JP2014081378A5 - - Google Patents

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Publication number
JP2014081378A5
JP2014081378A5 JP2013214991A JP2013214991A JP2014081378A5 JP 2014081378 A5 JP2014081378 A5 JP 2014081378A5 JP 2013214991 A JP2013214991 A JP 2013214991A JP 2013214991 A JP2013214991 A JP 2013214991A JP 2014081378 A5 JP2014081378 A5 JP 2014081378A5
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JP
Japan
Prior art keywords
mirror
test surface
sent
similar
light
Prior art date
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Application number
JP2013214991A
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English (en)
Japanese (ja)
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JP2014081378A (ja
JP6344898B2 (ja
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Priority claimed from US14/053,493 external-priority patent/US10234400B2/en
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Publication of JP2014081378A publication Critical patent/JP2014081378A/ja
Publication of JP2014081378A5 publication Critical patent/JP2014081378A5/ja
Application granted granted Critical
Publication of JP6344898B2 publication Critical patent/JP6344898B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2013214991A 2012-10-15 2013-10-15 欠陥および特徴的形状を検出する装置 Expired - Fee Related JP6344898B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201261714170P 2012-10-15 2012-10-15
US61/714,170 2012-10-15
US14/053,493 US10234400B2 (en) 2012-10-15 2013-10-14 Feature detection with light transmitting medium
US14/053,493 2013-10-14

Publications (3)

Publication Number Publication Date
JP2014081378A JP2014081378A (ja) 2014-05-08
JP2014081378A5 true JP2014081378A5 (enExample) 2016-07-14
JP6344898B2 JP6344898B2 (ja) 2018-06-20

Family

ID=50475078

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013214991A Expired - Fee Related JP6344898B2 (ja) 2012-10-15 2013-10-15 欠陥および特徴的形状を検出する装置

Country Status (2)

Country Link
US (1) US10234400B2 (enExample)
JP (1) JP6344898B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9068917B1 (en) * 2006-03-14 2015-06-30 Kla-Tencor Technologies Corp. Systems and methods for inspection of a specimen
US9297759B2 (en) * 2012-10-05 2016-03-29 Seagate Technology Llc Classification of surface features using fluorescence
CN116482122A (zh) * 2023-05-09 2023-07-25 中国工商银行股份有限公司 一种箱体及监测箱体表面完整性的方法和装置

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JP3445722B2 (ja) 1997-05-14 2003-09-08 出光石油化学株式会社 表面検査装置および表面検査方法
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CN202794062U (zh) 2012-09-28 2013-03-13 肇庆中导光电设备有限公司 具有透射及反射光源的照明装置及光学检测系统

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