JP2014031865A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2014031865A5 JP2014031865A5 JP2012174198A JP2012174198A JP2014031865A5 JP 2014031865 A5 JP2014031865 A5 JP 2014031865A5 JP 2012174198 A JP2012174198 A JP 2012174198A JP 2012174198 A JP2012174198 A JP 2012174198A JP 2014031865 A5 JP2014031865 A5 JP 2014031865A5
- Authority
- JP
- Japan
- Prior art keywords
- air bearing
- coating
- exhaust
- bearing device
- figurine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims description 21
- 238000000576 coating method Methods 0.000 claims description 21
- 239000007788 liquid Substances 0.000 claims description 5
- 238000005192 partition Methods 0.000 claims description 5
- 238000007599 discharging Methods 0.000 claims 4
- 238000005339 levitation Methods 0.000 claims 1
- 230000002093 peripheral Effects 0.000 description 1
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012174198A JP2014031865A (ja) | 2012-08-06 | 2012-08-06 | エアベアリング装置及び塗布装置 |
PCT/JP2013/067076 WO2014024583A1 (ja) | 2012-08-06 | 2013-06-21 | エアベアリング装置及び塗布装置 |
KR20157003630A KR20150040924A (ko) | 2012-08-06 | 2013-06-21 | 에어 베어링 장치 및 도포 장치 |
CN201380041409.1A CN104583618A (zh) | 2012-08-06 | 2013-06-21 | 空气轴承装置及涂布装置 |
TW102127675A TW201412409A (zh) | 2012-08-06 | 2013-08-01 | 空氣軸承裝置及塗布裝置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012174198A JP2014031865A (ja) | 2012-08-06 | 2012-08-06 | エアベアリング装置及び塗布装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2014031865A JP2014031865A (ja) | 2014-02-20 |
JP2014031865A5 true JP2014031865A5 (zh) | 2015-09-17 |
Family
ID=50067824
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012174198A Pending JP2014031865A (ja) | 2012-08-06 | 2012-08-06 | エアベアリング装置及び塗布装置 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP2014031865A (zh) |
KR (1) | KR20150040924A (zh) |
CN (1) | CN104583618A (zh) |
TW (1) | TW201412409A (zh) |
WO (1) | WO2014024583A1 (zh) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6685894B2 (ja) * | 2014-02-18 | 2020-04-22 | オイレス工業株式会社 | エアベアリング装置及び測定装置 |
US11097974B2 (en) | 2014-07-31 | 2021-08-24 | Corning Incorporated | Thermally strengthened consumer electronic glass and related systems and methods |
CN108698922B (zh) | 2016-01-12 | 2020-02-28 | 康宁股份有限公司 | 薄的热强化和化学强化的玻璃基制品 |
US11795102B2 (en) | 2016-01-26 | 2023-10-24 | Corning Incorporated | Non-contact coated glass and related coating system and method |
EP3719443B1 (en) * | 2019-04-03 | 2021-06-09 | Hexagon Technology Center GmbH | Coordinate-measuring machine with self-cleaning air bearing |
WO2020219290A1 (en) | 2019-04-23 | 2020-10-29 | Corning Incorporated | Glass laminates having determined stress profiles and methods of making the same |
CN116811379A (zh) | 2019-08-06 | 2023-09-29 | 康宁股份有限公司 | 具有用于阻止裂纹的埋入式应力尖峰的玻璃层压体及其制造方法 |
CN111894983A (zh) * | 2020-07-30 | 2020-11-06 | 西安工业大学 | 微孔节流的静压气体止推轴承 |
FR3139869A1 (fr) * | 2022-09-16 | 2024-03-22 | Micro-Contrôle - Spectra-Physics | Appareil pour la réduction des vibrations dans un système de régulation de mouvement à coussin d’air |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60113816A (ja) * | 1983-11-22 | 1985-06-20 | Miyoutoku:Kk | エア−スライド装置 |
JPH07109217B2 (ja) * | 1986-01-31 | 1995-11-22 | 京セラ株式会社 | 静圧気体直線案内装置 |
JPH09222124A (ja) * | 1996-02-19 | 1997-08-26 | Nippon Seiko Kk | 静圧気体軸受 |
US6287004B1 (en) * | 1999-11-22 | 2001-09-11 | Nikon Corporation | Fluid bearing operable in a vacuum region |
TWI222423B (en) * | 2001-12-27 | 2004-10-21 | Orbotech Ltd | System and methods for conveying and transporting levitated articles |
JP2004019760A (ja) * | 2002-06-14 | 2004-01-22 | Nsk Ltd | 静圧軸受 |
JP4468059B2 (ja) * | 2004-04-23 | 2010-05-26 | 太平洋セメント株式会社 | 静圧軸受け装置 |
JP2008149238A (ja) * | 2006-12-15 | 2008-07-03 | Chugai Ro Co Ltd | 塗布装置 |
US7607647B2 (en) * | 2007-03-20 | 2009-10-27 | Kla-Tencor Technologies Corporation | Stabilizing a substrate using a vacuum preload air bearing chuck |
JP2011133724A (ja) * | 2009-12-25 | 2011-07-07 | Nikon Corp | 流体静圧軸受、移動体装置、露光装置、デバイス製造方法、及び清掃装置 |
-
2012
- 2012-08-06 JP JP2012174198A patent/JP2014031865A/ja active Pending
-
2013
- 2013-06-21 CN CN201380041409.1A patent/CN104583618A/zh active Pending
- 2013-06-21 WO PCT/JP2013/067076 patent/WO2014024583A1/ja active Application Filing
- 2013-06-21 KR KR20157003630A patent/KR20150040924A/ko not_active Application Discontinuation
- 2013-08-01 TW TW102127675A patent/TW201412409A/zh unknown
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2014031865A5 (zh) | ||
JP5207306B2 (ja) | 薄膜積層ガラス基板の薄膜除去方法及び装置 | |
MY172412A (en) | An aerosol generating device with air flow nozzles | |
ATE550104T1 (de) | Verstellbare fluidsprühvorrichtung mit schwenkeigenschaften | |
EP2993420A3 (en) | Air washer | |
JP2008529765A5 (zh) | ||
JP2015509813A5 (zh) | ||
JP2014031865A (ja) | エアベアリング装置及び塗布装置 | |
JP2010080614A5 (zh) | ||
CO2017002379A2 (es) | Dispensador para servilletas interplegadas | |
JP2015103648A (ja) | 基板保持装置 | |
JP2012221074A5 (zh) | ||
JP6912910B2 (ja) | 乾燥システム | |
ES2393400T3 (es) | Aparato y proceso para el enfriamiento y la desvaporización de estuco calcinado | |
CN103706525A (zh) | 防止胶吸入的匀胶机托盘 | |
CN203803677U (zh) | 一种同时振动喷吹流化装置 | |
WO2016092963A1 (ja) | 容器内部乾燥装置及び容器内部乾燥方法 | |
CN203140231U (zh) | 喷漆装置 | |
JP2015502008A5 (zh) | ||
JP2003188077A5 (zh) | ||
CN202852824U (zh) | 拣灰火化机炕面冷却装置 | |
CN204872883U (zh) | 用来运送平板构件的输送载具 | |
JP6145148B2 (ja) | 冷却塔 | |
JP2016051857A5 (zh) | ||
KR101645723B1 (ko) | 태양광 웨이퍼의 스토리지 구조 |