KR101068439B1 - 유연한 기판용 이송 지그 - Google Patents
유연한 기판용 이송 지그 Download PDFInfo
- Publication number
- KR101068439B1 KR101068439B1 KR1020090058091A KR20090058091A KR101068439B1 KR 101068439 B1 KR101068439 B1 KR 101068439B1 KR 1020090058091 A KR1020090058091 A KR 1020090058091A KR 20090058091 A KR20090058091 A KR 20090058091A KR 101068439 B1 KR101068439 B1 KR 101068439B1
- Authority
- KR
- South Korea
- Prior art keywords
- flexible substrate
- guide
- jig
- coupled
- guide groove
- Prior art date
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/6875—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of individual support members, e.g. support posts or protrusions
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Supply And Installment Of Electrical Components (AREA)
Abstract
Description
Claims (4)
- 유연한 기판(FS)을 이송하기 위해 상기 유연한 기판(FS)을 파지하는 지그에 있어서,상기 유연한 기판(FS)이 위치되도록 내부에 사각형상의 중공부(120)가 형성되고, 사각형상의 각 모서리에서 중심을 향하도록 돌출되어 그 내부에 안내홈(111)이 형성된 안내부(110)를 포함하는 베이스 부재(100);직사각형의 바 형상을 갖으며 상기 안내부(110)를 따라 슬라이딩 이송되도록 상기 안내부(110)와 결합되고, 그 내부에 길이 방향의 가이드 홈(210)이 형성된 복수의 가이드 부재(200); 및상기 복수의 가이드 부재(200)에 각각 결합되어 상기 유연한 기판(FS)을 파지하고, 온도 변화에 의해 변형되는 상기 유연한 기판(FS)을 지지하는 복수의 링크부재(300);를 포함하는 유연한 기판용 이송 지그.
- 제 1항에 있어서,상기 링크부재(300)는,온도 변화에 의해 변형되는 상기 유연한 기판(FS)에 의해 중심축(C)이 회전하며 상기 가이드 홈(210)을 따라 좌ㆍ우 방향으로 슬라이딩 이송되도록 상기 중심축(C)이 상기 가이드 홈(210)에 나사결합되어 상기 유연한 기판(FS)을 지지하는 것을 특징으로 하는 상기 유연한 기판용 이송 지그.
- 제 2항에 있어서,상기 가이드 부재(200)는,상기 베이스 부재(100)의 외주부를 따라 사각형상을 갖도록 위치되고, 상기 가이드 홈(210)의 끝단부가 서로 교차된 상태로 체결구(220)에 의해 상기 안내홈(111)에 결합되어 상기 링크부재(300)의 슬라이딩 이송 시 상기 안내홈(111)을 따라 상기 베이스 부재(100)의 외주부 방향으로 슬라이딩 이송되는 것을 특징으로 하는 상기 유연한 기판용 이송 지그.
- 제 1항에 있어서,온도 변화에 의해 변형되는 상기 유연한 기판(FS)을 탄성력에 의해 지지하도록 일단이 상기 베이스 부재(100)의 상면에 결합되고, 타단이 체결구(220)의 상측에 결합되는 탄성부재(400);를 더 포함하는 것을 특징으로 하는 상기 유연한 기판용 이송 지그.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020090058091A KR101068439B1 (ko) | 2009-06-29 | 2009-06-29 | 유연한 기판용 이송 지그 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020090058091A KR101068439B1 (ko) | 2009-06-29 | 2009-06-29 | 유연한 기판용 이송 지그 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20110000814A KR20110000814A (ko) | 2011-01-06 |
KR101068439B1 true KR101068439B1 (ko) | 2011-09-28 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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KR1020090058091A KR101068439B1 (ko) | 2009-06-29 | 2009-06-29 | 유연한 기판용 이송 지그 |
Country Status (1)
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KR (1) | KR101068439B1 (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103726010A (zh) * | 2012-10-10 | 2014-04-16 | 住友重机械工业株式会社 | 成膜装置用基板传送托盘及外部开闭驱动装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100622408B1 (ko) | 2004-05-20 | 2006-09-19 | 주식회사 휘닉스 디지탈테크 | 액정표시장치의 조립지그 |
KR20070071270A (ko) * | 2005-12-29 | 2007-07-04 | 엘지.필립스 엘시디 주식회사 | 액정패널의 이송장치 |
KR100767439B1 (ko) | 2006-08-24 | 2007-10-17 | 세메스 주식회사 | 기판 처리 장치 |
KR100837599B1 (ko) | 2007-03-27 | 2008-06-13 | 주식회사 에스에프에이 | 기판 지지용 스테이지 |
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2009
- 2009-06-29 KR KR1020090058091A patent/KR101068439B1/ko active IP Right Grant
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100622408B1 (ko) | 2004-05-20 | 2006-09-19 | 주식회사 휘닉스 디지탈테크 | 액정표시장치의 조립지그 |
KR20070071270A (ko) * | 2005-12-29 | 2007-07-04 | 엘지.필립스 엘시디 주식회사 | 액정패널의 이송장치 |
KR100767439B1 (ko) | 2006-08-24 | 2007-10-17 | 세메스 주식회사 | 기판 처리 장치 |
KR100837599B1 (ko) | 2007-03-27 | 2008-06-13 | 주식회사 에스에프에이 | 기판 지지용 스테이지 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103726010A (zh) * | 2012-10-10 | 2014-04-16 | 住友重机械工业株式会社 | 成膜装置用基板传送托盘及外部开闭驱动装置 |
Also Published As
Publication number | Publication date |
---|---|
KR20110000814A (ko) | 2011-01-06 |
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