JP2014166939A5 - - Google Patents
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- Publication number
- JP2014166939A5 JP2014166939A5 JP2013225296A JP2013225296A JP2014166939A5 JP 2014166939 A5 JP2014166939 A5 JP 2014166939A5 JP 2013225296 A JP2013225296 A JP 2013225296A JP 2013225296 A JP2013225296 A JP 2013225296A JP 2014166939 A5 JP2014166939 A5 JP 2014166939A5
- Authority
- JP
- Japan
- Prior art keywords
- copper
- fine particles
- nitride fine
- copper nitride
- particles according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000010949 copper Substances 0.000 claims description 26
- 229910052802 copper Inorganic materials 0.000 claims description 24
- -1 Copper nitride Chemical class 0.000 claims description 21
- 239000010419 fine particle Substances 0.000 claims description 17
- 238000000354 decomposition reaction Methods 0.000 claims description 3
- 239000011164 primary particle Substances 0.000 claims description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 239000002904 solvent Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 150000001879 copper Chemical class 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005121 nitriding Methods 0.000 description 2
- 239000003223 protective agent Substances 0.000 description 2
- 239000011163 secondary particle Substances 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Chemical compound NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 1
- 125000003277 amino group Chemical group 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000004202 carbamide Substances 0.000 description 1
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 150000004699 copper complex Chemical class 0.000 description 1
- 239000002612 dispersion medium Substances 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 150000002823 nitrates Chemical class 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000000634 powder X-ray diffraction Methods 0.000 description 1
- 230000004580 weight loss Effects 0.000 description 1
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013225296A JP6057379B2 (ja) | 2013-01-31 | 2013-10-30 | 窒化銅微粒子およびその製造方法 |
| KR1020157020804A KR20150112984A (ko) | 2013-01-31 | 2014-01-31 | 질화구리 미립자 및 그 제조 방법 |
| PCT/JP2014/052321 WO2014119748A1 (ja) | 2013-01-31 | 2014-01-31 | 窒化銅微粒子およびその製造方法 |
| CN201480006826.7A CN104981427A (zh) | 2013-01-31 | 2014-01-31 | 氮化铜微粒及其制造方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013017510 | 2013-01-31 | ||
| JP2013017510 | 2013-01-31 | ||
| JP2013225296A JP6057379B2 (ja) | 2013-01-31 | 2013-10-30 | 窒化銅微粒子およびその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014166939A JP2014166939A (ja) | 2014-09-11 |
| JP2014166939A5 true JP2014166939A5 (enExample) | 2016-06-23 |
| JP6057379B2 JP6057379B2 (ja) | 2017-01-11 |
Family
ID=51262445
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013225296A Expired - Fee Related JP6057379B2 (ja) | 2013-01-31 | 2013-10-30 | 窒化銅微粒子およびその製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6057379B2 (enExample) |
| KR (1) | KR20150112984A (enExample) |
| CN (1) | CN104981427A (enExample) |
| WO (1) | WO2014119748A1 (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2015147561A1 (ko) * | 2014-03-26 | 2015-10-01 | 전자부품연구원 | 전도체 패턴의 형성이 용이한 복합소재와 그 복합소재를 제조하는 방법 및 상기 복합소재에서 시드 소재인 구리질화물 및 그 구리질화물을 합성하는 방법 |
| JP6574553B2 (ja) * | 2014-06-26 | 2019-09-11 | 昭和電工株式会社 | 導電パターン形成用組成物および導電パターン形成方法 |
| KR102303767B1 (ko) * | 2017-11-01 | 2021-09-23 | 한국전자기술연구원 | 전도체 패턴용 구리질화물 분말의 제조 방법 |
| CN110642304B (zh) * | 2019-10-09 | 2021-12-31 | 上海师范大学 | 一种超级电容器用三金属氮化物材料及其制备方法 |
| CN111450867A (zh) * | 2020-05-09 | 2020-07-28 | 青岛科技大学 | 用于电催化二氧化碳还原的Cu3N纳米催化剂的制备方法 |
| CN115057417B (zh) * | 2022-06-08 | 2023-09-12 | 安徽大学 | 一种氮化铜纳米片的制备及其在甲酸盐电合成中的应用 |
| CN116516280A (zh) * | 2023-04-27 | 2023-08-01 | 常州大学 | 一种高效节能的工件氮化方法 |
| CN116924697B (zh) * | 2023-07-31 | 2025-08-29 | 上海耀皮工程玻璃有限公司 | 一种Low-E镀膜玻璃调色层及其制备方法和用途 |
| CN119282131A (zh) * | 2024-11-18 | 2025-01-10 | 济源星翰新材料科技有限公司 | 一种微米铜粉的制备方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005122230A1 (ja) * | 2004-06-07 | 2005-12-22 | Kyushu Institute Of Technology | 銅表面の処理方法及び銅パターン配線形成方法、並びに該方法を用いて作成された半導体装置 |
| JP3870273B2 (ja) * | 2004-12-28 | 2007-01-17 | 国立大学法人九州工業大学 | 銅パターン配線形成方法及び該方法を用いて作成された半導体装置、並びにナノ銅金属粒子 |
| JP5778382B2 (ja) * | 2008-10-22 | 2015-09-16 | 東ソー株式会社 | 金属膜製造用組成物、金属膜の製造方法及び金属粉末の製造方法 |
| JP5243510B2 (ja) * | 2010-10-01 | 2013-07-24 | 富士フイルム株式会社 | 配線材料、配線の製造方法、及びナノ粒子分散液 |
-
2013
- 2013-10-30 JP JP2013225296A patent/JP6057379B2/ja not_active Expired - Fee Related
-
2014
- 2014-01-31 WO PCT/JP2014/052321 patent/WO2014119748A1/ja not_active Ceased
- 2014-01-31 KR KR1020157020804A patent/KR20150112984A/ko not_active Ceased
- 2014-01-31 CN CN201480006826.7A patent/CN104981427A/zh active Pending
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