JP2013539607A - 六方晶系結晶のナノ構造を備えた光電子素子 - Google Patents
六方晶系結晶のナノ構造を備えた光電子素子 Download PDFInfo
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- 230000005693 optoelectronics Effects 0.000 title claims abstract description 56
- 239000013078 crystal Substances 0.000 title claims abstract description 43
- 239000002086 nanomaterial Substances 0.000 title claims description 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 10
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 10
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 5
- 239000000956 alloy Substances 0.000 claims abstract description 5
- 230000000903 blocking effect Effects 0.000 claims description 37
- 239000004065 semiconductor Substances 0.000 claims description 35
- 229910052710 silicon Inorganic materials 0.000 claims description 32
- 239000010703 silicon Substances 0.000 claims description 32
- 230000003287 optical effect Effects 0.000 claims description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 31
- 238000010521 absorption reaction Methods 0.000 description 17
- 229910021417 amorphous silicon Inorganic materials 0.000 description 8
- 229910003460 diamond Inorganic materials 0.000 description 8
- 239000010432 diamond Substances 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 5
- 229910021419 crystalline silicon Inorganic materials 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 229910021424 microcrystalline silicon Inorganic materials 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
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- 238000001429 visible spectrum Methods 0.000 description 2
- 229910004613 CdTe Inorganic materials 0.000 description 1
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- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
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Abstract
Description
Fissel et al.、“Formation of twinning-superlattice regions by artificial stacking of Si layers(Si層の人工積層による双晶超格子領域の形成)”、Journal of Crystal Growth(結晶成長ジャーナル)290巻、2号 (2006年5月1日)、P.392〜397、doi:10.1016/j.jcrysgro.2006.02.009
Jin Hyeok KimとJeong Yong Lee、“Hexagonal silicon formation by pulsed laser beam annealing(パルスレーザビームアニーリングによる六法晶系シリコンの形成)”、Materials Letters(材料誌)27巻、6号 (1996年8月)、P.275〜279、doi:10.1016/0167-577X(96)00019
Jin Hyeok KimとJeong Yong Lee、“High-resolution transmission electron microscopy study of pulsed laser beam crystallized Si thin film(パルスレーザビームによる結晶化Si薄膜の高分解透過電子顕微鏡による研究):the formation of hexagonal Si and defects(六方晶Siの形成及び欠陥)”、 固体薄膜292巻, 1〜2号 (1997年1月5日)、P.313〜317、 doi:10.1016/S0040-6090(96)09088-8
Yan Zhang et al.、“Stable hexagonal-wurtzite silicon phase by laser ablation(レーザアブレーションによる安定した六方晶-ウルツ鉱型シリコン相)”、応用物理学会誌 75巻、18号 (1999年11月1日)、P.2758〜2760、doi:10.1063/1.125140
結晶の双晶は、六方晶相を部分形成するための一方法でもある。 (A. Fissel et al.、“Formation of twinning-superlattice regions by artificial stacking of Si layers(Si層の人工積層による双晶超格子領域の形成)”、Journal of Crystal Growth(結晶成長ジャーナル)290巻、2号 (2006年5月1日)、P.392〜397、doi:10.1016/j.jcrysgro.2006.02.009.
上記炭素ファミリーの各元素の六方相は、熱力学的に安定な相とは違い、結晶学的パラメータを有しているため、適当な基板上でのエピタキシーや、あるいは適切な機械的歪をかけることによって、上記六方相を安定させることができる。成長が高温で行われた場合や、層が上記基板の熱膨張率とは異なる熱膨張率を有する場合にも、歪が生じる。また、プラズマイオンの運動エネルギーが層の歪を引き起こすと知られているスパッタリングなどの、成膜工程の詳細に起因して歪曲が引き起こされる。
Claims (16)
- 第1の導電層(22)と、第2の導電層(24)と、上記第1の導電層(22)と上記第2の導電層(24)との間に設けられた活性層(26)とを備えた光電子素子であって、
上記活性層(26)は、炭素ファミリーから選択された単一の元素あるいは複数の元素の合金の、六方晶系結晶のサブミクロンサイズ構造を含む、光電子素子。 - 上記六方晶系結晶のナノ構造の少なくとも一部は、層構造を有することを特徴とする請求項1に記載の光電子素子。
- 上記六方晶系結晶のナノ構造の少なくとも一部は、フィラメント構造を有することを特徴とする請求項1または2に記載の光電子素子。
- 上記六方晶系結晶のナノ構造の少なくとも一部は、ドット構造を有することを特徴とする請求項1から3のいずれか1項に記載の光電子素子。
- 上記六方晶系結晶のナノ構造の少なくとも一部に対して、少なくとも一方向において力がかけられていることを特徴とする請求項1から4のいずれか1項に記載の光電子素子。
- 上記活性層は、10nm以上1000nm以下の厚さであることを特徴とする請求項1から5のいずれか1項に記載の光電子素子。
- 上記炭素ファミリーの上記単一の元素はシリコンであることを特徴とする請求項1から6のいずれか1項に記載の光電子素子。
- 上記第1の導電層の電子親和力は、上記活性層の電子親和力より小さく、上記第2の導電層のイオン化エネルギーは、上記活性層のイオン化エネルギーより大きいことを特徴とする請求項1から7のいずれか1項に記載の光電子素子。
- 上記活性層と上記第1の導電層との間に、上記活性層の上記電子親和力に略等しい電子親和力と、上記活性層の上記イオン化エネルギーより小さいイオン化エネルギーとを有する第1のブロッキング層(27)をさらに備え、また、上記活性層と上記第2の導電層との間に、上記活性層の上記電子親和力より大きい電子親和力と、上記活性層の上記イオン化エネルギーに略等しいイオン化エネルギーとを有する第2のブロッキング層(28)をさらに備えていることを特徴とする請求項8に記載の光電子素子。
- 上記光電子素子は、光起電力電池であることを特徴とする請求項8または9に記載の光電子素子。
- 上記光電子素子は、光センサであることを特徴とする請求項8または9に記載の光電子素子。
- 上記第1の導電層の電子親和力は、上記活性層の電子親和力より大きく、上記第2の導電層のイオン化エネルギーは、上記活性層のイオン化エネルギーより小さいことを特徴とする請求項1から7のいずれか1項に記載の光電子素子。
- 上記活性層と上記第1の導電層との間に、上記第1の導電層の上記電子親和力に略等しい電子親和力と、上記活性層の上記イオン化エネルギーより小さいイオン化エネルギーとを有する第1のブロッキング層(27)をさらに備え、また、上記活性層と上記第2の導電層との間に、上記活性層の上記電子親和力より大きい電子親和力と、上記第2の導電層の上記イオン化エネルギーに略等しいイオン化エネルギーとを有する第2のブロッキング層(28)をさらに備えていることを特徴とする請求項12に記載の光電子素子。
- 上記第1のブロッキング層の上記電子親和力は、上記第2のブロッキング層の上記電子親和力より小さく、上記第1のブロッキング層の上記イオン化エネルギーは、上記第2のブロッキング層の上記イオン化エネルギーより小さいことを特徴とする請求項13に記載の光電子素子。
- 上記光電子素子は、ダイオードまたはレーザなどの発光素子であることを特徴とする請求項12または13に記載の光電子素子。
- 上記第1のブロッキング層および上記第2のブロッキング層の少なくとも一方は、非ドープの半導体層または非ドープの絶縁層であることを特徴とする請求項9、13および14のいずれか1項に記載の光電子素子。
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KR101064068B1 (ko) * | 2009-02-25 | 2011-09-08 | 엘지이노텍 주식회사 | 발광소자의 제조방법 |
US20110203632A1 (en) * | 2010-02-22 | 2011-08-25 | Rahul Sen | Photovoltaic devices using semiconducting nanotube layers |
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2010
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- 2010-09-09 CN CN2010800699514A patent/CN103283044A/zh active Pending
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JP2010062539A (ja) * | 2008-09-02 | 2010-03-18 | Au Optronics Corp | マルチバンドギャップを備えるナノ結晶シリコン光電池及び低温多結晶シリコン薄膜トランジスタパネルにおけるその応用 |
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Publication number | Publication date |
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KR101443770B1 (ko) | 2014-09-23 |
KR20130073959A (ko) | 2013-07-03 |
JP5694538B2 (ja) | 2015-04-01 |
CA2810371C (en) | 2016-08-30 |
CA2810371A1 (en) | 2012-03-15 |
CN103283044A (zh) | 2013-09-04 |
EP2614535A1 (en) | 2013-07-17 |
US9627564B2 (en) | 2017-04-18 |
WO2012033493A1 (en) | 2012-03-15 |
AU2010360267B2 (en) | 2014-10-30 |
AU2010360267A1 (en) | 2013-04-11 |
US20130168725A1 (en) | 2013-07-04 |
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