JP2014166942A5 - - Google Patents

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Publication number
JP2014166942A5
JP2014166942A5 JP2014013648A JP2014013648A JP2014166942A5 JP 2014166942 A5 JP2014166942 A5 JP 2014166942A5 JP 2014013648 A JP2014013648 A JP 2014013648A JP 2014013648 A JP2014013648 A JP 2014013648A JP 2014166942 A5 JP2014166942 A5 JP 2014166942A5
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JP
Japan
Prior art keywords
piezoelectric
piezoelectric element
mol
laminated
piezoelectric material
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Application number
JP2014013648A
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English (en)
Japanese (ja)
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JP6366284B2 (ja
JP2014166942A (ja
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Priority to JP2014013648A priority Critical patent/JP6366284B2/ja
Priority claimed from JP2014013648A external-priority patent/JP6366284B2/ja
Publication of JP2014166942A publication Critical patent/JP2014166942A/ja
Publication of JP2014166942A5 publication Critical patent/JP2014166942A5/ja
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Publication of JP6366284B2 publication Critical patent/JP6366284B2/ja
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JP2014013648A 2013-01-29 2014-01-28 圧電材料、圧電素子、および電子機器 Active JP6366284B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014013648A JP6366284B2 (ja) 2013-01-29 2014-01-28 圧電材料、圧電素子、および電子機器

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2013014613 2013-01-29
JP2013014613 2013-01-29
JP2014013648A JP6366284B2 (ja) 2013-01-29 2014-01-28 圧電材料、圧電素子、および電子機器

Publications (3)

Publication Number Publication Date
JP2014166942A JP2014166942A (ja) 2014-09-11
JP2014166942A5 true JP2014166942A5 (https=) 2017-03-02
JP6366284B2 JP6366284B2 (ja) 2018-08-01

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ID=50150744

Family Applications (1)

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JP2014013648A Active JP6366284B2 (ja) 2013-01-29 2014-01-28 圧電材料、圧電素子、および電子機器

Country Status (5)

Country Link
US (2) US9932273B2 (https=)
EP (1) EP2946417B1 (https=)
JP (1) JP6366284B2 (https=)
TW (1) TW201434789A (https=)
WO (1) WO2014119703A1 (https=)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101728255B1 (ko) * 2012-08-27 2017-04-18 캐논 가부시끼가이샤 압전 재료, 그것을 사용한 압전 소자 및 그 압전 소자를 사용한 전자 기기
US9768375B2 (en) * 2012-08-27 2017-09-19 Canon Kabushiki Kaisha Piezoelectric material, piezoelectric element, multilayered piezoelectric element, manufacturing method for multilayered piezoelectric element, liquid discharge head, liquid discharge device, ultrasonic motor, optical device, vibration device, dust removing device, imaging device, and electronic device
CN104871328A (zh) * 2012-12-21 2015-08-26 佳能株式会社 振动波驱动设备、图像拾取设备、光学装置、液体排出设备和电子装置
WO2017018222A1 (ja) * 2015-07-24 2017-02-02 株式会社ユーテック 圧電体膜及びその製造方法、バイモルフ素子、圧電体素子及びその製造方法
KR101792381B1 (ko) * 2016-01-04 2017-11-01 삼성전기주식회사 전자부품 및 그 제조방법
JP2017179416A (ja) * 2016-03-29 2017-10-05 Tdk株式会社 圧電磁器スパッタリングターゲット、非鉛圧電薄膜およびそれを用いた圧電薄膜素子
USD857020S1 (en) * 2016-05-25 2019-08-20 Tdk Corporation Piezoelectric element
JP1565481S (https=) * 2016-05-25 2016-12-19
US10069061B2 (en) * 2016-06-02 2018-09-04 eLux Inc. Fabrication and harvest of piezoelectric plates
JP6772728B2 (ja) * 2016-09-29 2020-10-21 Tdk株式会社 圧電素子
JP7057941B2 (ja) * 2017-08-04 2022-04-21 キヤノン株式会社 圧電材料、圧電素子、および電子機器
US11988640B2 (en) * 2020-03-11 2024-05-21 Bfly Operations, Inc. Bottom electrode material stack for micromachined ultrasonic transducer devices
JP7645086B2 (ja) * 2021-01-29 2025-03-13 株式会社ディスコ 剥離装置
CN114907847B (zh) * 2022-05-18 2023-01-03 五邑大学 一种荧光测温材料及其制备方法和应用

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3678234B2 (ja) 2002-07-25 2005-08-03 株式会社村田製作所 積層型圧電部品の製造方法、及び積層型電子部品
JP4945801B2 (ja) * 2005-03-24 2012-06-06 株式会社村田製作所 圧電素子、及び圧電素子の製造方法
KR100904618B1 (ko) 2005-04-28 2009-06-25 가부시키가이샤 무라타 세이사쿠쇼 압전체 자기 조성물, 및 이 압전체 자기 조성물의제조방법, 및 압전 세라믹 전자부품
JP4347288B2 (ja) 2005-11-07 2009-10-21 キヤノン株式会社 撮像装置
CN101421202A (zh) * 2006-04-13 2009-04-29 株式会社村田制作所 陶瓷粉末及陶瓷粉末的制造方法
JP2009227535A (ja) 2008-03-25 2009-10-08 Panasonic Corp 圧電性磁器組成物
JP5399165B2 (ja) * 2008-11-17 2014-01-29 富士フイルム株式会社 成膜方法、成膜装置、圧電体膜、圧電素子、液体吐出装置、及び圧電型超音波振動子
JP6021351B2 (ja) 2011-02-28 2016-11-09 キヤノン株式会社 圧電材料、圧電素子、液体吐出ヘッド、超音波モータ、塵埃除去装置およびデバイス
BR112014000104B1 (pt) * 2011-07-05 2021-08-03 Canon Kabushiki Kaisha Elemento piezoelétrico, elemento piezoelétrico de múltiplas camadas, cabeçote de descarga de líquido, aparelho de descarga de líquido, motor ultrassônico, aparelho óptico, e aparelho eletrônico

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