JP2014078601A - 成膜装置用基板搬送トレイ、及び外部開閉駆動装置 - Google Patents

成膜装置用基板搬送トレイ、及び外部開閉駆動装置 Download PDF

Info

Publication number
JP2014078601A
JP2014078601A JP2012225406A JP2012225406A JP2014078601A JP 2014078601 A JP2014078601 A JP 2014078601A JP 2012225406 A JP2012225406 A JP 2012225406A JP 2012225406 A JP2012225406 A JP 2012225406A JP 2014078601 A JP2014078601 A JP 2014078601A
Authority
JP
Japan
Prior art keywords
substrate
tray
transport
film forming
forming apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2012225406A
Other languages
English (en)
Japanese (ja)
Inventor
Itsushi Iio
逸史 飯尾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Heavy Industries Ltd
Original Assignee
Sumitomo Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries Ltd filed Critical Sumitomo Heavy Industries Ltd
Priority to JP2012225406A priority Critical patent/JP2014078601A/ja
Priority to TW102122182A priority patent/TW201415572A/zh
Priority to CN201310268416.7A priority patent/CN103726010A/zh
Priority to KR1020130077707A priority patent/KR20140046977A/ko
Publication of JP2014078601A publication Critical patent/JP2014078601A/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/066—Transporting devices for sheet glass being suspended; Suspending devices, e.g. clamps, supporting tongs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1876—Particular processes or apparatus for batch treatment of the devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Physical Vapour Deposition (AREA)
JP2012225406A 2012-10-10 2012-10-10 成膜装置用基板搬送トレイ、及び外部開閉駆動装置 Pending JP2014078601A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2012225406A JP2014078601A (ja) 2012-10-10 2012-10-10 成膜装置用基板搬送トレイ、及び外部開閉駆動装置
TW102122182A TW201415572A (zh) 2012-10-10 2013-06-21 成膜裝置用基板搬運托盤、及外部開閉驅動裝置
CN201310268416.7A CN103726010A (zh) 2012-10-10 2013-06-28 成膜装置用基板传送托盘及外部开闭驱动装置
KR1020130077707A KR20140046977A (ko) 2012-10-10 2013-07-03 성막장치용 기판반송트레이, 및 외부개폐구동장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012225406A JP2014078601A (ja) 2012-10-10 2012-10-10 成膜装置用基板搬送トレイ、及び外部開閉駆動装置

Publications (1)

Publication Number Publication Date
JP2014078601A true JP2014078601A (ja) 2014-05-01

Family

ID=50450299

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012225406A Pending JP2014078601A (ja) 2012-10-10 2012-10-10 成膜装置用基板搬送トレイ、及び外部開閉駆動装置

Country Status (4)

Country Link
JP (1) JP2014078601A (ko)
KR (1) KR20140046977A (ko)
CN (1) CN103726010A (ko)
TW (1) TW201415572A (ko)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018154851A (ja) * 2017-03-15 2018-10-04 日新電機株式会社 基板保持装置
EP3528280A4 (en) * 2017-12-19 2019-10-30 Beijing Apollo Ding Rong Solar Technology Co., Ltd. PRODUCTION LINE OF CO-EVAPORATION OF SOLAR CELLS
CN113330584A (zh) * 2019-01-24 2021-08-31 株式会社钟化 太阳能电池制造用基板托盘及太阳能电池的制造方法
CN114972505A (zh) * 2022-04-29 2022-08-30 弥费实业(上海)有限公司 一种位置识别系统

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016104863B4 (de) * 2016-03-16 2023-11-02 Lisa Dräxlmaier GmbH Vorrichtung zum Bedampfen eines Bauteils
JP6610980B2 (ja) 2017-06-08 2019-11-27 株式会社アルバック 基板ガイド、キャリア

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4034860B2 (ja) * 1997-10-31 2008-01-16 キヤノンアネルバ株式会社 トレイ搬送式成膜装置及び補助チャンバー
JP4665155B2 (ja) * 2004-10-22 2011-04-06 株式会社昭和真空 薄膜形成装置及びその方法
KR101068439B1 (ko) * 2009-06-29 2011-09-28 웅진케미칼 주식회사 유연한 기판용 이송 지그
JPWO2011024853A1 (ja) * 2009-08-26 2013-01-31 キヤノンアネルバ株式会社 成膜装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018154851A (ja) * 2017-03-15 2018-10-04 日新電機株式会社 基板保持装置
EP3528280A4 (en) * 2017-12-19 2019-10-30 Beijing Apollo Ding Rong Solar Technology Co., Ltd. PRODUCTION LINE OF CO-EVAPORATION OF SOLAR CELLS
CN113330584A (zh) * 2019-01-24 2021-08-31 株式会社钟化 太阳能电池制造用基板托盘及太阳能电池的制造方法
CN113330584B (zh) * 2019-01-24 2024-04-23 株式会社钟化 太阳能电池制造用基板托盘及太阳能电池的制造方法
CN114972505A (zh) * 2022-04-29 2022-08-30 弥费实业(上海)有限公司 一种位置识别系统

Also Published As

Publication number Publication date
TW201415572A (zh) 2014-04-16
CN103726010A (zh) 2014-04-16
KR20140046977A (ko) 2014-04-21

Similar Documents

Publication Publication Date Title
JP2014078601A (ja) 成膜装置用基板搬送トレイ、及び外部開閉駆動装置
JP4839405B2 (ja) コンベアおよび成膜装置とそのメンテナンス方法
TWI652119B (zh) 用於在由載具所支撐的基板上沉積一或多個層的系統、及使用其之方法
JP6328766B2 (ja) 有機材料用の蒸発源、真空チャンバの中で有機材料を堆積させるための堆積装置、及び有機材料を蒸発させるための方法
JP5596166B2 (ja) 真空処理装置
JP2010194447A (ja) 搬送装置
JP2014078602A (ja) 基板搬送トレイ起伏装置
JP2005285576A (ja) インライン式有機エレクトロルミネセンス製造装置
KR101188863B1 (ko) 챔버용 기판 이송장치 및 그 챔버 시스템
JP2013237914A (ja) 成膜装置及び成膜方法
JP2014078600A (ja) 成膜装置
JP2014077170A (ja) 成膜装置
KR101511179B1 (ko) 성막장치, 및 성막장치용 반송트레이
KR101553618B1 (ko) 기판 이송시스템
KR20150072260A (ko) 기판 턴장치
JP2016211030A (ja) 真空処理装置
KR20140113289A (ko) 기판반송트레이, 및 성막장치
JP5277015B2 (ja) 有機ｅｌデバイス製造装置及び成膜装置並びにシャドウマスク交換装置
JP5260212B2 (ja) 成膜装置
KR101553625B1 (ko) 기판 턴장치
JP2014036159A (ja) 被処理体の搬送機構および真空処理装置
WO2019021834A1 (ja) 産業用ロボット
JP2012001283A (ja) 基板搬送装置及び真空処理装置
JP2018154926A (ja) 有機材料用の蒸発源、有機材料用の蒸発源を有する真空チャンバにおいて有機材料を堆積するための堆積装置、及び有機材料を蒸発させるための方法
JP2010024469A (ja) スパッタ装置