JP2014003281A5 - - Google Patents

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Publication number
JP2014003281A5
JP2014003281A5 JP2013099172A JP2013099172A JP2014003281A5 JP 2014003281 A5 JP2014003281 A5 JP 2014003281A5 JP 2013099172 A JP2013099172 A JP 2013099172A JP 2013099172 A JP2013099172 A JP 2013099172A JP 2014003281 A5 JP2014003281 A5 JP 2014003281A5
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JP
Japan
Prior art keywords
lifting
rotating
elevating
module according
lifting module
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2013099172A
Other languages
English (en)
Japanese (ja)
Other versions
JP6261185B2 (ja
JP2014003281A (ja
Filing date
Publication date
Priority claimed from KR1020120050369A external-priority patent/KR101379834B1/ko
Application filed filed Critical
Publication of JP2014003281A publication Critical patent/JP2014003281A/ja
Publication of JP2014003281A5 publication Critical patent/JP2014003281A5/ja
Application granted granted Critical
Publication of JP6261185B2 publication Critical patent/JP6261185B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2013099172A 2012-05-11 2013-05-09 昇降モジュールおよび昇降モジュールを使用する昇降装置 Active JP6261185B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2012-0050369 2012-05-11
KR1020120050369A KR101379834B1 (ko) 2012-05-11 2012-05-11 승강모듈 및 이를 사용한 승강장치

Publications (3)

Publication Number Publication Date
JP2014003281A JP2014003281A (ja) 2014-01-09
JP2014003281A5 true JP2014003281A5 (zh) 2016-06-02
JP6261185B2 JP6261185B2 (ja) 2018-01-17

Family

ID=49854448

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013099172A Active JP6261185B2 (ja) 2012-05-11 2013-05-09 昇降モジュールおよび昇降モジュールを使用する昇降装置

Country Status (3)

Country Link
JP (1) JP6261185B2 (zh)
KR (1) KR101379834B1 (zh)
TW (1) TWI623474B (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101474695B1 (ko) 2014-09-18 2014-12-18 (주)삼정오토메이션 Ｄｄ모터를 이용한 ｚ축 스테이지
KR102567650B1 (ko) 2021-12-28 2023-08-18 주식회사 한성시스코 Z축스테이지 및 z축스테이지를 포함하는 스테이지장치

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2876388B2 (ja) * 1994-09-02 1999-03-31 東京エレクトロン株式会社 搬送装置
KR20000002236U (ko) * 1998-06-19 2000-02-07 김영환 직선 운동식 모터
JP4032911B2 (ja) * 2002-10-02 2008-01-16 豊和工業株式会社 リニアモータ駆動式工作機械の主軸ヘッド落下防止装置
JP2005051188A (ja) * 2003-07-28 2005-02-24 Yasuhito Itagaki 搬送工程レイアウト方法並び複合機能ロボット及び完全密閉構造を成したクランプ方式アライナ装置。
KR100637590B1 (ko) * 2005-07-08 2006-10-23 주식회사 탑 엔지니어링 평판표시장치 제조용 기판 스크라이빙장치
JP4836684B2 (ja) * 2006-06-21 2011-12-14 株式会社日本マイクロニクス 検査ステージ及び検査装置
KR100779029B1 (ko) * 2006-12-15 2007-11-23 세크론 주식회사 프로브 스테이션 및 이를 이용한 웨이퍼 검사방법
JP5387760B2 (ja) * 2010-04-07 2014-01-15 株式会社安川電機 θＺ駆動装置およびステージ装置

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