JP2014095795A - 液晶表示装置およびその製造方法 - Google Patents
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/124—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
- H01L27/1244—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits for preventing breakage, peeling or short circuiting
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1345—Conductors connecting electrodes to cell terminals
- G02F1/13452—Conductors connecting driver circuitry and terminals of panels
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1345—Conductors connecting electrodes to cell terminals
- G02F1/13458—Terminal pads
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136204—Arrangements to prevent high voltage or static electricity failures
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136227—Through-hole connection of the pixel electrode to the active element through an insulation layer
Abstract
【解決手段】TFT基板100の端子領域には、ICドライバと接続するための端子が形成され、前記端子は、端子金属60と第1の絶縁膜107に形成された第1のスルーホールと、第2の絶縁膜109に形成された第2のスルーホールと前記第1のスルーホールに形成され、前記端子金属60と接触する第1のITO20と、前記第1のITO20の上に形成された第2のITO30によって形成され、前記第2のITO30は、前記第1のITO20と接触している部分に形成され、前記第2のスルーホールの外側には形成されていない。これによって、隣り合う端子のITO間の距離を大きく出来、端子間のショートの確率を低減出来る。
【選択図】図4
Description
Claims (7)
- TFTを含む画素がマトリクス状に形成された表示領域と端子領域を有するTFT基板の端子領域にICドライバが接続された液晶表示装置であって、
前記端子領域には、ICドライバと接続するための端子が形成され、
前記端子は、端子金属と第1の絶縁膜に形成された第1のスルーホールと、第2の絶縁膜に形成された第2のスルーホールと前記第1のスルーホールに形成され、前記端子金属と接触する第1のITOと、前記第1のITOの上に形成された第2のITOによって形成され、
前記第2のITOは、前記第1のITOと接触している部分に形成され、前記第2のスルーホールの外側には形成されていないことを特徴とする液晶表示装置。 - 前記第2のスルーホールの径は、前記第1のスルーホールの径よりも小さいことを特徴とする請求項1に記載の液晶表示装置。
- 前記端子金属はドレイン電極と同層で形成されていることを特徴とする請求項1に記載の液晶表示装置。
- 前記端子金属はゲート電極と同層で形成されていることを特徴とする請求項1に記載の液晶表示装置。
- TFTを含む画素がマトリクス状に形成された表示領域と端子領域を有するTFT基板の端子領域にICドライバが接続された液晶表示装置であって、
前記端子領域には、ICドライバと接続するための端子が形成され、
前記端子は、第1のITOと絶縁膜に形成されたスルーホールと、前記第1のITOの上に形成された第2のITOによって形成され、
前記第2のITOは、前記第1のITOと接触している部分に形成され、前記スルーホールの外側には形成されていないことを特徴とする液晶表示装置。 - TFTを含む画素がマトリクス状に形成された表示領域と端子領域を有するTFT基板の端子領域にICドライバと接続する端子が形成された液晶表示装置の製造方法であって、
前記TFT基板に端子金属を形成し、
前記端子金属を覆って絶縁膜を形成し、
前記端子金属の部分に前記絶縁膜にスルーホールを形成し、
前記スルーホールに第1のITOを形成し、
前記第1のITOを多結晶化し、
前記第1のITO及び前記絶縁膜を覆って第2のITOを形成し、
前記第2のITOをレジストを用いずにエッチングすることによって、前記第1のITOと接触している部分以外の前記第2のITOを除去することを特徴とする液晶表示装置の製造方法。 - 前記第2のITOをエッチングするエッチング液は蓚酸であることを特徴とする請求項6に記載の液晶表示装置の製造方法。
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JP2012247016A JP2014095795A (ja) | 2012-11-09 | 2012-11-09 | 液晶表示装置およびその製造方法 |
US14/071,886 US9335595B2 (en) | 2012-11-09 | 2013-11-05 | Display device and method of manufacturing the same |
US15/089,160 US9954013B2 (en) | 2012-11-09 | 2016-04-01 | Display device and method of manufacturing the same |
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JP2014095795A5 JP2014095795A5 (ja) | 2015-07-30 |
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Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
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CN104007571B (zh) * | 2014-06-04 | 2017-01-18 | 南京中电熊猫液晶显示科技有限公司 | 一种阵列基板及其制造方法 |
CN104698710A (zh) * | 2015-04-01 | 2015-06-10 | 上海天马微电子有限公司 | 一种阵列基板以及液晶显示装置 |
JP2017037131A (ja) * | 2015-08-07 | 2017-02-16 | 三菱電機株式会社 | アレイ基板とそのアレイ基板を用いた液晶表示装置 |
JP6701777B2 (ja) * | 2016-02-15 | 2020-05-27 | セイコーエプソン株式会社 | 電気光学装置、電子機器 |
JP2018025671A (ja) * | 2016-08-10 | 2018-02-15 | 株式会社ジャパンディスプレイ | 表示装置 |
WO2019064342A1 (ja) * | 2017-09-26 | 2019-04-04 | シャープ株式会社 | 表示デバイス、表示デバイスの製造方法、表示デバイスの製造装置 |
CN107611115B (zh) * | 2017-09-29 | 2019-12-13 | 武汉华星光电技术有限公司 | 集成电路针脚、内嵌式触摸屏及集成电路针脚的封装方法 |
JP7046705B2 (ja) * | 2018-04-27 | 2022-04-04 | 株式会社ジャパンディスプレイ | 表示装置 |
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Patent Citations (4)
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JP2005259371A (ja) * | 2004-03-09 | 2005-09-22 | Advanced Display Inc | 液晶表示装置およびこれらの製造方法 |
JP2007248903A (ja) * | 2006-03-16 | 2007-09-27 | Epson Imaging Devices Corp | 液晶表示装置及び液晶表示装置の製造方法 |
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JP2011070054A (ja) * | 2009-09-28 | 2011-04-07 | Sony Corp | 液晶表示パネル |
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US20140131719A1 (en) | 2014-05-15 |
US9954013B2 (en) | 2018-04-24 |
US9335595B2 (en) | 2016-05-10 |
US20160218122A1 (en) | 2016-07-28 |
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