventional wet method. ing.
For this reason, 150 V is used as the voltage (discharge voltage) of the arc power supply 32 in this embodiment.

  In addition, as a verification of the amount supported, the amount deposited was measured by applying a powder deposited at discharge voltages of 100 V and 150 V to the temperature-programmed desorption gas analyzer TGD, and both had a residual weight (platinum amount) of about 3%. The amount is likely less than the expected value of 5%.

  8 to 12 show the results of TEM observation of platinum nanoparticles at each voltage. At 72 V, platinum particles of about 1 nm are uniformly dispersed, but when the discharge voltage is 150 V, it can be seen that a very large number of nanoparticles of about 6 nm are highly dispersed. At 300 V, 8 nm particles and fine particles tend to be mixed. Even if the capacity of the capacitor unit 33 is changed to change the arc discharge energy, the size of the platinum nanoparticles can be changed.

Thus, by depositing on the carbon powder using the fuel cell electrode manufacturing apparatus 1, it was possible to obtain the same electromotive force by reducing the supporting rate and the supporting amount as compared with the conventional wet method.
In addition, with respect to the oxygen electrode current and the hydrogen electrode current, values higher than those of the conventional wet method are obtained. This is presumably because the arc plasma deposition source has a large area in contact with hydrogen and oxygen because platinum nanoparticles adhere only to the surface. From this, in the platinum loading for fuel cells using the arc plasma deposition source, the electromotive force can obtain the same performance with a small loading amount, and the current value exceeds the wet method. In addition, it was confirmed that the effects of reducing the number of manufacturing processes and energy such as waste liquid treatment and cleaning can be achieved.

Hereinafter, the stirring device 3 shown in FIG. 1 will be described.
[Agitator 3]
The stirrer 3 includes a stirring vessel 73 for containing the deposition target 7, scrapers 75 a and 75 b that are fixed blades for stirring the deposition target 7, and lumps (lumps) of the deposition target 7 generated during the stirring process. And a stamp 85 for crushing.
The vapor-deposited body 7 is, for example, titania powder that is a powder having a particle size of 0.1 μm or more and 1 mm or less.

A rotation mechanism 72 that rotates the stirring vessel 73 about its central axis 80 is connected to the center of the lower surface of the stirring vessel 73.
The rotation mechanism 72 is disposed below the fixed table 71.
The material of the stirring vessel 73 is, for example, stainless steel, and the inner wall (inner side surface and bottom surface 73a) is buffed. The diameter of the upper opening of the stirring vessel 73 is, for example, 60 to 300 mm. The upper opening may be oval.
The inner wall of the stirring vessel 73 is coated with alumina or Teflon (registered trademark). The coating method may be any of CVD, sputtering, and arc methods. If it is Teflon (registered trademark), the container itself may be made of Teflon (registered trademark).

FIG. 13 is a diagram for explaining the functions of the scrapers 75a and 75b of the fuel cell electrode manufacturing apparatus 1. FIG. FIG. 13A is a diagram for explaining the arrangement of the scrapers 75a and 75b in the planar direction as viewed from the upper open side of the stirring vessel 73, and FIG. 13B is an illustration of the arrangement as viewed from the side surface of the scraper 75a. It is a figure for doing.
As shown in FIG. 13A, scrapers 75 a and 75 b are fixed around the stirring vessel 73.
The scrapers 75a and 75b are made of stainless steel, for example. The scrapers 75a and 75b are formed of a rod having a diameter of about 1 mm to 5 mm, and the outside is covered with a Teflon (registered trademark) tube.

The scraper 75a extends from the upper open portion of the stirring vessel 73 into the stirring vessel 73, contacts the vicinity of the inner peripheral surface of the bottom surface 73a of the stirring vessel 73, and extends inward while contacting the bottom surface 73a from the contacted portion. Yes.
The scraper 75b extends from the upper open portion of the stirring vessel 73 into the stirring vessel 73, contacts the vicinity of the central axis of the bottom surface 73a, and extends toward the inner peripheral surface while contacting the bottom surface 73a. .
Further, a gap 76 is formed between the tip of the scraper 75b and the scraper 75a.

The vapor-deposited body 7 in the stirring vessel 73 collides with the scraper 75b, moves toward the gap 76 (toward the inner peripheral surface of the stirring vessel 73), and collides with the scraper 75a through the gap 76 to enter the central axis. Move towards 80. A part of the deposition object 7 collides with the scrapers 75a and 75b, is directed upward, and moves over them.
In this way, by forming the scrapers 75a and 75b, the vapor-deposited body 7 in the stirring vessel 73 is directed from the central axis 80 toward the inner peripheral surface, from the inner peripheral surface toward the central axis 80, and in the depth direction. And can be efficiently stirred.
Thus, when gold is deposited on the ketjen black carbon powder, platinum nanoparticles of several to 10 nm of platinum nanoparticles on the ketjen black carbon surface are supported on the ketjen black carbon surface. The

  Further, since the scrapers 75a and 75b are fixed and the stirring vessel 73 is rotated without driving the scrapers 75a and 75b, the driving mechanism can be simplified.

FIG. 14 is a view for explaining the scrapers 75a and 75b and the stamp 85 of the fuel cell electrode manufacturing apparatus 1. FIG.
As shown in FIG. 14, in addition to the scrapers 75a and 75b, a stamp 85 is disposed around the stirring vessel 73.
The stamp 85 supports the stamp head 87 which strikes the bottom surface 73a in the stirring vessel 73 and the stamp head in order to pulverize the lumps of the deposition target (powder carrier) 7 generated in the stirring process by the scrapers 75a and 75b. Arm portion 89 for

  The stamp 85 has a first operation in which the stamp head 87 collides with the bottom surface 73a of the stirring container 73 in a process in which the stirring container 73 rotates about the central axis 80, and the stamp head 87 is in contact with the bottom surface 73a. The second operation for holding and the third operation for gradually separating the stamp head 87 from the bottom surface 73a are repeated.

As shown in FIG. 15, the circular edge 90 of the upper opening of the stirring vessel 73 is notched obliquely and forms a slope that smoothly slopes in the direction in which the central axis 80 extends.
The edge 90 of the upper opening of the stirring container 73 has a first edge 90a that is not inclined, a second edge 90b that is smoothly inclined in a direction away from the bottom surface 73a, and a step 90c.
The step 90b is 3 to 20 mm, for example.

  The arm portion 89 has a stamp head 87 fixed to one end on the side disposed in the stirring vessel 73, and the other end is fixed to a stamp head holding portion 93 as shown in FIGS. 14 and 16. The diameter of the arm part 89 is, for example, about 1 mm to 5 mm.

The vicinity of the center of the arm portion 89 in the longitudinal direction is in contact with the edge 90 of the upper opening of the stirring vessel 73. The arm portion 89 is urged toward the bottom surface 73 a of the stirring vessel 73 by a spring 95.
Thereby, the arm part 89 always makes the vicinity of the center part contact the edge part 90 in the process in which the stirring vessel 73 rotates around the central axis 80.
The arm portion 89 is dropped toward the bottom surface 73a at the step 90c of the edge portion 90 described above to cause the stamp head 87 to collide with the bottom surface 73a, and the stamp head 87 is brought into contact with the bottom surface 73a at the first edge portion 90a. Is held for a predetermined period. Thereafter, the stamp head 87c and the bottom surface 73a are brought into a non-contact state at the second edge 90b. This operation is performed while the stirring vessel 73 makes one rotation around the central axis 80, and the first, second, and third operations described above are repeated during the rotation.

FIG. 17 is a diagram for explaining the change over time in the distance between the stamp head 87 and the bottom surface 73a of the stirring vessel 73 during the rotation of the central shaft 80 described above.
As shown in FIG. 17, the stamp head 87 and the bottom surface 73 a of the stirring vessel 73 periodically contact each other.
That is, as the arm portion 89 climbs the slope of the edge portion 90, the stamp head 87 gradually rises upward from the bottom surface 73a (floor surface).
The depth of the deposition target 7 in the stirring vessel 73 and the amount of movement of the stamp head 87 in the vertical movement are set so that the stamp head 87 does not come out of the surface of the deposition target 7.
In addition, the rotation speed of the stirring container 73 is 20-100 rpm, for example.

The tip 87a of the stamp head 87 is inclined in a direction away from the bottom surface 73a of the stirring vessel 73, for example, as shown in FIG. Thereby, the vapor-deposited body 7 can collide with the stamp head 87a according to the rotation of the stirring vessel 73, and can be efficiently drawn between the stamp head 87 and the bottom surface 73a. For this reason, it is possible to increase the probability of completely crushing the lumps of the deposition object 7.
Further, in the stirring device 3, the scrapers 75 a and 75 b and the arm portion 89 of the stamp 85 are set to have very small diameters and the stamp head 87 is set so as not to come out from the surface of the deposition target 7. The amount of nanoparticles (vapor deposition body) from the vacuum arc deposition source 5 colliding with the scrapers 75a and 75b and the stamp head 87 can be reduced.

In the fuel cell electrode manufacturing apparatus 1, as described above, discharge is periodically performed using a pulse as a trigger. As the discharge (evaporation) cycle becomes shorter, the amount of lumps is increased. For structural reasons, the collision period of the stamp 85 with the bottom surface 73 a is proportional to the rotational speed of the stirring vessel 73. Note that the rotation speed of the stirring container 73 after the elapse of a predetermined time from the start of rotation of the stirring container 73 may be faster than the rotation speed within the predetermined time.
That is, the rotation speed of the stirring vessel 73 may be increased as the amount of the vapor deposition material deposited on the vapor deposition target increases.

Hereinafter, an operation example of the fuel cell electrode manufacturing apparatus 1 shown in FIG. 1 will be described.
[Operation example of coaxial vacuum arc deposition source 5]
Electric charges are charged at a discharge voltage of 150 V by the arc power source 32. Here, the capacitor unit 33 is set to 720 to 1800 μF.
By applying a trigger pulse of 3.4 kV from the trigger power supply 31 to the trigger electrode 13 and applying it between the vapor deposition material 11 attached to the cathode electrode and the trigger electrode 13 via the hat-type insulator 14, a hat-type Creeping discharge occurs on the insulator 14 surface, the electric charge stored in the capacitor unit 33 is discharged between the vapor deposition material 11 and the anode electrode 23, a large amount of current flows into the cathode electrode, and it is attached to the cathode electrode made of gold. The deposited material 11 is formed from a liquid phase to a gas phase and further gold plasma.

  At this time, since a large amount of current (2000 A to 5000 A) flows in the cathode electrode between 200 μS and 500 μS, a magnetic field is formed in the vapor deposition material 11 attached to the cathode electrode. Electrons in the plasma fly under the coaxial vacuum arc deposition source 5 under the Lorentz force generated by the magnetic field formed by the deposition material 11 attached to the cathode electrode.

  Gold ions, which are vapor deposition materials in the plasma, are polarized and attracted to electrons flying in front of the coaxial vacuum arc deposition source 5 by Coulomb force and fly forward of the coaxial vacuum arc deposition source 5. It becomes like this.

  On the other hand, platinum ions, which are the deposition material in the plasma, are polarized and fly forward of the coaxial vacuum arc deposition source 5 by Coulomb force. As a result, platinum ions grow using the ketjen black carbon powder 7a as a nucleus, and gold particles in nanometers are formed.

  The Ketjen black carbon powder is stirred by rotating the stirring container 73 on the scrapers 75a and 75b while irradiating platinum ions in this way. This is continued to uniformly form platinum nanoparticles on the ketjen black carbon powder.

More specifically, platinum ions are irradiated toward the ketjen black carbon powder 7 in the stirring vessel 73. Here, the stirring container 73 is rotated by the rotating mechanism 72, and the vapor deposition body 7 such as carbon in the stirring container 73 is stirred by the scrapers 75a and 75b.
The deposition object 7 appears on the stirring vessel 73 and is exposed to platinum ions by colliding with the scrapers 75a and 75b. By continuing this one after another, platinum fine particles are uniformly formed on the particles of all the vapor-deposited bodies 7 in the stirring vessel 73.

[Stirring and crushing operation]
The fuel cell electrode manufacturing apparatus 1 shown in FIG. 1 is, for example, a vacuum arc plasma generator while stirring alumina powder (deposited body 7) that is a carrier housed in a stirring container 73 that is a cylindrical container in a vacuum. The catalyst metal is supported on the surface of the alumina powder by irradiating plasma of nanoparticles (deposited body), which is the catalyst metal generated using No. 3, from above.
In this process, the arm portion 89 of the stamp 85 shown in FIG. 14 is cut off obliquely at the edge 90 of the upper opening of the stirring vessel 73 in conjunction with the rotation of the stirring vessel 73 around the central axis 80. Climb the slope (second edge 90b shown in FIG. 15). The stamp head 87 gradually floats upward from the bottom surface 73a of the stirring vessel 73.
At this time, the stamp head 87 is lifted while the arm portion 89 is pulled by the spring 97 to the bottom surface 73 a (downward) of the stirring vessel 73.

  Then, when it reaches the final upper stage, the stamp head 87 that is suddenly dropped to a lower step by the step 90c shown in FIG. Crush the lump of the deposition object 7 at the bottom.

Since the elastic force of the spring 97 acts on the stamp head 87 even on the bottom surface 73a of the step, the stamp head 87 moves while contacting the bottom surface 73a as the stirring vessel 73 rotates. That is, while the arm portion 89 and the first edge portion 90a shown in FIG. 15 are in contact, the stamp head 87 moves while being in contact with the bottom surface 73a.
At this time, since the fine particles that have entered between the stamp head 87 and the bottom surface 73a pass between the stamp head 87 and the bottom surface 73a, they are crushed like a buckwheat mortar and further broken into powder.
Then, the slope of the edge 90b is gradually climbed from the stamp head 87 or the lower stage again, and when it reaches the position of the uppermost step 90c, it is dropped to the lower stage at once, so that the tension of the spring 97 is released and Crush and then crush. Repeat this.

As described above, in the present embodiment, by depositing on the carbon powder using the fuel cell electrode manufacturing apparatus 1, it is possible to obtain the same electromotive force by reducing the loading rate and the loading amount as compared with the conventional wet method. I was able to.
In addition, with respect to the oxygen electrode current and the hydrogen electrode current, current values higher than those of the conventional wet method are obtained. This is because the platinum plasma particles adhere only to the surface in the arc plasma deposition source. This is thought to be due to the large area in contact with the surface. From this, in the platinum support for fuel cells using an arc plasma deposition source, the electromotive force is equivalent to the performance with a small amount of support, and the current value is superior to the wet method. It was confirmed that there was an effect of reducing energy consumption such as reduction, waste liquid treatment and cleaning.

The fuel cell electrode manufacturing apparatus 1 uses the stamp 85 to apply pressure to the surface of the vapor-deposited body 7 in the stirring vessel 73 to crush it, and the crushed powder is mixed with the stamp head 87 of the stamp 85 and the stirring vessel. 73 is further finely ground according to the rotation of the stirring vessel 73.
As a result, when various metals and reactive substances are deposited and supported in a vacuum, it is possible to suppress the formation of powder lumps and to crush the formed lumps, thereby preventing the powder from agglomerating while supporting the catalyst. The catalyst can be supported on the powder while maintaining the particle size as before.

[First Modification]
In the embodiment described above, the stamp head 87 is moved up and down by making a slope and a step on the upper edge of the wall of the stirring vessel 73, pulling the arm portion 89 of the stamp 85 downward by the spring 97, and using the rotation of the stirring vessel 73. A mechanism that knocks down at the step portion is used.
The present invention may use, for example, a mechanism that independently drives the stamp 85 up and down without interlocking with the rotation of the stirring vessel 73.

[Second Modification]
In the embodiment described above, the stamp 85 is used to grind lumps, but instead, a mechanism that grinds lumps with a roller or a propeller may be used.

The present invention is not limited to the embodiment described above.
That is, those skilled in the art may make various modifications, combinations, subcombinations, and alternatives regarding the components of the above-described embodiments within the technical scope of the present invention or an equivalent scope thereof.
In the above-described embodiment, the cylindrical stirring container 73 is illustrated, but a conical stirring container 73 may be used.

  The present invention is applied to the manufacture of fuel cell electrodes.

DESCRIPTION OF SYMBOLS 1 ... Fine particle formation apparatus 3 ... Stirring apparatus 5 ... Coaxial type vacuum arc vapor deposition source 6 ... Power supply apparatus 7 ... To-be-deposited body 31 ... Trigger power supply 32 ... Arc power supply 33 ... Capacitor unit 73 ... Stirring container 75a, 75b ... Scraper 85 ... Stamp 87 ... Stamp head 89 ... Arm 90 ... Edge

Claims (5)

A coaxial vacuum arc evaporation source including a vacuum chamber, a cathode electrode made of a metal of vapor deposition material, a trigger electrode, an anode electrode, a trigger power source, and an arc power source and a capacitor provided in parallel for generating arc plasma;
A container for accommodating a powdery carrier, which is a deposition target, disposed opposite to the coaxial vacuum arc evaporation source;
Stirring means for stirring the powder carrier in the container;
Crushing means for hitting the bottom surface in the container in order to crush the lump of the powdery carrier generated in the stirring process by the stirring means,
A fuel cell electrode manufacturing apparatus for manufacturing a fuel cell electrode by depositing the metal on the powder carrier,
Circular edge of the open- end of the container becomes a slope inclined in a direction in which the mandrel extends within the container, it has a step at a predetermined location,
The crushing means includes a first operation for causing the stamp head to collide with the bottom surface, a second operation for holding the stamp head in contact with the bottom surface, and a third operation for separating the stamp head from the bottom surface. Repeat in order,
The crushing means has an arm portion that abuts against the edge portion while being biased toward the bottom surface, and the stamp head contacts the bottom surface when the arm portion falls toward the bottom surface at the step. And the stamp head is separated from the bottom surface when the arm portion reaches a predetermined position along the slope. A coaxial vacuum arc evaporation source including a vacuum chamber, a cathode electrode made of a metal of vapor deposition material, a trigger electrode, an anode electrode, a trigger power source, and an arc power source and a capacitor provided in parallel for generating arc plasma;
A container for accommodating a powdery carrier, which is a deposition target, disposed opposite to the coaxial vacuum arc evaporation source;
Stirring means for stirring the powder carrier in the container;
Crushing means for hitting the bottom surface in the container in order to crush the lump of the powdery carrier generated in the stirring process by the stirring means,
A fuel cell electrode manufacturing apparatus for manufacturing a fuel cell electrode by depositing the metal on the powder carrier,
Circular edge of the open- end of the container becomes a slope inclined in a direction in which the mandrel extends within the container, it has a step at a predetermined location,
It said grinding means, a plate-shaped scan Tanpuheddo, up and down movement relative to said bottom surface, to collide with the punch face of the stamp head to the bottom surface,
The end of the stamp surface on the side on which the vapor-deposited body enters is inclined in a direction away from the bottom surface,
The crushing means has an arm portion that abuts against the edge portion while being biased toward the bottom surface, and the stamp head contacts the bottom surface when the arm portion falls toward the bottom surface at the step. And the stamp head is separated from the bottom surface when the arm portion reaches a predetermined position along the slope. The stirring means includes
Contact from the opening of the container on the outer periphery near the bottom surface of the container, a first scraper extending inwardly along the bottom surface from those applicable against the point,
Wherein the opening in contact with the vicinity of the central axis of said bottom surface of said container, fuel of claim 1 or claim 2 and a second scraper extending outwardly the from contact with the portion along the bottom surface Battery electrode manufacturing equipment. The container is cylindrical or conical, is rotated around the central axis,
Said stirring means has one end fixed to the periphery of the container, the other end is inserted into the container, and stirred to collide before Kikotai like carrier which moves in conjunction with the rotation of the front Kiyo unit,
Rotational speed of the container is increased in accordance with the vapor deposition period of the coaxial vacuum arc evaporation source is shortened,
Collision period to the bottom surface of the stamp head of the agitating means, the fuel cell electrode manufacturing apparatus according to claim 1, increased in accordance with the discharge period of the coaxial vacuum arc evaporation source is shortened. In the process of supporting the metal vapor deposition material from the coaxial vacuum arc evaporation source on the vapor deposition body in the container, and stirring the powdery carrier of the vapor deposition body in the container, the bottom surface in the container is crushed by the crushing means. Pulverizing the lump of the powdery carrier generated by the stirring, and depositing the metal on the powdery carrier to produce a fuel cell electrode,
Circular edge of the open- end of the container becomes a slope inclined in a direction in which the mandrel extends within the container, it has a step at a predetermined location,
The crushing means has an arm portion that comes into contact with the edge portion while being urged toward the bottom surface,
If the deposition target of the stamp surface of the plate-like scan Tanpuheddo the end on the side of invasion, which are inclined in a direction away from said bottom surface,
Said grinding means, said scan Tanpuheddo, up and down movement relative to said bottom surface, to collide with the punch face of the stamp head to the bottom surface,
The stamp head is brought into contact with the bottom surface when the arm portion falls toward the bottom surface at the step, and when the arm portion reaches a predetermined position along the slope, the stamp head is separated from the bottom surface. The fuel cell electrode manufacturing method.