JP2014031865A5 - - Google Patents

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Publication number
JP2014031865A5
JP2014031865A5 JP2012174198A JP2012174198A JP2014031865A5 JP 2014031865 A5 JP2014031865 A5 JP 2014031865A5 JP 2012174198 A JP2012174198 A JP 2012174198A JP 2012174198 A JP2012174198 A JP 2012174198A JP 2014031865 A5 JP2014031865 A5 JP 2014031865A5
Authority
JP
Japan
Prior art keywords
air bearing
coating
exhaust
bearing device
figurine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2012174198A
Other languages
English (en)
Japanese (ja)
Other versions
JP2014031865A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2012174198A priority Critical patent/JP2014031865A/ja
Priority claimed from JP2012174198A external-priority patent/JP2014031865A/ja
Priority to PCT/JP2013/067076 priority patent/WO2014024583A1/ja
Priority to KR20157003630A priority patent/KR20150040924A/ko
Priority to CN201380041409.1A priority patent/CN104583618A/zh
Priority to TW102127675A priority patent/TW201412409A/zh
Publication of JP2014031865A publication Critical patent/JP2014031865A/ja
Publication of JP2014031865A5 publication Critical patent/JP2014031865A5/ja
Pending legal-status Critical Current

Links

JP2012174198A 2012-08-06 2012-08-06 エアベアリング装置及び塗布装置 Pending JP2014031865A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2012174198A JP2014031865A (ja) 2012-08-06 2012-08-06 エアベアリング装置及び塗布装置
PCT/JP2013/067076 WO2014024583A1 (ja) 2012-08-06 2013-06-21 エアベアリング装置及び塗布装置
KR20157003630A KR20150040924A (ko) 2012-08-06 2013-06-21 에어 베어링 장치 및 도포 장치
CN201380041409.1A CN104583618A (zh) 2012-08-06 2013-06-21 空气轴承装置及涂布装置
TW102127675A TW201412409A (zh) 2012-08-06 2013-08-01 空氣軸承裝置及塗布裝置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012174198A JP2014031865A (ja) 2012-08-06 2012-08-06 エアベアリング装置及び塗布装置

Publications (2)

Publication Number Publication Date
JP2014031865A JP2014031865A (ja) 2014-02-20
JP2014031865A5 true JP2014031865A5 (zh) 2015-09-17

Family

ID=50067824

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2012174198A Pending JP2014031865A (ja) 2012-08-06 2012-08-06 エアベアリング装置及び塗布装置

Country Status (5)

Country Link
JP (1) JP2014031865A (zh)
KR (1) KR20150040924A (zh)
CN (1) CN104583618A (zh)
TW (1) TW201412409A (zh)
WO (1) WO2014024583A1 (zh)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6685894B2 (ja) * 2014-02-18 2020-04-22 オイレス工業株式会社 エアベアリング装置及び測定装置
US11097974B2 (en) 2014-07-31 2021-08-24 Corning Incorporated Thermally strengthened consumer electronic glass and related systems and methods
CN108698922B (zh) 2016-01-12 2020-02-28 康宁股份有限公司 薄的热强化和化学强化的玻璃基制品
US11795102B2 (en) 2016-01-26 2023-10-24 Corning Incorporated Non-contact coated glass and related coating system and method
EP3719443B1 (en) * 2019-04-03 2021-06-09 Hexagon Technology Center GmbH Coordinate-measuring machine with self-cleaning air bearing
WO2020219290A1 (en) 2019-04-23 2020-10-29 Corning Incorporated Glass laminates having determined stress profiles and methods of making the same
CN116811379A (zh) 2019-08-06 2023-09-29 康宁股份有限公司 具有用于阻止裂纹的埋入式应力尖峰的玻璃层压体及其制造方法
CN111894983A (zh) * 2020-07-30 2020-11-06 西安工业大学 微孔节流的静压气体止推轴承
FR3139869A1 (fr) * 2022-09-16 2024-03-22 Micro-Contrôle - Spectra-Physics Appareil pour la réduction des vibrations dans un système de régulation de mouvement à coussin d’air

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60113816A (ja) * 1983-11-22 1985-06-20 Miyoutoku:Kk エア−スライド装置
JPH07109217B2 (ja) * 1986-01-31 1995-11-22 京セラ株式会社 静圧気体直線案内装置
JPH09222124A (ja) * 1996-02-19 1997-08-26 Nippon Seiko Kk 静圧気体軸受
US6287004B1 (en) * 1999-11-22 2001-09-11 Nikon Corporation Fluid bearing operable in a vacuum region
TWI222423B (en) * 2001-12-27 2004-10-21 Orbotech Ltd System and methods for conveying and transporting levitated articles
JP2004019760A (ja) * 2002-06-14 2004-01-22 Nsk Ltd 静圧軸受
JP4468059B2 (ja) * 2004-04-23 2010-05-26 太平洋セメント株式会社 静圧軸受け装置
JP2008149238A (ja) * 2006-12-15 2008-07-03 Chugai Ro Co Ltd 塗布装置
US7607647B2 (en) * 2007-03-20 2009-10-27 Kla-Tencor Technologies Corporation Stabilizing a substrate using a vacuum preload air bearing chuck
JP2011133724A (ja) * 2009-12-25 2011-07-07 Nikon Corp 流体静圧軸受、移動体装置、露光装置、デバイス製造方法、及び清掃装置

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