JP2013539865A - 表面の化学的性質の非接触測定装置および方法 - Google Patents
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Abstract
【選択図】図1
Description
Claims (14)
- プロセッサと、
前記プロセッサと接続しており、かつ、ある範囲の赤外波長を用いた測定対象面にわたる表面の化学的性質の同時測定のために構成されている波長可変赤外線レーザー分光計のアレイと、
前記プロセッサと接続しており、かつ、前記測定対象面から反射する赤外波長の赤外線スペクトルを表示するよう適合されている表示部と、
を含む表面の化学的性質の測定装置。 - 前記プロセッサと接続している可視レーザーポインターをさらに含む請求項1に記載の装置。
- 装置筐体をさらに含み、かつ、前記波長可変赤外線レーザー分光計のアレイが前記装置筐体に収容されている請求項1に記載の装置。
- 前記筐体に入射赤外線ビーム開口をさらに含み、かつ、前記波長可変赤外線レーザー分光計のアレイが前記入射赤外線ビーム開口と接続している請求項3に記載の装置。
- 前記装置筐体に可視レーザービーム開口と、前記プロセッサと接続しており、かつ、前記可視レーザービーム開口と接続している可視レーザーポインターとをさらに含む請求項4に記載の装置。
- 前記筐体に反射赤外線ビーム開口をさらに含み、かつ、前記波長可変赤外線レーザー分光計のアレイが前記反射赤外線ビーム開口と接続している請求項4に記載の装置。
- 前記波長可変赤外線レーザー分光計のアレイが、波数約400(cm−1)から波数約4000までの赤外波長を用いた測定対象面にわたる表面の化学的性質の同時測定のために構成されている請求項1に記載の装置。
- 前記プロセッサと接続している少なくとも1つのポートをさらに含む請求項1に記載の装置。
- 入射赤外線ビーム開口、可視レーザービーム開口および反射赤外線ビーム開口を有する装置筐体と、
前記装置筐体内のプロセッサと、
前記装置筐体内に存在し、かつ、前記プロセッサならびに前記入射赤外線ビーム開口および前記可視レーザービーム開口と接続している波長可変赤外線レーザー分光計のアレイであって、
ある範囲の赤外波長を用いた測定対象面にわたる表面の化学的性質の同時測定のために構成されている前記波長可変赤外線レーザー分光計のアレイと、
前記装置筐体内に存在し、かつ、前記可視レーザービーム開口と接続している可視レーザーと、
前記プロセッサと接続しており、かつ、前記測定対象面から反射する赤外波長の赤外線スペクトルを表示するよう適合されている表示部と、
を含む表面の化学的性質の測定装置。 - 前記波長可変赤外線レーザー分光計のアレイが、波数約400(cm−1)から波数約4000までの赤外波長を用いた測定対象面にわたる表面の化学的性質の同時測定のために構成されている請求項9に記載の装置。
- 前記プロセッサと接続している少なくとも1つのポートをさらに含む請求項9に記載の装置。
- 前記可視レーザービーム開口が、概して、前記入射赤外線ビーム開口と前記反射赤外線ビーム開口との間に存在する請求項9に記載の装置。
- 表面の化学的性質の汚染の広がり(range)を有する複数の標準物を設けること、
波長可変赤外線レーザー分光計のアレイを設けること、
前記標準物上の前記表面の化学的性質の汚染の広がりの赤外線スペクトルを得ること、
前記表面の化学的性質の汚染の広がりに合わせて前記赤外線スペクトルを較正すること、
前記波長可変赤外線レーザー分光計のアレイを用いて汚染の可能性のある表面の赤外線スペクトルを得ること、および、
前記汚染の可能性のある表面の前記赤外線スペクトルを前記表面の化学的性質の汚染の広がりの前記赤外線スペクトルと比較すること
を含む表面の化学的性質の非接触測定方法。 - 前記波長可変赤外線レーザー分光計のアレイを用いて汚染の可能性のある表面の赤外線スペクトルを得ることが、前記波長可変赤外線レーザー分光計のアレイを用いてシリコーン汚染の可能性のある表面の赤外線スペクトルを得ることを含む請求項13に記載の方法。
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US12/903,548 US8536529B2 (en) | 2010-10-13 | 2010-10-13 | Non-contact surface chemistry measurement apparatus and method |
PCT/US2011/049331 WO2012050669A1 (en) | 2010-10-13 | 2011-08-26 | Non-contact surface chemistry measurement apparatus and method |
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JP2018515913A (ja) * | 2015-04-29 | 2018-06-14 | オスラム オプト セミコンダクターズ ゲゼルシャフト ミット ベシュレンクテル ハフツングOsram Opto Semiconductors GmbH | オプトエレクトロニクス装置 |
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JP5736325B2 (ja) | 2012-02-21 | 2015-06-17 | 株式会社日立製作所 | 光学装置 |
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JP2016224063A (ja) | 2016-12-28 |
CN103180715A (zh) | 2013-06-26 |
US20120092665A1 (en) | 2012-04-19 |
JP6309583B2 (ja) | 2018-04-11 |
JP6037340B2 (ja) | 2016-12-07 |
US8536529B2 (en) | 2013-09-17 |
WO2012050669A1 (en) | 2012-04-19 |
EP2627989B1 (en) | 2021-02-17 |
EP2627989A1 (en) | 2013-08-21 |
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