JP6344898B2 - 欠陥および特徴的形状を検出する装置 - Google Patents

欠陥および特徴的形状を検出する装置 Download PDF

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Publication number
JP6344898B2
JP6344898B2 JP2013214991A JP2013214991A JP6344898B2 JP 6344898 B2 JP6344898 B2 JP 6344898B2 JP 2013214991 A JP2013214991 A JP 2013214991A JP 2013214991 A JP2013214991 A JP 2013214991A JP 6344898 B2 JP6344898 B2 JP 6344898B2
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JP
Japan
Prior art keywords
light
article
detector
defect
strand
Prior art date
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Expired - Fee Related
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JP2013214991A
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English (en)
Japanese (ja)
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JP2014081378A (ja
JP2014081378A5 (enExample
Inventor
ジョアキム・ワルター・アーナー
フロリン・ザバリチェ
デイビッド・エム・タン
サミュエル・カー・ヘアン・ウォン
マイサラス・ナシロウ
ヘンリー・ルイス・ロット
スティーブン・キース・マクラウリン
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Seagate Technology LLC
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Seagate Technology LLC
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Publication of JP2014081378A publication Critical patent/JP2014081378A/ja
Publication of JP2014081378A5 publication Critical patent/JP2014081378A5/ja
Application granted granted Critical
Publication of JP6344898B2 publication Critical patent/JP6344898B2/ja
Expired - Fee Related legal-status Critical Current
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Optical Couplings Of Light Guides (AREA)
JP2013214991A 2012-10-15 2013-10-15 欠陥および特徴的形状を検出する装置 Expired - Fee Related JP6344898B2 (ja)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201261714170P 2012-10-15 2012-10-15
US61/714,170 2012-10-15
US14/053,493 US10234400B2 (en) 2012-10-15 2013-10-14 Feature detection with light transmitting medium
US14/053,493 2013-10-14

Publications (3)

Publication Number Publication Date
JP2014081378A JP2014081378A (ja) 2014-05-08
JP2014081378A5 JP2014081378A5 (enExample) 2016-07-14
JP6344898B2 true JP6344898B2 (ja) 2018-06-20

Family

ID=50475078

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013214991A Expired - Fee Related JP6344898B2 (ja) 2012-10-15 2013-10-15 欠陥および特徴的形状を検出する装置

Country Status (2)

Country Link
US (1) US10234400B2 (enExample)
JP (1) JP6344898B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9068917B1 (en) * 2006-03-14 2015-06-30 Kla-Tencor Technologies Corp. Systems and methods for inspection of a specimen
US9297759B2 (en) * 2012-10-05 2016-03-29 Seagate Technology Llc Classification of surface features using fluorescence
CN116482122A (zh) * 2023-05-09 2023-07-25 中国工商银行股份有限公司 一种箱体及监测箱体表面完整性的方法和装置

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DE9414467U1 (de) * 1994-07-15 1994-11-10 Bruker Analytische Meßtechnik GmbH, 76287 Rheinstetten Raman-Spektrometer mit einer Meßsonde
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JP3445722B2 (ja) 1997-05-14 2003-09-08 出光石油化学株式会社 表面検査装置および表面検査方法
JPH10332348A (ja) 1997-05-27 1998-12-18 Mitsubishi Heavy Ind Ltd 半導体チップ外観検査装置
US6800859B1 (en) 1998-12-28 2004-10-05 Hitachi, Ltd. Method and equipment for detecting pattern defect
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US6781699B2 (en) 2002-10-22 2004-08-24 Corning-Tropel Two-wavelength confocal interferometer for measuring multiple surfaces
US20040208458A1 (en) * 2002-11-26 2004-10-21 Hitoshi Uno Bidirectional optical module, optical drop module, and optical transmission device
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US20060066842A1 (en) * 2004-09-30 2006-03-30 Saunders Winston A Wafer inspection with a customized reflective optical channel component
US9068917B1 (en) * 2006-03-14 2015-06-30 Kla-Tencor Technologies Corp. Systems and methods for inspection of a specimen
US7864316B2 (en) * 2006-11-20 2011-01-04 Malvern Instruments, Ltd. Spectrometric characterization of pharmaceutical heterogeneity
JP5237874B2 (ja) 2009-04-24 2013-07-17 株式会社日立ハイテクノロジーズ 欠陥検査方法および欠陥検査装置
US8115932B2 (en) * 2009-05-28 2012-02-14 Corning Incorporated Methods and apparatus for measuring ion implant dose
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CN202442950U (zh) 2011-12-14 2012-09-19 杭州慕才科技有限公司 用于机器视觉的产品质量检测装置
CN202794062U (zh) 2012-09-28 2013-03-13 肇庆中导光电设备有限公司 具有透射及反射光源的照明装置及光学检测系统

Also Published As

Publication number Publication date
JP2014081378A (ja) 2014-05-08
US20140104603A1 (en) 2014-04-17
US10234400B2 (en) 2019-03-19

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